CN218602415U

CN218602415U - Overturning actuating mechanism based on stepping motor control

Info

Publication number: CN218602415U
Application number: CN202223138999.5U
Authority: CN
Inventors: 江秦波; 单发晨
Original assignee: Shanghai Jiaozhen Semiconductor Technology Co ltd
Current assignee: Shanghai Jiaozhen Semiconductor Technology Co ltd
Priority date: 2022-11-25
Filing date: 2022-11-25
Publication date: 2023-03-10
Anticipated expiration: 2032-11-25

Abstract

The utility model discloses a upset actuating mechanism based on step motor control relates to wafer production technical field, include the bottom plate and install the upset arm on the bottom plate, the positive fixed mounting of bottom plate has cavity rotary mechanism, cavity rotary mechanism's the outside distributes and has signal trigger unit, cavity rotary mechanism's rotation end fixed mounting has the cylinder mounting panel, one side fixed mounting of cylinder mounting panel has cylinder support, one side movable mounting of cylinder support has the upset arm, the inner wall of upset arm has the wafer through the peek finger centre gripping, the utility model discloses an adopt two-way tongs die clamping cylinder, adopt the both sides centre gripping simultaneously of same cylinder assurance, guarantee that the wafer keeps the card die state after putting into, can not cause the wafer to drop because of the mechanism turn-over, and be provided with high-accuracy cavity rotary mechanism and drive the centre gripping arm rotation, realize the turn-over function, set up the application of peek material finger at the clamping site.

Description

Overturning actuating mechanism based on stepping motor control

Technical Field

The utility model relates to an upset actuating mechanism, in particular to upset actuating mechanism based on step motor control belongs to wafer production technical field.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor circuit, the raw material of the wafer is silicon, a silicon crystal bar forms a silicon wafer after grinding, polishing and slicing, namely the wafer, the main processing modes of the wafer are wafer processing and batch processing, namely one or more wafers are processed simultaneously, along with the fact that the characteristic size of a semiconductor is smaller and smaller, processing and measuring equipment is more and more advanced, the wafer processing has new data characteristics, along with the increasing prominence of the problem of chip shortage, the investment enthusiasm of new equipment of each large wafer factory is increased day by day, part of process sections have EQ internal inversion requirements for the wafer, the existing wafer conveying manipulator is mostly controlled by 4 shafts and does not have wafer inversion capacity, the cleanliness of the existing turnover mechanism cannot meet the requirements of hundred-level use environments in the semiconductor industry, the existing turnover mechanism is mostly independent equipment, the volume is large, the existing equipment cannot be integrated, meanwhile, servo or frequency conversion control is adopted, the hardware cost is higher, an external independent controller is required for control, the control cost and the development cost is high.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a upset actuating mechanism based on step motor control to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides an upset actuating mechanism based on step motor control, includes the bottom plate and installs the upset arm on the bottom plate, the positive fixed mounting of bottom plate has cavity rotary mechanism, the outside distribution of cavity rotary mechanism has signal trigger unit, cavity rotary mechanism's rotation end fixed mounting has the cylinder mounting panel, one side fixed mounting of cylinder mounting panel has cylinder support, one side movable mounting of cylinder support has the upset arm, the inner wall of upset arm has the wafer through the peek finger centre gripping, position feedback type step motor is installed in the outside of bottom plate, position feedback type step motor's output shaft and cavity rotary mechanism rotate the end and are connected.

Preferably, a driving cable is fixedly installed at the bottom of the position feedback type stepping motor, and a data cable is installed at the bottom of the bottom plate.

Preferably, the data cable is connected with a position feedback type stepping motor and a bidirectional finger clamping cylinder component.

Preferably, the inner side of the cylinder support is provided with a bidirectional finger clamping cylinder, and the output end of the bidirectional finger clamping cylinder is connected with the overturning arm.

Preferably, a detection sensor is arranged on one side of the front surface of the bottom plate, and the detection sensor is matched with the signal trigger unit for use.

Compared with the prior art, the beneficial effects of the utility model are that:

the utility model relates to a upset actuating mechanism based on step motor control, through adopting two-way tongs die clamping cylinder, centre gripping simultaneously in both sides that adopt same cylinder to guarantee, guarantee that the wafer keeps the card dead state after putting into, can not cause the wafer to drop because of the mechanism turn-over, and it is rotatory to be provided with high-accuracy cavity rotary mechanism and drive the centre gripping arm, realize the turn-over function, use cavity rotary platform simultaneously, conveniently walk the line, the wire-wound problem has been solved, set up the application that the peek material pointed at the centre gripping position, guarantee not cause wearing and tearing to the wafer with wafer contact segment, adopt the application of taking feedback function step motor, the precision of operation has been ensured, simultaneously this equipment volume is less, the mountable is in the middle of current equipment, reduce the required cost of upset wafer.

Drawings

Fig. 1 is a schematic top view of the present invention;

fig. 2 is a schematic view of the overall structure of the present invention.

In the figure: 1. a peek finger; 2. a wafer; 3. a bidirectional finger clamping cylinder; 4. a hollow rotating mechanism; 5. a position feedback type stepping motor; 6. turning over the arm; 7. a detection sensor; 8. a signal triggering unit; 9. a data cable; 10. a drive cable; 11. a cylinder support; 12. a cylinder mounting plate; 13. a base plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Please refer to fig. 1-2, the utility model provides a upset actuating mechanism based on step motor control, including bottom plate 13 and the upset arm 6 of installing on bottom plate 13, the front fixed mounting of bottom plate 13 has cavity rotary mechanism 4, adopt high accuracy cavity rotary mechanism 4 to drive the centre gripping arm rotation, realize the turn-over function, detect sensor 7 and signal trigger unit cooperation use simultaneously, can accurate control turn-over angle, the outside distribution of cavity rotary mechanism 4 has signal trigger unit 8, signal trigger unit 8 and detect sensor 7 cooperation use, hollow rotary mechanism 4's rotation end fixed mounting has cylinder mounting panel 12, cylinder mounting panel 12 can fix the cylinder, one side fixed mounting of cylinder mounting panel 12 has cylinder support 11, cylinder support 11 can install fixed upset arm 6, avoid the position to change, one side movable mounting of cylinder support 11 has upset arm 6, upset arm 6 is used for the centre gripping wafer, the inner wall of upset arm 6 has wafer 2 through peek finger 1 centre gripping, peek finger 1 is that this kind of material has rigidity and flexibility aerospace field, medical instrument field and industrial field have application, the outside of the feedback type is installed position feedback motor 5, stepper motor 5 is connected with the rotation motor's rotation end 5, stepper motor's accessible rotary mechanism 5 has been guaranteed the feedback type rotary mechanism 4 of rotation, stepper motor is connected with the rotation motor of rotation precision.

Further: the bottom of position feedback type step motor 5 is fixed with drive cable 10, and drive cable 10 carries out whole power supply for the device, and data cable 9 is installed to the bottom of bottom plate 13, and data cable 9 accessible outside IO controlling means running state.

Further: the data cable 9 is connected with the position feedback type stepping motor 5 and the bidirectional finger clamping cylinder 3, and the data control and data feedback can be carried out on the whole device through the data cable 9.

Further: two-way finger clamping cylinder 3 is installed to the inboard of cylinder support 11, and two-way finger clamping cylinder 3 adopts the both sides centre gripping simultaneously of same cylinder assurance, guarantees that wafer 6 keeps card dead state after putting into, can not cause the wafer to drop because of the mechanism turn-over, and two-way finger clamping cylinder 3's output is connected with upset arm 6.

Further: one side of the front surface of the bottom plate 13 is provided with a detection sensor 7, and the detection sensor 7 is matched with the signal trigger unit 8 for use.

In the description of the present invention, it should be understood that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.

In the present invention, unless otherwise explicitly specified or limited, for example, it may be fixedly connected, detachably connected, or integrated; can be mechanically or electrically connected; the terms may be directly connected or indirectly connected through an intermediate medium, and may be used for communicating the inside of two elements or for interacting with each other, unless otherwise specifically defined, and the specific meaning of the terms in the present invention will be understood by those skilled in the art according to the specific circumstances.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a upset actuating mechanism based on step motor control, includes bottom plate (13) and installs upset arm (6) on bottom plate (13), its characterized in that, the positive fixed mounting of bottom plate (13) has cavity rotary mechanism (4), the outside distribution of cavity rotary mechanism (4) has signal trigger unit (8), the rotation end fixed mounting of cavity rotary mechanism (4) has cylinder mounting panel (12), one side fixed mounting of cylinder mounting panel (12) has cylinder support (11), one side movable mounting of cylinder support (11) has upset arm (6), the inner wall of upset arm (6) has wafer (2) through peek finger (1) centre gripping, position feedback type step motor (5) are installed in the outside of bottom plate (13), the output shaft and the cavity rotary mechanism (4) rotation end of position feedback type step motor (5) are connected.

2. The overturning actuating mechanism based on stepping motor control according to claim 1, characterized in that: the bottom of position feedback type step motor (5) is fixed mounting has drive cable (10), data cable (9) are installed to the bottom of bottom plate (13).

3. The stepping motor control-based overturning actuating mechanism according to claim 2, characterized in that: and the data cable (9) is connected with the position feedback type stepping motor (5) and the two-way finger clamping cylinder (3).

4. The overturning actuating mechanism based on stepping motor control according to claim 1, characterized in that: two-way finger clamping cylinder (3) are installed to the inboard of cylinder support (11), the output and the upset arm (6) of two-way finger clamping cylinder (3) are connected.

5. The overturning actuating mechanism based on stepping motor control according to claim 1, characterized in that: one side of the front surface of the bottom plate (13) is provided with a detection sensor (7), and the detection sensor (7) is matched with the signal trigger unit (8) for use.