CN210778534U - Vacuum ceramic sucker for adsorbing multiple wafers - Google Patents
Vacuum ceramic sucker for adsorbing multiple wafers Download PDFInfo
- Publication number
- CN210778534U CN210778534U CN201922270335.6U CN201922270335U CN210778534U CN 210778534 U CN210778534 U CN 210778534U CN 201922270335 U CN201922270335 U CN 201922270335U CN 210778534 U CN210778534 U CN 210778534U
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- China
- Prior art keywords
- connecting rod
- rod
- adsorption
- vacuum ceramic
- rubber cushion
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 235000012431 wafers Nutrition 0.000 title claims abstract description 32
- 239000000919 ceramic Substances 0.000 title claims abstract description 20
- 238000001179 sorption measurement Methods 0.000 claims abstract description 28
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 230000006978 adaptation Effects 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract description 4
- 238000010521 absorption reaction Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a vacuum ceramic sucker for adsorbing a plurality of wafers, which comprises a main supporting rod, wherein the top of the main supporting rod is fixedly provided with a handle, rubber pads are uniformly distributed at equal intervals around the handle, the four side walls of the bottom end of the main supporting rod are respectively provided with a first connecting rod, a second connecting rod, a third connecting rod and a fourth connecting rod, the other ends of the first connecting rod, the second connecting rod, the third connecting rod and the fourth connecting rod are all fixedly provided with vertical rods, the bottom end of the vertical rod is provided with a connecting sleeve in a threaded manner, the bottom end of the connecting sleeve is connected with a rubber cushion block, the bottom of the rubber cushion block is provided with a sucker body which is integrated with the rubber cushion block, the lower surface of the sucker body is provided with a plurality of adsorption grooves, the other end of the adsorption groove is provided with an adsorption hole which penetrates through the sucker body, and the adsorption hole is communicated with the adsorption groove. The utility model discloses a can adsorb a plurality of wafers, the processing of being convenient for improves the machining efficiency of wafer widely, easy operation.
Description
Technical Field
The utility model belongs to the technical field of the ceramic sucking disc, concretely relates to be used for a plurality of adsorbed vacuum ceramic sucking discs of wafer.
Background
Because the ceramic sucking disc that uses at present can only adsorb the processing to single wafer, to less wafer, only place single wafer on the ceramic sucking disc, can cause the wafer machining inefficiency like this, if place a plurality of wafers and process on ceramic sucking disc, then can cause the ceramic sucking disc vacuum to reveal and can't adsorb the wafer moreover. We therefore propose a vacuum ceramic chuck for multiple wafer chucking to solve the above problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a vacuum ceramic sucking disc for a plurality of wafers are absorbent to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a be used for absorptive vacuum ceramic sucking disc of a plurality of wafers, includes the main tributary pole, the top fixed mounting of main tributary pole has the handle, and the even and equal clearance distribution of handle sets up the rubber pad all around, the bottom four lateral walls of main tributary pole sets up head rod, second connecting rod, third connecting rod and fourth connecting rod respectively, the other end of head rod, second connecting rod, third connecting rod and fourth connecting rod is all fixed and sets up the montant, the connecting sleeve is installed to the bottom screw thread of montant, the bottom of connecting sleeve is connected and is set up rubber cushion, rubber cushion's bottom is equipped with the suction cup rather than the integrated into one piece structure, a plurality of adsorbs the groove has been seted up to suction cup's lower surface, the other end that adsorbs the groove is equipped with the absorption hole that runs through the suction cup, and adsorb the hole and adsorb.
Preferably, the first connecting rod, the second connecting rod, the third connecting rod and the fourth connecting rod are the same in structure and size, the connecting rods are obliquely connected with the main supporting rod, and the inclination angle is 30 degrees.
The connecting rods and the main supporting rods are obliquely connected, so that the operation and the use are convenient.
Preferably, a thread groove is formed in the bottom end of the vertical rod, an external thread matched with the thread groove is arranged on the outer surface of the connecting sleeve, and a fastening nut is fixedly sleeved on the outer side of the connecting sleeve.
The arrangement of the thread groove and the fastening nut can ensure the stable connection of the connecting sleeve and the vertical rod.
Preferably, the rubber cushion block is internally provided with a circular hole which is communicated with the sucker body, and the circular hole is communicated with the sucker body in a penetrating manner.
This sets up the circular port and passes through the intercommunication with the sucking disc body and set up and effectively improve the adsorption efficiency.
Preferably, the lower surface of the adsorption hole is fixedly arranged on a small adsorption block communicated with the adsorption hole.
The arrangement can facilitate the adsorption of a plurality of wafers.
The utility model discloses a technological effect and advantage: according to the vacuum ceramic sucker for adsorbing the plurality of wafers, the placing space of the wafers is effectively increased through the combined arrangement of the first connecting rod, the second connecting rod, the third connecting rod, the fourth connecting rod, the vertical rod and the connecting sleeve, so that the plurality of wafers can be conveniently adsorbed for use; through the cooperation of rubber cushion, absorption disk body, absorption groove, absorption hole and little absorption piece, can adsorb a plurality of wafers, the processing of being convenient for is used, has improved the machining efficiency of wafer widely, easy operation.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic sectional view of the connecting sleeve and the vertical rod of the present invention;
fig. 3 is a schematic structural view of the middle suction cup of the present invention.
In the figure: 1. a primary strut; 2. a handle; 3. a first connecting rod; 4. a second connecting rod; 5. a third connecting rod; 6. a fourth connecting rod; 7. a vertical rod; 8. a connecting sleeve; 9. a thread groove; 10. fastening a nut; 11. a rubber cushion block; 12. a suction cup body; 13. an adsorption tank; 14. an adsorption hole; 15. a small adsorption block.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
The utility model provides a be used for a plurality of adsorbed vacuum ceramic sucking discs of wafer as shown in fig. 1-3, including main tributary pole 1, main tributary pole 1's top fixed mounting has handle 2, and handle 2 evenly just wait the clearance distribution all around and set up the rubber pad, main tributary pole 1's bottom four lateral walls set up head rod 3 respectively, second connecting rod 4, third connecting rod 5 and fourth connecting rod 6, when specifically designing, head rod 3, second connecting rod 4, the structure of third connecting rod 5 and fourth connecting rod 6, the size is the same, and be connected the setting for the slant between every connecting rod and the main tributary pole 1, and inclination is 30 degrees, can press the absorption very conveniently like this.
The other ends of the first connecting rod 3, the second connecting rod 4, the third connecting rod 5 and the fourth connecting rod 6 are all fixedly provided with a vertical rod 7, a connecting sleeve 8 is installed at the bottom end of the vertical rod 7 in a threaded manner, specifically, a threaded groove 9 is formed in the bottom end of the vertical rod 7, an external thread matched with the threaded groove 9 is arranged on the outer surface of the connecting sleeve 8, a fastening nut 10 is fixedly sleeved on the outer side of the connecting sleeve 8, the connecting sleeve 8 can be conveniently installed and disassembled, a rubber cushion block 11 is connected and arranged at the bottom end of the connecting sleeve 8, a hole penetrates through and is communicated with the sucker body 12, the adsorption effect is improved, a sucker body 12 of an integrally formed structure is arranged at the bottom of the rubber cushion block 11, a plurality of adsorption grooves 13 are formed in the lower surface of the sucker body 12, adsorption holes 14 penetrating through the sucker body 12 are formed at the other ends of the adsorption grooves 13, the lower surface of the adsorption hole 14 is fixedly arranged on a small adsorption block 15 communicated with the adsorption hole, so that a plurality of wafers can be conveniently adsorbed and used.
This a vacuum ceramic sucking disc for a plurality of wafers are adsorbed, during the use, lower surface at sucking disc body 12 sets up a plurality of absorption grooves 13, adsorbs hole 14 and little absorption piece 15, can adsorb processing use to a plurality of wafers under vacuum adsorption's effect, through setting up first connecting rod 3, second connecting rod 4, third connecting rod 5 and fourth connecting rod 6 under, can increase the place space of wafer, thereby be convenient for process and use, improved the machining efficiency of wafer widely.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.
Claims (5)
1. A vacuum ceramic chuck for the chucking of a plurality of wafers, comprising a primary support rod (1), characterized in that: the suction cup is characterized in that a handle (2) is fixedly mounted at the top of a main supporting rod (1), rubber pads are uniformly distributed at equal intervals around the handle (2), four side walls of the bottom end of the main supporting rod (1) are respectively provided with a first connecting rod (3), a second connecting rod (4), a third connecting rod (5) and a fourth connecting rod (6), the other ends of the first connecting rod (3), the second connecting rod (4), the third connecting rod (5) and the fourth connecting rod (6) are respectively fixedly provided with a vertical rod (7), a connecting sleeve (8) is installed at the bottom end of the vertical rod (7) in a threaded manner, a rubber cushion block (11) is connected and arranged at the bottom end of the connecting sleeve (8), a suction cup body (12) of an integrally formed structure is arranged at the bottom of the rubber cushion block (11), a plurality of adsorption grooves (13) are formed in the lower surface of the suction cup body (12), and adsorption holes (14) penetrating through the suction cup body (12), and the adsorption hole (14) is communicated with the adsorption groove (13).
2. A vacuum ceramic chuck for multiple wafer chucking as recited in claim 1, wherein: the structure and the size of the first connecting rod (3), the second connecting rod (4), the third connecting rod (5) and the fourth connecting rod (6) are the same, the connecting rods are obliquely connected with the main supporting rod (1), and the inclination angle is 30 degrees.
3. A vacuum ceramic chuck for multiple wafer chucking as recited in claim 1, wherein: thread groove (9) have been seted up to the bottom of montant (7) inside, the surface of connecting sleeve (8) is equipped with the external screw thread with thread groove (9) looks adaptation, and the fixed cover in the outside of connecting sleeve (8) is equipped with fastening nut (10).
4. A vacuum ceramic chuck for multiple wafer chucking as recited in claim 1, wherein: the rubber cushion block (11) is internally provided with a circular hole communicated with the sucker body (12), and the circular hole is communicated with the sucker body (12) in a penetrating manner.
5. A vacuum ceramic chuck for multiple wafer chucking as recited in claim 1, wherein: the lower surface of the adsorption hole (14) is fixedly arranged on a small adsorption block (15) which is communicated with the adsorption hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922270335.6U CN210778534U (en) | 2019-12-17 | 2019-12-17 | Vacuum ceramic sucker for adsorbing multiple wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922270335.6U CN210778534U (en) | 2019-12-17 | 2019-12-17 | Vacuum ceramic sucker for adsorbing multiple wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210778534U true CN210778534U (en) | 2020-06-16 |
Family
ID=71049579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922270335.6U Expired - Fee Related CN210778534U (en) | 2019-12-17 | 2019-12-17 | Vacuum ceramic sucker for adsorbing multiple wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210778534U (en) |
-
2019
- 2019-12-17 CN CN201922270335.6U patent/CN210778534U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200616 |