CN220400556U - Vacuum chuck - Google Patents

Abstract

The utility model discloses a vacuum chuck, which comprises a chuck upper plate and a chuck lower plate, wherein a fixing bolt is arranged between the chuck upper plate and the chuck lower plate, an air passage is formed in the surface of the chuck upper plate, a main connecting passage is formed in the side wall of the chuck upper plate, an adsorption hole communicated with the main connecting passage is formed in the air passage, and a sealing assembly is arranged in the adsorption hole. In the use process, the air in the air channel is sucked out outwards through the cooperation of the main connecting channel and the adsorption hole, so that the surface of the upper disc of the sucker and the workpiece to be fixed are in a negative pressure state, the suction holes are adsorbed and fixed, the sealing component for sealing the adsorption holes is arranged, the sealing component can seal the adsorption holes, so that the workpieces with different sizes can be adsorbed and fixed conveniently, the installation and the disassembly between the sealing component and the adsorption holes are convenient and quick, a traditional glue sealing method is not needed, and a large amount of time is saved.

Description

Vacuum chuck

Technical Field

The utility model relates to the technical field of vacuum chucks, in particular to a vacuum chuck.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor circuit, and is manufactured by grinding, polishing and slicing a silicon crystal bar. The wafer is in processing or go on detecting the in-process need adsorb it fixedly through vacuum chuck, and current vacuum chuck is in the in-process of adsorbing the fixed wafer of size difference, needs to use glue to fill the outer absorption hole of its size, guarantees that vacuum chuck is applicable to the fixed of different size wafers. However, the manner of sealing the adsorption hole by the glue is not only to waste a long time to wait for the glue to dry, but also to be difficult to clean. To this end we propose a vacuum chuck.

Disclosure of Invention

The present utility model is directed to a vacuum chuck for solving the above-mentioned problems.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a vacuum chuck, includes sucking disc upper disc and sucking disc lower disc, be equipped with fixing bolt between sucking disc upper disc and the sucking disc lower disc, the air flue has been seted up on sucking disc upper disc surface, main connecting channel has been seted up to the lateral wall of sucking disc upper disc, the absorption hole that is linked together with main connecting channel has been seted up in the air flue, seal assembly is assembled in the absorption hole.

Preferably, the number of the fixing bolts is at least four, the four fixing bolts are respectively positioned at four corners of the upper disc of the sucker and the lower disc of the sucker, the number of each fixing bolt is four, and the four fixing bolts are distributed in a triangular shape.

Preferably, the adsorption hole comprises an upper hole part and a lower hole part, the upper hole part is arranged in the air passage, the bottom of the upper hole part is communicated with the main connecting passage through the lower hole part, and the diameter of the upper hole part is larger than that of the lower hole part.

Preferably, the sealing assembly comprises an upper sealing body, an assembly groove is formed in the center of the upper sealing body, a connecting bolt is screwed in the assembly groove, and a lower sealing body is assembled at the bottom of the connecting bolt.

Preferably, the outer side wall of the lower sealing body is integrally formed with auxiliary sealing bodies which are spirally distributed.

Preferably, a sealing ring is assembled at the joint of the connecting bolt and the assembly groove.

Compared with the prior art, the utility model has the beneficial effects that: the utility model provides a vacuum chuck, be provided with sucking disc upper disc and sucking disc lower disc, the cooperation through main connecting channel and absorption hole in the in-process of using is the outside suction of air in the air flue, make the surface of sucking disc upper disc and wait to be fixed between the work piece negative pressure state, adsorb it fixedly, be provided with the seal assembly who seals the absorption hole, seal assembly can carry out sealing operation to the absorption hole, thereby be convenient for adsorb fixedly to the work piece of equidimension not, the installation between seal assembly and the absorption hole is convenient, swift with dismantling, no longer need use traditional glue sealed method, a large amount of time has been saved.

Drawings

Fig. 1 is a perspective view of the present utility model.

Fig. 2 is a schematic structural view of the present utility model.

Fig. 3 is a partial cross-sectional view of the present utility model.

Fig. 4 is a detail view at a in fig. 3.

Fig. 5 is a perspective view of the seal assembly of the present utility model.

FIG. 6 is a schematic view of the seal assembly of the present utility model.

Fig. 7 is a front cross-sectional view of the seal assembly of the present utility model.

In the figure: 1. the sucking disc upper disc, 2, sucking disc lower disc, 3, fixing bolt, 4, air flue, 5, main connecting channel, 6, adsorption hole, 61, upper hole portion, 62, lower hole portion, 7, seal assembly, 71, upper seal body, 72, assembly groove, 73, connecting bolt, 74, lower seal body, 75, auxiliary seal body, 76, sealing ring, 8, fixing screw hole, 9, assembly hole.

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.

Referring to fig. 1, 2, 3, 4, 5, 6 and 7, the present utility model provides a technical solution: a vacuum chuck comprises a chuck upper disc 1 and a chuck lower disc 2, wherein fixed assembly is realized between the chuck upper disc 1 and the chuck lower disc 2 through fixing bolts 3, the number of the fixing bolts 3 is four, the four groups of fixing bolts 3 are respectively positioned at four corners of the chuck upper disc 1 and the chuck lower disc 2, the number of each group of fixing bolts 3 is at least four, the four fixing bolts 3 of each group are distributed in a triangular shape, and the connection fixation between the chuck upper disc 1 and the chuck lower disc 2 is more stable through the uniformly distributed fixing bolts 3.

As shown in fig. 2, fixing screw holes 8 are uniformly formed in the surface of the suction cup lower plate 2, the positions of the fixing screw holes 8 correspond to the assembling positions of the fixing bolts 3, the fixing screw holes 8 are used for connecting and fixing the suction cup lower plate 2 with the suction cup upper plate 1, assembling holes 9 are uniformly formed in the surface of the suction cup lower plate 2, connecting bolts are used in the assembling holes 9 in a screwed manner, the suction cup lower plate 2 is fixed on an operation table of machine tool equipment, and the suction cup upper plate 1 is supported and fixed by arranging the suction cup lower plate 2.

The surface of sucking disc upper disc 1 opens air flue 4, air flue 4 is circumference evenly distributed with sucking disc upper disc 1's axle center department, as shown in fig. 3, sucking disc upper disc 1's lateral wall is left and right symmetry and has seted up main connecting channel 5, main connecting channel 5 is used for being connected with outside vacuum pump, the absorption hole 6 that is linked together with main connecting channel 5 has been seted up in air flue 4, after outside vacuum pump is opened, through the cooperation of main connecting channel 5 and absorption hole 6, outwards suck the air in the air flue 4, thereby make the work piece of assembly on sucking disc upper disc 1 surface and sucking disc upper disc 1 be the vacuum state, adsorb the surface of fixing at sucking disc upper disc 1.

As shown in fig. 3 and 4, the adsorption hole 6 includes an upper hole portion 61 and a lower hole portion 62, the diameter of the upper hole portion 61 is larger than that of the lower hole portion 62, the upper hole portion 61 opens into the air passage 4, the bottom of the lower hole portion 62 penetrates into the main connection passage 5, and the upper hole portion 61 communicates with the main connection passage 5 through the lower hole portion 62.

Because the workpiece fixed by the sucker upper disc 1 is different in size in the process of processing operation, when the workpiece with smaller size needs to be adsorbed and fixed, other adsorption holes 6 except the workpiece with smaller size need to be sealed, so that the sealing property between the air passage 4 and the main connecting channel 5 is ensured, and the stability of the adsorption and fixation of the workpiece with smaller size is ensured.

As shown in fig. 4, the adsorption hole 6 is internally provided with a sealing assembly 7 for sealing the adsorption hole, as shown in fig. 5 and 6, the sealing assembly 7 comprises an upper sealing body 71, the size of the upper sealing body 71 is matched with the size of the upper hole 61, an assembly groove 72 is formed in the center of the upper sealing body 71, a connecting bolt 73 penetrating the upper sealing body 71 is screwed in the assembly groove 72, the bottom of the connecting bolt 73 is sheathed with a lower sealing body 74, the size of the lower sealing body 74 is slightly larger than the size of the lower hole 62, the lower sealing body 74 and the lower hole 62 are in interference fit, the upper sealing body 71 is made of a hard rubber material, and the lower sealing body 74 is made of a soft rubber material.

The outer side wall of the lower sealing body 74 is integrally formed with the auxiliary sealing bodies 75 which are spirally distributed, and by providing the auxiliary sealing bodies 75, the sealing performance of the lower sealing body 74 to the lower hole 62 can be enhanced after the lower sealing body 74 completely enters the lower hole 62.

As shown in fig. 7, the connection of the connection bolt 73 and the assembly groove 72 is embedded with a sealing ring 76, and when the connection bolt 73 is completely screwed to the bottom of the assembly groove 72, the sealing performance of the connection bolt 73 and the assembly groove 72 is increased by the arranged sealing ring 76, so that the sealing performance of the upper sealing body 71 and the lower sealing body 74 to the adsorption hole 6 is further improved.

Working principle: in the use process of the device, after an external vacuum pump is started, air in the air channel 4 is sucked out outwards through the matching of the main connecting channel 5 and the adsorption hole 6, the surface of the upper disc 1 of the sucking disc and a workpiece fixed by the upper disc are in a vacuum state, so that the workpiece is adsorbed and fixed, when the size of the workpiece to be fixed is smaller, the sealing assembly 7 is assembled into the adsorption hole 6 which does not need to generate adsorption force, the upper sealing body 71 is assembled into the upper hole part 61 at first, then the connecting bolt 73 is screwed by a tool, the connecting bolt 73 drives the lower sealing body 74 to move downwards along the assembling groove 72, the lower sealing body 74 is extruded into the lower hole part 62, the adsorption hole 6 is sealed through the matching of the upper sealing body 71 and the lower sealing body 74, and the lower sealing body 74 and the upper sealing body 71 can be disassembled after the connecting bolt 73 is reversely screwed, so that the operation is simple and convenient.

Claims (6)

1. The utility model provides a vacuum chuck, includes sucking disc upper disc (1) and sucking disc lower disc (2), be equipped with fixing bolt (3), its characterized in that between sucking disc upper disc (1) and sucking disc lower disc (2): the novel sucker is characterized in that an air passage (4) is formed in the surface of the sucker upper disc (1), a main connecting passage (5) is formed in the side wall of the sucker upper disc (1), an adsorption hole (6) communicated with the main connecting passage (5) is formed in the air passage (4), and a sealing assembly (7) is assembled in the adsorption hole (6).

2. A vacuum chuck as in claim 1, wherein: the fixing bolts (3) are at least four groups, the four groups of fixing bolts (3) are respectively located at four corners of the upper sucker disc (1) and the lower sucker disc (2), the number of each group of fixing bolts (3) is four, and the four fixing bolts (3) are distributed in a triangular shape.

3. A vacuum chuck as in claim 1, wherein: the adsorption hole (6) comprises an upper hole part (61) and a lower hole part (62), the upper hole part (61) is arranged in the air passage (4), the bottom of the upper hole part (61) is communicated with the main connecting passage (5) through the lower hole part (62), and the diameter of the upper hole part (61) is larger than that of the lower hole part (62).

4. A vacuum chuck as in claim 1, wherein: the sealing assembly (7) comprises an upper sealing body (71), an assembly groove (72) is formed in the center of the upper sealing body (71), a connecting bolt (73) is connected in the assembly groove (72) in a threaded mode, and a lower sealing body (74) is arranged at the bottom of the connecting bolt (73).

5. A vacuum chuck as in claim 4, wherein: the outer side wall of the lower sealing body (74) is integrally formed with auxiliary sealing bodies (75) which are spirally distributed.

6. A vacuum chuck as in claim 4, wherein: a sealing ring (76) is arranged at the joint of the connecting bolt (73) and the assembly groove (72).