CN219991730U - Atomic layer deposition device for laminated perovskite solar cell - Google Patents
Atomic layer deposition device for laminated perovskite solar cell Download PDFInfo
- Publication number
- CN219991730U CN219991730U CN202321638228.4U CN202321638228U CN219991730U CN 219991730 U CN219991730 U CN 219991730U CN 202321638228 U CN202321638228 U CN 202321638228U CN 219991730 U CN219991730 U CN 219991730U
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- China
- Prior art keywords
- cavity
- perovskite solar
- atomic layer
- layer deposition
- solar cell
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- 238000000231 atomic layer deposition Methods 0.000 title claims abstract description 27
- 238000006243 chemical reaction Methods 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 238000007789 sealing Methods 0.000 claims description 4
- 238000000151 deposition Methods 0.000 abstract description 4
- 230000008021 deposition Effects 0.000 abstract description 4
- 238000007747 plating Methods 0.000 abstract description 4
- 230000006872 improvement Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 8
- 238000003475 lamination Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000013082 photovoltaic technology Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Landscapes
- Photovoltaic Devices (AREA)
Abstract
The utility model relates to structural improvement of an atomic layer deposition device, in particular to an atomic layer deposition device for a laminated perovskite solar cell, which can effectively reduce contact with air in the manufacturing process of the laminated perovskite solar cell and avoid plating around and large-area deposition; including interior cavity (1) and outer cavity (2), be equipped with reaction chamber (3) in interior cavity (1), one side of reaction chamber (3) is equipped with air inlet (4), and the opposite side is equipped with gas outlet (5), reaction chamber (3) bottom is equipped with recess (6) that are used for putting the substrate, outer cavity (2) are equipped with a plurality of external gas pockets (7) of evenly arranging, the top and the below of interior cavity (1) all are equipped with heating device (8), reaction chamber (3) are straight flange ellipse.
Description
Technical Field
The utility model relates to structural improvement of an atomic layer deposition device, in particular to an atomic layer deposition device for a laminated perovskite solar cell.
Background
The development of renewable energy sources has always been an urgent problem for the rapidly growing energy demands. The perovskite solar cell takes perovskite material as a light absorption layer, belongs to the third-generation solar cell, has excellent characteristics of high light absorption coefficient, carrier mobility and the like, and has low preparation cost and high photoelectric conversion efficiency. The excellent characteristics of perovskite solar cells have led to their wide application in the photovoltaic, semiconductor light source and optical fields. At present, the conversion efficiency of perovskite unijunction and perovskite silicon lamination is as high as 25.8% and 33.2%, respectively, and the perovskite unijunction and perovskite silicon lamination are in the leading position in other thin film photovoltaic technologies. The laminated Perovskite solar cell mainly consists of transparent conductive glass (TCO), an Electron Transport Layer (ETL), a Perovskite layer (perovskie), a Hole Transport Layer (HTL) and a metal Electrode (Electrode). In order to achieve energy level matching, passivate interface defects, promote carrier transport, reduce recombination current, improve the conversion efficiency and stability of the stacked perovskite solar cell, a passivation layer (passionlayer) and a buffer layer (bufferlyer) are generally added between perovskite stacks.
The film prepared by atomic layer deposition has the advantages of accurate and controllable thickness, compactness, no pinholes, good shape retention, good uniformity, good repeatability and capability of large-area deposition at low temperature. The film prepared by atomic layer deposition has great help to improve the performance of the laminated perovskite solar cell. The compact pinhole-free layer prepared by atomic layer deposition can inhibit permeation of water and oxygen, and improve stability of the device. The atomic layer deposition temperature can be reduced to below 100 ℃, and the high-temperature decomposition of the perovskite solar cell is avoided.
Each laminated material of the laminated perovskite solar cell needs different equipment to prepare, the process is troublesome, and when the laminated perovskite solar cell is transferred to different equipment, the time for the laminated perovskite solar cell to contact air is increased. Magnetron sputtering for large-area laminated perovskite solar cells can damage the solar cell structure and affect the performance.
In summary, in the prior art, an atomic layer deposition device is needed to solve the problem of reducing contact with air during the preparation process of the laminated perovskite solar cell, and avoiding plating around and large-area deposition.
Disclosure of Invention
In view of the problems mentioned in the background art, an object of the present utility model is to provide an atomic layer deposition device for a laminated perovskite solar cell, which can effectively reduce contact with air during the manufacturing process of the laminated perovskite solar cell, and avoid plating around and large-area deposition.
The technical aim of the utility model is realized by the following technical scheme: the atomic layer deposition device for the laminated perovskite solar cell comprises an inner cavity and an outer cavity, wherein a reaction cavity is arranged in the inner cavity, one side of the reaction cavity is provided with an air inlet, the other side of the reaction cavity is provided with an air outlet, the bottom of the reaction cavity is provided with a groove for placing a substrate, the outer cavity is provided with a plurality of evenly-arranged external air holes, heating devices are arranged above and below the inner cavity, and the reaction cavity is straight-edge elliptic.
Preferably, the inner cavity comprises an inner cavity shell and an inner cavity upper cover, and the inner cavity upper cover is detachably connected with the inner cavity shell.
Preferably, the heating device comprises a plurality of heat insulation layers and heating wires in coil pipe shapes, and the heating wires face the inner cavity.
Preferably, the outer cavity comprises an outer cavity shell and an outer cavity upper cover, and the outer cavity upper cover is hinged with the outer cavity shell.
Preferably, the inner wall of the upper cover of the outer cavity is connected with a heating device.
Preferably, an annular sealing gasket is arranged at the opening edge of the outer cavity shell.
Preferably, the outer cavity upper cover is also connected with the outer cavity shell through a pneumatic push rod.
Preferably, the bottom of the groove is provided with a plurality of negative pressure ports.
In summary, the utility model has the following advantages: the atomic layer deposition device for the laminated perovskite solar cell can finish the preparation of the transparent conductive layer, the electron transport layer, the perovskite layer, the passivation layer, the hole transport layer, the buffer layer, the electrode and the encapsulation layer of the perovskite solar cell through one set of equipment.
The formula of each perovskite lamination to be prepared can be arranged on atomic layer deposition equipment in a one-key mode, so that the preparation of each lamination is automatically completed, less personnel and operation are required, the manpower and material resources are saved, and the efficiency is improved.
The preparation of each lamination of the perovskite solar cell is completed under vacuum, so that the influence of water oxygen and the like in the air on the perovskite solar cell is reduced, and the efficiency loss of the perovskite solar cell can be protected to the greatest extent.
The large-size laminated perovskite solar cell can be deposited at one time through the size and shape design of the grooves.
The design of the equipment cavity is unique, the back of the glass is tightly attached to the bottom of the groove through the negative pressure port of the groove, the contact with reaction gas is avoided, and the back of the transparent glass is further reduced by winding plating.
Drawings
FIG. 1 is a schematic diagram of a first embodiment of the present utility model;
FIG. 2 is a schematic diagram of a second embodiment of the present utility model;
FIG. 3 is a cross-sectional view of the present utility model;
FIG. 4 is a cross-sectional view II of the present utility model;
fig. 5 is a schematic view of the internal structure of the present utility model.
Reference numerals: 1. an inner cavity; 2. an outer cavity; 3. a reaction chamber; 4. an air inlet; 5. an air outlet; 6. a groove; 7. externally connected air holes; 8. a heating device; 9. an inner cavity housing; 10. an inner cavity upper cover; 11. a heat preservation layer; 12. heating wires; 13. an outer chamber housing; 14. an outer cavity upper cover; 15. a sealing gasket; 16. a pneumatic push rod; 17. a connecting piece; 18. and a negative pressure port.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
The atomic layer deposition device for the laminated perovskite solar cell comprises an inner cavity 1 and an outer cavity 2, wherein when atomic layer deposition is carried out on the surface of a glass substrate, the outer cavity 2 is kept at negative pressure, different reaction gases are sequentially introduced into the inner cavity 1, a reaction cavity 3 is arranged in the inner cavity 1, and the inner cavity 1 is arranged at the bottom of the outer cavity 2 through a connecting piece 17, so that the inner cavity 1 is kept suspended. One side of reaction chamber 3 is equipped with air inlet 4, and the opposite side is equipped with gas outlet 5, reaction chamber 3 is the straight flange ellipse, sends into reaction gas through air inlet 4, and air inlet 4 is located straight flange elliptical left side edge, and gas outlet 5 is located straight flange elliptical right side edge, and the reaction gas that air inlet 4 lets in can realize even gas distribution effect through the arc of straight flange ellipse edge, reaction chamber 3 bottom is equipped with the recess 6 that is used for putting the substrate, and glass substrate's size is the same with recess 6 size, and the bottom of recess 6 is equipped with negative pressure port 18, and after glass substrate put into recess 6, negative pressure port 18 lets in the negative pressure for glass substrate bottom keeps pasting tightly with the bottom of recess 6, and the bottom of glass substrate is not contacted with reaction gas, and reaction gas carries out atomic layer deposition at the substrate upper surface from air inlet 4 to gas outlet 5 in-out the in-process, outer cavity 2 is equipped with a plurality of evenly arranged's external gas pockets 7, interior cavity 1 top and below all are equipped with heating device 8, when carrying out atomic layer deposition, external gas pockets 7 switch on inert gas to keep interior cavity 1 and outer cavity 2 to guarantee that the gas tightness is 1 and the bottom of recess 6 keeps, and heat the device is different to the different temperature of interior cavity 1, and the different temperature of the device is realized at the same time, and the different temperature of the device is heated up at the different portion of the inner cavity 1.
The inner cavity 1 comprises an inner cavity shell 9 and an inner cavity upper cover 10, and the inner cavity upper cover 10 is detachably connected with the inner cavity shell 9; the outer cavity 2 comprises an outer cavity shell 13 and an outer cavity upper cover 14, and the outer cavity upper cover 14 is hinged with the outer cavity shell 13; the inner wall of the outer cavity upper cover 14 is connected with the heating device 8; an annular sealing gasket 15 is arranged at the edge of the opening of the outer cavity shell 13; the outer cavity upper cover 14 is also connected with the outer cavity shell 13 through a pneumatic push rod 16. The outer cavity 2 is directly opened by a handle on the outer cavity shell 13 to radiate heat, the inner cavity 1 is opened at the same time, the outer cavity 2 can be closed for introducing inert gas, and the glass substrate containing laminated perovskite after the reaction is completed is taken out.
The heating device 8 comprises a plurality of heat preservation layers 11 and heating wires 12 in a coil pipe shape, the heating wires 12 face the inner cavity 1, and the heat can not be dispersed towards the direction of the outer cavity 2 while uniform heat can be provided for the inner cavity 1.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The atomic layer deposition device for the laminated perovskite solar cell is characterized by comprising an inner cavity (1) and an outer cavity (2), wherein a reaction cavity (3) is arranged in the inner cavity (1), one side of the reaction cavity (3) is provided with an air inlet (4), the other side of the reaction cavity is provided with an air outlet (5), the bottom of the reaction cavity (3) is provided with a groove (6) for placing a substrate, the outer cavity (2) is provided with a plurality of evenly arranged external air holes (7), and heating devices (8) are arranged above and below the inner cavity (1), and the reaction cavity (3) is straight-edge elliptic.
2. Atomic layer deposition device for stacked perovskite solar cells according to claim 1, characterized in that the inner chamber (1) comprises an inner chamber housing (9) and an inner chamber upper cover (10), the inner chamber upper cover (10) being detachably connected to the inner chamber housing (9).
3. Atomic layer deposition device for stacked perovskite solar cells according to claim 1, characterized in that the heating device (8) comprises a number of heat-insulating layers (11) and coil-shaped heating wires (12), the heating wires (12) being directed towards the inner cavity (1).
4. An atomic layer deposition device for a stacked perovskite solar cell according to claim 2, wherein the outer cavity (2) comprises an outer cavity housing (13) and an outer cavity upper cover (14), the outer cavity upper cover (14) being hinged to the outer cavity housing (13).
5. An atomic layer deposition apparatus for a stacked perovskite solar cell as claimed in claim 4, wherein an inner wall of the outer chamber upper cover (14) is connected to a heating means (8).
6. Atomic layer deposition device for stacked perovskite solar cells according to claim 4, characterized in that the opening edge of the outer cavity housing (13) is provided with an annular sealing gasket (15).
7. The atomic layer deposition device for a laminated perovskite solar cell according to claim 4, wherein the outer cavity upper cover (14) is further connected with the outer cavity housing (13) through a pneumatic push rod (16).
8. Atomic layer deposition device for stacked perovskite solar cells according to claim 1, characterized in that the bottom of the recess (6) is provided with a plurality of negative pressure ports (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321638228.4U CN219991730U (en) | 2023-06-27 | 2023-06-27 | Atomic layer deposition device for laminated perovskite solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321638228.4U CN219991730U (en) | 2023-06-27 | 2023-06-27 | Atomic layer deposition device for laminated perovskite solar cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219991730U true CN219991730U (en) | 2023-11-10 |
Family
ID=88603273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321638228.4U Active CN219991730U (en) | 2023-06-27 | 2023-06-27 | Atomic layer deposition device for laminated perovskite solar cell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219991730U (en) |
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2023
- 2023-06-27 CN CN202321638228.4U patent/CN219991730U/en active Active
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