CN201373947Y - Ultraviolet laser beam shaping device - Google Patents
Ultraviolet laser beam shaping device Download PDFInfo
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- CN201373947Y CN201373947Y CN200920135606U CN200920135606U CN201373947Y CN 201373947 Y CN201373947 Y CN 201373947Y CN 200920135606 U CN200920135606 U CN 200920135606U CN 200920135606 U CN200920135606 U CN 200920135606U CN 201373947 Y CN201373947 Y CN 201373947Y
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- laser
- beam shaping
- violet laser
- laser light
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Abstract
The utility model discloses an ultraviolet laser beam shaping device, which comprises an ultraviolet laser source, a focusing system, a laser beam expander and a laser beam shaper, wherein the laser beam expander is arranged at a port of an emergent surface of the ultraviolet laser source, and ultraviolet laser emits to the following laser beam shaper after being expanded by the laser beam expander and then enters the focusing system. Laser beams are changed into laser beams with uniform energy through the laser beam expander and the shaper, thereby obtaining fine processing effect during a working process and simultaneously increasing utilization rate of laser energy.
Description
Technical field
The utility model relates to a kind of laser beam shaping device, relates in particular to a kind of Ultra-Violet Laser machining beams apparatus for shaping.
Background technology
In the last few years, people increased substantially to the demand of consumer electronics product, had promoted the development of electronic products manufacturing technology.At this wherein, the manufacturing of PCB (printed circuit board (PCB)) develops towards the direction of accurate and microfabrication, and these needs have well been satisfied in Laser Processing.Laser Processing is " non-contact type processing ", compares with traditional mechanical processing technique, has a lot of advantages: the cutting slit is little, and the smooth no burr of cut surface can not cause machinery extrusion or mechanical stress to material; Pollution-free to workpiece; Almost can process, guarantee that same batch processing effect is in full accord any material; The machining precision height, speed is fast, the efficient height.
Ultra-Violet Laser processing is real " cold working ", most of materials all have bigger absorptivity to ultraviolet light, because the ultraviolet photon energy is with respect to visible and the infrared photon energy is bigger, can directly destroy the molecular link of many non-metal material surfaces, make molecule break away from material, this mode can not produce high heat.The parts that process with this cold light treatment technology have smooth edges and MIN charing.And, short wavelength's characteristic of Ultra-Violet Laser itself has superiority to little processing of metal and polymkeric substance. and it can be focused on the point of the sub-micron order of magnitude, therefore can carry out the processing of trickle parts, even under not high pulse energy level, also can obtain very high energy density, carry out materials processing effectively.
But the laser that the Ultra-Violet Laser light source produces has Gaussian Energy Distribution, as shown in Figure 1, the spot center energy density height after the focusing, ambient energy density reduces gradually.For cutting processing, joint-cutting is middle owing to have high energy density, material is cut, and at the joint-cutting edge, because energy density is lower, material scorification occurs and causes the carbonization blackening, and cutting section has certain tapering, and for boring processing, the hole that the light beam of Gaussian Energy Distribution gets out is a bellmouth, these all be work in-process do not expect to obtain, especially require to have smooth hole for buried blind via at the bottom of.In addition, the energy density of Gauss's spot center has surpassed the absorption threshold value of material, the molecular link that the energy density that the edge is lower can not interrupt material again maybe can not make the material gasification, and they are not all made contributions to materials processing, have so just reduced the utilization factor of laser energy.
The utility model content
The technical matters that the utility model solves is: overcome prior art medium ultraviolet laser processing beam energy inequality, processing effect poor, reduced the technical matters of the utilization factor of laser energy simultaneously.
The technical scheme that the utility model is taked is: make up a kind of Ultra-Violet Laser light-beam forming unit, comprise Ultra-Violet Laser light source, focusing system, also comprise beam expanding lens, beam shaping mirror, described beam expanding lens places ultraviolet source exiting surface mouth, the Ultra-Violet Laser beam shaping mirror that incident follows closely after beam expanding lens expands bundle enters focusing system again.
The further technical scheme of the utility model technical solution problem is: described beam expanding lens is the Galileo telescope system.
The further technical scheme of the utility model technical solution problem is: described beam shaping mirror is an aspheric surface refractor group.
The further technical scheme of the utility model technical solution problem is: described beam shaping mirror comprises: first lens combination and second lens combination, described first lens combination is according to refraction law deviation light beam, be used for changing beam energy and distribute, described second lens combination is used for collimating the light beam by first's deviation.
The further technical scheme of the utility model technical solution problem is: described beam shaping mirror makes magnification along the non-homogeneous change of the direction of vertical optical axis, and is bigger near the magnification of axis, less away from the magnification of axis.
The further technical scheme of the utility model technical solution problem is: also comprise circular aperture, the laser behind beam shaping enters focusing system again by circular aperture.
The further technical scheme of the utility model technical solution problem is: all solid state laser or UV excimer laser that described Ultra-Violet Laser light source is a frequency tripling.
The technique effect of technical solutions of the utility model technical solution problem is: by making up a kind of Ultra-Violet Laser light-beam forming unit, laser beam is become the laser beam of energy even by beam expanding lens and shaping mirror, in process, obtain good processing effect, simultaneously, improve the utilization factor of laser energy.
Description of drawings
Laser beam energy distribution plan in the present technology of Fig. 1.
Fig. 2 is the utility model structural representation.
Fig. 3 is a laser beam energy distribution plan of the present utility model.
Embodiment
Below in conjunction with specific embodiments and the drawings technical solutions of the utility model are further specified:
As shown in Figure 2, a kind of Ultra-Violet Laser light-beam forming unit that the utility model makes up, comprise Ultra-Violet Laser light source 1, focusing system 5, also comprise beam expanding lens 2, beam shaping mirror 3, described beam expanding lens 2 places Ultra-Violet Laser light source 1 exiting surface mouth, the Ultra-Violet Laser beam shaping mirror 3 that incident follows closely after beam expanding lens 2 expands bundle enters focusing system 5 again.The optical axis of described beam expanding lens 2, beam shaping mirror 3 overlaps with laser beam axis.Described beam expanding lens 2 is the Galileo telescope system.During work, laser beam expands by beam expanding lens 2 restraints the multiple that the beam shaping mirror needs, the angle of divergence with laser beam reduces identical multiple simultaneously, follows beam expanding lens 2 closely and places beam shaping mirror 3 afterwards, the laser beam of Gaussian distribution is converted to the laser beam of flat-top distribution by beam shaping mirror 3.Described beam shaping mirror 3 is an aspheric surface refractor group, according to beam shaping mirror 3 desired launching spot size and beam expanding lens 2 placement locations, calculates the expansion bundle multiple that needs, i.e. the beam expanding lens of much expansion several times numbers is adopted in decision.
Be beam shaping mirror 3 after the beam expanding lens 2 of Ultra-Violet Laser light source 1 light-emitting window front end, if the distance of beam expanding lens 2 preceding minute surfaces and laser beam waist position 11 is z, the laser beam waist diameter is ω
0, beam shaping mirror 3 and then behind the beam expanding lens 2 is so can ignore distance between beam expanding lens 2 and the beam shaping mirror 3.
So, according to Gaussian beam diameter propagation formula, the input beam diameter at beam expanding lens 2 front surface places
If the only input beam diameter that beam shaping mirror 3 requires is W, then we select the expansion bundle multiple of beam expanding lens
For example, laser instrument position 11 with a tight waist is distance lasers light-emitting window z
1=420mm place (in the chamber), beam waist diameter 0.26mm, laser instrument light-emitting window minute surface z before the beam expanding lens
2=300mm, then z=z
1+ z
2=720mm can get ω=1.28mm according to formula (1) calculating, if the input beam diameter W=5mm that shaping mirror requires then has formula (2) to calculate and can get η=5/1.28 ≈ 4, so the expansion bundle multiple that needs is about 4 times.
As shown in Figure 2, described beam shaping mirror 3 comprises: first lens combination and second lens combination, described first lens combination are used for changing beam energy and distribute according to refraction law deviation light beam, and described second lens combination is used for collimating the light beam by first's deviation.Described beam shaping mirror 3 makes magnification along the non-homogeneous change of the direction of vertical optical axis, and is bigger near the magnification of axis, less away from the magnification of axis.
As shown in Figure 2, the utility model also comprises circular aperture 4, and the laser after 3 shapings of beam shaping mirror enters focusing system 5 again by circular aperture.Described circular aperture is a filtering device, utilize circular aperture 4 that original elliptical laser hot spot filter is circular laser facula, though the light beam center major part of beam shaping mirror 3 outgoing is that flat-top distributes in addition, but present precipitous energy decreases trend at the edge, circular iris helps filtering the precipitous energy decreases part of hot spot edge, to obtain a flat-top distribution light beam completely.
Described focusing system comprises the needed various beam steering arrangements of laser process equipment (catoptron, galvanometer etc.), and the focus lamp that focuses of the light beam into the spot size of application need.
Ultra-Violet Laser light source 1 described in the utility model is all solid state laser or the UV excimer laser of frequency tripling.
Above content be in conjunction with concrete preferred implementation to further describing that the utility model is done, can not assert that concrete enforcement of the present utility model is confined to these explanations.For the utility model person of an ordinary skill in the technical field, under the prerequisite that does not break away from the utility model design, can also make some simple deduction or replace, all should be considered as belonging to protection domain of the present utility model.
Claims (7)
1. Ultra-Violet Laser light-beam forming unit, comprise Ultra-Violet Laser light source, focusing system, it is characterized in that, also comprise beam expanding lens, beam shaping mirror, described beam expanding lens places Ultra-Violet Laser light source exiting surface mouth, the Ultra-Violet Laser beam shaping mirror that incident follows closely after beam expanding lens expands bundle enters focusing system again.
2, Ultra-Violet Laser light-beam forming unit according to claim 1 is characterized in that, described beam expanding lens is the Galileo telescope system.
3, Ultra-Violet Laser light-beam forming unit according to claim 1 is characterized in that, described beam shaping mirror is an aspheric surface refractor group.
4, laser beam shaping device according to claim 1, it is characterized in that described beam shaping mirror comprises: in order to the distribution of change beam energy and according to first lens combination of refraction law deviation light beam with in order to collimate by second lens combination of described deviation light beam.
5, laser beam shaping device according to claim 4 is characterized in that, described beam shaping mirror makes magnification along the non-homogeneous change of the direction of vertical optical axis, and is bigger near the magnification of axis, less away from the magnification of axis.
6, laser beam shaping device according to claim 1 is characterized in that, also comprises circular aperture, and the laser behind beam shaping enters focusing system again by described circular aperture.
7, according to the described Ultra-Violet Laser light-beam forming unit of above-mentioned arbitrary claim, it is characterized in that all solid state laser or UV excimer laser that described Ultra-Violet Laser light source is a frequency tripling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920135606U CN201373947Y (en) | 2009-03-11 | 2009-03-11 | Ultraviolet laser beam shaping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920135606U CN201373947Y (en) | 2009-03-11 | 2009-03-11 | Ultraviolet laser beam shaping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201373947Y true CN201373947Y (en) | 2009-12-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920135606U Expired - Lifetime CN201373947Y (en) | 2009-03-11 | 2009-03-11 | Ultraviolet laser beam shaping device |
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| CN (1) | CN201373947Y (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102628996A (en) * | 2012-03-31 | 2012-08-08 | 北京国科世纪激光技术有限公司 | Fundamental transverse mode laser beam shaping device and method |
| CN103592767A (en) * | 2013-10-30 | 2014-02-19 | 浙江大学 | Laser beam shaping device with double-free-form surface lens |
| CN109093251A (en) * | 2017-06-20 | 2018-12-28 | 上海微电子装备（集团）股份有限公司 | A kind of laser package device and packaging method |
| CN111624725A (en) * | 2020-04-22 | 2020-09-04 | 大族激光科技产业集团股份有限公司 | System for realizing zooming and light path shaping |
| CN116175967A (en) * | 2023-03-30 | 2023-05-30 | 深圳市智能派科技有限公司 | Light beam processing device for 3D printing and 3D printing system |
-
2009
- 2009-03-11 CN CN200920135606U patent/CN201373947Y/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102628996A (en) * | 2012-03-31 | 2012-08-08 | 北京国科世纪激光技术有限公司 | Fundamental transverse mode laser beam shaping device and method |
| CN102628996B (en) * | 2012-03-31 | 2014-03-26 | 北京国科世纪激光技术有限公司 | Fundamental transverse mode laser beam shaping device and method |
| CN103592767A (en) * | 2013-10-30 | 2014-02-19 | 浙江大学 | Laser beam shaping device with double-free-form surface lens |
| CN109093251A (en) * | 2017-06-20 | 2018-12-28 | 上海微电子装备（集团）股份有限公司 | A kind of laser package device and packaging method |
| CN109093251B (en) * | 2017-06-20 | 2020-08-04 | 上海微电子装备（集团）股份有限公司 | Laser packaging device and packaging method |
| CN111624725A (en) * | 2020-04-22 | 2020-09-04 | 大族激光科技产业集团股份有限公司 | System for realizing zooming and light path shaping |
| CN116175967A (en) * | 2023-03-30 | 2023-05-30 | 深圳市智能派科技有限公司 | Light beam processing device for 3D printing and 3D printing system |
| CN116175967B (en) * | 2023-03-30 | 2024-08-16 | 深圳市智能派科技有限公司 | Light beam processing device for 3D printing and 3D printing system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20091230 |