CN212169696U

CN212169696U - Vacuum chuck

Info

Publication number: CN212169696U
Application number: CN201921861749.XU
Authority: CN
Inventors: 晋志勇; 孙永军
Original assignee: Zhejiang Aobamei New Materials Co ltd
Current assignee: Zhejiang Aobamei New Materials Co ltd
Priority date: 2019-10-31
Filing date: 2019-10-31
Publication date: 2020-12-18
Anticipated expiration: 2029-10-31

Abstract

The utility model relates to a vacuum chuck. The vacuum suction disc comprises a supporting shell, a through hole is formed in the upper end of the supporting shell, the lower end of the supporting shell is sealed through a breathable buckle plate, a suction nozzle tray assembly is arranged in the supporting shell and provided with a rubber suction nozzle, the rubber suction nozzle is inserted into the through hole, a linkage plate frame is arranged in an inner cavity of the supporting shell, a vacuum valve assembly is arranged in the linkage plate frame, the lower end of the linkage plate frame is sealed through the vacuum shell, the lower end of the vacuum valve assembly is connected with a polymerization cavity, a vacuum generator device communicated with the polymerization cavity is arranged at the lower end of the linkage plate frame, and a driving assembly is arranged between the linkage plate frame and the supporting shell. The utility model has the advantages that: the workpiece with the rough surface and the uneven surface can be adsorbed, the problem that the flatness of the workpiece cannot be guaranteed is solved, and meanwhile, the condition that the workpiece cannot be adsorbed due to insufficient vacuum pressure caused by air leakage of part of rubber suction nozzles is avoided.

Description

Vacuum chuck

Technical Field

The utility model relates to the field of machining, concretely relates to vacuum chuck.

Background

In daily production and processing, vacuum chuck is often used for fixed work piece, vacuum chuck produces the negative pressure through compressed gas and vacuum apparatus and adsorbs the work piece, there are a lot of apertures on a vacuum chuck, can be according to the size of work piece, enclose an area that is less than the work piece with the adhesive tape, just can fix the work piece on vacuum chuck, traditional vacuum chuck is fixed on the lathe, when the machined surface of work piece has the contained angle with the adsorbed face, the machined surface is not in the horizontality, in addition some work pieces add and make things convenient for processing man-hour, also have the requirement on the fixed direction, lead to processing the degree of difficulty height or unable processing, simultaneously, if machined part surface is unsmooth or coarse, then lead to the vacuum chuck part to produce the gas leakage phenomenon very easily, lead to adsorbing the jail to the machined part, even produce the problem that can't adsorb.

In order to solve the defects of the prior art, people have long searched for and put forward various solutions. For example, chinese patent document discloses an adjustable vacuum chuck device [ cn201821871263.x ] for a machine tool, which includes a vacuum chuck mounted above a base plate, a linkage device mounted between the vacuum chuck and the base plate, when a first motor is started, two sets of sliders move on a first lead screw, one end of a first rotating shaft is pulled down by two sets of connecting rods, the other end is lifted up, and the vacuum chuck rotates around a second rotating shaft, thereby realizing the inclination of the vacuum chuck in the length direction; when the second motor is started, the two groups of sliding blocks II move on the second screw rod, one end of the second rotating shaft can be pulled down through the two groups of connecting rods II, the other end of the second rotating shaft is lifted up, and the vacuum sucker rotates by taking the first rotating shaft as a center, so that the structure that the vacuum sucker inclines in the width direction is realized.

Above-mentioned scheme has solved current traditional vacuum chuck to a certain extent and has leaded to processing the problem that the degree of difficulty is high or even can't be processed when the machined surface is not in the horizontality or when having the direction requirement to the machined part, but this scheme still has a great deal of not enough, for example, machined part surface irregularity or roughness, easily produce gas leakage phenomenon, lead to adsorbing the jail to the machined part, produce the problem that can't adsorb the machined part even.

Disclosure of Invention

The utility model aims at the above-mentioned problem, provide a reasonable in design, vacuum chuck that adsorption effect is good.

In order to achieve the above purpose, the utility model adopts the following technical proposal: the vacuum sucker comprises a supporting shell with an inner cavity, wherein the upper end of the supporting shell is provided with a plurality of through holes which are arranged in a rectangular array, the lower end of the supporting shell is open and is sealed by an openable breathable buckle plate, a suction nozzle tray assembly is movably arranged in the inner cavity of the supporting shell and is provided with a plurality of hollow rubber suction nozzles which are arranged in a rectangular array, the rubber suction nozzles respectively correspond to the through holes one by one, the rubber suction nozzles are respectively and movably inserted in the through holes, the upper ends of the rubber suction nozzles are flush with the upper end surface of the supporting shell, the suction nozzle tray assembly is provided with a linkage grillage which is positioned in the inner cavity of the supporting shell, a vacuum valve component which is respectively communicated with each rubber suction nozzle is arranged in the linkage grillage, the lower end of the linkage grillage is open and is sealed by a vacuum shell with a polymerization cavity, the lower end of the vacuum valve component is, and a driving component capable of driving the linkage plate frame to vertically lift is arranged between the linkage plate frame and the supporting shell. Because the rubber suction nozzle is made by rubber materials, and rubber materials's elastic modulus is little, and recoverability is strong, so better with the vacuum effect of vacuum generator device manufacturing, the adsorption affinity is stronger, simultaneously, because every rubber suction nozzle lower extreme all is equipped with vacuum valve subassembly, so even when work piece surface irregularity leads to partial rubber suction nozzle to leak gas, vacuum valve subassembly also can self-sealing rubber suction nozzle, thereby avoided appearing leaking gas and lead to the condition that vacuum pressure is not enough to adsorb the work piece.

In the vacuum sucker, the vacuum valve assembly comprises a plurality of vacuum one-way valves which are respectively positioned in the linkage plate frame, the upper ends of the vacuum one-way valves are respectively connected with the rubber suction nozzles through connecting shafts, and the lower ends of the vacuum one-way valves are communicated with the first connecting valve of the polymerization cavity through the first pneumatic assembly. The vacuum check valve effectively avoids the defect of insufficient adsorption force caused by insufficient vacuum pressure due to air leakage of the rubber suction nozzle which cannot adsorb a workpiece.

In the vacuum chuck, the first pneumatic component comprises a first pneumatic quick connector, the first pneumatic quick connector is in threaded connection with the lower end of the vacuum one-way valve, and the first pneumatic quick connector is connected with a second pneumatic quick connector inserted in a first connecting valve of the polymerization cavity through a first air pipe.

In foretell vacuum chuck, the connecting axle is pegged graft in the spliced eye of linkage grillage upper end, and the one end that the connecting axle is located linkage grillage upper end links to each other with the rotatory joint of rubber suction nozzle lower extreme, and the one end diameter that the connecting axle is located linkage grillage upper end is greater than the diameter of spliced eye, and the connecting axle is located linkage grillage lower extreme and links to each other with the vacuum check valve, and the circumference outside cover that the connecting axle is located between linkage grillage lower extreme and the vacuum valve subassembly is equipped with lock nut, and lock nut diameter is greater than the diameter of spliced eye, and lock nut. The locking nut fixes the connecting shaft on the linkage plate, so that the linkage plate or the connecting shaft is prevented from shaking in the movement process, and the stability of the rubber suction nozzle is enhanced.

In foretell vacuum chuck, the linkage grillage is the bending form, and the linkage grillage includes the horizontal part that the level set up, and the horizontal part both ends are equipped with the vertical portion that is parallel to each other and downwardly extending, and vacuum housing set up between vertical portion.

In foretell vacuum chuck, the vacuum generator device includes vacuum generator, and vacuum generator one end passes through the second pneumatic component and links to each other with the second connecting valve of polymerization cavity lower extreme, and the vacuum generator other end passes through the second trachea and links to each other with the compressed gas interface that sets up in the support housing outside, and compressed gas interface both sides are equipped with the manometer respectively and are used for inserting the hydraulic pressure access mouth of outside hydraulic pressure station pipeline.

In foretell vacuum chuck, drive assembly includes driving cylinder, and driving cylinder fixes and installs on the support base that supports the casing inner wall, and driving cylinder has the horizontal depression bar of crossing setting with the drive shaft through drive shaft connection, and horizontal depression bar one end both sides are passed through nut locking in the drive shaft from top to bottom, and the horizontal depression bar other end links to each other with the vertical portion inboard of linkage grillage. The driving component controls the linkage plate frame to lift so as to control the suction nozzle tray component to lift and tightly adsorb the workpiece on the finish grinding surface.

In the vacuum chuck, the driving oil cylinder is communicated with a hydraulic access port arranged on the outer side of the supporting shell.

In the vacuum chuck, the upper end face of the supporting shell is provided with a fine grinding face, a limiting block assembly capable of limiting the lifting range of the rubber suction nozzle is arranged between any two adjacent rubber suction nozzles, and the limiting block assembly comprises an upper limiting part abutting against the outer side of the lower end of the rubber suction nozzle and a lower limiting part abutting against the upper end of the linkage plate frame. The limit block can effectively control the lifting range of the rubber suction nozzle and the linkage plate frame.

In the vacuum chuck, the through hole is formed between two adjacent limiting block assemblies, the upper limiting part is obliquely arranged, and the lower limiting part is formed on the end surface of the inner side of the upper end of the supporting shell.

Compared with the prior art, the utility model has the advantages of: simple structure, the rubber suction nozzle adsorptivity of being made by rubber material is better moreover, and adsorbable unevenness, the work piece of surface roughness have guaranteed the planarization of processing work piece, have solved the difficult problem that can't guarantee the work piece roughness, very big shortening process time, simultaneously, avoided partial rubber suction nozzle to appear leaking gas and lead to the condition that vacuum pressure can't adsorb the work piece inadequately, improved production efficiency.

Drawings

FIG. 1 is a sectional view of the overall structure of the present invention;

fig. 2 is a top view of the present invention;

fig. 3 is a schematic side view of the present invention;

FIG. 4 is a sectional view of the rubber suction nozzle of the present invention;

fig. 5 is a structural sectional view of the connecting shaft of the present invention;

FIG. 6 is a schematic structural view of the vacuum check valve of the present invention;

fig. 7 is a schematic structural view of a first pneumatic quick coupling of the present invention;

in the figure, a support housing 1, a through hole 11, a fine grinding surface 12, a stopper component 13, an upper stopper 131, a lower stopper 132, a breathable buckle 2, a suction nozzle tray component 3, a rubber suction nozzle 31, a linkage plate frame 4, a plug hole 41, a horizontal part 42, a vertical part 43, a vacuum valve component 5, a vacuum one-way valve 51, a connecting shaft 52, a first pneumatic component 53, a first pneumatic quick joint 531, a first air pipe 532, a second pneumatic quick joint 533, a locking nut 54, a vacuum housing 6, a polymerization cavity 61, a first connecting valve 62, a second connecting valve 63, a vacuum generator device 7, a vacuum generator 71, a second pneumatic component 72, a second air pipe 73, a compressed gas interface 74, a pressure gauge 75, a driving component 8, a driving oil cylinder 81, a support base 82, a driving shaft 83, a transverse pressure lever 84, a nut 85 and a hydraulic access 86 are arranged.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.

As shown in figures 1-4, the vacuum sucker comprises a supporting shell 1 with an inner cavity, a plurality of through holes 11 arranged in a rectangular array are arranged at the upper end of the supporting shell 1, the lower end of the supporting shell is open and is sealed by an openable permeable buckle 2, a sucker tray assembly 3 is movably arranged in the inner cavity of the supporting shell 1, the sucker tray assembly 3 is provided with a plurality of hollow rubber suckers 31 arranged in a rectangular array, the rubber suckers 31 respectively correspond to the through holes 11 one by one, each rubber sucker 31 is movably inserted in the through hole 11, the upper ends of the rubber suckers 31 are flush with the upper end surface of the supporting shell 1, the vacuum sucker is characterized in that the sucker tray assembly 3 is provided with a linkage plate frame 4 positioned in the inner cavity of the supporting shell 1, vacuum valve components 5 respectively communicated with each rubber sucker 31 are arranged in the linkage plate frame 4, the lower end of the linkage plate frame 4 is open and is sealed by a vacuum shell, the lower end of the vacuum valve component 5 is connected with the polymerization cavity 61, the lower end of the linkage plate frame 4 is provided with a vacuum generator device 7 which is communicated with the polymerization cavity 61 and fixed at the lower end of the vacuum shell 6, and a driving component 8 which can drive the linkage plate frame 4 to vertically lift is arranged between the linkage plate frame 4 and the supporting shell 1. The rubber suction nozzles 31 are made of rubber materials, flatness of rough and uneven surfaces of workpieces can be achieved, meanwhile, the vacuum valve assemblies 5 are arranged at the lower ends of the rubber suction nozzles 31, when the rubber suction nozzles 31 are drawn away from air to form a vacuum state, all the rubber suction nozzles 31 attached to the workpieces can bite the workpieces tightly, the rubber suction nozzles 31 not adsorbing the workpieces can be automatically closed, and the situation that the workpieces cannot be adsorbed due to insufficient vacuum pressure caused by air leakage is avoided.

As shown in fig. 6, the vacuum valve assembly 5 includes a plurality of vacuum check valves 51 respectively located in the gangboard frame 4, the upper ends of the vacuum check valves 51 are respectively connected with the rubber suction nozzles 31 through connecting shafts 52, and the lower ends of the vacuum check valves 51 are connected with the first connecting valve 62 at the upper end of the polymerization chamber 61 through a first pneumatic assembly 53. The vacuum check valve 51 can control the air circulation in the rubber suction nozzle 31, and avoid the problem of poor work adsorption caused by insufficient vacuum pressure generated by air leakage of the rubber suction nozzle 31 which does not adsorb the work.

As shown in fig. 7, the first pneumatic assembly 53 includes a first pneumatic quick coupling 531, the first pneumatic quick coupling 531 is in threaded connection with the lower end of the vacuum check valve 51, and the first pneumatic quick coupling 531 is connected to a second pneumatic quick coupling 533 inserted into the first connection valve 62 of the polymerization chamber 61 through a first air pipe 532.

As shown in fig. 5, the connecting shaft 52 is inserted into the insertion hole 41 at the upper end of the linkage plate frame 4, one end of the connecting shaft 52 at the upper end of the linkage plate frame 4 is connected with the lower end of the rubber suction nozzle 31 in a rotating clamping manner, the diameter of one end of the connecting shaft 52 at the upper end of the linkage plate frame 4 is larger than the diameter of the insertion hole 41, the connecting shaft 52 at the lower end of the linkage plate frame 4 is connected with the vacuum check valve 51, the locking nut 54 is sleeved on the circumferential outer side of the connecting shaft 52 between the lower end of the linkage plate frame 4 and the vacuum valve assembly 5, the diameter of the locking nut 54 is larger than the diameter of the. The connecting shaft is used for promoting the rubber suction nozzle 31, the vacuum valve assembly 5 and the linkage plate frame 4 to keep synchronous movement, and meanwhile, the locking nut 54 can prevent the linkage plate frame 4 and the connecting shaft 52 from shaking in the movement process.

As can be seen, the gangway frame 4 is bent, and the gangway frame 4 includes a horizontal portion 42 horizontally disposed, and both ends of the horizontal portion 42 are provided with vertical portions 43 parallel to each other and extending downward, and the vacuum housing 6 is disposed between the vertical portions 43.

Obviously, the vacuum generator device 7 comprises a vacuum generator 71, one end of the vacuum generator 71 is connected with the second connecting valve 63 at the lower end of the polymerization chamber 61 through a second pneumatic assembly 72, the other end of the vacuum generator 71 is connected with a compressed gas port 74 arranged outside the support housing 1 through a second air pipe 73, and a pressure gauge 75 and a hydraulic access 86 for accessing an external hydraulic station pipe are respectively arranged at two sides of the compressed gas port 74. The second pneumatic assembly 72 is identical in construction to the first pneumatic assembly 53.

Further, the driving assembly 8 includes a driving cylinder 81, the driving cylinder 81 is fixed on a supporting base 82 installed on the inner wall of the supporting housing 1, and the driving cylinder 81 is connected with a transverse pressing rod 84 arranged to cross the driving shaft 83 through a driving shaft 83, one end of the transverse pressing rod 84 is locked on the driving shaft 83 at the upper and lower sides thereof by nuts 85, and the other end of the transverse pressing rod 84 is connected with the inner side of the vertical portion 43 of the gangboard frame 4. The driving oil cylinder is a hydraulic oil cylinder, and the suction nozzle tray assembly 3 can bear larger and heavier workpieces by utilizing the characteristics of stability and large pulling force and pushing force of the hydraulic oil cylinder.

In detail, the driving cylinder 81 communicates with a hydraulic inlet 86 provided outside the support case 1.

Preferably, the upper end surface of the supporting housing 1 is provided with a polishing surface 12, a stopper assembly 13 capable of limiting the lifting range of the rubber suction nozzle 31 is arranged between any two adjacent rubber suction nozzles 31, and the stopper assembly 13 comprises an upper stopper 131 abutting against the outer side of the lower end of the rubber suction nozzle 31 and a lower stopper 132 abutting against the upper end of the linkage plate frame 4. The finish grinding surface 12 is made of a heat treatment hardening material, the surface is parallel to the bottom surface in finish grinding, the machining precision is guaranteed, the limit block assembly 13 limits the lifting range of the suction nozzle tray assembly 3, and the suction nozzle tray assembly 3 can be prevented from being too high or too low in lifting.

Specifically, the through hole 11 is formed between two adjacent stopper assemblies 13, the upper stopper 131 is disposed obliquely, and the lower stopper 132 is formed on the end surface of the upper end inside of the support housing 1.

The principle of the embodiment is as follows: when the driving component 8 is jacked up, the suction nozzle tray component 3 is pushed onto the finish grinding surface 12, a workpiece can be placed at the moment, because the rubber suction nozzles 31 are made of rubber materials with small elastic modulus and strong restorability, the workpiece can be attached even if the surface of the workpiece is uneven, at the moment, the vacuum generator device 7 is opened, all the rubber suction nozzles 31 are exhausted, a vacuum state is formed, so that all the rubber suction nozzles 31 attached to the workpiece can tightly suck the workpiece, the rubber suction nozzles 31 not tightly sucking the workpiece can be automatically closed due to the arrangement of the vacuum valve component 5, the problem that the workpiece is not tightly sucked due to air leakage, the vacuum pressure is insufficient, and the workpiece grabbing is influenced is solved, after the workpiece is tightly sucked, the driving component 8 tensions the workpiece downwards, the workpiece is attached to the finish grinding surface 12, and the machining.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Although the terms of the support housing 1, the through hole 11, the fine grinding surface 12, the stopper assembly 13, the upper stopper 131, the lower stopper 132, the air-permeable buckle 2, the suction nozzle tray assembly 3, the rubber suction nozzle 31, the linkage plate frame 4, the insertion hole 41, the horizontal portion 42, the vertical portion 43, the vacuum valve assembly 5, the vacuum check valve 51, the connecting shaft 52, the first pneumatic assembly 53, the first pneumatic quick connector 531, the first air pipe 532, the second pneumatic quick connector 533, the locking nut 54, the vacuum housing 6, the polymeric cavity 61, the first connecting valve 62, the second connecting valve 63, the vacuum generator 7, the vacuum generator 71, the second pneumatic assembly 72, the second air pipe 73, the compressed air port 74, the pressure gauge 75, the driving assembly 8, the driving cylinder 81, the support base 82, the driving shaft 83, the transverse pressing rod 84, the nut 85, the hydraulic inlet 86, etc. are used more frequently, but does not exclude the possibility of using other terms. These terms are used merely to more conveniently describe and explain the nature of the present invention; they are to be construed in a manner that is inconsistent with the spirit of the invention.

Claims

1. The utility model provides a vacuum chuck, is including support casing (1) that has the inner chamber, support casing (1) upper end have a plurality of through-holes (11) that are the rectangle array and arrange, the lower extreme is uncovered and through the ventilative buckle that can open and shut and seals (2), the activity is equipped with suction nozzle tray assembly (3) in the inner chamber of support casing (1), suction nozzle tray assembly (3) rubber suction nozzle (31) that have a plurality of cavitys and arrange that are the rectangle array, rubber suction nozzle (31) respectively with through-hole (11) one-to-one and each rubber suction nozzle (31) respectively the activity peg graft in through-hole (11), just rubber suction nozzle (31) upper end and the up end of support casing (1) its characterized in that, suction nozzle tray assembly (3) have linkage grillage (4) that are arranged in support casing (1) inner chamber, linkage grillage (4) in be equipped with vacuum valve subassembly (5) that are linked together with each rubber suction nozzle (31) respectively and flush ) The utility model discloses a vacuum pump, linkage grillage (4) lower extreme open and close through vacuum casing (6) that have polymerization cavity (61), vacuum valve subassembly (5) lower extreme and polymerization cavity (61) link to each other, and linkage grillage (4) lower extreme be equipped with polymerization cavity (61) be linked together and fix vacuum generator device (7) at vacuum casing (6) lower extreme, just linkage grillage (4) and support casing (1) between be equipped with drive assembly (8) that can drive the vertical lift of linkage grillage (4).

2. The vacuum chuck as claimed in claim 1, wherein the vacuum valve assembly (5) comprises a plurality of vacuum check valves (51) respectively located in the ganged plate frame (4), the upper ends of the vacuum check valves (51) are respectively connected with the rubber suction nozzle (31) through connecting shafts (52), and the lower ends of the vacuum check valves (51) are connected with the first connecting valve (62) at the upper end of the polymerization cavity (61) through a first pneumatic assembly (53).

3. The vacuum chuck as claimed in claim 2, wherein the first pneumatic assembly (53) comprises a first pneumatic quick coupling (511), the first pneumatic quick coupling (511) is connected with the lower end of the vacuum check valve (51) by a screw thread, and the first pneumatic quick coupling (511) is connected with a second pneumatic quick coupling (513) inserted into the first connecting valve (62) of the polymerization chamber (61) through a first air pipe (512).

4. The vacuum chuck as claimed in claim 3, wherein the connecting shaft (52) is inserted into the insertion hole (41) at the upper end of the yoke (4), one end of the connecting shaft (52) positioned at the upper end of the linkage plate frame (4) is rotationally connected with the lower end of the rubber suction nozzle (31) in a clamping way, the diameter of one end of the connecting shaft (52) positioned at the upper end of the linkage plate frame (4) is larger than that of the inserting hole (41), and the connecting shaft (52) is positioned at the lower end of the linked plate frame (4) and is connected with the vacuum one-way valve (51), and the circumferential outer side of the connecting shaft (52) between the lower end of the linkage plate frame (4) and the vacuum valve component (5) is sleeved with a locking nut (54), the diameter of the locking nut (54) is larger than that of the inserting hole (41), and the upper end surface of the locking nut (54) is in close contact with the inner side surface of the upper end of the linkage plate frame (4).

5. Vacuum chuck according to claim 4, characterized in that said gangway plate frame (4) is curved, and said gangway plate frame (4) comprises a horizontal portion (42) arranged horizontally, and two ends of said horizontal portion (42) are provided with vertical portions (43) extending downwards and parallel to each other, and said vacuum housing (6) is arranged between said vertical portions (43).

6. The vacuum chuck as claimed in claim 5, wherein the vacuum generator device (7) comprises a vacuum generator (71), one end of the vacuum generator (71) is connected with the second connecting valve (63) at the lower end of the polymerization chamber (61) through a second pneumatic assembly (72), the other end of the vacuum generator (71) is connected with a compressed gas port (74) arranged outside the supporting shell (1) through a second air pipe (73), and a pressure gauge (75) and a hydraulic inlet (86) for connecting to an external hydraulic station pipeline are respectively arranged on two sides of the compressed gas port (74).

7. The vacuum chuck as claimed in claim 6, wherein the driving assembly (8) comprises a driving cylinder (81), the driving cylinder (81) is fixed on a supporting base (82) installed on the inner wall of the supporting shell (1), the driving cylinder (81) is connected with a transverse pressure lever (84) crossed with the driving shaft (83) through the driving shaft (83), the upper side and the lower side of one end of the transverse pressure lever (84) are locked on the driving shaft (83) through nuts (85), and the other end of the transverse pressure lever (84) is connected with the inner side of the vertical part (43) of the linked plate frame (4).

8. Vacuum chuck according to claim 7, wherein said actuating cylinder (81) communicates with a hydraulic inlet (86) arranged outside the support housing (1).

9. The vacuum chuck as claimed in claim 1, wherein the supporting housing (1) has a polishing surface (12) on the upper end surface thereof, a limit block assembly (13) for limiting the lifting range of the rubber suction nozzle (31) is disposed between any two adjacent rubber suction nozzles (31), and the limit block assembly (13) comprises an upper limit portion (131) abutting against the outer side of the lower end of the rubber suction nozzle (31) and a lower limit portion (132) abutting against the upper end of the linkage plate frame (4).

10. The vacuum chuck according to claim 9, wherein the through hole (11) is formed between two adjacent stopper block assemblies (13), the upper stopper portion (131) is disposed obliquely, and the lower stopper portion (132) is formed on the inner end surface of the upper end of the support housing (1).