CN206966220U - A kind of chip mega sonic wave cleaning machine - Google Patents
A kind of chip mega sonic wave cleaning machine Download PDFInfo
- Publication number
- CN206966220U CN206966220U CN201720681319.4U CN201720681319U CN206966220U CN 206966220 U CN206966220 U CN 206966220U CN 201720681319 U CN201720681319 U CN 201720681319U CN 206966220 U CN206966220 U CN 206966220U
- Authority
- CN
- China
- Prior art keywords
- plate
- fixed
- cleaning machine
- wave cleaning
- sonic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model discloses a kind of chip mega sonic wave cleaning machine,Including mega sonic wave cleaning machine and fixed mount,The fixed mount includes fixed basket,Positioning seat,Location-plate,Position axostylus axostyle,Limiting plate,Demarcation strip,Alignment pin and position-limited rack,The fixed basket is located inside mega sonic wave cleaning machine,It is and identical with the service sink size in mega sonic wave cleaning machine,The both ends of the mega sonic wave cleaning machine are arranged with positioning seat,The both ends of the fixed basket are provided with the location-plate coordinated with positioning seat,It is fixedly connected between the location-plate and positioning seat by positioning axostylus axostyle,The centre of the fixed basket is fixed with limiting plate,The both sides of the demarcation strip are placed on limiting plate,Pin-and-hole is equipped with the demarcation strip and limiting plate,The limiting plate is fixedly connected by alignment pin with demarcation strip,This chip mega sonic wave cleaning machine,Position-limited rack is fixed with demarcation strip and fixed basket,Separate chip so as to convenient,Prevent wafer stacking together,Increase the service life of chip.
Description
Technical field
Wafer cleaning techniques field is the utility model is related to, specially a kind of chip mega sonic wave cleaning machine.
Background technology
Mega sonic wave cleaning not only saves the advantages of ultrasonic wave cleaning, and overcomes its deficiency.Mega sonic wave cleaning
Mechanism be by high frequency (850kHz) shake effect and combine chemical chemical reaction silicon chip is cleaned.Cleaning
When, it is the high energy sound wave that 1 μm of frequency is 0.8 megahertz to send wavelength by transducer.Solution molecule is made under the promotion of this sound wave
Accelerate, maximum instantaneous velocity can reach 30cm/s.Therefore, bubble as not becoming ultrasonic wave cleaning, and can only be with
The fluid wave bump wafer surface of high speed, the fine particles of the pollutant of silicon chip surface attachment is forced removing and go forward side by side
Enter into cleaning fluid.
The existing mega sonic wave cleaning chip that is used for all is that eyeglass is placed in mega sonic wave service sink, because chip is all heap
It is folded together so as to being easily damaged when causing cleaning.
Utility model content
The purpose of this utility model is to provide a kind of chip mega sonic wave cleaning machine, to solve to propose in above-mentioned background technology
The problem of.
To achieve the above object, the utility model provides following technical scheme：A kind of chip mega sonic wave cleaning machine, including million
Sound wave cleaning machine and fixed mount, the fixed mount include fixed basket, positioning seat, location-plate, positioning axostylus axostyle, limiting plate, demarcation strip,
Alignment pin and position-limited rack, the fixed basket are located inside mega sonic wave cleaning machine, and with the service sink size in mega sonic wave cleaning machine
Identical, the both ends of the mega sonic wave cleaning machine are arranged with positioning seat, and the both ends of the fixed basket are provided with what is coordinated with positioning seat
Location-plate, it is fixedly connected between the location-plate and positioning seat by positioning axostylus axostyle, fixed limited location among the fixed basket
Plate, the both sides of the demarcation strip are placed on limiting plate, and pin-and-hole is equipped with the demarcation strip and limiting plate, and the limiting plate leads to
Alignment pin is crossed to be fixedly connected with demarcation strip, the alignment pin and pin-and-hole are tapered, and big footpath is upward, the fixed basket bottom and
Demarcation strip upper end is placed with position-limited rack.
Preferably, the positioning seat includes connecting plate and positioning pipe, solid by welding between the connecting plate and positioning pipe
Fixed connection, the both ends that the connecting plate is located at positioning pipe are equipped with through hole, and the connecting plate passes through screw with mega sonic wave cleaning machine
It is fixedly connected.
Preferably, the limiting plate includes supporting plate and fixed plate, and one end of the supporting plate is vertically fixed on fixed plate
One end, the fixed plate is fixedly connected by bolt with fixed basket.
Preferably, the position-limited rack is made up of multiple placement plates, and the placement plate is provided with multiple fixing grooves.
Preferably, multiple through holes are equipped with the fixed basket and demarcation strip.
Compared with prior art, the beneficial effects of the utility model are：
1st, the utility model is placed on fixed basket in service sink first, then the through hole pair on location-plate and positioning seat
Together, then positioning axostylus axostyle is embedded in the through hole on location-plate and positioning seat, so as to which fixed basket be fixed, then passed through
Chip is individually positioned in the fixing groove of demarcation strip and fixed basket bottom, then position-limited rack is fixed by alignment pin and how to be fixed
On plate, fixed basket and demarcation strip are fixed by alignment pin and positioning axostylus axostyle, so as to convenient fixed and dismounting.
2nd, the utility model is fixed with position-limited rack on demarcation strip and fixed basket, separates chip so as to convenient, prevents chip
It is stacked, increases the service life of chip.
Brief description of the drawings
Fig. 1 is the utility model overall structure diagram；
Fig. 2 is the utility model fixed rack structure schematic diagram；
Fig. 3 is that the utility model places plate structure schematic diagram.
In figure：1- mega sonic wave cleaning machines；2- fixed mounts；3- fixes basket；4- positioning seats；5- location-plates；6- positions axostylus axostyle；
7- limiting plates；8- demarcation strips；9- alignment pins；10- position-limited racks；11- connecting plates；12- positioning pipes；13- supporting plates；14- fixed plates；
15- places plate.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out
Clearly and completely describing, it is clear that described embodiment is only the utility model part of the embodiment, rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not under the premise of creative work is made
The every other embodiment obtained, belong to the scope of the utility model protection.
Fig. 1-3 are referred to, the utility model provides a kind of technical scheme：A kind of chip mega sonic wave cleaning machine, including million sound
Ripple cleaning machine 1 and fixed mount 2, the fixed mount 2 include fixed basket 3, positioning seat 4, location-plate 5, positioning axostylus axostyle 6, limiting plate 7,
Demarcation strip 8, alignment pin 9 and position-limited rack 10, the fixed basket 3 are located inside mega sonic wave cleaning machine 1, and with mega sonic wave cleaning machine 1
Interior service sink size is identical, and the both ends of the mega sonic wave cleaning machine 1 are arranged with positioning seat 4, and the both ends of the fixed basket 3 are set
There is the location-plate 5 coordinated with positioning seat 4, be fixedly connected between the location-plate 5 and positioning seat 4 by positioning axostylus axostyle 6, it is described
The centre of fixed basket 3 is fixed with limiting plate 7, and the both sides of the demarcation strip 8 are placed on limiting plate 7, the demarcation strip 8 and spacing
Pin-and-hole is equipped with plate 7, the limiting plate 7 is fixedly connected by alignment pin 9 with demarcation strip 8, and the alignment pin 9 and pin-and-hole are equal
It is tapered, and big footpath is upward, the fixed bottom of basket 3 and the upper end of demarcation strip 8 are placed with position-limited rack 10.
The positioning seat 4 includes connecting plate 11 and positioning pipe 12, passes through welding between the connecting plate 11 and positioning pipe 12
It is fixedly connected, the both ends that the connecting plate 11 is located at positioning pipe 12 are equipped with through hole, the connecting plate 11 and mega sonic wave cleaning machine 1
It is fixedly connected by screw, for fixing, the limiting plate 7 includes supporting plate 13 and fixed plate 14, and the one of the supporting plate 13
End is vertically fixed on one end of fixed plate 14, and the fixed plate 14 is fixedly connected by bolt with fixed basket 3, for supporting, institute
State position-limited rack 10 to be made up of multiple placement plates 15, the placement plate 15 is provided with multiple fixing grooves, described solid for placing chip
Determine to be equipped with multiple through holes on basket 3 and demarcation strip 8, for circulating.
Operation principle：When in use, fixed basket 3 is placed in service sink first, then location-plate 5 and positioning seat 4
On through hole alignment, then positioning axostylus axostyle 6 is embedded in the through hole on location-plate 5 and positioning seat 4, so as to enter to fixed basket 3
Row is fixed, and then by the way that chip is individually positioned in the fixing groove of demarcation strip 8 and the fixed bottom of basket 3, then passes through alignment pin 9
Limit demarcation strip 8 is fixed on limiting plate 7, fixed basket 3 and demarcation strip 8 are fixed by alignment pin 9 and positioning axostylus axostyle 6,
So as to convenient fixed and dismounting, and position-limited rack 10 is fixed with demarcation strip 8 and fixed basket 3, separates chip so as to convenient, prevent
Only wafer stacking together, increases the service life of chip.
While there has been shown and described that embodiment of the present utility model, for the ordinary skill in the art,
It is appreciated that these embodiments can be carried out with a variety of changes in the case where not departing from principle of the present utility model and spirit, repaiied
Change, replace and modification, the scope of the utility model are defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of chip mega sonic wave cleaning machine, including mega sonic wave cleaning machine (1) and fixed mount (2), it is characterised in that：The fixation
Frame (2) includes fixed basket (3), positioning seat (4), location-plate (5), positioning axostylus axostyle (6), limiting plate (7), demarcation strip (8), alignment pin
(9) with position-limited rack (10), it is internal that the fixed basket (3) is located at mega sonic wave cleaning machine (1), and with mega sonic wave cleaning machine (1)
Service sink size is identical, and the both ends of the mega sonic wave cleaning machine (1) are arranged with positioning seat (4), the both ends of the fixed basket (3)
It is solid by positioning axostylus axostyle (6) between the location-plate (5) and positioning seat (4) provided with the location-plate (5) coordinated with positioning seat (4)
Fixed connection, the centre of the fixed basket (3) are fixed with limiting plate (7), and the both sides of the demarcation strip (8) are placed on limiting plate (7)
On, pin-and-hole is equipped with the demarcation strip (8) and limiting plate (7), the limiting plate (7) passes through alignment pin (9) and demarcation strip (8)
It is fixedly connected, the alignment pin (9) and pin-and-hole are tapered, and big footpath is upward, fixed basket (3) bottom and demarcation strip (8)
Upper end is placed with position-limited rack (10).
A kind of 2. chip mega sonic wave cleaning machine according to claim 1, it is characterised in that：The positioning seat (4) includes connecting
Fishplate bar (11) and positioning pipe (12), it is fixedly connected by welding between the connecting plate (11) and positioning pipe (12), the connection
The both ends that plate (11) is located at positioning pipe (12) are equipped with through hole, and the connecting plate (11) passes through screw with mega sonic wave cleaning machine (1)
It is fixedly connected.
A kind of 3. chip mega sonic wave cleaning machine according to claim 1, it is characterised in that：The limiting plate (7) includes branch
Fagging (13) and fixed plate (14), one end of the supporting plate (13) are vertically fixed on one end of fixed plate (14), the fixation
Plate (14) is fixedly connected by bolt with fixed basket (3).
A kind of 4. chip mega sonic wave cleaning machine according to claim 1, it is characterised in that：The position-limited rack (10) is by multiple
Place plate (15) to form, the placement plate (15) is provided with multiple fixing grooves.
A kind of 5. chip mega sonic wave cleaning machine according to claim 1, it is characterised in that：The fixed basket (3) and separation
Plate is equipped with multiple through holes on (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720681319.4U CN206966220U (en) | 2017-06-13 | 2017-06-13 | A kind of chip mega sonic wave cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720681319.4U CN206966220U (en) | 2017-06-13 | 2017-06-13 | A kind of chip mega sonic wave cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206966220U true CN206966220U (en) | 2018-02-06 |
Family
ID=61407960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720681319.4U Expired - Fee Related CN206966220U (en) | 2017-06-13 | 2017-06-13 | A kind of chip mega sonic wave cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206966220U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111112221A (en) * | 2019-12-26 | 2020-05-08 | 西安奕斯伟硅片技术有限公司 | Workpiece storage and transportation device |
-
2017
- 2017-06-13 CN CN201720681319.4U patent/CN206966220U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111112221A (en) * | 2019-12-26 | 2020-05-08 | 西安奕斯伟硅片技术有限公司 | Workpiece storage and transportation device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206966220U (en) | A kind of chip mega sonic wave cleaning machine | |
| CN206661873U (en) | A kind of information communication rack dust arrester | |
| CN108515797B (en) | A kind of four process digital-controlled carving machines | |
| CN206720799U (en) | A kind of chemical machinery oil receiving equipment | |
| CN206804086U (en) | A kind of electrode of electromagnetic flowmeter polished surface cleaning device | |
| CN215032069U (en) | Clinical laboratory uses tube cleaning device | |
| CN202030075U (en) | Cleaning device of circulating water for jelly filling machine | |
| CN207137742U (en) | A kind of oil sample automatic dilution device with heating function | |
| CN202601600U (en) | Wafer holder fixing frame for automatic adhesive removing machines for solar silicon wafers | |
| CN210411660U (en) | Water valve cleaning device | |
| CN204036598U (en) | A kind of floor minor face Wax applyor | |
| CN206356944U (en) | A kind of circular shaft drilling jig | |
| CN215822411U (en) | Bubble removing device for pickling tank | |
| CN203140349U (en) | Silicon wafer pre-cleaning auxiliary device | |
| CN207068806U (en) | Brushing machine chip brushing device | |
| CN103008282A (en) | Device for cleaning megasonic transducer | |
| CN218395052U (en) | Clamp and cleaning device | |
| CN219112407U (en) | Device for cleaning medical capillary | |
| CN206474479U (en) | A kind of dirty cleaning bay | |
| CN201969570U (en) | Labware fixing device | |
| CN221908972U (en) | Ceramic strip cleaning clamp | |
| CN213051445U (en) | Fine sand extraction element | |
| CN219129576U (en) | Plasma bag clamp for plasma recovery device | |
| CN215696397U (en) | Integrated circuit detection equipment with hierarchical clearance mechanism | |
| CN208866362U (en) | A kind of device improving conticaster crystallizer vibrating stability |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180206 Termination date: 20190613 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |