JPH07157291A - Positioning device for lift device - Google Patents

Abstract

PURPOSE:To provide a positioning device for a lift device in which setting a detection position of prescribed part like a position of shopping a pallet is facilitated with a work environment of eliminating necessity for space or the like for adjusting and with a high degree of design freedom of a host device structure provided with this lift device. CONSTITUTION:In a lift device lifting a load 18 loaded in a pallet 16, a nut 15 fixed to the pallet 16 is fitted to a screw 10, rotatably held in upper/lower both end parts, rotated and driven by a motor 13, to connect a rotary shaft of a potentiometer 20 to a prescribed position of the screw 10, and the lift device is formed so as to decide a position of the pallet 16 by this potentiometer 20. Here, a connecting position of the potentiometer 20 relating to the screw 10 is preferably arranged in an opposite side end part to the motor 13 connected to the screw 10.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an elevating device for loading, elevating and transferring intermediate production materials, finished products, etc. in factories and the like.
Alternatively, a diffusion device used for manufacturing semiconductor devices, C
The present invention relates to an improvement of a positioning device in a lifting device used for a VD device or the like.

[0002]

2. Description of the Related Art In a recent factory, an elevating device is used for vertically transferring intermediate products, finished products and the like. Further, in a diffusing device used in the manufacture of semiconductor devices, and an elevating device in a CVD device, in particular, to transfer an unprocessed wafer to a position on the furnace side, or to transfer a processed wafer to a position on the upright side. Lifting equipment is used. Some of such lifting devices have a function of stopping not only at the upper and lower ends of the lifting but also at an intermediate position. For example, in an elevating device for transferring an intermediate product, a finished product, etc., it stops at a shelf or a workbench to be stored or processed, and for a semiconductor device manufacturing device, it depends on the processing amount, the structural condition of the processing device, etc. It is necessary to stop at an appropriate position in the middle set from. The positioning device of the lifting device having the intermediate positioning function has, for example, a configuration as shown in FIG. In FIG. 3, 10
Reference numeral A denotes a screw, which is rotatably supported by an upper bearing 11 and a lower bearing 12A fixed at predetermined positions by a cylindrical portion machined above and below the screw. Screw-1
0A is rotationally driven by the motor 13 and the speed reduction mechanism 14. A nut 15A is fitted to the screw 10A, and a loading platform 16 is fixed to the nut 15A. Note that, in FIG. 3, an elevator shaft and the like for holding the cargo bed are not shown. Reference numeral 30 indicates a vertical structure provided on the side of the platform that moves up and down. A position sensor having a switching signal function, for example, a limit switch, or optical sensors 31a, 31b, 31n is provided at a predetermined position of the vertical structure portion 30.
Is installed. Reference numeral 17A is a support structure portion for holding the lifting device, 18 is a load loaded on the loading platform, and detailed description of the mating structure at the intermediate position of the loading platform, the motor, and the lead wire of the position sensor is omitted. There is. In the structure shown in FIG. 3, the screw is driven by driving the motor 13.
10A is rotated, and the loading platform 16 is moved up and down by the movement of the nut 15A fitted to the screw 10A by the rotation of the screw 10A. When the loading platform 16 moves up and down and the position sensor 31a senses a predetermined associated position of the loading platform 16, it is determined that the loading platform has passed the position sensor 31a portion. Therefore, for example, when an attempt is made to stop the position sensor 31a, a control device (not shown) for an elevator such as an elevator (hereinafter simply referred to as an elevator) is provided with a conditional function which is activated in advance by a sensing signal from the position sensor 31a. By setting it, if the sensing signal of the position sensor 31a is input to the control device (not shown), the motor 1
Stop the rotation of 3. That is, each position sensor is attached to a required position such as the stop position of the loading platform.

[0003]

By the way, in the case of the above-described loading platform detection device, when the position sensor is replaced when the device is out of order, and when the lifting device or the host device having the lifting device is disassembled and maintained, etc. Therefore, when the maintenance work of the position sensor becomes necessary, the position where the sensor is mounted must be clarified on the mechanism and a position sensor mounting structure that can be finely adjusted to mount the position sensor in the correct position with high accuracy is required. A work environment for position adjustment is required. Moreover, changing the set position was troublesome and the positioning accuracy was not always good. The present invention solves the above-mentioned problems (problems) of the conventional one, and is provided with a working environment in which it is easy to set a detection position at a predetermined position such as a stop position of a loading platform and does not require a space for adjustment, and this lifting device. An object of the present invention is to provide a positioning device for a lifting device, which has a high degree of freedom in designing the upper device structure.

[0004]

In order to solve the above-mentioned problems, in the positioning device for the lifting device according to the present invention,
A screw fixed to the loading platform is fitted to a screw that is rotatably held at the upper and lower ends and is rotated by a motor, and a potentiometer for position determination is connected to the screw at a predetermined position. Configured. In this case, it is preferable that a nut having a ball screw is used as the nut, and that the screw also has a screw corresponding to the ball screw. Further, it is desirable to connect a potentiometer to the opposite side of the screw from the motor connection.

[0005]

Since the present invention is constructed as described above, the brush position of the potentiometer can be corresponded to the position of the loading platform in a one-to-one manner, and the loading position of the loading platform can be accurately detected by the brush output signal value of the potentiometer. . Further, unlike the position sensor, there is no need to perform adjustment work or the like in the lifting mechanism, so that the degree of freedom in structural design around the platform of the lift is increased. Also,
The setting position can be changed easily, the approach of the loading platform to the predetermined position can be detected, the deceleration operation of the motor can be executed, and the stopping precision of the loading platform can be improved. As the nut, a nut having a ball screw is used, and the screw is
Also, if a screw corresponding to this ball screw is used, the position detection accuracy can be further improved. If a potentiometer is connected to the opposite side of the screw from the motor connection, a highly accurate position determination function can be realized with a simple structure.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A positioning device for a lifting device according to the present invention will be specifically described below with reference to the embodiments shown in FIGS. FIG. 1 shows a configuration example of an elevating device in which the present invention is applied to, for example, a CVD device of a semiconductor manufacturing device. Since it is not directly related to the configuration of the present invention, an elevator shaft, which is a holding mechanism for the loading platform and the lifting mechanism, a mechanical structure of an upper device existing around the lifting device, such as a main body structure of a CVD device, and a motor. The elements such as the lead wire of the potentiometer and the like are omitted. Also, in FIG.
Elemental functions that are the same as or equivalent to those of the conventional example are denoted by the same reference numerals as in FIG. In FIG. 1, reference numeral 10 is a screw that functions as a drive mechanism that moves up and down the platform. Both ends of the screw 10 are processed into a cylindrical shape having a predetermined diameter, and are rotatably supported by an upper bearing 11 and a lower bearing 12 fixed at predetermined positions. The screw 10 reduces the rotation of the motor 13 to a predetermined rotation speed by the speed reduction mechanism 14,
Driven. The lower part of the screw 10 is processed into a cylinder having a predetermined diameter, the lower bearing 12 is penetrated through, and the rotary shaft of the potentiometer 20 having a predetermined performance is connected to the tip part. The lower bearing 12 and the potentiometer 20 are fixed to a horizontal structure 17 which constitutes a supporting structure of the lifting device. That is, the horizontal structure 17 forming the support structure is opened to a predetermined size and the lower portion of the screw 10 is penetrated to fix the potentiometer 20. A nut 15 is fitted to the screw 10, and a loading platform 16 is fixed to the nut 15. In this case, it is preferable that a nut having a ball screw is used as the nut 15, and the screw 10 also has a structure corresponding to the ball screw. Reference numeral 18 indicates a load loaded on the loading platform 16.

FIG. 2 is a block diagram showing a signal processing circuit that realizes the function of the positioning device of the lifting device of the present invention. An example of the configuration of the positioning means of the lifting device of the present invention will be described with reference to the same drawing. In the figure, reference numeral 20 is the potentiometer described above with reference to FIG. 1, and the potentiometer 20 is supplied with a voltage from a power supply device (not shown) that outputs a predetermined voltage.
The signal voltage output from the brush section (not shown) of the potentiometer 20 is converted into a digital value by the A / D converter 21 in the next stage. Potentiometer 20 and A
The line connecting the / D converter 21 is abbreviated as one line. The signal converted into a digital value by the A / D converter 21 is input to the comparison function unit 22, and when it matches the preset value set in the comparison function unit 22, an output signal is output to the output signal line 23. The output signal line 23 is connected to the controller main body of the elevator (not shown). 24
Is a setting function unit provided at an arbitrary predetermined place, for example, a numerical setting function such as a numeric keypad is provided, and the potentiometer 20 corresponding to the position where the platform 16 should be stopped.
The value that matches the output value of is set. The comparison function unit 22 is provided with, for example, a number of registers corresponding to the number of positions where the loading platform 16 should be stopped, and stores the numerical value input from the setting function unit 24. A display unit 25 has a function of displaying a numerical value input from the A / D converter 21 and an alarm signal or the like as necessary.

Next, with reference to FIGS. 1 and 2, the work to be performed when it is necessary to adjust the stop position of the loading platform when the lifting device is constructed or after disassembly maintenance is performed in the above configuration. Examples will be described. The operation of the operator is set to the manual mode by the operation panel (not shown) of the controller main body of the elevator equipped with the positioning device shown in FIG. 2, and the motor 13 is operated to stop the cargo bed 16. Stop at the desired stop position. The display value of the display unit 25 at the time of the stop is set in the setting function unit 24 together with the preset stop position number. The setting function unit 2 is provided in the register (not shown) corresponding to the stop position number provided in the comparison function unit 22.
The set value set to 4 is stored. The operator carries out the above-described operation corresponding to all the stop positions at which the platform 16 should be stopped, and sets all the stop positions to complete the setting work.

The above-mentioned setting function section 24 and display section 25 have been described separately from the control apparatus main body (not shown) in order to explain the configuration and function according to the present invention. The setting function unit 24 is integrated with the operation panel of the control unit or the operation panel for remote operation, and the display unit 25 corresponds to the site condition of the control unit, and the display unit 25 is the display unit or remote unit of the control unit. Of course, it may be provided on the operation panel for operation.

An operation panel (not shown) of the main body of the control device for the elevator equipped with this positioning device operates the elevator in the operating mode, and the motor 13 drives the platform 16 while the potentiometer is operating. When the output value of 20 coincides with one content value of a register (not shown) provided in the comparison function unit 22, a coincidence signal is output to the output signal line 23, for example, 23a.
The control device body (not shown) ignores this signal or stops the rotation of the motor 13 according to the condition preset in the setting function (not shown) of the control device body to stop the cargo bed 16
To stop. Further, the operation preset in the control device body (not shown) is automatically executed. When the above-mentioned operation is completed, the rotation of the motor 13 is automatically started by the operation set in the control device body (not shown), or the motor 13 is operated by the operation of the operator. The rotation is started to drive the loading platform 16. Then, the above operation is repeated.

The above description has explained the basic configuration of the present invention and its application example, and it suffices to appropriately change it in accordance with the installation conditions and required functions of the host device having the lifting device. Of course. For example, potentiometer 20
Has been described as being connected to the bottom of the screw-10,
It may be connected to the motor 13 or the reduction mechanism 14. This connection may be directly connected to the target location according to the rotation condition of the target location and the required stopping accuracy, or may be mounted via an appropriate gear in consideration of backlash. Further, the potentiometer 20 may be configured as a multi-rotation type potentiometer or a single-rotation type depending on the rotational speed conversion mechanism connected to the mounting location and the required resolution. Either way is fine. In addition, the potentiometer 20 corresponds to its required accuracy and permissible life, etc., such as winding, conductive plastic, solid metal, non-contact type, etc.
Any suitable structure may be selected and used. Although the output of the potentiometer 20 is described as being converted into a digital value by the A / D converter, the analog function remains unchanged and the setting potentiometer is provided, and the comparison function unit is provided by the analog type comparison circuit. 22 may be configured. The potentiometer for setting may be used by connecting it in series with a fixed resistor so as to enhance the setting accuracy. Although the embodiment has been described in which a register for storing the set value is provided, even if a battery for backup is provided as a countermeasure against a power failure or a non-volatile memory is used, the potentiometer for setting and A /
A D converter may be provided. Moreover, although it has been described that the output signal line 23 of the comparison function unit 22 outputs a plurality of output signal lines 23 corresponding to the number of stop positions, one output stop signal line is output according to the conditions of the cargo handling device. Is also good. Further, a value deviating from the set value by a predetermined value is output to the potentiometer 20 so that the deceleration signal is output when the stop position is approached.
The comparison function unit may be configured to output the deceleration signal when the signal is output. Although it has been described that the output value of the potentiometer 20 is displayed on the display unit 25, the output value of the potentiometer 20 is not displayed and the output signal of the comparison function unit 22 is set to an appropriate value when setting the set value. You may make it set visually by a measuring device.

For the position sensor, a digital encoder is used instead of the potentiometer 20 described above, and an A / D converter is used.
A counter may be used instead of the converter, but initial setting is required at a predetermined time such as at the start of the day,
After the power failure, the current position of the loading platform becomes unknown, so it is necessary to move the loading platform to a predetermined position and correct the counter contents. Further, if the absolute encoder is adopted, the above problems are eliminated, but the resolution is limited and it can be adopted in connection with the required performance.

[0013]

Since the present invention is constructed as described above, it has the following excellent effects. Since the brush position of the potentiometer can correspond to the loading position on a one-to-one basis, the loading position can be accurately detected by the brush output signal value of the potentiometer. It is easy to adjust the setting position during setting operation. Therefore, the setting position can be easily changed. Since it can be set by the setting function unit provided at any suitable position, a work space for setting is not required around the elevator equipped with this positioning device, and the degree of freedom in structural design is increased. The operation, setting, and adjustment functions of the elevator equipped with this positioning device can be concentrated in one place such as the operation panel of the control device body. Depending on the functional configuration of the comparison function and the like, the approach of the loading platform to a predetermined position can be detected, the deceleration operation of the motor can be executed, and the loading platform stopping accuracy can be improved. Measures against power failure are easy and no adjustment is required after power failure. Use a ball screw nut as the nut,
Further, if a screw corresponding to this ball screw is also used as the screw, the position stop accuracy according to the present invention can be further improved. If a potentiometer is connected to the opposite side of the screw from the motor connection, a highly accurate position determination function can be realized with a simple structure.

[Brief description of drawings]

FIG. 1 is a side view of a schematic mechanism showing an example of a lifting device to which a positioning device for a lifting device according to the present invention is applied.

FIG. 2 is a schematic block diagram showing a configuration example of a signal processing circuit that realizes a function of a positioning device of a lifting device according to the present invention.

FIG. 3 is a side view of a schematic mechanism showing an example of a lifting device to which a positioning device of a conventional lifting device is applied.

[Explanation of symbols]

 10: screw 13: motor 15: nut (ball screw) 16: luggage carrier 20: potentiometer

Claims (2)

[Claims] 1. A lifting device for loading and lowering a load on a loading platform, wherein a screw fixed to the loading platform is fitted to a screw that is rotatably held at both upper and lower ends and is rotationally driven by a motor. A positioning device for an elevating device, characterized in that the rotary shaft of the potentiometer is connected to a predetermined position of-, and the position of the loading platform is determined by this potentiometer. 2. A positioning device for an elevating device, wherein the potentiometer according to claim 1 is connected to a screw at the opposite end of the motor connected to the screw.