CN201645050U - Equipment for large-width precise laser scribing and dotting - Google Patents
Equipment for large-width precise laser scribing and dotting Download PDFInfo
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- CN201645050U CN201645050U CN 201020149999 CN201020149999U CN201645050U CN 201645050 U CN201645050 U CN 201645050U CN 201020149999 CN201020149999 CN 201020149999 CN 201020149999 U CN201020149999 U CN 201020149999U CN 201645050 U CN201645050 U CN 201645050U
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- laser
- dynamic focusing
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- expanding lens
- dotting
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- 238000000034 method Methods 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 6
- 239000011521 glass Substances 0.000 abstract description 4
- 239000000463 material Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model provides equipment for large-width precise laser scribing and dotting. The output end of a laser is provided with a beam expander, the output end of which is provided with a dynamic focusing lens, and the output end of the dynamic focusing lens is connected with a vibrating lens; the beam emitted by the laser is injected to the beam expander which outputs parallel beam, and the parallel beam passes through the dynamic focusing lens and then enters the vibrating lens, and the focus of the beam is distributed on a processing workpiece of a vacuum adsorbing platform. The technical scheme is as follows: the dynamic focusing lens is adopted to lead a laser processing surface to be a plane, the high-efficiency path planning algorithm completes the planning of ten thousands of graphic elements within 25 seconds, and the laser scribing or dotting can be finished within several seconds with high efficiency and high precision. The equipment has a processing width of being two hundred and fifty thousand square millimeter, completes the processes of dotting and scribing at time, is quick in speed and high in precision, and applicable to processing ITO glasses or films.
Description
Technical field
The utility model relates to a kind of laser and does the etching apparatus at quarter, the equipment that relates in particular to a kind of large-breadth precise laser scribing and get ready.
Background technology
At present, be used for groove in the practical application and have following three kinds with the method for getting ready:
1) method for chemially etching: make a film according to figure earlier, prepare the chemical attack medicine, carry out several days corrosion then, form institute's needle drawing shape according to mold materials; Carry out again drying with equipment after the cleaning of multiple operation; The technology comparative maturity, but operation is many, the design cycle is long, needs to handle the corrosive liquids that produces, and product does not have repeatability;
2) mechanical drilling method: process at numerical control drilling machine or machining center with diamond spherical pass or drill bit, drill bit is perishable, can not change after damaging midway, causes entire product to be scrapped, and material is easily hindered in contact processing;
3) the molten carving method of laser: utilize the high density energy of laser, make material surface fusing, and vaporization, the melt at irradiation center evenly to around overflow; Because it is Gauss's circular distribution that laser energy distributes, so irradiation certain hour (1ms) just forms a ball hole after removing cooling; The whole design cycle is short, and technology is ripe not enough, and technological parameter is many.
Therefore, need a kind of large-breadth precise laser scribing of design and get equipment ready.
Summary of the invention
The purpose of this utility model is to overcome the deficiency that prior art exists, the equipment that a kind of large-breadth precise laser scribing is provided and gets ready.
The purpose of this utility model is achieved through the following technical solutions:
Large-breadth precise laser scribing and the equipment of getting ready comprise laser instrument and beam expanding lens, and characteristics are: the output of described laser instrument is provided with beam expanding lens, and the output of described beam expanding lens is furnished with the dynamic focusing mirror, and the output of described dynamic focusing mirror is connected with galvanometer; The light beam that described laser instrument sends is injected beam expanding lens, beam expanding lens output collimated light beam, and collimated light beam enters galvanometer after the dynamic focusing mirror focuses on, and beam focus is positioned on the processing work of vacuum absorbing platform.
Further, above-mentioned large-breadth precise laser scribing and the equipment of getting ready, wherein, the output wavelength of described laser instrument is 355nm, and laser power is 3～12W, and beam diameter is at 1mm.
Further, above-mentioned large-breadth precise laser scribing and the equipment of getting ready, wherein, the enlargement ratio of described beam expanding lens is 3～10 times.
Again further, above-mentioned large-breadth precise laser scribing and the equipment of getting ready, wherein, described dynamic focusing mirror is on the same horizontal plane focal length.
The substantive distinguishing features of technical solutions of the utility model and progressive being mainly reflected in:
The utility model modern design, having used the dynamic focusing mirror to make Laser Processing face is the plane, path planning algorithm was finished the planning of 10,000 graphic elements in 25 seconds efficiently, finishes the laser scoring of high-efficiency high-accuracy or get processing ready in a few minutes.The processing breadth of this device can reach 250,000 square millimeters, and satisfied realization is got ready and disposable the finishing of groove processing, and speed is fast, precision is high.This equipment is applicable to be processed the glass of ITO or film class, and the value that has a wide range of applications in industries such as mobile phone industry, palm PC, notebook display and LCD TV is the new design of a practicality.
Description of drawings
Below in conjunction with accompanying drawing technical solutions of the utility model are described further:
Fig. 1: organigram of the present utility model.
The implication of each Reference numeral sees the following form among the figure:
| Reference numeral | Implication | Reference numeral | Implication | Reference numeral | Implication | |
| 1 | |
2 | |
3 | The dynamic focusing mirror | |
| Reference numeral | Implication | Reference numeral | Implication | Reference | Implication | |
| 4 | |
5 | Processing work |
The specific embodiment
As shown in Figure 1, large-breadth precise laser scribing and the equipment of getting ready comprise laser instrument 1, beam expanding lens 2, dynamic focusing mirror 3 and galvanometer 4, and the output of laser instrument 1 is provided with beam expanding lens 2, the output of beam expanding lens 2 is furnished with dynamic focusing mirror 3, and the output of dynamic focusing mirror 3 is connected with galvanometer 4; Wherein, the output wavelength of laser instrument 1 is 355nm, and laser power is 3～12W, and beam diameter is at 1mm; The enlargement ratio of beam expanding lens 2 is 3～10 times; Dynamic focusing mirror sphere of action is 550mm * 550mm.
The dried etching of carving of laser belongs to the material removal process category, utilizes the high characteristics of laser power density, with its focusing, makes material processed transient heating fusing, vaporization, and melted material is squeezed out by the residual compression of steam, with its removal.The light of laser instrument output is shaped to directional light (being beneficial to focus on thinner) through expanding bundle, and carrying out elder generation focusing through the dynamic focusing mirror then, to make the light beam focal plane be a plane, enters galvanometer at last, forms flat scanning by the rotation mirror surface of both direction.Open at the local laser Q switch that figure is arranged that (repetition rate of 30K～100KHz) is carried out bright dipping processing with high frequency.
Add man-hour, the light beam that laser instrument 1 sends is injected beam expanding lens 2, beam expanding lens 2 output collimated light beams, and collimated light beam enters galvanometer 4 after dynamic focusing mirror 3 focuses on, and beam focus is positioned on the processing work 5 of vacuum absorbing platform.Read figure and carry out graphics-optimized and path planning by software control, control XY plateform system positions and processes.The dowel device fixation workpiece is arranged, by the control of computer system coherent system on the platform of vacuum absorbing platform system.The technological parameter that equipment control software has the reading in of the file of forms such as identification DXF, DWG and figure, a figure is function such as control accurately.Laser instrument 1 wavelength is 355nm (the ITO material has good absorptivity to the laser of this wavelength), M
2＜1.1, laser power is 3～12W, electric-optically Q-switched (peak power reaches tens KW); Full water cooling, totally-enclosed, modularized design; Whole laser instrument electrical power is 200W, and operating frequency is at 10～100KHz, beam diameter 1mm.Transmission laser system adopts 2 pairs of light of 7 power beam expansion lens to collimate, and to reduce the angle of divergence, expands bundle back spot diameter and is about 5mm.Adopt high accuracy adjustment degree scanning galvanometer 4, per second can reach 6000mm (1mm height), and is glasses lens plated for 355nm is all-trans, and repeatable accuracy＜4um is anti-interference strong digital data transmission formula galvanometer.Optical focus adopts dynamic focusing mirror 3, makes the interior light of whole working range impinge perpendicularly on surface of the work, can not produce out of focus.Operating distance is F=725mm, and this configuration line width down can be controlled in 30～150um, is fit to the various demands in market, and whole optical path adopts totally-enclosed dustproof, has significantly reduced the damage of laser instrument.
Vibration mirror scanning: galvanometer 4 is a vibrating mirror, its principle is similar to galvanometer, after receiving the signal of telecommunication, turning cylinder drives vibration eyeglass (reflecting optics) and deflects, if receive alternate electrical signal, then eyeglass vibrates, and makes light scanning go out straight line, two vertically arranged eyeglasses form the scanning of XY direction, and are identical with the television set image-forming principle.
Optical focus: laser is the best light source of directionality, but certain angle of divergence is still arranged; Also be luminous intensity and the highest light source of optical power density, must laser beam be focused on very little zone (tens microns) by optical focusing system, because common focus lamp can not adapt to the large format requirement, so adopt dynamic focusing mirror 3, played flat field effect (making focal length be in same horizontal plane), but can bring the distortion of figure, this point can be proofreaied and correct by software, the highdensity laser of high energy is focused on the zone of required processing, and (spot size is regulated as required, generally at 0.03mm～0.08mm), make energy higher, density is higher, focuses on to be in same plane.
Process disposable finishing, do not need piecemeal or splicing.
During concrete the application, adjust platform earlier and be located at place, laser focal plane, the graphic file introducing equipment function software of a large format.Processing work 5 is placed on the vacuum absorbing platform, is fixed, the location by alignment pin.Set the start-stop coordinate and the focal length of processing, computer control system is sent corresponding instruction after having optimized the path, and the XY galvanometer carries out scanning motion, processes corresponding figure.Computer sends laser signal as requested and gives laser instrument 1, laser instrument 1 sends laser pulse sequence with the frequency that requires, the light beam that laser instrument 1 sends is injected beam expanding lens 2, form collimated light beam, focus on by dynamic focusing mirror 3, its focus enters galvanometer 4 then on the processing work of vacuum absorbing platform again, galvanometer 4 scannings are up to the figure of finishing requirement.After finishing, this moment, computer control system was sent instruction, made vacuum absorbing platform system cancellation vacuum suction, took off workpiece, machined; The processing breadth can reach 500mm * 500mm.
In sum, the utility model design is unique, having used the dynamic focusing mirror to make Laser Processing face is the plane, path planning algorithm (improved dijkstra algorithm) can be finished the planning of 10,000 graphic elements in 25 seconds efficiently, can finish the laser scoring of high-efficiency high-accuracy or get processing ready in a few minutes.The processing breadth of this device can reach 250,000 square millimeters, realizes getting ready and groove (groove comprises engraving straight line, carves oblique line, carves literal, carves circle etc.) disposable the finishing of processing, and speed is fast, precision is high.Be applicable to glass or the film class of ITO are processed, in industries such as mobile phone industry, palm PC, notebook display and LCD TV, have a wide range of applications.
What need understand is: the above only is a preferred implementation of the present utility model; for those skilled in the art; under the prerequisite that does not break away from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (3)
1. large-breadth precise laser scribing and the equipment got ready, comprise laser instrument and beam expanding lens, it is characterized in that: the output of described laser instrument is provided with beam expanding lens, and the output of described beam expanding lens is furnished with the dynamic focusing mirror, and the output of described dynamic focusing mirror is connected with galvanometer; The light beam that described laser instrument sends is injected beam expanding lens, beam expanding lens output collimated light beam, and collimated light beam enters galvanometer after the dynamic focusing mirror focuses on, and beam focus is positioned on the processing work of vacuum absorbing platform.
2. large-breadth precise laser scribing according to claim 1 and the equipment of getting ready, it is characterized in that: the output wavelength of described laser instrument is 355nm, and laser power is 3～12W, and beam diameter is at 1mm.
3. large-breadth precise laser scribing according to claim 1 and the equipment of getting ready, it is characterized in that: the enlargement ratio of described beam expanding lens is 3～10 times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020149999 CN201645050U (en) | 2010-03-26 | 2010-03-26 | Equipment for large-width precise laser scribing and dotting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201020149999 CN201645050U (en) | 2010-03-26 | 2010-03-26 | Equipment for large-width precise laser scribing and dotting |
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| Publication Number | Publication Date |
|---|---|
| CN201645050U true CN201645050U (en) | 2010-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201020149999 Expired - Lifetime CN201645050U (en) | 2010-03-26 | 2010-03-26 | Equipment for large-width precise laser scribing and dotting |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101804515A (en) * | 2010-03-26 | 2010-08-18 | 苏州德龙激光有限公司 | Large-breadth precise laser scribing and dotting equipment |
| CN105034608A (en) * | 2015-07-10 | 2015-11-11 | 辽宁科技大学 | Industrial robot laser marking machine |
| CN110524109A (en) * | 2019-06-24 | 2019-12-03 | 东莞理工学院 | A kind of scanning galvanometer formula laser welding system |
-
2010
- 2010-03-26 CN CN 201020149999 patent/CN201645050U/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101804515A (en) * | 2010-03-26 | 2010-08-18 | 苏州德龙激光有限公司 | Large-breadth precise laser scribing and dotting equipment |
| CN105034608A (en) * | 2015-07-10 | 2015-11-11 | 辽宁科技大学 | Industrial robot laser marking machine |
| CN110524109A (en) * | 2019-06-24 | 2019-12-03 | 东莞理工学院 | A kind of scanning galvanometer formula laser welding system |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 215021 Suzhou Industrial Park, Jiangsu, Hong Zhong Road, No. 77 Patentee after: Suzhou Delphi Laser Co., Ltd. Address before: 215021 Suzhou Industrial Park, Jiangsu, Hong Zhong Road, No. 77 Patentee before: Suzhou Delphi Laser Co., Ltd. |
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| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20101124 |