CN115775754A - Bonding and separating jig and separating method thereof - Google Patents
Bonding and separating jig and separating method thereof Download PDFInfo
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- CN115775754A CN115775754A CN202211476180.1A CN202211476180A CN115775754A CN 115775754 A CN115775754 A CN 115775754A CN 202211476180 A CN202211476180 A CN 202211476180A CN 115775754 A CN115775754 A CN 115775754A
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- 238000000034 method Methods 0.000 title abstract description 24
- 238000000926 separation method Methods 0.000 claims abstract description 34
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 238000004140 cleaning Methods 0.000 claims abstract description 11
- 238000005406 washing Methods 0.000 claims abstract description 11
- 230000004913 activation Effects 0.000 claims abstract description 6
- 239000011159 matrix material Substances 0.000 claims description 7
- 238000004381 surface treatment Methods 0.000 claims description 6
- 230000005484 gravity Effects 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 24
- 238000006748 scratching Methods 0.000 abstract description 6
- 230000002393 scratching effect Effects 0.000 abstract description 6
- 239000011521 glass Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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Abstract
The invention discloses a bonding and separating jig and a separating method thereof, belonging to the technical field of bonding jigs and being used for separating a first bonding substrate and a second bonding substrate which are mutually attached after activation treatment. The separation method comprises the following steps of S1, preparing glassware, and sequentially placing a lower jig and an upper jig; s2, placing the large circular part into the bearing section, and suspending the small circular part in the accommodating section; and S3, washing the joint of the small round part and the second bonding base body by using water, and sequentially taking out the upper jig and the lower jig for cleaning after the second bonding base body slides into the bearing groove. The separation process does not need tweezers to participate, and the cleaning can be carried out without transferring jigs after separation, so that the problems of dirt and scratching can be effectively avoided.
Description
Technical Field
The invention relates to the technical field of bonding jigs, in particular to a bonding and separating jig and a separating method thereof.
Background
The wafer bonding technology is a new technological method, can realize organic combination between two parts of wafers (usually made of silicon or glass materials), achieves certain bonding strength, and plays a foundation role in aspects of electrical connection of a micro-motor system, packaging combination of microelectronic devices, thin film transfer technology of photoelectric communication software and the like. The bonding technology can be divided into a direct bonding method and an intermediate layer bonding method according to the existence of the intermediate layer, and can also be divided into a hydrophilic bonding method and a hydrophobic bonding method according to the characteristics of surface treatment and subsequent bonding reaction. The direct bonding method has advantages of simple process, wide temperature adaptability, high bonding strength and the like, and becomes a popular research field.
A wafer direct bonding technology is introduced into the manufacturing process of an AVGG (Anti-vignetting Glass-Glass Anti-halation Glass assembly) product, and a hydrophilic bonding method is adopted to assemble the AVG (Anti-vignetting Glass) and the two assemblies of the structure small piece (refer to fig. 9 and 10), and the steps of (1) cleaning, (2) surface treatment, (3) pre-bonding and (4) high-temperature annealing are required, so that the ' borosilicate Glass hydrophilic bonding method ' disclosed in the patent number ' 202210617935.9 can be referred to. In the process of surface treatment in the second bonding step, AVG and a structure chip are required to be attached to each other, a reaction reagent is added into the interface to improve the activation energy of the bonding surface, then water is added for separation after constant temperature reaction for a certain time, the AVG and the structure chip which are attached together are required to be placed in a container in the separation process, the water is added into the interface to realize the separation, however, due to the hydrophilic property of the glass surface after treatment, the two components are mutually adsorbed, in the slow separation process under the action of flowing water washing, the AVG part is required to be lifted by tweezers, the separation is assisted by the self weight and the water flow action of the structure chip, and after the separation, the AVG and the structure chip are transferred to self-cleaning jigs to be respectively cleaned to remove the residual reagent on the surface. However, the above process has many disadvantages: 1. the tweezers are easy to cause dirt and scratches when clamping and contacting the AVG part, and when a plurality of groups of components need to be separated, the efficiency is too low by adopting a mode that the tweezers are lifted one by one to wash and separate; 2. the separation process needs a certain time of washing, and the AVG and the small structure pieces falling into the vessel in the washing process are easy to collide with each other to cause scratches; 3. after separation, the AVG and the small structure pieces need to be transferred and cleaned respectively, and the transfer process can also increase pollution or scratching to the product.
Disclosure of Invention
The invention aims to solve the technical problems and provides a bonding and separating jig and a separating method thereof, wherein tweezers are not needed in the separating process, the problems of lifting dirt and scratching are avoided, the cleaning requirements after the first bonding base body and the second bonding base body are separated can be effectively met, the jig is not needed to be transferred for cleaning, the scratching problem in the transferring process is avoided, the second bonding base body falling into the bearing groove cannot collide with the first bonding base body, and the problems of collision and scratching are avoided.
In order to achieve the purpose, the invention provides the following scheme: the invention discloses a bonding and separating jig which is used for separating a first bonding substrate and a second bonding substrate which are mutually attached after activation treatment, wherein the first bonding substrate is coaxially formed by a small circular part attached to the second bonding substrate and a large circular part with the diameter larger than the small circular part, the second bonding substrate is a circular sheet with the diameter same as that of the small circular part, and the second bonding substrate comprises an upper jig and a lower jig which are stacked up and down; the top surface and the bottom surface of the upper jig are respectively provided with a bearing groove and a water drainage opening allowing the second bonding matrix to pass through, the bearing groove and the water drainage opening are communicated with each other, and the bearing groove comprises a bearing section for the axis of the large circular part to be placed in the horizontal direction and an accommodating section for the small circular part to be suspended; the top surface of the lower jig is provided with a receiving groove used for receiving the second bonding base body falling from the containing section, and the lower jig is provided with a drainage structure for draining water in the receiving groove.
Preferably, the distance between the notch of the receiving groove and the groove bottom of the accommodating section is smaller than the diameter of the second bonding base body, and the distance between the groove bottom of the receiving groove and the groove bottom of the accommodating section is larger than the diameter of the second bonding base body.
Preferably, the drainage structure comprises a drainage groove and a drainage outlet, the drainage groove is located on one side of the receiving groove and communicated with the receiving groove, the drainage outlet is located on the bottom surface of the lower jig, and the drainage groove and the receiving groove are both communicated with the drainage outlet.
Preferably, the drainage structure further comprises a drainage groove located on the other side of the receiving groove and communicated with the receiving groove, and the drainage groove is communicated with the drainage port.
Preferably, go up the bearing groove that is equipped with the mutual intercommunication of a plurality of on the tool, a plurality of the bearing groove is arranged and is faced the same along the axis, down the tool top surface be equipped with the same groove, a plurality of are accepted to hold that support groove quantity is the same the groove is arranged and is faced the same along the axis interval, and is adjacent accept the water drainage tank between the groove and the groove intercommunication that sluices.
Preferably, the top surface of lower tool is equipped with the constant head tank.
Preferably, the lifting handle is detachably connected with both the upper jig and the lower jig.
Preferably, the handle includes connecting montant and the connecting cross pole of mutually perpendicular connection, the connecting montant is kept away from the one end of connecting the cross pole is equipped with the screw thread head, go up be equipped with on the tool with screw thread head complex goes up the screw hole, be equipped with on the tool down with screw thread head complex screw hole down.
Also discloses a separation method adopting the bonding separation jig, which comprises the following steps:
s1, preparing a glassware, placing the lower jig in the glassware, and stacking the upper jig on the lower jig;
s2, placing the large circular parts of the first bonding base body and the second bonding base body which are mutually attached after surface treatment into the bearing section of the bearing groove of the upper jig, and suspending the small circular parts in the containing section;
s3, washing the small round part and the joint of the second bonding base body slowly by water flow from the upper part, sequentially taking out the upper jig and the lower jig after the second bonding base body gradually slides into the receiving groove of the lower jig under the action of gravity, and respectively cleaning the first bonding base body in the upper jig and the second bonding base body in the lower jig.
Preferably, in step S3, the screw head is installed in the upper threaded hole, the upper jig is lifted out of the glassware by lifting up the connecting cross rod, then the screw head is removed, the screw head is screwed into the lower threaded hole, the connecting cross rod is lifted up, the lower jig is lifted out of the glassware, and then the screw head is removed.
Compared with the prior art, the invention has the following technical effects:
1. in the pre-bonding jig, the small circular part of the first bonding substrate is suspended, the second bonding substrate naturally falls off under the washing of water flow, tweezers are not used in the whole separation process to contact products, impurities are not additionally introduced, pollution and scratching of the products are avoided, the upper jig and the lower jig are stacked up and down, the upper jig and the lower jig can be detached after separation to directly and independently clean the two parts, the first bonding substrate and the second bonding substrate do not need to be transferred to the jig, and pollution caused by contact of the products in the process of transferring the jig can be avoided.
2. In the pre-bonding jig, the distance between the notch of the bearing groove and the groove bottom is smaller than the diameter of the second bonding base body, and the second bonding base body enters the bearing groove when being about to separate from the small round part, so that the second bonding base body is prevented from side turning when falling; meanwhile, the distance between the bottom of the bearing groove and the bottom of the accommodating section is larger than the diameter of the second bonding base body, the vertical direction fall satisfies the product height, the first bonding base body and the second bonding base body are not contacted with each other after separation, and collision and scratch cannot be caused under the water flow washing.
3. In the pre-bonding jig, the upper jig and the lower jig are designed to be provided with the multiple grooves, a single separation jig can realize the separation of a plurality of first bonding matrixes and second bonding matrixes at one time, if a large container is adopted, a plurality of separation jigs can be placed at one time and can be adjusted according to the number of products, the number of products separated at the same time is increased by more than several times, and compared with the mode that the products are put out one by using tweezers, the pre-bonding jig has the advantage that the operation efficiency is obviously improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
Fig. 1 is a three-dimensional structure diagram of a bonding and separating jig;
FIG. 2 is a three-dimensional structure view of the upper jig;
FIG. 3 is a three-dimensional structure of the lower fixture;
FIG. 4 is a three-dimensional structure diagram of the upper jig after the second bonding substrate falls;
FIG. 5 is a perspective view of a lower fixture with a second bonding substrate;
FIG. 6 is a perspective view of the handle;
FIG. 7 is a perspective view of the lower fixture with the upper handle installed;
fig. 8 is a cross-sectional view of a bonding separation jig;
FIG. 9 is a view showing the first bonding substrate and the second bonding substrate after surface activation and bonding;
fig. 10 is a structural view after the first bonding base and the second bonding base are separated.
Description of reference numerals: 1. mounting a jig; 2. a lower jig; 3. a handle; 4. a first bonding base; 5. a second bonding base; 101. a water discharge opening; 102. a support section; 103. an accommodating section; 104. an upper threaded hole; 201. a receiving groove; 202. a water discharge tank; 203. a water drainage tank; 204. a water outlet; 205. positioning a groove; 206. a lower threaded hole; 301. and (4) a thread head.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
The embodiment discloses a bonding and separating jig, which is used for separating a first bonding base body 4 and a second bonding base body 5 which are mutually attached after activation treatment, wherein the first bonding base body 4 is coaxially formed by a small round part and a large round part, the diameter of the large round part is larger than that of the small round part, the small round part is attached to the second bonding base body 5, and the second bonding base body 5 is a circular sheet with the same diameter as that of the small round part. As shown in fig. 1 to 10, the bonding and separating jig includes an upper jig 1 and a lower jig 2, and the upper jig 1 and the lower jig 2 can be stacked up and down. The top surface and the bottom surface of the upper jig 1 are respectively provided with a support groove and a drain opening 101, the support groove and the drain opening 101 are communicated with each other, and the size of the drain opening 101 allows the second bonding substrate 5 washed down by water flow to fall and pass through. The support groove comprises a support section 102 and an accommodating section 103, the support section 102 is used for arranging a large circle part, the large circle part is arranged behind the support section 102, the axis of the large circle part is in the horizontal direction, and the small circle part and the second bonding matrix 5 are suspended in the accommodating section 103. The top surface of the lower jig 2 is provided with a receiving groove 201, the receiving groove 201 is used for receiving the second bonding base 5 falling from the receiving section 103, preferably, the width of the receiving groove 201 is slightly larger than the thickness of the second bonding base 5, the receiving groove 201 corresponds to the receiving section 103, as shown in fig. 8, the lower jig 2 is provided with a drainage structure for draining water in the receiving groove 201, the drainage structure is not limited to a specific structure, as long as drainage can be performed, that is, drainage through holes or rectangular drainage through holes are densely distributed on the top surface of the lower jig 2. The supporting groove may be provided with one or more than one to simultaneously perform separation of a plurality of sets of the first bonding base 4 and the second bonding base 5. The number of the corresponding receiving grooves 201 is the same as that of the supporting grooves, and the number of the corresponding receiving grooves may be one or more. The bonding and separating jig can be widely applied to various materials, such as glass, silicon, III-V materials and the like, and is particularly suitable for the manufacturing process of AVGG products, namely, the first bonding substrate 4 is an AVG product, and the second bonding substrate 5 is a small structural piece.
The working principle is as follows: after the upper jig 1 and the lower jig 2 are stacked together and placed in a container, the small round part and the activated surface (i.e., the joint surface) of the second bonded substrate 5 are washed downwards slowly by pure water from above the first bonded substrate 4 and the second bonded substrate 5, the second bonded substrate 5 falls downwards slowly from the accommodating section 103 under the washing of self weight and water flow (as shown in fig. 1), and then falls into the receiving groove 201 of the receiving groove 201 through the drain opening 101 (as shown in fig. 5), the first bonded substrate 4 is left in the upper jig 1 (as shown in fig. 4) to complete separation, and the upper jig 1 and the lower jig 2 can be taken out in sequence and taken out for cleaning in the later period. Above-mentioned whole separation process no longer uses tweezers contact product, does not additionally introduce impurity, can not pollute, fish tail product, but from top to bottom split, need not shift the tool after the separation, can directly wash alone last tool 1 and lower tool 2 two parts, avoids shifting the pollution that tool in-process contact product leads to.
In this embodiment, as shown in fig. 1 to 10, the distance between the notch of the receiving groove 201 and the groove bottom of the accommodating section 103 is smaller than the diameter of the second bonding base 5, so that the second bonding base 5 can enter the receiving groove 201 when it is about to be separated from the small round portion, and the second bonding base 5 is prevented from turning over when falling. Meanwhile, the distance between the bottom of the receiving groove 201 and the bottom of the accommodating section 103 is greater than the diameter of the second bonding base body 5, so that the bottom of the receiving groove 201 has enough fall, the second bonding base body 5 is completely separated from the small round part of the first bonding base body 4 after falling into the receiving groove 201, the second bonding base body 5 and the first bonding base body 4 are not contacted with each other after separation, and collision and scratch cannot be caused under water flow washing.
In this embodiment, as shown in fig. 1 to 10, the drainage structure includes a drainage groove 202 located at one side of the receiving groove 201 and a drainage port 204 located at the bottom surface of the lower fixture 2, the drainage groove 202 is located at one side of the receiving groove 201 close to the bearing section 102, the drainage groove 202 is communicated with the receiving groove 201, and both the drainage groove 202 and the receiving groove 201 are communicated with the drainage port 204.
Further, in order to improve the drainage capability of the lower jig 2, in the present embodiment, as shown in fig. 1 to 10, the drainage structure further includes a drainage groove 203 located on the other side of the receiving groove 201, and the drainage groove 203 communicates with the drainage port 204.
In order to improve the separation efficiency, in this embodiment, as shown in fig. 1 to 10, the upper jig 1 is provided with a plurality of mutually-communicated supporting grooves, and a plurality of supporting grooves are arranged along the axis and face the same direction to form a supporting section 102, an accommodating section 103, a supporting section 102, and an interval arrangement mode of the accommodating section 103. The top surface of the lower jig 2 is provided with receiving grooves 201 with the same number as the supporting grooves, the receiving grooves 201 are arranged along the axial line at intervals and have the same orientation, and the drainage grooves 202 and the drainage grooves 203 between the adjacent receiving grooves 201 are communicated with each other. Taking fig. 1, fig. 2, fig. 3, fig. 4, fig. 5, fig. 7 and fig. 8 as an example, 11 bearing grooves are provided in the upper jig 1, and 11 receiving grooves 201 are provided in the lower jig 2, so that 11 groups of the first bonding base 4 and the second bonding base 5 can be separated at a time, and in the using process, the number of products to be separated can be matched with a vessel with a proper size, although the number of the bearing grooves and the receiving grooves 201 is not limited to the 11 groove design.
In this embodiment, as shown in fig. 1 to 10, the positioning groove 205 is formed on the top surface of the lower fixture 2, so as to facilitate the rapid placement and the stability of the upper fixture 1 after placement.
In this embodiment, as shown in fig. 1 to 10, the bonding and separating jig further includes a handle 3 detachably connected to both the upper jig 1 and the lower jig 2, so as to sequentially lift the upper jig 1 and the lower jig 2 out of the container.
Further, in this embodiment, as shown in fig. 1 to 10, the handle 3 includes a connecting vertical rod and a connecting horizontal rod that are perpendicular to each other, a threaded head 301 is disposed at one end of the connecting vertical rod away from the connecting horizontal rod, an upper threaded hole 104 that is matched with the threaded head 301 is disposed on the upper jig 1, and a lower threaded hole 206 that is matched with the threaded head 301 is disposed on the lower jig 2.
Example 2
This embodiment provides a separation method using the bonding and separation jig according to embodiment 1, as shown in fig. 1 to 3, including the following steps:
s1, preparing a glassware, placing a lower jig 2 in the glassware, and stacking an upper jig 1 on the lower jig 2;
s2, placing the large circular parts of the first bonding base body 4 and the second bonding base body 5 which are mutually attached after surface treatment into a bearing section 102 of a bearing groove of the upper jig 1, and suspending the small circular parts in a containing section 103;
and S3, washing the joint of the small round part and the second bonding matrix 5 from the upper part slowly by water flow, taking the upper jig 1 and the lower jig 2 out in sequence after the second bonding matrix 5 gradually slides into the receiving groove 201 of the lower jig 2 under the action of gravity, and cleaning the first bonding matrix 4 in the upper jig 1 and the second bonding matrix 5 in the lower jig 2 respectively.
In this embodiment, as shown in fig. 1 to 10, in step S3, the upper screw head 301 is installed in the upper screw hole 104, the connecting cross bar is lifted up, the upper jig 1 is lifted out of the glassware, and then the screw head 301 is detached and sent to be cleaned. Then the screw head 301 is screwed into the lower threaded hole 206, the connecting cross rod is lifted up, the lower jig 2 is lifted out of the glassware, and then the screw head 301 is detached and sent to be cleaned. The handle 3 is taken down in the cleaning process, so that pollutants or particles remained in the gap can be avoided.
The principle and the implementation mode of the invention are explained by applying a specific example, and the description of the embodiment is only used for helping to understand the method and the core idea of the invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (10)
1. A bonding separation jig is used for separating a first bonding base body and a second bonding base body which are mutually attached after activation treatment, wherein the first bonding base body is formed by coaxially attaching a small round part and a large round part, the diameter of the small round part of the first bonding base body is larger than that of the large round part of the second bonding base body, the second bonding base body is a round sheet, the diameter of the round sheet is the same as that of the small round part, and the bonding separation jig is characterized by comprising an upper jig and a lower jig which are stacked up and down; the top surface and the bottom surface of the upper jig are respectively provided with a bearing groove and a water drainage opening allowing the second bonding matrix to pass through, the bearing groove and the water drainage opening are communicated with each other, and the bearing groove comprises a bearing section for the axis of the large circular part to be placed in the horizontal direction and an accommodating section for the small circular part to be suspended; the top surface of the lower jig is provided with a receiving groove for receiving the second bonding base body falling from the containing section, and the lower jig is provided with a drainage structure for discharging water in the receiving groove.
2. The bonding and separating jig according to claim 1, wherein a distance between the notch of the receiving groove and the bottom of the receiving section is smaller than a diameter of the second bonding base, and a distance between the bottom of the receiving groove and the bottom of the receiving section is larger than the diameter of the second bonding base.
3. The bonding and separating jig according to claim 1 or 2, wherein the drainage structure comprises a drainage groove located on one side of the receiving groove and communicated with the receiving groove and a drainage opening located on the bottom surface of the lower jig, and both the drainage groove and the receiving groove are communicated with the drainage opening.
4. The bonding and separating jig according to claim 3, wherein the drainage structure further comprises a drainage groove located at the other side of the receiving groove and communicated with the receiving groove, and the drainage groove is communicated with the drainage port.
5. The bonding separation jig according to claim 4, wherein a plurality of mutually communicating supporting grooves are formed in the upper jig, a plurality of supporting grooves are arranged along the axis and face the same direction, receiving grooves are formed in the top surface of the lower jig, the number of receiving grooves is the same as the number of supporting grooves, the number of receiving grooves are arranged at intervals along the axis and face the same direction, and the drainage grooves and drainage grooves between adjacent receiving grooves are mutually communicated.
6. The bonding and separating tool of claim 5, wherein the lower tool has a positioning groove on a top surface thereof.
7. The bonding and separating jig according to claim 1 or 2, further comprising a handle detachably connected to both the upper jig and the lower jig.
8. The bonding and separating jig according to claim 7, wherein the handle comprises a connecting vertical rod and a connecting horizontal rod which are perpendicularly connected with each other, a threaded head is arranged at one end of the connecting vertical rod, which is far away from the connecting horizontal rod, an upper threaded hole matched with the threaded head is arranged on the upper jig, and a lower threaded hole matched with the threaded head is arranged on the lower jig.
9. A separation method using the bonding separation jig according to any one of claims 1 to 8, comprising the steps of:
s1, preparing a glassware, placing the lower jig in the glassware, and stacking the upper jig on the lower jig;
s2, placing the large circular parts of the first bonding base body and the second bonding base body which are mutually attached after surface treatment into the bearing section of the bearing groove of the upper jig, and suspending the small circular parts in the containing section;
s3, washing the small round part and the joint of the second bonding base body slowly by water flow from the upper part, sequentially taking out the upper jig and the lower jig after the second bonding base body gradually slides into the receiving groove of the lower jig under the action of gravity, and respectively cleaning the first bonding base body in the upper jig and the second bonding base body in the lower jig.
10. The separation method according to claim 9, wherein in step S3, the screw head is installed in the upper threaded hole, the connecting cross bar is lifted up, the upper jig is lifted out of the glassware, then the screw head is removed, the screw head is screwed into the lower threaded hole, the connecting cross bar is lifted up, the lower jig is lifted out of the glassware, and then the screw head is removed.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117863707A (en) * | 2024-03-11 | 2024-04-12 | 杭州邦齐州科技有限公司 | Pre-bonded glass separation jig and separation method thereof |
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| TWM323384U (en) * | 2007-07-06 | 2007-12-11 | Kin Tec Technology Corp | Chain-block separation jig |
| CN101582265A (en) * | 2008-05-12 | 2009-11-18 | 新科实业有限公司 | Magnetic head separation auxiliary device and method for manufacturing magnetic head by using same |
| KR20110063420A (en) * | 2011-05-24 | 2011-06-10 | 주식회사 에이에스이 | Wafer separator and transferring device |
| US20160111316A1 (en) * | 2014-10-17 | 2016-04-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Debonding Schemes |
| CN108333010A (en) * | 2018-02-08 | 2018-07-27 | 东莞市益汇知识产权服务有限公司 | Grinding wheel automatic dismounting machine containing Teflon piece and its dismounting process |
| CN110625942A (en) * | 2019-09-02 | 2019-12-31 | 广州黑格智造信息科技有限公司 | Demolding jig and demolding method |
| CN111300205A (en) * | 2020-03-17 | 2020-06-19 | 东莞市晶博光电有限公司 | Edge sweeping jig |
| CN112420512A (en) * | 2020-11-23 | 2021-02-26 | 上海新微科技集团有限公司 | Method for separating thin film wafer from residual wafer in bonding structure |
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| CN117863707A (en) * | 2024-03-11 | 2024-04-12 | 杭州邦齐州科技有限公司 | Pre-bonded glass separation jig and separation method thereof |
| CN117863707B (en) * | 2024-03-11 | 2024-05-10 | 杭州邦齐州科技有限公司 | Pre-bonded glass separation jig and separation method thereof |
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| CN115775754B (en) | 2023-07-14 |
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Denomination of invention: A bonding separation fixture and its separation method Effective date of registration: 20231129 Granted publication date: 20230714 Pledgee: Bank of Hangzhou Co.,Ltd. Fuyang Jiangnan Shopping Mall Small and Micro Enterprises Exclusive Sub branch Pledgor: Hangzhou Bangqizhou Technology Co.,Ltd. Registration number: Y2023980068019 |