CN203140349U - Silicon wafer pre-cleaning auxiliary device - Google Patents
Silicon wafer pre-cleaning auxiliary device Download PDFInfo
- Publication number
- CN203140349U CN203140349U CN 201320144169 CN201320144169U CN203140349U CN 203140349 U CN203140349 U CN 203140349U CN 201320144169 CN201320144169 CN 201320144169 CN 201320144169 U CN201320144169 U CN 201320144169U CN 203140349 U CN203140349 U CN 203140349U
- Authority
- CN
- China
- Prior art keywords
- square plate
- silicon chip
- prerinse
- apopore
- servicing unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a silicon wafer pre-cleaning auxiliary device which comprises a square plate (1), a water inlet (3) is formed in the front end face of the square plate (1) in a longitudinal mode, a water outlet (2) is formed in the upper end face of the square plate (1) in a vertical mode, and the water outlet (2) is communicated with the water inlet (3). The silicon wafer pre-cleaning auxiliary device is simple and reasonable in structure, low in cost, high in cleaning efficiency, more complete and thorough in cleaning and strong in practicability, greatly reduces water consumption, saves energy, and reduces cost.
Description
Technical field
The utility model relates to a kind of servicing unit, specifically is a kind of silicon chip prerinse servicing unit, belongs to slicer silico briquette section field.
Background technology
Slicer is when carrying out viscose glue and prerinse to silicon chip, all silicon chip is placed on the servicing unit, the slicer servicing unit that present stage uses is a single plank, adopt both sides spray mode that silicon chip is carried out prerinse during silicon chip prerinse, because there is the blind area during to silicon chip prerinse in angle problem prerinse machine, cause the silicon chip middle part to clean up, cause a large amount of contaminations in middle part residual, when burst, produce a large amount of fragments, can and clean link to inserted sheet afterwards and impact.
The utility model content
Problem to be solved in the utility model provides a kind of silicon chip prerinse servicing unit, and inadequate problem is cleaned at the silicon chip middle part when being used for solving device prerinse in the past.
The technical scheme that the utility model provides is: silicon chip prerinse servicing unit, comprise square plate, and the square plate front end face is vertically arranged with the inlet opening, and the upper surface vertically is provided with apopore, and apopore and inlet opening communicate with each other.General general-purpose interface specification is adopted in the inlet opening, conveniently is connected with the outside appurtenances joint; During use, silicon chip is bonded on glass, again glass is bonded in square plate apopore place end face, and glass is positioned at two ends, the apopore left and right sides, at last whole square plate is put in prerinse place, during placement with square plate last, silicon chip under mode place, the place inserts water pipe with the inlet opening, current are flowed out at the apopore place, current spread downwards and all around from the silicon chip centre position of well cutting silicon chip were carried out comprehensive cleaning this moment, and the silicon chip middle part is cleaned fully, thoroughly, but and silicon chip middle part and all prerinse around other, not only prerinse efficient height, and save the water source.
It also comprises the steel rod through hole that is arranged on the left and right two ends of square plate, and the steel rod through hole vertically runs through square plate from the square plate front end face, and described steel rod through hole is positioned at apopore or the outside, inlet opening.Square plate passes the steel rod through hole by the steel rod that is fixed on the support when prerinse, square plate is supported on the support, thereby guarantees that square plate can not be shifted, tilt influence the prerinse effect, guarantees prewashedly efficiently to finish the efficient raising.
The diameter of described steel rod through hole is 10-14mm.Because of the square plate own wt with and on silicon chip weight, steel rod need satisfy the requirement that certain diameter can satisfy its bearing strength, the steel rod diameter can satisfy requirement of strength when 10-14mm generally speaking, so the diameter of corresponding steel rod through hole is 10-14mm.
Described square plate is aluminium sheet.Square plate can adopt, and the stable material of chemical property corrosion-resistant, acid and alkali-resistance is made, as PP material, stainless steel, steel alloy and some simple metal materials, consider the generality of cost, weight and use, adopt aluminium sheet can not only well save cost, and it uses general, in light weight, be convenient to change.
The width of described square plate is 156mm, and length is at least 480mm, and thickness is 30-40mm.The width of square plate is that 156mm is for the size with present silico briquette is consistent, and guarantees processing when saving cost; Length is the slicer of corresponding different model then, all should can normally use greater than 480mm according to slicer model square plate length; The thickness of square plate is crossed yielding, the fracture of low then square plate, also can influence the perforate quantity of inlet opening, and the too high then cost of square plate thickness improves, and weight is also heavier simultaneously, makes troubles to replacing, so square plate thickness is 30-40mm.
Described inlet opening is provided with four altogether.Take full advantage of water source, prerinse fully and the purpose of raising the efficiency for reaching, the inlet opening is provided with four, not only can maximum saving water source, and the cleaning efficiency height in the unit interval cleans fully simultaneously, and is practical.
The length of described square plate is 520mm, and four inlet openings are followed successively by 70mm, 140mm, 310mm and 380mm apart from the size of square plate left side.Square plate of the present utility model adopts the length of 520mm, fully improving under the prerequisite of cleaning efficiency and cleaning performance, according to square plate length, the size of four inlet openings is limited the position, namely four inlet openings are followed successively by 70mm, 140mm, 310mm and 380mm apart from the size of square plate left side, thereby improve cleaning efficiency and effect.
Described apopore is centered close on the horizontal center line of square plate.Apopore is positioned at the middle part just can evenly provide the water source to the square plate both sides, cleans sufficient purpose to reach.
Described apopore diameter is 10-15mm.For reaching the purpose of cleaning and raising the efficiency at a high speed, the apopore diameter is generally 10-15mm, when the apopore diameter is the raising water outlet efficient of 10-15mm maximizing, cleans faster more thorough.
Advantage of the present utility model is:
1. the utility model is simple and reasonable for structure, and cost is low.
2. the utility model prerinse efficient height can carry out prerinse to the silicon chip middle part, cleans complete more, thorough, practical.
3. the water consumption during the utility model prerinse greatly reduces, and has saved the energy, has reduced cost.
Description of drawings
Fig. 1 is vertical view of the present utility model.
Fig. 2 is side view of the present utility model.
Label among the figure is respectively: 1, square plate; 2, apopore; 3, inlet opening; 4, steel rod through hole.
The specific embodiment
Embodiment 1
Referring to Fig. 1, Fig. 2, present embodiment comprises square plate 1, and square plate 1 front end face is vertically arranged with inlet opening 3, and the upper surface vertically is provided with apopore 2, and apopore 2 communicates with each other with inlet opening 3.
When implementing present embodiment, silicon chip is bonded on glass, again glass is bonded in the apopore 2 place end faces of square plate 1, and glass is positioned at two ends, apopore 2 left and right sides, at last whole square plate 1 fixedly is put in prerinse place, during placement with square plate 1 last, silicon chip under mode place, 3 places, inlet opening are inserted water pipe, current are flowed out at apopore 2 places, current spread downwards and all around from the silicon chip centre position of well cutting silicon chip were carried out comprehensive cleaning this moment, and the silicon chip middle part is cleaned fully, thoroughly, but and silicon chip middle part and all prerinse around other, not only prerinse efficient height, and save the water source.
Embodiment 2
Present embodiment has increased steel rod through hole 4 on the basis of embodiment 1, its concrete structure is: it also comprises the steel rod through hole 4 that is arranged on square plate 1 left and right two ends, steel rod through hole 4 vertically runs through square plate 1 from square plate 1 front end face, and described steel rod through hole 4 is positioned at apopore 2 or 3 outsides, inlet opening.
Than embodiment 1, present embodiment has increased the structure of steel rod through hole 4, and constantly to pass steel rod through hole 4 by the steel rod on the support fixing with square plate 1 being put in prerinse place for square plate 1, avoids its displacement, simultaneously also conveniently replaced square plate 1.
As preferably, the diameter of described steel rod through hole 4 is 10-14mm.Because of square plate 1 own wt with and on silicon chip weight, steel rod need satisfy the requirement that certain diameter can satisfy its bearing strength, the steel rod diameter can satisfy requirement of strength when 10-14mm generally speaking, so the diameter of corresponding steel rod through hole 4 is 10-14mm.
Embodiment 3
Present embodiment is selected the square plate 1 more excellent than embodiment 1 or embodiment 2 for use, and its concrete structure is: described square plate 1 is aluminium sheet.
Than embodiment 1 or embodiment 2, present embodiment adopts aluminium sheet not only can reduce cost square plate 1, and aluminium sheet is used general, corrosion-resistant, acid and alkali-resistance, chemical property are stable, and its weight is lighter, not only satisfies the requirement of strength of square plate, and changes laborsaving, convenient.
Embodiment 4
Embodiment 4 is optimum embodiment of the present utility model.
Present embodiment has been optimized following structure on the basis of embodiment 3: the width of described square plate 1 is 156mm, and length is at least 480mm, and thickness is 30-40mm; Described inlet opening 3 is provided with four altogether; Described apopore 2 is centered close on the horizontal center line of square plate 1; Described apopore 2 diameters are 10-15mm.
Than embodiment 3, the width of present embodiment square plate 1 is that 156mm is for the size with present silico briquette is consistent, and guarantees processing when saving cost; Length is the slicer of corresponding different model then, all should can normally use greater than 480mm according to slicer model square plate 1 length; The thickness of square plate 1 is crossed yielding, the fracture of low then square plate, also can influence the perforate quantity of inlet opening, and the too high then cost of square plate 1 thickness improves, and weight is also heavier simultaneously, makes troubles to replacing, so square plate thickness is 30-40mm; It is that to take full advantage of the water source, clean fully and raise the efficiency be purpose that inlet opening 3 arranges four, improves the cleaning efficiency in the unit interval when the water source is saved in maximization, cleans fully, practical; Apopore 2 is positioned on the horizontal center line of square plate 1 just can evenly provide the water source to square plate 1 both sides, cleans sufficient purpose to reach; Apopore 2 diameters are that 10-15mm is to be purpose at a high speed to clean and to raise the efficiency, and the raising water outlet efficient of maximizing is cleaned faster more thorough.
As preferably, the length of square plate 1 is 520mm, and four inlet openings 3 are followed successively by 70mm, 140mm, 310mm and 380mm apart from the size of square plate left side.Square plate 1 of the present utility model adopts the length of 520mm, fully improving under the prerequisite of cleaning efficiency and cleaning performance, according to square plate 1 length, the size of four inlet openings 3 is limited the position, namely four inlet openings 3 are followed successively by 70mm, 140mm, 310mm and 380mm apart from the size of square plate 1 left side, thereby improve cleaning efficiency and effect.
Compare with traditional prerinse mode to silicon chip both sides spray, this top spray prerinse mode that the utility model adopts is not cleaned the blind area, clean more thorough, simultaneously, traditional the prerinse mode of silicon chip both sides spray is needed the working time of 1000 kilograms water, 20-30 minute when the silico briquette to a square plate carries out prerinse, and only need the working time of 400 kilograms water, 10-15 minute when adopting the utility model that the silico briquette of identical square plate is cleaned; Water consumption has reduced 60%, and the working time has shortened half, so the utility model has also reduced energy consumption when strengthening cleaning performance, has improved efficient.
Scope of patent protection of the present utility model is as the criterion with claims, and the equivalent structure that every utilization specification of the present utility model and accompanying drawing content are done changes, and in like manner all should be included in the protection domain of the present utility model.
Claims (9)
1. silicon chip prerinse servicing unit comprises square plate (1), it is characterized in that: square plate (1) front end face is vertically arranged with inlet opening (3), and the upper surface vertically is provided with apopore (2), and apopore (2) communicates with each other with inlet opening (3).
2. silicon chip prerinse servicing unit according to claim 1, it is characterized in that: it also comprises the steel rod through hole (4) that is arranged on the left and right two ends of square plate (1), steel rod through hole (4) vertically runs through square plate (1) from square plate (1) front end face, and described steel rod through hole (4) is positioned at apopore (2) or inlet opening (3) outside.
3. silicon chip prerinse servicing unit according to claim 2, it is characterized in that: the diameter of described steel rod through hole (4) is 10-14mm.
4. silicon chip prerinse servicing unit according to claim 1, it is characterized in that: described square plate (1) is aluminium sheet.
5. silicon chip prerinse servicing unit according to claim 1, it is characterized in that: the width of described square plate (1) is 156mm, and length is at least 480mm, thickness is 30-40mm.
6. silicon chip prerinse servicing unit according to claim 1, it is characterized in that: described inlet opening (3) are provided with four altogether.
7. silicon chip prerinse servicing unit according to claim 6, it is characterized in that: the length of described square plate (1) is 520mm, and four inlet openings (3) are followed successively by 70mm, 140mm, 310mm and 380mm apart from the size of square plate (1) left side.
8. silicon chip prerinse servicing unit according to claim 1, it is characterized in that: described apopore (2) is centered close on the horizontal center line of square plate (1).
9. according to claim 1 or 8 described silicon chip prerinse servicing units, it is characterized in that: described apopore (2) diameter is 10-15mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320144169 CN203140349U (en) | 2013-03-27 | 2013-03-27 | Silicon wafer pre-cleaning auxiliary device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320144169 CN203140349U (en) | 2013-03-27 | 2013-03-27 | Silicon wafer pre-cleaning auxiliary device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203140349U true CN203140349U (en) | 2013-08-21 |
Family
ID=48967905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320144169 Expired - Fee Related CN203140349U (en) | 2013-03-27 | 2013-03-27 | Silicon wafer pre-cleaning auxiliary device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203140349U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104070028A (en) * | 2013-03-27 | 2014-10-01 | 天威新能源控股有限公司 | Pre-cleaning device for top spraying silicon wafers |
-
2013
- 2013-03-27 CN CN 201320144169 patent/CN203140349U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104070028A (en) * | 2013-03-27 | 2014-10-01 | 天威新能源控股有限公司 | Pre-cleaning device for top spraying silicon wafers |
| CN104070028B (en) * | 2013-03-27 | 2016-03-30 | 天威新能源控股有限公司 | Top spray silicon chip precleaning unit |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130821 Termination date: 20180327 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |