CN218918834U

CN218918834U - Pre-bonding jig

Info

Publication number: CN218918834U
Application number: CN202223132526.4U
Authority: CN
Inventors: 赵培瑜
Original assignee: Hangzhou Bangqizhou Technology Co ltd
Current assignee: Hangzhou Bangqizhou Technology Co ltd
Priority date: 2022-11-25
Filing date: 2022-11-25
Publication date: 2023-04-25
Anticipated expiration: 2032-11-25

Abstract

The utility model discloses a pre-bonding jig, which belongs to the technical field of bonding jigs and is used for pre-bonding a first bonding matrix and a circular lamellar second bonding matrix, wherein the first bonding matrix is formed by a small round part and a large round part with the diameter larger than that of the small round part, the diameter of the small round part is the same as that of the second bonding matrix, the pre-bonding jig comprises a bearing seat, a first round groove for bearing the large round part, a second round groove for the small round part to compress the second bonding matrix and a drainage round hole which is positioned at the bottom of the bearing seat and is coaxially communicated with the second round groove are arranged on the bearing seat, the inner diameter of the second round groove is the same as that of the second bonding matrix, a drainage vertical groove which is convenient for the tips of tweezers holding the second bonding matrix to extend into the second round groove along the axial direction is arranged on the first round groove, and the drainage vertical groove is communicated with the drainage round hole. The pre-bonding jig can effectively reduce particles in the pre-bonding process, improves the cleanliness of a bonding interface of a product, and is suitable for replacing a smaller vessel to hold pure water so as to achieve the expected water-saving effect.

Description

Pre-bonding jig

Technical Field

The utility model relates to the technical field of bonding jigs, in particular to a pre-bonding jig.

Background

The wafer bonding technology is an emerging process method, can realize the organic combination between two parts of wafers (usually made of silicon or glass materials), achieves a certain bonding strength, and plays a technical foundation role in the aspects of electric connection of a micro-motor system, packaging combination of micro-electronic devices, film transfer technology of photoelectric communication software and the like. The bonding technology can be divided into two types, namely a direct bonding method and an intermediate layer bonding method according to the existence of an intermediate layer, and can be divided into two types, namely hydrophilic bonding and hydrophobic bonding according to the surface treatment and the subsequent bonding reaction characteristics. The direct bonding method has the advantages of simple process, wide temperature adaptability, high bonding strength and the like, and is a popular research field.

The wafer direct bonding technology is introduced in the manufacturing flow of the AVGG (Anti-alignment Glass-Glass Anti-halation Glass component), and the hydrophilic bonding method is adopted to assemble the AVG (Anti-alignment Glass-Glass Anti-halation Glass) and the structural small piece, which needs four steps of (1) cleaning, (2) surface treatment, (3) pre-bonding and (4) high-temperature annealing, and the hydrophilic bonding method of borosilicate Glass disclosed in the patent number of 202210617935.9 can be referred to. In the third step of bonding, the two components are required to be attached in water and then taken out. The conventional pre-bonding practice is (see fig. 8 to 10): a glass crystallization dish with a diameter of 20cm and a depth of about 8cm is taken to contain pure water with a depth of about 2/3, an operator holds up the AVG in water by one hand, clamps the structural small piece from the side by using small-mouth forceps, places the structural small piece on the surface of the AVG in water, and holds up and drains water after the surfaces of the two parts are attached. Under the current working conditions, the above manner has a plurality of problems: 1. the glove is filled with water to inevitably generate a large amount of particles, the bonding strength is reduced due to the existence of interface particles, the bonding surface of the small structural piece is polluted in the process of clamping the small structural piece by tweezers, the product performance can not meet the requirement due to the phenomenon of dirty large interfaces, and therefore, in the process of high-temperature annealing in the fourth step, defects such as bubbles, falling, cracking and the like occur on a large amount of interfaces, and the bonding yield is extremely low and is only 20-30%. 2. In the pre-bonding process, the small piece lacks fixation and slides mutually with the AVG surface, so that the risk of interface scratch is high; 3. for convenient operation, the size of the water container is larger, and for reducing particles in water, water is required to be changed every 3 groups of AVGG pre-bonding, and the water consumption of a single group of products is about 558ml, so that a large amount of pure water resources are consumed. Therefore, there is a need for an operation method that can reduce the particulate matters in the pre-bonding process, improve the cleanliness of the bonding interface of the product, avoid the problems of bubbles, falling, explosion and the like in the subsequent annealing process caused by the particulate matters, and simultaneously reduce the pure water consumption in the pre-bonding process as much as possible, reduce the production cost and promote green production.

Disclosure of Invention

The utility model aims to solve the technical problems, and provides a pre-bonding jig, which can improve the operation method, prevent pollution sources such as gloves from entering water in the pre-bonding process, change the tweezers clamping method, prevent pollution caused by contact with the surface of a bonding object during tweezers clamping, reduce particles in the pre-bonding process, improve the cleanliness of a bonding interface of a product, avoid the problems of bubbles, falling, cracking and the like in the subsequent annealing process caused by the particles, adaptively change a smaller vessel to hold pure water, reduce the water changing frequency in the pre-bonding process, achieve the expected water saving effect, reduce the production cost and promote green production.

In order to achieve the above object, the present utility model provides the following solutions: the utility model discloses a pre-bonding jig which is used for pre-bonding a first bonding matrix and a circular lamellar second bonding matrix, wherein the first bonding matrix is formed by a small round part and a large round part with the diameter larger than that of the small round part coaxially, the diameter of the small round part is the same as that of the second bonding matrix, the pre-bonding jig comprises a bearing seat, a first round groove for bearing the large round part, a second round groove for the small round part to compress the second bonding matrix and a drainage round hole which is positioned at the bottom of the bearing seat and is coaxially communicated with the second round groove are arranged on the bearing seat, the inner diameter of the second round groove is the same as that of the second bonding matrix, the first round groove is provided with a drainage vertical groove which is convenient for the tip part of tweezers holding the second bonding matrix to stretch into the second round groove along the axial direction, and the drainage vertical groove is communicated with the drainage round hole.

Preferably, the drainage vertical grooves are distributed on the first round groove in a cross shape.

Preferably, the holding seat is provided with a transverse placing groove which is convenient for the tips of the forceps holding the large round part to extend into the first round groove, and the transverse placing groove extends along the radial direction of the first round groove.

Preferably, the inner diameter of the first circular groove is the same as the diameter of the large circular portion.

Preferably, the support bracket is provided with a handle for placing and lifting the support bracket into and out of the water surface, and the handle is provided with a lifting part which is always kept above the water surface during the placing and lifting process.

Preferably, the handle comprises a connecting vertical rod and a connecting cross rod which are mutually perpendicular, one end of the connecting vertical rod is fixed with the connecting cross rod, and the other end of the connecting vertical rod is connected with the bearing seat.

Preferably, the bearing bracket is provided with a threaded hole, the connecting vertical rod is provided with a threaded head, and the threaded head is in threaded connection with the threaded hole.

Preferably, the socket is provided with a plug hole, the connecting vertical rod is provided with a plug connector, and the plug connector is in interference plug connection with the plug hole.

Compared with the prior art, the utility model has the following technical effects:

1. the process pollution is small, and the interface cleanliness is high; the whole pre-bonding process only includes immersing the first bonding matrix, the second bonding matrix and the bearing seat in water, so that the situation that the original glove water is substituted into the particulate matters is avoided, the number of the particulate matters in the pre-bonding process is greatly reduced, the tweezers for clamping the second bonding matrix are clamped into the edge clamping mode from the two sides, the problem of pollution caused by the fact that the tweezers contact the bonding surface of the second bonding matrix is avoided, the cleanliness is improved due to reduction of interface particulate matters and pollutants, the defects such as bubbles, falling and burst in the subsequent annealing process are effectively avoided, the defective proportion is greatly reduced, the bonding yield is improved to more than 80% from the original 20-30%, and the pre-bonding jig can be widely applied to bonding of various hydrophilic materials (such as glass, silicon, III-V materials and the like) and is particularly suitable for the manufacturing process of AVGG products.

2. The bonding yield is improved; after the guide bearing seat is guided, the first bonding matrix and the second bonding matrix can be limited in the pre-bonding process by the first round groove and the second round groove, so that relative sliding in the pre-bonding process is avoided, and the risk of scratch is reduced.

3. The pure water consumption is saved, and the production energy consumption is reduced; after the container is led into the bearing seat, the container for holding pure water can be replaced by a smaller capacity without manually supporting the first bonding matrix, 2/3 pure water is filled into the original container each time, the volume is about 1675ml, only three groups of products can be pre-bonded at most, the container needs to be replaced, after the container is replaced by a small-capacity container, the single water holding quantity is only 250ml, the pollution in the improved pre-bonding process is less, the utilization rate of pure water is higher, 10 groups of pre-bonding can be continuously carried out on 250ml of pure water, the single pre-bonding water consumption is reduced to 25ml from the original 558ml of pure water, the pure water consumption is reduced by 95.5% compared with the original pure water consumption, the pure water consumption in the pre-bonding process is reduced as much as possible, the production cost is reduced, and the green production is promoted.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a perspective view of a pre-bonding jig;

FIG. 2 is a diagram showing a manner in which tweezers grip a second bonding substrate when the present pre-bonding jig is used;

FIG. 3 is a perspective view of the pre-bonding jig after the second bonding matrix is mounted;

FIG. 4 is a perspective view of the pre-bonding jig after the first bonding matrix is mounted;

FIG. 5 is a perspective view of a vacuum suction pen;

FIG. 6 is a perspective view of the pre-bonding jig when the vacuum suction pen adsorbs the first bonding substrate;

FIG. 7 is a view showing a structure of a vacuum suction after adsorbing a first bonding base body and a second bonding base body after pre-bonding;

FIG. 8 is a block diagram of the first bonding matrix and the second bonding matrix after pre-bonding;

FIG. 9 is a block diagram of the first bonding matrix and the second bonding matrix prior to pre-bond bonding;

fig. 10 is a schematic view of a prior art bonding in which tweezers grip a second bonding matrix.

Reference numerals illustrate: 1. a support bracket; 2. a first circular groove; 3. a second circular groove; 4. a water discharge round hole; 5. a drainage vertical groove; 6. placing a transverse groove; 7. a handle; 8. a first bonding matrix; 9. a second bonding matrix; 10. tweezers; 11. a vacuum suction pen.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The present embodiment provides a pre-bonding jig, which is mainly used for pre-bonding a first bonding substrate 8 and a second bonding substrate 9 with shapes as shown in fig. 8 and 9, wherein the first bonding substrate 8 is composed of a small round part and a large round part which are coaxial, the diameter of the large round part is larger than that of the small round part, the whole second bonding substrate 9 is a round sheet, and the diameter of the second bonding substrate 9 is the same as that of the small round part. As shown in fig. 1 to 10, the pre-bonding jig comprises a supporting seat 1, wherein a first round groove 2, a second round groove 3 and a water draining round hole 4 which are coaxially distributed up, down and communicated are arranged on the supporting seat 1, the first round groove 2 is used for placing a first bonding matrix 8, the first round groove 2 is used for placing a large round part of the first bonding matrix 8, after the large round part is placed into the first round groove 2, a small round part of the first bonding matrix 8 can press a second bonding matrix 9 on the second round groove 3, the supporting seat 1 is supported, and the supporting seat 1 is not required to be supported by hands, so that particle pollutants brought by gloves are avoided. The inner diameter of the second circular groove 2 is the same as the diameter of the second bonding matrix 9, the second circular groove 2 can play a role in guiding and limiting, and the second bonding matrix 9 and the large circular part extending into the second circular groove 2 cannot shake in the radial direction, so that the first bonding matrix 8 and the second bonding matrix 9 are prevented from being scratched due to shaking. The first round groove 1 is provided with a drainage vertical groove 5 communicated with the drainage round hole 4, the drainage vertical groove 5 is at least two, and the two grooves are symmetrically arranged, and the arrangement mode has two advantages: firstly, the tips of the tweezers 7 which are convenient to open extend into the tweezers, so that the mode that the tweezers 7 clamp the second bonding matrix 9 is changed, two sides clamping the second bonding matrix 9 are changed into the mode that the tips of the tweezers 7 clamp the edge of the second bonding matrix 9 (shown in figure 2), so that the bonding surface can be prevented from being polluted by the tips of the tweezers 7, and secondly, after the tweezers 7 are placed into the first bonding matrix 8, water of the first bonding matrix 8 and the second bonding matrix 9 can be timely pressed out through the water drainage vertical grooves 5 and the water drainage round holes 4, so that the bonding surface of the small round part of the first bonding matrix 8 is tightly attached to the bonding surface of the second bonding matrix 9. Because the first bonding matrix 8 and the second bonding matrix 9 are hydrophilic materials (such as glass, silicon, III-V materials, etc.), the bonding method mainly adopts a hydrophilic direct bonding method. The pre-bonding jig can be widely used for bonding various shapes such as a first bonding matrix 8 and a second bonding matrix, is particularly suitable for manufacturing an AVGG product, namely the first bonding matrix 8 of the AVG product and the second bonding matrix 9 of the structural chip.

Working principle:

firstly, preparing a vessel containing pure water; then, the edges of the two sides of the second bonding matrix 9 are clamped by the tips of tweezers, the second bonding matrix 9 is vertically downwards placed perpendicular to the direction of the bearing seat 1, the tips of the tweezers 7 slowly extend into the two symmetrical water drainage vertical grooves 5, after the second bonding matrix 9 is attached to the second round groove 3, the tweezers 7 are opened to release the second bonding matrix 9, then the tweezers 7 are taken out, and the bearing seat 1 and the second bonding matrix 9 are slowly immersed into water together, so that the bonding surface of the second bonding matrix 9 is kept moist; then, the supporting seat 1 is lifted, the first bonding matrix 8 is clamped by the tweezers 7, the small round part of the first bonding matrix 8 faces the second bonding matrix 9 and is placed in the second round groove 3, the large round part is placed in the first round groove 2, and the supporting seat 1 is immersed in water again together with the first bonding matrix 8 and the second bonding matrix 9, so that the supporting seat is fully immersed; finally, the support base 1 is lifted out of the water again, the vacuum suction pen 11 is used for adsorbing the back of the large round part of the first bonding base body 8, the adsorption effect is shown in fig. 6, the suction pen is used for lifting out the whole pre-bonding body, and the whole pre-bonding body is placed on the bracket after being reversed (shown in fig. 7).

Because the first bonding matrix 8 and the second bonding matrix 9 are supported by the support bracket 1, the first bonding matrix 8 is not required to be supported by hands, so that a container for containing pure water can be replaced by a smaller glass vessel from a crystallization vessel with the diameter of 20cm x 8cm, the container can be placed into the support bracket 1 enough, the water containing amount is about 250ml, the water changing frequency is increased from original water changing once every 3 sheets to water changing once every 10 sheets, and the pure water using amount is greatly reduced. The original container is filled with 2/3 of pure water each time, the volume is about 1675ml, and at most, the original container can be replaced only by three groups of pre-bonding. The water consumption of single-group pre-bonding is reduced from 558ml to 25ml, and the pure water consumption is reduced by 95.5% compared with the original water consumption.

In this embodiment, as shown in fig. 1 to 10, the drainage vertical grooves 5 are four in total, and the four drainage vertical grooves 5 are distributed in a cross shape on the first circular groove 2.

Further, in this embodiment, as shown in fig. 1 to 10, the support bracket 1 is provided with a transverse placement groove 6, the transverse placement groove 6 extends along the radial direction of the first circular groove 2, and the transverse placement groove 6 can facilitate the tips of the forceps 7 holding the large circular portion to extend into and withdraw from the first circular groove 2. That is, after the tip portions of the tweezers 7 grip the large round portions of the first bonding base 8 and put them into the first round grooves 2, the tweezers 7 are placed transversely in the placing transverse grooves 6 and then pulled out along the placing transverse grooves 6.

In this embodiment, as shown in fig. 1 to 10, the inner diameter of the first circular groove 2 is the same as the diameter of the large circular portion, so that the radial stability of the first bonding base 8 can be further improved.

In this embodiment, as shown in fig. 1 to 10, the carrying bracket 1 is provided with a handle 7, so that the carrying bracket 1 can be put into water and lifted out of the water, and the requirement of multiple placement and lifting is met. The handle 7 has a lifting portion which remains above the water surface throughout the insertion and extraction process.

In this embodiment, as shown in fig. 1 to 10, the handle 7 includes a connecting vertical rod and a connecting horizontal rod that are perpendicular to each other, one end of the connecting vertical rod is fixed with the connecting horizontal rod, and the other end of the connecting vertical rod is connected with the support seat 1. The length of the connecting vertical rod needs to ensure that the upper part of the connecting vertical rod is positioned above the water surface after the bearing bracket 1 is placed in the vessel, so that the upper part of the connecting vertical rod and the connecting cross rod become lifting parts, the connecting cross rod is convenient for lifting the connecting vertical rod communicated with the bearing bracket 1,

further, in this embodiment, the handle 7 is detachably connected with the support seat 1, as shown in fig. 1 to 10, if a threaded hole is formed in the support seat 1, a threaded head is formed on the connecting vertical rod, the threaded head is in threaded connection with the threaded hole, and the handle 7 can be unscrewed or screwed by rotating the connecting vertical rod.

Of course, other detachable connection modes can be provided, in this embodiment, if a socket hole is formed in the bearing bracket 1, a plug connector is formed in the connection vertical rod, the plug connector and the socket hole are in interference plug connection, and the handle 7 can be fixed or detached by forcefully inserting or pulling out.

Further, in this embodiment, the support bracket 1 and the handle 7 are made of flexible materials such as high-quality polytetrafluoroethylene, polyimide or PEEK, so that the support bracket is waterproof and dustproof, and can be kept clean in the pre-bonding process.

The principles and embodiments of the present utility model have been described in detail with reference to specific examples, which are provided to facilitate understanding of the method and core ideas of the present utility model; also, it is within the scope of the present utility model to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the utility model.

Claims

1. The utility model provides a bond tool in advance, is used for first bonding base member and the circular flaky second bonding base member's of bonding in advance to bond the base member, and first bonding base member is by little circle portion and diameter is greater than big circle portion coaxial constitution of little circle portion, the diameter of little circle portion with the diameter of second bonding base member is the same, a serial communication port, including the supporting seat, be equipped with on the supporting seat and be used for the bearing big circle portion first circular slot, confession little circle portion will the second bonding base member compresses tightly and be located the supporting seat bottom and with the drainage round hole of the coaxial intercommunication of second circular slot, the internal diameter of second circular slot with the diameter of second bonding base member is the same, be equipped with on the first circular slot and conveniently be equipped with the tip of the tweezers of second bonding base member stretches into along the axial the drainage vertical slot of second circular slot, drainage vertical slot with drainage round hole intercommunication.

2. The pre-bonding jig according to claim 1, wherein the drainage vertical grooves are distributed on the first circular groove in a cross shape.

3. The pre-bonding jig according to claim 2, wherein the holding base is provided with a transverse placement groove which is convenient for the tips of the forceps holding the large round part to extend into the first round groove, and the transverse placement groove extends along the radial direction of the first round groove.

4. A pre-bonding jig according to claim 3, wherein the first circular groove has an inner diameter equal to the diameter of the large circular portion.

5. The pre-bonding jig according to claim 1, wherein the support bracket is provided with a handle for putting it into and out of the water surface, the handle having a lifting portion which is always kept above the water surface during putting in and out.

6. The pre-bonding jig according to claim 5, wherein the handle comprises a connecting vertical rod and a connecting cross rod which are perpendicular to each other, one end of the connecting vertical rod is fixed with the connecting cross rod, and the other end of the connecting vertical rod is connected with the bearing seat.

7. The pre-bonding jig according to claim 6, wherein the bearing bracket is provided with a threaded hole, the connecting vertical rod is provided with a threaded head, and the threaded head is in threaded connection with the threaded hole.

8. The pre-bonding jig according to claim 6, wherein the socket is provided with a socket hole, the connecting vertical rod is provided with a plug connector, and the plug connector is in interference fit with the socket hole.