CN217493051U - Beam shaping system for water jet guiding high-power laser and application processing device thereof - Google Patents
Beam shaping system for water jet guiding high-power laser and application processing device thereof Download PDFInfo
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- CN217493051U CN217493051U CN202221587570.1U CN202221587570U CN217493051U CN 217493051 U CN217493051 U CN 217493051U CN 202221587570 U CN202221587570 U CN 202221587570U CN 217493051 U CN217493051 U CN 217493051U
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Abstract
The utility model provides a beam shaping system of water jet guide high power laser and use processingequipment thereof, including the laser instrument that sets gradually, the group, the focusing unit of beam expanding lens, set up the beam shaping unit between the group and the focusing unit of beam expanding lens, beam shaping unit is the flat top light distribution that the energy is even, the burnt length of depth with laser energy from the gaussian distribution plastic. The focused multi-focus light path has uniform energy after passing through the beam shaping unit, reduces the energy density of a single focus, does not cause optical breakdown due to overhigh energy density in the coupling and transmission process with the water beam optical fiber, and can improve the total energy of the water beam coupled laser. By adopting the beam shaping method and the processing system of the water jet guided high-power laser, the high-power-density laser can be applied to the water-guided laser processing technology, the radial and axial homogenization degree of the beam is improved, the coupling efficiency and the system robustness are effectively ensured, and the processing quality and the processing efficiency are improved.
Description
Technical Field
The utility model relates to a water guide laser processing technology field, concretely relates to beam shaping system of water jet guide high power laser and use processingequipment thereof.
Background
The principle of the water-guided laser processing is that a micron-sized water beam optical fiber is generated by using a coupling cavity, laser is coupled with a water beam, total reflection occurs at an interface of water and air and is restrained in the water beam optical fiber, and the water beam optical fiber guides the laser to act on the surface of a workpiece to realize processing. The high-energy laser beam can ablate and process materials, the water beam can wash the surface of the workpiece to take away slag and cool the workpiece, and the water-guided laser processing has the advantages of high processing speed, high precision and small thermal stress.
The shortest laser pulse width that current water leads laser processing used is at the nanosecond level, but along with the requirement of market machining precision, machining efficiency is higher and higher, and water leads laser machining efficiency and quality to have the demand that promotes. High power laser such as Q-switched sub-nanosecond high power density laser, Q-switched narrow pulse width laser, mopa narrow pulse width laser and picosecond laser (wavelength 1064nm, 532nm, 355nm and 266nm, pulse width 300ps-20ns, power density 10 8 -10 12 W/cm 2 ) The method has the advantages of high power density, short optical pulse width and large breakdown threshold value. The high power density can improve the processing speed; the action time of each pulse and the workpiece is short when the pulse width is short, the heat influence on the processing surrounding area is small, and the processing precision can be improved; when the breakdown threshold value is large, optical breakdown is not easy to occur, the nonlinear effect can be reduced, and the processing quality is ensured to be improved. If the high-power-density laser can be coupled into the water beam optical fiber and the material is removed by a mechanism mainly based on gasification or plasma, the high-power-density laser can realize better processing quality and ensure higher processing efficiency, and is beneficial to pushing the water-guided laserThe application of the processing technology in the field of high-precision processing.
The existing water-guided laser processing system generally comprises a collimation and beam expansion system, a focusing lens, a coupling unit and a nozzle, wherein the energy distribution of a laser beam is Gaussian distribution in the transmission process, and the homogenization degree of the Gaussian distributed laser beam on the cross section of a water beam optical fiber is low, so that the processing quality of a workpiece is low and a cutting seam is not parallel. The laser beam has only one focus after being focused by the focusing lens, the laser beam with a single focus is coupled with the water beam through the coupling cavity and the nozzle, the energy concentration density is high, the nonlinear effect is easily generated by optical breakdown, and a large amount of laser energy is lost. And the high-power laser has large energy, and once optical breakdown occurs, a strong nonlinear effect is generated, so that the processing quality is seriously influenced. Therefore, the existing water-guided laser processing system cannot be suitable for high-power laser, and the high-power laser cannot achieve a good processing effect by adopting the system.
Based on the above disadvantages, if a beam shaping system for guiding high-power laser by water jet and a processing device using the system can be designed, the high-power laser can be applied to a water-guided laser system, the problems of low homogenization degree of the beam, high energy density of a single focus and the like can be solved, the coupling adjustment efficiency, the homogenization of the energy of the coupled beam and the robustness of the water-guided system can be effectively improved, the processing quality, the processing efficiency and the processing precision of the water-guided laser technology can be improved, and the popularization and the industrialized application of the water-guided laser processing technology in the high-precision and high-efficiency processing field can be promoted.
SUMMERY OF THE UTILITY MODEL
The utility model provides a beam shaping system of water jet guide high power laser and use processingequipment thereof can be applied to water guide laser processing technique with high power density laser, optimizes beam energy distribution, improves the radial and axial homogenization degree of light beam, effectively guarantees processingquality, machining efficiency and machining precision. In order to realize the technical purpose, the technical effect is achieved, and the utility model discloses a following technical scheme solves above-mentioned problem:
the beam shaping system of the water jet guided high-power laser comprises a laser, a beam expander set and a focusing unit which are sequentially arranged, wherein a beam shaping unit is arranged between the beam expander set and the focusing unit, and the beam shaping unit shapes laser energy from Gaussian distribution into flat-top light distribution with uniform energy and long focal depth.
In the scheme, the laser beam enters the beam shaping unit through the beam expander set, and the beam shaping unit and the focusing unit adjust the laser beam to enable the laser energy to be shaped from Gaussian distribution into flat-top light distribution with better radial uniformity, better axial uniformity and longer focal depth. The shaped light beam is more uniformly distributed in the radial direction and the axial direction compared with the Gaussian distribution energy intensity, and can be more effectively and stably coupled into the water beam optical fiber.
The energy of the shaped light beam is distributed more uniformly in the radial direction and the axial direction, the peak value of single-point energy can be reduced, the occurrence of optical breakdown can be reduced, and the tolerance of the device to high-power-density laser is improved. The high-power-density laser has high energy and short pulse width, can effectively improve the processing speed, reduces the heat influence of the processing surrounding area and improves the processing precision.
Furthermore, the beam shaping unit adopts a Galileo aspheric lens group, a laser diffraction beam splitter or a pi shape beam shaping lens group/pishaper beam shaping lens group.
Further, the Galileo aspheric lens group comprises a Galileo aspheric plano-concave lens and a Galileo aspheric plano-convex lens which are arranged in front and back.
Furthermore, the pi shape/pishaper beam shaping mirror group comprises two optical components which are arranged in front and back, the first optical component introduces spherical aberration required by energy redistribution, and the second optical component compensates aberration.
Furthermore, the focusing unit adopts a long-focus depth lens, a spherical lens, a digital axicon, a multi-curvature surface combined refraction lens, a refraction and diffraction lens or a refraction/diffraction lens group. The curvature radiuses of the front and rear surfaces of the long-focus-depth lens are obtained by a nonlinear curve fitting method by taking a phase distribution function of the logarithmic axicon as an objective function.
Further, a meniscus lens group is arranged between the beam expanding lens group and the light beam shaping unit, and the meniscus lens group comprises a negative focal power meniscus convex lens and a positive focal power meniscus concave lens which are arranged in front and back.
Furthermore, the beam expander set comprises a beam expander and a collimating lens which are arranged in sequence.
Furthermore, the laser adopts a Q-switched subnanosecond high-power-density laser, a Q-switched narrow-pulse-width laser, a mopa narrow-pulse-width laser or a picosecond laser generator, and the output power density of the laser reaches 10 8 -10 12 W/cm 2 Magnitude.
The processing device of the beam shaping system for guiding high-power laser by water jet comprises a laser, a beam expander set, a beam shaping unit, a focusing unit and a laser coupling device which are arranged in sequence; the beam shaping unit shapes the laser energy from Gaussian distribution into flat-top distribution with high energy homogenization degree and long focal depth; the laser coupling device is provided with a high-pressure liquid supply system to input high-pressure water flow.
Furthermore, the output end of the laser coupling device is provided with a workbench unit, the workbench unit comprises a supporting platform, and a water tank which is arranged on the supporting platform and used for placing a workpiece; the water inlet end of the high-pressure liquid supply system is connected with the water tank, and the water outlet end of the high-pressure liquid supply system is connected with the laser coupling device to provide stable stepless pressure-regulating high-pressure water flow.
The utility model has the advantages and effects that:
1. water jet guide high power laser's beam shaping system and applied processingequipment thereof, adopt and transfer Q subnanosecond high power density laser, transfer Q narrow pulse width laser, mopa narrow pulse width laser or high power density laser generator such as picosecond laser. The high-power-density laser has the advantages of high power density, short optical pulse width and large breakdown threshold. The high-power-density laser is applied to the water-guide laser processing, and the processing efficiency and the processing precision can be effectively improved by combining the advantages of the water-guide laser processing.
2. Water jet guide high power laser's beam shaping system and use processingequipment thereof, set up beam shaping unit and focus unit and adjust the light path, make laser energy from the gaussian distribution plastic for radial and more even, the longer flat top light beam of focal depth of axial distribution, with water beam fiber coupling, energy distribution punctures in the reducible optics of a plurality of focuses. The scheme optimizes and homogenizes the energy distribution of the laser on the cross section of the water beam optical fiber, improves the tolerance of the water-guide laser system to high-power laser, and enables the high-power laser to be better applied to the water-guide laser processing technology.
Drawings
Fig. 1 is a schematic view of a beam shaping system according to embodiment 1 of the present invention;
fig. 2 is a schematic view of a beam shaping system according to embodiment 2 of the present invention;
fig. 3 is a schematic view of a beam shaping system according to embodiment 3 of the present invention;
fig. 4(a) is a dot diagram of the focal light path f 1;
fig. 4(b) is a dot diagram of the focal light path f 2;
fig. 5 is a schematic diagram of a machining device of a beam shaping system using a water jet guided high power laser.
And (3) identifying the figure number: 1. the device comprises a laser, 2, a beam expander group, 21, a beam expander, 22, a collimating mirror, 3, a focusing unit, 31, a long focal depth lens, 32, a spherical lens, 33 and a logarithmic axis pyramid lens;
4. the device comprises a beam shaping unit, 41, a Galileo aspheric lens group, 411, a Galileo aspheric plano-convex lens, 412, a Galileo aspheric plano-concave lens, 42, a laser diffraction beam splitter and 43, a pi shape/pishaper beam shaping lens group; 5. a meniscus lens group 51, a negative power meniscus concave lens 52, a positive power meniscus convex lens,
6. a laser coupling device 61, a nozzle; 7. the high-pressure water supply system comprises a high-pressure liquid supply system 71, a water tank 72, a high-pressure water suction pump 73, a one-way valve 74, an accumulator 75, an overflow valve 76 and a high-precision filter; 8. a workbench unit 81, a support platform 82 and a water tank.
Detailed Description
The technical solution in the embodiment of the present invention is clearly and completely described below with reference to the drawings in the embodiment of the present invention. The specific embodiments described herein are merely illustrative of the invention and are not intended to be limiting of the invention.
Example 1
A beam shaping system for guiding high-power laser by water jet, as shown in fig. 1, includes a laser 1, a beam expander lens group 2, a meniscus lens group 5 (optionally mounted as required), a beam shaping unit 4, and a focusing unit 3, which are sequentially arranged.
The laser 1 is selected from Q-switched subnanosecond high-power density laser, Q-switched narrow pulse width laser, mopa narrow pulse width laser or picosecond laser with the power density of 10 8 -10 12 W/cm 2 High power density laser generator of order of magnitude. The beam expander set 2 comprises a beam expander 21 and a collimating lens 22 which are arranged in sequence, the beam expander 21 expands the beam waist radius of the light beam and reduces the divergence angle, the collimating lens changes the divergent light after beam expansion into plane wavefront light with parallel equal diameter, and the laser light passing through the beam expander set 2 enters the meniscus lens set 7 as parallel light.
The meniscus lens group 5 comprises a negative focal power meniscus concave lens 51 and a positive focal power meniscus convex lens 52 which are arranged in front and back, and the meniscus lens group 5 is used for focusing to enable the laser beam to be accurately focused and enter the beam shaping unit 4.
The beam shaping unit 4 is a Galileo aspheric lens group 41, which includes a Galileo aspheric plano-convex lens 411 and a Galileo aspheric plano-concave lens 412 sequentially arranged. The collimated light beam is divided and homogenized by the galileo aspheric plano-convex mirror 411, and the phase of the galileo aspheric plano-concave mirror 412 is adjusted to output the light to the focusing unit 3 in parallel.
The focusing unit 3 can be one of a long focal depth lens 31, a spherical lens 32, an axicon 33, a multi-curvature surface combined refractive lens 34, a catadioptric lens 35 and a refractive/diffractive lens group 36. When the telephoto lens 31 is selected, the lens center thickness t is 12.5mm, the lens front curvature radius s1 is 351.7mm, the lens rear curvature radius s2 is-645.5 mm, and the focal length f is 450 mm. The focusing unit 3 can focus the uniform light beam output by the galilean aspheric lens group 51 into a light beam with more uniform radial and axial distribution and longer focal depth, and the light beam enters the laser coupling device 4 in a focal point lattice form to be coupled with the water beam optical fiber.
When the focusing unit 3 employs the long-focus-depth lens 31, the spherical lens 32, or the logarithmic pyramid lens 33, the focal point lattice f1 of the outgoing light beam is as shown in fig. 4 (a). When the focusing unit 3 employs the multi-curvature surface combination refractive lens 34, the catadioptric lens 35, or the refraction/diffraction lens group 36, the focal point lattice f2 of the outgoing light beam is as shown in fig. 4 (b).
The focused multi-focus light path after passing through the beam shaping unit 4 has uniform energy, and cannot cause optical breakdown due to overhigh energy density in the coupling and transmission process with the water beam optical fiber.
Example 2
As shown in fig. 2, the present embodiment is different from embodiment 1 in that: the beam shaping unit 4 is a laser diffraction beam splitter 42, and the focusing unit 3 is a long focal depth lens 31, a spherical lens 32, a axicon 33, a multi-curvature surface combined refraction lens 34, a refraction and diffraction lens 35 or a refraction/diffraction lens group 36. . The laser diffraction beam splitter 52 can also adjust and divide the single laser beam into a plurality of laser beams, the multi-beam laser output focusing unit 3 focuses the laser beams into a multi-focus light path, and the multi-beam laser output focusing unit outputs the multi-focus light path in a focus dot matrix form to be coupled with the water beam optical fiber.
Example 3
As shown in fig. 3, the present embodiment is different from embodiment 1 in that: the light beam shaping unit 4 adopts a pi shape/shape light beam shaping mirror group 43, and the focusing unit 3 adopts a long focal depth lens 31, a spherical lens 32, a plurality of axicon lenses 33, a multi-curvature surface combined refraction lens 34, a refraction and diffraction lens 35 or a refraction/diffraction lens group 36. The pi shape/shape beam shaping mirror group 43 divides the single laser into multiple beams, which are output to the focusing unit 3 to be focused into a multi-focus light path and output in a focus dot matrix form to be coupled with the water beam fiber.
A machining device using a beam shaping system of a water jet guided high power laser, comprising the beam shaping system of any one of the above embodiments, as shown in fig. 5. The focusing unit 3 outputs laser to the laser coupling device 6, and the laser coupling device 6 is provided with a high-pressure liquid supply system 7 to input high-pressure water flow. The output end of the laser coupling device 6 is provided with a worktable unit 8 for fixing a workpiece 9.
The working table unit 8 comprises a supporting platform 81 and a water tank 82, the supporting platform 81 is installed at the output end of the laser coupling device 6 corresponding to the working position, and the water tank 82 is installed at the supporting platform 81 for recycling waste water. The workpiece 9 is mounted in the water tank 82 and is processed. The water inlet end of the stable high-pressure liquid supply system 7 is connected with the water tank 82, and the water outlet end is connected with the coupling cavity of the laser coupling device 6 to provide stable stepless pressure-regulating high-pressure water flow.
The high-pressure liquid supply system 7 comprises a main liquid supply loop formed by sequentially connecting a water tank 71, a high-pressure water suction pump 72, a one-way valve 73 and an energy accumulator 74, a water outlet pipeline of the main liquid supply loop is connected to the laser coupling device 6 to output stable high-pressure water flow, and a water inlet pipeline is connected with a water tank 82 to return cooling water; an overflow valve 75 is arranged between the water outlet of the high-pressure water suction pump 73 and the water tank 71 to form a pressure regulating loop, so that the main liquid supply loop is kept stable and overload is prevented. The water outlet pipeline and the water inlet pipeline are both provided with high-precision filters 66 for filtering the fluid.
The processing device of the beam shaping system for guiding the high-power laser by adopting the water jet comprises the following steps:
1): clamping the workpiece 9 at a working position corresponding to the output end of the laser coupling device 6;
2): starting a high-pressure liquid supply system 7 to convey high-pressure water to a laser coupling device 6, and converting the high-pressure water into stable water beams by the laser coupling device 6 for outputting;
3): after the water beam is stable, the laser 1 is turned on to output high-power-density laser;
4): the laser beam is collimated by the beam expander set 2, focused by the meniscus lens set 5 and enters the beam shaping unit 4 as parallel light;
5): the laser beam is shaped by the beam shaping unit 4, the laser energy is shaped from Gaussian distribution into a flat-top beam with uniformly distributed energy, and the shaped beam enters the focusing unit 3;
6): the laser beam is focused by the focusing unit 3 to form a light beam with uniform radial and axial distribution and long focal depth, and the light beam enters the laser coupling device 6 to be coupled into the water beam optical fiber;
7): the homogenized light beam is guided by the water beam optical fiber and transmitted to the surface of the workpiece 9 for ablation processing, the water beam washes the surface of the workpiece, slag is taken away, and the workpiece is cooled;
8): and after the machining is finished, the laser 1 and the high-pressure hydraulic system 7 are sequentially turned off to finish the machining.
The utility model discloses compare with current water guide laser processing method, be applied to water guide laser processing with high power density, short pulse width laser, combine its advantage with water guide laser processing, the work piece quality of processing out is better, and machining precision and machining efficiency are higher. Through the shaping system consisting of the meniscus lens group and the beam shaping unit, the energy distribution of the laser on the cross section of the water beam optical fiber is more uniform in the radial direction and the axial direction, the focal depth is longer, the coupling efficiency and the robustness of the water beam are improved, and meanwhile, the processing quality and the processing precision of a workpiece can be improved. After passing through the beam shaping unit, the multi-focus light path formed by the focusing unit can realize multi-focus coupling, reduce the energy density of a single focus and improve the total energy of the water beam coupled laser. The utility model discloses can realize the effective coupling of high power laser and water beam optical fiber, improve the machining efficiency of work piece.
The embodiments of the present invention are described in detail with reference to the drawings, but the present invention is not limited to the described embodiments. Various changes, modifications, substitutions and alterations to these embodiments may be made without departing from the principles and spirit of the invention, which is within the scope of the invention.
Claims (10)
1. The beam shaping system of water jet guide high power laser, including laser instrument (1), the beam expander group (2), the focusing unit (3) that set gradually, its characterized in that:
a beam shaping unit (4) is arranged between the beam expander set (2) and the focusing unit (3), and the beam shaping unit (4) shapes laser energy from Gaussian distribution into flat-top light distribution with uniform energy and long focal depth.
2. The beam shaping system of a water jet guided high power laser according to claim 1, wherein: the beam shaping unit (4) adopts a Galileo aspheric lens group (41), a laser diffraction beam splitter (42) or a pi shape/pishaper beam shaping lens group (43).
3. The beam shaping system of a water jet guided high power laser of claim 2, wherein: the Galileo aspheric lens group (41) comprises a Galileo aspheric plano-concave lens (411) and a Galileo aspheric plano-convex lens (412) which are arranged in front and back.
4. The beam shaping system of a water jet guided high power laser according to claim 2, wherein: the pi shape/shape beam shaping mirror group (43) comprises two optical components which are arranged in front and behind, wherein the first optical component introduces spherical aberration required by energy redistribution, and the second optical component compensates aberration.
5. The beam shaping system of a water jet guided high power laser according to claim 1, wherein: the focusing unit (3) adopts a long focal depth lens (31), a spherical lens (32), a numerical axis pyramid mirror (33), a multi-curvature surface combined refraction lens (34), a refraction and diffraction lens (35) or a refraction/diffraction lens group (36).
6. The beam shaping system of a water jet guided high power laser according to claim 1, wherein: a meniscus lens group (5) is arranged between the beam expanding lens group (2) and the light beam shaping unit (4), and the meniscus lens group (5) comprises a negative focal power meniscus convex lens (51) and a positive focal power meniscus concave lens (52) which are arranged in front and back.
7. The beam shaping system of a water jet guided high power laser according to claim 1, wherein: the beam expander set (2) comprises a beam expander (21) and a collimating lens (22) which are arranged in sequence.
8. The beam shaping system of a water jet guided high power laser according to claim 1, wherein: the laser (1) adopts a Q-switched subnanosecond high-power density laser, a Q-switched narrow pulse width laser, a mopa narrow pulse width laser or a picosecond laser generator, and the output power density of the laser reaches 10 8 -10 12 W/cm 2 Magnitude.
9. A processing device of water jet guided high-power laser, which adopts the beam shaping system of water jet guided high-power laser as claimed in any one of claims 1 to 8, and is characterized in that:
the device comprises a laser (1), a beam expander set (2), a beam shaping unit (4), a focusing unit (3) and a laser coupling device (6) which are arranged in sequence; the beam shaping unit (4) shapes the laser energy from Gaussian distribution to flat-top distribution with high energy homogenization degree and long focal depth; the laser coupling device (6) is configured with a high-pressure liquid supply system (7) to input high-pressure water flow.
10. The device for processing a water jet guided high power laser according to claim 9, wherein: the output end of the laser coupling device (6) is provided with a workbench unit (8), the workbench unit (8) comprises a supporting platform (81), and a water tank (82) which is arranged on the supporting platform (81) and used for placing a workpiece (9); the water inlet end of the high-pressure liquid supply system (7) is connected with the water tank (82), and the water outlet end of the high-pressure liquid supply system is connected with the laser coupling device (6) to provide stable stepless pressure-regulating high-pressure water flow.
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