CN217641244U - Thin wafer cleaning flower basket - Google Patents

Abstract

The utility model discloses a thin wafer washs basket of flowers, thin wafer washs the basket of flowers include a pair of base plate, with a pair of side arm of a pair of base plate connection, with a pair of base plate connection's back timber, be provided with trapezoidal draw-in groove on the base plate for connect side arm and back timber. The inclined side wall and the top beam with the limiting teeth and the limiting grooves act together to stably limit the thin wafer from shaking in the cleaning process. The utility model discloses the structure is succinct, easily makes and assembles, both can guarantee cleaning quality in the wet process cleaning process of thin wafer, still can realize good protection effect to thin wafer simultaneously, reduces the lobe of a leaf rate.

Description

Thin wafer cleaning flower basket

Technical Field

The utility model belongs to the technical field of the semiconductor, a bear the weight of the container is related to, concretely relates to be used for abluent thin wafer of wet process to wash basket of flowers.

Background

Semiconductor wafers are the base material for the fabrication of semiconductor chips. In order to meet the performance index of some semiconductor chips, the thickness of the semiconductor wafer is required to be reduced to below 200 μm in the process. As the thickness becomes thinner, the semiconductor wafer becomes lighter in weight, and rigidity and strength decrease.

In the wet cleaning process of thin wafers with the thickness of the existing cleaning flower basket below 200 mu m, the existing cleaning flower basket cannot play a good protection effect on the wafers, the wafers are easy to crack, the production efficiency is reduced, and the main problems are as follows: because the error of wafer size, thickness and the machining error who washs the basket of flowers, cause the size of wafer and basket of flowers to match inadequately, thin wafer receives the washing liquid of violent boiling to influence and rocks, produces slightly crooked easily, deviates from in the tooth's socket of washing the basket of flowers, the following condition appears: 1. floating occurs; 2. the thin wafers are adhered or collided; 3. the thin wafer card creates severe distortion in the chuck. These conditions in turn lead to uncleanness or splintering during washing or sheet removal.

SUMMERY OF THE UTILITY MODEL

Objects of the invention

The utility model aims at: the thin wafer cleaning flower basket is provided, and can achieve a good protection effect on a thin wafer while ensuring the cleaning quality.

(II) technical scheme

In order to solve the technical problem, the utility model provides a thin wafer washs basket of flowers, thin wafer washs the basket of flowers include a pair of base plate, with a pair of side arm of a pair of base plate connection, with a pair of base plate connection's back timber.

Preferably, the bottom of the base plate is provided with a rectangular opening, and the inner side of the base plate is symmetrically provided with two trapezoidal grooves for connecting the side arms and one trapezoidal groove for connecting the top beam.

Preferably, the trapezoid grooves of the connecting side arms form a fixed included angle of 30-60 degrees with the bottom surface of the base plate.

Preferably, the trapezoid-shaped groove of the connecting top beam is perpendicular to the bottom surface of the base plate and is located at the top center of the inner side of the base plate.

Preferably, a gap is left between the bottoms of the pair of side arms.

Preferably, the inner side of the side arm is provided with a limit tooth and a limit groove which are arranged periodically, and the outer side of the side arm is provided with two grooves.

Preferably, the bottom of the limiting groove is a plane, and the top end of the limiting tooth is provided with a 45-degree chamfer.

Preferably, the length of the groove covers all the limiting grooves, and the depth of the groove penetrates through the bottom of each limiting groove.

Preferably, the inner side of the top beam is provided with limiting teeth and limiting grooves which correspond to the inner sides of the side arms one to one.

Preferably, the base plate, the side arms and the top beam are made of polytetrafluoroethylene.

(III) advantageous effects

The thin wafer cleaning flower basket provided by the technical scheme can realize a more reliable protection effect on the wafer, prevent the wafer from falling out of the limiting groove of the cleaning flower basket due to insufficient matching of the size of the wafer and the cleaning flower basket, and reduce the splitting rate; the smooth liquid flow in all directions of the cleaning flower basket and good draining effect can be ensured, and better cleaning quality is realized; can be disassembled and assembled, has simple structure and is easy to manufacture and use.

Drawings

Fig. 1 is an isometric view of a thin wafer cleaning basket according to an embodiment of the present invention.

Fig. 2 is a front view of the thin wafer cleaning basket of fig. 1.

Fig. 3 is an outside view of the side arm of fig. 1.

Fig. 4 is a schematic view of the limiting teeth and the limiting grooves on the inner sides of the side arms and the inner sides of the top beam in fig. 1.

Reference numerals:

1-a substrate; 2-a side arm; 3-top beam; 4-thin wafer.

Detailed Description

In order to make the objects, contents and advantages of the present invention more apparent, the following detailed description of the embodiments of the present invention will be given with reference to the accompanying drawings and examples.

As shown in fig. 1 and 2, the thin wafer cleaning flower basket provided in this embodiment includes a pair of base plates 1, a pair of sidewalls 2 connected to the pair of base plates 1, and a top beam 3 connected to the pair of base plates 1.

Two trapezoidal grooves for connecting side arms and a trapezoidal groove for connecting a top beam are symmetrically arranged on the inner side of the base plate 1. The trapezoidal grooves connecting the side arms form a fixed included angle of 30-60 degrees with the bottom surface of the base plate 1, such as 30 degrees, 45 degrees and 60 degrees. The trapezoid groove connected with the top beam is arranged at the top center of the inner side of the base plate 1 and is vertical to the bottom surface of the base plate.

When in use, a pair of substrates 1 and a pair of substrates 2 are connected together according to the figure 1 to form a cleaning cavity; then the thin wafers 4 to be cleaned are put into the limit grooves on the inner sides of the side arms one by one; and finally, connecting the top beam 3 with the pair of substrates 1, so that the upper edge of the thin wafer 4 enters the limiting groove of the top beam 3 to carry out the subsequent wet cleaning step.

As shown in fig. 2, the side arms 2 are spaced at the bottom to ensure smooth flow in the up-and-down direction during the cleaning process. After the thin wafer 4 is put in, the thin wafer automatically falls into the limiting grooves of the pair of side arms 2 under the gravity, and the thin wafer 4 is directly supported by the pair of side arms 2 with a certain inclination angle. In the cleaning process, the side arm 2 can simultaneously and stably limit the displacement of the wafer in the left direction, the right direction and the downward direction, the top beam 3 with the limiting teeth and the limiting grooves can stably limit the upward displacement of the thin wafer 4, the thin wafer 4 is more reliably protected, and the thin wafer 4 is prevented from being separated from the limiting grooves due to the fact that the size of the thin wafer cleaning basket is not matched with that of the thin wafer cleaning basket.

As shown in FIG. 2, during the cleaning process, the rectangular opening formed at the bottom of the substrate 1 can ensure smooth liquid flow perpendicular to the rectangular opening, thereby improving the cleaning effect.

As shown in figure 3, in the cleaning process, the two grooves arranged on the outer sides of the side arms can ensure smooth liquid flow in the direction perpendicular to the side arms, and after the cleaning is finished, a good draining effect can be ensured. The ungrooved areas between the grooves may provide support for the thin wafer.

As shown in fig. 4, the bottom of the periodically arranged limiting grooves is a plane to prevent thin wafers from being stuck in the limiting grooves, and the top ends of the limiting teeth are provided with 45 ° chamfers to guide the thin wafers to be placed in the limiting grooves, so that the thin wafers can be conveniently taken and placed.

The thin wafer cleaning flower basket of the described embodiment is machined from polytetrafluoroethylene. The polytetrafluoroethylene is easy to machine, resistant to strong acid, strong alkali and high temperature, and very suitable for wet cleaning of wafers.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (2)

1. A thin wafer cleaning basket of flowers is characterized in that the thin wafer cleaning basket of flowers comprises a pair of base plates, a pair of side arms connected with the base plates, and a top beam connected with the base plates;

the bottom of the base plate is provided with a rectangular opening, and the inner side of the base plate is symmetrically provided with two trapezoidal grooves for connecting the side arms and one trapezoidal groove for connecting the top beam;

the trapezoid grooves of the connecting side arms form a fixed included angle of 30-60 degrees with the bottom surface of the substrate;

the trapezoid groove connected with the top beam is vertical to the bottom surface of the substrate and is positioned in the middle of the top of the inner side of the substrate;

a gap is reserved between the bottoms of the side arms;

the inner side of the side arm is provided with limit teeth and limit grooves which are arranged periodically, and the outer side of the side arm is provided with two grooves;

the bottom of the limiting groove is a plane, and the top end of the limiting tooth is provided with a 45-degree chamfer;

the length of the groove covers all the limiting grooves, and the depth of the groove penetrates through the bottom of each limiting groove;

and the inner side of the top beam is provided with limiting teeth and limiting grooves which correspond to the inner sides of the side arms one to one.

2. The thin wafer cleaning basket according to claim 1, wherein the base plate, the side arms and the top beam are made of polytetrafluoroethylene.

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