CN210051433U - Measuring device for normal random micro-vibration of throttler - Google Patents
Measuring device for normal random micro-vibration of throttler Download PDFInfo
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- CN210051433U CN210051433U CN201921135225.2U CN201921135225U CN210051433U CN 210051433 U CN210051433 U CN 210051433U CN 201921135225 U CN201921135225 U CN 201921135225U CN 210051433 U CN210051433 U CN 210051433U
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Abstract
The utility model discloses a measuring device of flow controller normal direction random micro vibration. The utility model discloses a laser vibrometer, inductance micrometer head, X-Y two dimension translation platform, spacing subassembly, high accuracy marble platform, industrial computer and display screen. The throttler is placed on the high-precision marble platform and limited by a limiting component; the inductance micrometer head is vertically fixed on the upper surface of the throttler; and adjusting the X-Y two-dimensional translation table to enable the laser beam of the laser vibration meter to fall on each point to be measured in sequence, measuring the normal random micro-vibration of each point to be measured of the throttle after the ventilation is stable, and measuring the thickness of the air film by using an inductance micrometer. The right-angle ball limiting blocks in the limiting assemblies limit the position of the throttler, and the balls are in point contact with the side face of the throttler, so that friction force of the throttler during normal vibration is reduced. The utility model discloses simultaneous measurement flow controller normal direction random micro vibration and air film thickness, the precision is high.
Description
Technical Field
The utility model belongs to the technical field of the vibration measurement of flow controller and specifically relates to a measuring device of flow controller normal direction random micro vibration.
Background
In the existing devices, gas static pressure lubrication technology is generally adopted when the linear or rotary motion is realized. In China, the integral restrictor technology is adopted in the aspect of gas static pressure lubrication, namely, a restrictor is formed by arranging a restrictor hole on the integral inner surface of an accommodating part (a shaft sleeve or a guide rail bracket) of an ultra-precise kinematic pair matching coupling part, gas flows out of the restrictor hole, and a layer of lubricating gas film is formed between kinematic pairs. The kinematic pair can realize frictionless translational sliding through the lubricating air film.
However, the restrictor can generate fluid-solid coupling micro-vibration in the throttling process, which is represented by random vibration characteristics, the magnitude of the vibration is between picometers and nanometers, and the normal vibration characteristics of different points on the restrictor are different. When the nano-scale movement is required, errors generated by vibration can become important error sources, so that the random micro-vibration of different points on the measurement restrictor is beneficial to avoiding a random resonance area by a kinematic pair, and the positioning precision is improved.
In addition, the characteristics of the normal random micro-vibration of the restrictor are related to air source pressure, orifice distribution, orifice diameter, normal stress of the restrictor and the like, and the influence factors are finally related to the thickness of the air film, so that the thickness of the air film is measured while the normal random micro-vibration of the restrictor is measured, and the characteristics and the influence factors of the normal random micro-vibration of the restrictor are analyzed. Therefore, a measuring device for the normal and random micro-vibration of the restrictor is needed.
Disclosure of Invention
The utility model discloses to prior art's not enough, provide a measurement device of flow controller normal direction random micro vibration.
The above purpose is not realized, the utility model discloses a technical scheme as follows:
a measuring device for normal random micro-vibration of a throttler comprises a laser vibration meter, a vibration sensor and a vibration sensor, wherein the laser vibration meter is used for measuring the normal random micro-vibration of a certain point of the throttler; the electric inductance micrometer head is used for measuring the stable initial gas film thickness of the throttler after ventilation; the device comprises an X-Y two-dimensional translation table, a laser vibrometer, a high-precision marble platform and a control system, wherein the X-Y two-dimensional translation table is used for realizing the movement of the high-precision marble platform in X and Y directions relative to the laser vibrometer; the limiting assembly is used for limiting the positions of the throttles with different sizes, preventing the throttles from sliding after ventilation and avoiding the position of the current measuring point from deviating from the laser beam; and the industrial personal computer and the display are used for controlling the X-Y two-dimensional translation table, and recording, analyzing and displaying data measured by the laser vibrometer and the electric inductance micrometer head.
Furthermore, the limiting assembly comprises 4 right-angle ball limiting blocks, 4 square ejector rods, 2 fixed screw rods and 2 movable screw rods capable of moving in the X direction along the small sliding rail. The concrete structure and the installation position are as follows: 2 parallel grooves are formed in the high-precision marble platform, and 2 small sliding rails are fixed in the 2 grooves through screws respectively; the 2 moving screw rods are respectively fixed on the 2 small slide rails through fastening screws; 2 fixed screws are respectively arranged in the two grooves and are positioned on the left side of the small slide rail; each right-angle ball limiting block is connected with 1 square ejector rod through threads; the square ejector rod is fixed on the screw rod through a fastening screw, and the fixed position can be adjusted according to the width of the throttler; the distance between the movable screw and the fixed screw in the same groove is changed by changing the position of the movable screw on the small slide rail, so that the distance between 2 corresponding right-angle ball limiting blocks is changed, and the positions of the throttlers with different lengths are limited; through the structure, the position of the square ejector rod in the screw rod and the position of the movable screw rod on the small slide rail are adjusted according to the size of the throttleer, so that 4 right-angle ball limiting blocks are just attached to 4 corners of the throttleer, the position of the throttleer is limited, the throttleer is prevented from sliding after ventilation, and the square ejector rod and the movable screw rod are fixed by using a set screw after adjustment is completed.
Furthermore, the square ejector rod and the right-angle ball limiting block are not in contact with the plane of the high-precision marble, so that the right-angle ball limiting block is prevented from blocking an air film air outlet; the square ejector rod can prevent the right-angle ball limiting block from inclining; the right-angle ball limiting block is structurally characterized in that balls are mounted in a right-angle sheet metal groove, and when the position of the throttler is limited, the balls are in point contact with the side surface of the throttler, so that friction force borne by the throttler during normal vibration is reduced.
A method for measuring normal random micro-vibration of a throttleer comprises the steps of firstly, attaching a reflective film to a point to be measured on the upper surface of the throttleer, placing the reflective film on a high-precision marble platform, adjusting a limiting assembly according to the size of the throttleer, and limiting the position of the throttleer; the inductance micrometer head is vertically and downwards fixed on the square ejector rod by adopting a set screw, the square ejector rod is fixed on the rotatable screw rod by the set screw, the angle of the rotatable screw rod and the position of the square ejector rod in the rotatable screw rod are adjusted, the inductance micrometer head is vertically contacted with the upper surface of the throttler, and the reading x of the inductance micrometer head at the moment is recorded
1(ii) a The industrial personal computer and the upper computer program control the laser vibrometer to move along the X direction, and the high-precision marble platform moves along the Y direction, so that the laser beam of the laser vibrometer vertically falls on the central point of the reflective adhesive film; the air inlet of the throttler is connected with an air inlet pipe through an air pipe quick connector; the air inlet pipe is filled with stable air pressure, after the normal vibration of the throttleer is stable, namely after the protruding frequency points in the amplitude-frequency curve of data measured by the laser vibration meter basically do not change along with time, the normal random micro-vibration data of the throttleer measured by the laser vibration meter are recorded, and meanwhile, the inductance micro-head records the current reading x
2The thickness of the gas film is Δ x ═ x
1-x
2(ii) a If all the measuring points on the upper surface of the throttler are measured, the measurement is finished, if not, the industrial personal computer and the upper computer control the laser vibration meter to move along the X direction, and the high-precision marble platform moves along the Y direction, so that the laser beam of the laser vibration meter vertically falls on the central point of the reflective adhesive film of the next measuring point to measure until all the measuring points are measured; and recording and analyzing the normal random micro-vibration data and the thickness of the air film of the restrictor, and displaying the data through a display screen.
The utility model has the advantages that: in the utility model, the right-angle ball limiting block is adopted to limit the position of the throttleer when the normal direction random micro-vibration of the throttleer is measured, the structure is that the ball is arranged in the right-angle sheet metal groove, when the position of the throttleer is limited, the ball is in point contact with the side surface of the throttleer, the friction force borne by the throttleer during the normal direction vibration can be reduced, and the measuring result is more accurate; by moving the laser vibrometer or placing the high-precision marble platform of the throttleer, the vibration data of different points to be measured of the same throttleer can be measured, and the two-dimensional distribution characteristic of the normal random micro-vibration of the throttleer is obtained. Additionally, the utility model discloses not only can measure the flow controller normal direction random micro vibration, can also measure gas film thickness. The method has high precision and high measurement efficiency.
Drawings
FIG. 1 is a diagram of the overall apparatus of the present invention;
FIG. 2 is a block diagram of a restrictor assembly of the present invention;
FIG. 3 is a structural diagram of a right-angle ball stopper of the present invention;
fig. 4 is a flowchart of the present invention for completing one measurement.
Detailed Description
In order to make the technical means, the creation features, the achieved objects and the effects of the present invention easily understood and appreciated, the present invention will be further described with reference to the accompanying drawings.
As shown in fig. 1 to 3, the utility model discloses a 1, display screen, 2, industrial computer, 3, work platform, 4, laser vibrometer, 5, laser beam, 6, X axle displacement guide rail, 7, the intake pipe, 8, high accuracy marble platform, 9, Y axis nature module, 10, cam structure, 11, rotatable screw rod, 12, square ejector pin 5, 13, inductance micrometer head, 14, fixed screw rod 1, 15, square ejector pin 1, 16, removal screw rod 1, 17, square ejector pin 2, 18, reflection of light pad pasting, 19, small-size slide rail 1, 20, right angle type ball stopper, 21, square ejector pin 3, 22, fixed screw rod 2, 23, square ejector pin 4, 24, removal screw rod 2, 25, small-size slide rail 2, 26, the flow controller, 27, trachea quick-operation joint, 28, right angle type panel beating groove, 29, ball.
As shown in figure 1, the normal random micro-vibration magnitude of the restrictor is between picometers and nanometers, and the vibration frequency distribution is wide, so that a high-performance laser vibration meter (4) with the model of OFV505/5000, the frequency range of DC-24 MHz and the displacement resolution ratio of better than 0.05pm is selected for measurement, and the measurement requirement is met.
The X-Y two-dimensional translation stage shown in fig. 1 is not limited to the specific structure in fig. 1, and the movement of the throttle in the X-Y direction with respect to the laser vibrometer may be realized.
As shown in fig. 1 and fig. 2, the specific implementation steps are as follows:
step 1: firstly, a reflective film (18) is adhered to the point to be measured on the upper surface of the restrictor (26), and the point to be measured is placed on a high-precision marble platform (8). The positions of the square mandrill 1(15), the square mandrill 2(17), the square mandrill 3(21) and the square mandrill 4(23) in the fixed screw 1(14), the movable screw 1(16), the fixed screw 2(22) and the movable screw 2(24) are adjusted according to the width of the throttle; adjusting the positions of the movable screw rod 1(16) and the movable screw rod 2(24) on the small slide rail 1(19) and the small slide rail 2(25) according to the length of the throttle; through the adjustment, 4 right-angle ball bearings are attached to 4 angles of the throttleer, the position of the throttleer is limited, and a square ejector rod and a movable screw rod are fixed by using a set screw;
step 2: according to the position limited by the throttle, the angle of a rotatable screw rod (11) and the position of a square ejector rod 5(12) supporting an inductance micrometer head (13) in the rotatable screw rod (11) are adjusted, the inductance micrometer head (13) is vertically contacted with the upper surface of the throttle (26), a set screw is adopted to fix the inductance micrometer head (13) on the square ejector rod 5(12), the square ejector rod 5(12) is fixed on the rotatable screw rod (11) through the set screw, the rotatable screw rod (11) is fixed at an angle through a cam mechanism (10), and the reading x of the inductance micrometer head (13) at the moment is recorded
1；
And step 3: the laser vibration meter (4) is vertically fixed on a slide block of the X-axis displacement guide rail (6) and can move along the X-axis direction; the industrial personal computer (2) and an upper computer program control the laser vibration meter (4) to move along the X direction, and the high-precision marble platform (8) moves along the Y direction, so that a laser beam (5) of the laser vibration meter (4) vertically falls on the central point of the reflective adhesive film (18);
and 4, step 4: the air inlet of the restrictor is connected with an air inlet pipe (7) through an air pipe quick joint (27); the air inlet pipe (7) is introduced with stable air pressure, and after the normal vibration of the throttler (26) is stable, the laser vibration meter (4) measures dataAfter the outstanding frequency points in the amplitude-frequency curve are basically not changed along with the time, the normal random micro-vibration data of the throttler measured by the laser vibration meter are recorded, and meanwhile, the current reading x is recorded by the inductance micro-measuring head
2The thickness of the gas film is Δ x ═ x
2-x
1. Recording and analyzing the normal random micro-vibration data and the thickness of the air film of the restrictor, and displaying the data through a display screen;
and 5: the industrial personal computer (2) and an upper computer program control the laser vibration meter (4) to move along the X direction, the high-precision marble platform (8) moves along the Y direction, and a laser beam (5) of the laser vibration meter (4) vertically falls on a central point on a reflective adhesive film of the next measuring point to measure until all the points to be measured are measured.
Fig. 3 shows the structure diagram of the right-angle ball limiting block of the present invention, which is composed of a right-angle sheet metal groove (28) and 4 balls. When the position of the restrictor is limited, the ball is tangent to the side surface of the restrictor, so that the ball is in point contact with the side surface of the restrictor, the friction force borne by the restrictor during normal vibration is reduced, and the phenomenon that the laser beam of the laser vibration meter deviates from the current measuring point due to sliding of the restrictor due to ventilation is avoided.
FIG. 4 is a once-through working flow chart, wherein a reflective film is firstly pasted on a point to be measured on the upper surface of the throttler, and the throttler is placed on a high-precision marble platform; secondly, limiting the position of the throttler on a high-precision marble plane by using a limiting component; secondly, fixing the inductance micrometer head according to the position of the throttleer, enabling the inductance micrometer head to be vertically contacted with the upper surface of the throttleer, and recording the reading x of the inductance micrometer head at the moment
1(ii) a Then, starting the measuring device, and adjusting the X-Y two-dimensional translation table to enable the laser beam of the laser vibrometer to fall on the reflective adhesive film of the first point to be measured; then, stable air pressure is introduced into the air pipe, after the normal vibration of the throttler is stable, the normal random micro-vibration data of the throttler measured by the laser vibration meter are recorded, and meanwhile, the current reading x is recorded by the inductance micrometer head
2The thickness of the gas film is Δ x ═ x
1-x
2(ii) a If all the points to be measured on the upper surface of the throttler are measured, the measurement is finished, otherwise, the X-Y two-dimensional translation table is adjusted to enable the laser of the laser vibrometer to be excitedAnd (3) measuring the central point of the light beam vertically falling on the reflective adhesive film of the next measuring point until all the points to be measured are measured, recording and analyzing the normal random micro-vibration data and the thickness of the air film of the throttler, and displaying the data through a display screen.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (3)
1. The utility model provides a measuring device of throttle normal direction random micro vibration which characterized in that: the device comprises a laser vibration meter, a sensor and a controller, wherein the laser vibration meter is used for measuring the normal random micro-vibration of a certain point of the restrictor; the electric inductance micrometer head is used for measuring the stable initial gas film thickness of the throttler after ventilation; the device comprises an X-Y two-dimensional translation table, a laser vibrometer, a high-precision marble platform and a control system, wherein the X-Y two-dimensional translation table is used for realizing the movement of the high-precision marble platform in X and Y directions relative to the laser vibrometer; the limiting assembly is used for limiting the positions of the throttles with different sizes, preventing the throttles from sliding after ventilation and avoiding the position of the current measuring point from deviating from the laser beam; and the industrial personal computer and the display are used for controlling the X-Y two-dimensional translation table, and recording, analyzing and displaying data measured by the laser vibrometer and the electric inductance micrometer head.
2. The device for measuring the normal random micro-vibration of the restrictor of claim 1, wherein: spacing subassembly include 4 right angle type ball stopper, 4 root square ejector pins, 2 clamping screw, 2 removal screw that can realize the X direction along small-size slide rail, its concrete structure and mounted position are as follows: 2 parallel grooves are formed in the high-precision marble platform, and 2 small sliding rails are fixed in the 2 grooves through screws respectively; the 2 moving screw rods are respectively fixed on the 2 small slide rails through fastening screws; 2 fixed screws are respectively arranged in the two grooves and are positioned on the left side of the small slide rail; each right-angle ball limiting block is connected with 1 square ejector rod through threads; the square ejector rod is fixed on the screw rod through a fastening screw, and the fixed position can be adjusted according to the width of the throttler; the distance between the movable screw and the fixed screw in the same groove is changed by changing the position of the movable screw on the small slide rail, so that the distance between 2 corresponding right-angle ball limiting blocks is changed, and the positions of the throttlers with different lengths are limited; through the structure, the position of the square ejector rod in the screw rod and the position of the movable screw rod on the small slide rail are adjusted according to the size of the throttleer, so that 4 right-angle ball limiting blocks are just attached to 4 corners of the throttleer, the position of the throttleer is limited, the throttleer is prevented from sliding after ventilation, and the square ejector rod and the movable screw rod are fixed by using a set screw after adjustment is completed.
3. The device for measuring the normal random micro-vibration of the restrictor of claim 1, wherein: the square ejector rod and the right-angle ball limiting block in the limiting assembly are not in contact with the plane of the high-precision marble, so that the right-angle ball limiting block is prevented from blocking the air outlet of the air film; the square ejector rod can prevent the right-angle ball limiting block from inclining; the right-angle ball limiting block is structurally characterized in that balls are mounted in a right-angle sheet metal groove, and when the position of the throttler is limited, the balls are in point contact with the side surface of the throttler, so that friction force borne by the throttler during normal vibration is reduced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921135225.2U CN210051433U (en) | 2019-07-19 | 2019-07-19 | Measuring device for normal random micro-vibration of throttler |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921135225.2U CN210051433U (en) | 2019-07-19 | 2019-07-19 | Measuring device for normal random micro-vibration of throttler |
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| CN210051433U true CN210051433U (en) | 2020-02-11 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110274677A (en) * | 2019-07-19 | 2019-09-24 | 中国计量大学 | A kind of measuring device and method of the random micro-vibration of flow controller normal direction |
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2019
- 2019-07-19 CN CN201921135225.2U patent/CN210051433U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110274677A (en) * | 2019-07-19 | 2019-09-24 | 中国计量大学 | A kind of measuring device and method of the random micro-vibration of flow controller normal direction |
| CN110274677B (en) * | 2019-07-19 | 2024-01-12 | 中国计量大学 | Device and method for measuring normal random micro-vibration of restrictor |
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