CN216765119U - Single crystal furnace heat exchange system and single crystal furnace - Google Patents
Single crystal furnace heat exchange system and single crystal furnace Download PDFInfo
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- CN216765119U CN216765119U CN202220381414.3U CN202220381414U CN216765119U CN 216765119 U CN216765119 U CN 216765119U CN 202220381414 U CN202220381414 U CN 202220381414U CN 216765119 U CN216765119 U CN 216765119U
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Abstract
The utility model discloses a heat exchange system of a single crystal furnace and the single crystal furnace, which comprises two cooling systems and two jackets, wherein the two cooling systems are symmetrically arranged on the furnace wall and the furnace bottom of the single crystal furnace, each jacket is arranged on a tail gas pipeline of the single crystal furnace, each jacket is connected with a cooling system through a connecting pipe, each jacket is provided with a jacket water inlet and a jacket water outlet, each cooling system is provided with a cooling water inlet and a cooling water outlet, the cooling water inlet is arranged at the furnace bottom of the single crystal furnace, and the cooling water outlet is arranged at the upper part of the furnace wall of the single crystal furnace. The utility model improves the thermal efficiency on one hand and stabilizes the thermal field on the other hand.
Description
Technical Field
The utility model belongs to the technical field of monocrystalline silicon, and particularly relates to a heat exchange system of a single crystal furnace and the single crystal furnace.
Background
Silicon wafers are used in a large amount in the semiconductor industry, and the growth of single crystal silicon which is the basis thereof is an important technology. In the growth of single crystal silicon, there are a floating zone silicon refining (FZ) method in which a silicon rod is locally heated and melted by an induction coil to be single-crystallized, and a czochralski single crystal growth (CZ) method in which a silicon raw material in a crucible is heated and melted by a heater to extract a single crystal from the obtained solution. The crucible in the CZ method is generally a double-layer structure of a quartz crucible composed of silicon and oxygen and a graphite crucible supporting the quartz crucible in order to prevent the quartz crucible from softening at a high temperature and changing in shape. In the CZ method, oxygen eluted from a quartz crucible in a growing crystal is taken into silicon, and in a wafer cut out from the crystal, oxygen precipitates are formed by heat treatment or the like in a device, and these oxygen precipitates exert a gettering effect of capturing impurities in a device process. Meanwhile, the CZ method is also relatively easy to increase the diameter of the silicon single crystal as compared with the FZ method, and the CZ method is the mainstream as a method for industrially growing the silicon single crystal.
The low-cost and high-quality monocrystalline silicon piece is the core competitiveness of monocrystalline silicon manufacturing enterprises. In order to further reduce the cost, a large-size thermal field and a large-size silicon wafer are produced at the same time, but the large thermal field brings the problem of high power consumption, the high power consumption can not only cause the rise of the crystal pulling cost, but also influence the stability of the growth of the single crystal, and the energy consumption is the most important factor for limiting the cost of the single crystal silicon all the time.
In the single crystal growth and crystal pulling of the single crystal furnace, since the crystal pulling needs to be carried out at a high temperature of about 1420 ℃ and in a high vacuum state, the temperature of a silicon solution in the single crystal furnace is high, inert gas such as argon gas needs to be introduced into the furnace, the argon gas enters from an upper furnace chamber and is discharged from a lower furnace chamber in a tail gas form after passing through a thermal field, and a tail gas recovery system is used for recycling.
Referring to fig. 1, in fig. 1, a furnace chamber 3 is enclosed by a furnace wall 1 and a furnace bottom 2, two tail gas discharge holes 4 are axially and symmetrically arranged on the furnace bottom 2, the two tail gas discharge holes 4 are respectively connected with a tail gas recycling device (not shown in the figure) through pipelines, two furnace bottom cooling pipelines 5 are axially and symmetrically arranged on the furnace bottom 2, two furnace wall cooling pipeline systems are axially and symmetrically arranged on the furnace wall 1, each furnace wall cooling pipeline system is composed of a furnace wall upper pipeline 7 and a furnace wall lower pipeline 6, when in cooling operation, bottom cooling water enters from a bottom cooling water inlet 51 and flows out from a bottom cooling water outlet 52 after exchanging heat with the furnace bottom 2. The lower cooling water enters from the furnace wall lower cooling water inlet 61, exchanges heat with the furnace wall, and then flows out from the furnace wall lower cooling water outlet 62. The lower cooling water enters from the furnace wall upper cooling water inlet 71, exchanges heat with the furnace wall, and then flows out from the furnace wall lower cooling water outlet 72.
The existing single crystal furnace has high power consumption, low heat efficiency utilization rate and poor thermal field stability.
SUMMERY OF THE UTILITY MODEL
Aiming at the defects, the utility model provides a heat exchange system of a single crystal furnace, which improves the thermal efficiency and stabilizes the thermal field.
A heat exchange system of a single crystal furnace comprises two cooling systems and two jackets, wherein the two cooling systems are symmetrically arranged on the furnace wall and the furnace bottom of the single crystal furnace, each jacket is arranged on a tail gas pipeline of the single crystal furnace, each jacket is connected with the cooling system through a connecting pipe, each jacket is provided with a jacket water inlet and a jacket water outlet, each cooling system is provided with a cooling water inlet and a cooling water outlet, the cooling water inlet is arranged at the furnace bottom of the single crystal furnace, and the cooling water outlet is arranged at the upper part of the furnace wall of the single crystal furnace.
Optionally, the jacket water inlet is located below the jacket water outlet.
Optionally, a coil pipe matched with the interlayer is arranged in the interlayer of the jacket, the coil pipe is spiral, the water outlet of the jacket is connected with the upper port of the coil pipe, and the water inlet of the jacket is connected with the lower port of the coil pipe.
Optionally, the cross-sectional round mouths of the jackets are equal in size from bottom to top.
Optionally, the size of the cross-sectional round mouth of the jacket decreases from bottom to top.
The utility model also provides a single crystal furnace.
A single crystal furnace is provided with the heat exchange system of the single crystal furnace.
The utility model principle and the beneficial effects are as follows:
the inventor of the utility model finds that: in the prior art, the furnace wall and the furnace bottom are cooled by sectional cooling water, so that a better cooling effect can be achieved, but the whole heat taken away after water is discharged from the whole cooling water system is larger due to larger cooling temperature difference, and the stability of the whole thermal field is poorer due to larger sectional cooling and cooling temperature difference, so that the crystal pulling production is influenced. The inventor also finds that the tail gas coming out of the tail gas hole directly enters the tail gas recovery system through a pipeline for recovery, and the heat absorbed by the tail gas from the thermal field is directly discharged to the air (is subjected to heat exchange with the air), so that on one hand, the heat is wasted, the heat efficiency is reduced, and on the other hand, the temperature of the environment is also increased.
The utility model improves the heat efficiency on one hand and stabilizes the thermal field on the other hand by replacing sectional cooling with integral cooling and additionally arranging the heat exchange jacket.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
FIG. 1 is a schematic diagram of a background structure of the present invention;
FIG. 2 is a schematic structural diagram of a heat exchange system of the single crystal furnace of the present invention;
FIG. 3 is a schematic view showing the overall structure of a jacket according to the present invention;
FIG. 4 is a schematic diagram of the structure of the jacketed coil of FIG. 3;
FIG. 5 is a schematic view showing the overall structure of another jacket according to the present invention;
FIG. 6 is a schematic diagram of the structure of the jacketed pipe of FIG. 5.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The technical means of the present invention will be described in detail with reference to specific examples. The following embodiments may be combined with each other and may not be described in detail in some embodiments for the same or similar concepts or processes.
Referring to fig. 2, fig. 2 is a schematic structural diagram of a heat exchange system of a single crystal furnace according to the present invention.
A heat exchange system of a single crystal furnace comprises two cooling systems 3 and two jackets 5, wherein the two cooling systems 3 are symmetrically arranged on a furnace wall 1 and a furnace bottom 2, each jacket 5 is arranged on a tail gas pipeline 4, each jacket 5 is connected with one cooling system 3 through a connecting pipe 6, each jacket 5 is provided with a jacket water inlet 51 and a jacket water outlet 52, each cooling system 3 is provided with a cooling water inlet 31 and a cooling water outlet 32, the cooling water inlet 31 is arranged on the furnace bottom 2, and the cooling water outlet 32 is arranged on the upper part of the furnace wall 1.
Through the setting of two jackets 5 and two cooling systems 3, tail gas passes through the jacket, along with tail gas heat conduction for jacket 5, the temperature of water in jacket 5 rises gradually, take away the tail gas heat, because tail gas jacket temperature rise, the heat exchanges to the water in jacket 5, water that comes out from jacket 5 gets into axle cooling water inlet (cooling water inlet 31) in the bottom of the thermal field through connecting pipe 6, cool off stove bottom 2 and take away the heat, the cooling surface transversely aligns to the heat of absorbing the heat of axle surface radiation under the thermal field, because the hot water of taking that adopts tail gas heating, the stove bottom heat scatters and disappears, the surface temperature reduces, the vertical temperature gradient in bottom diminishes, make the bottom temperature gradient of thermal field through the heat conduction effect, the heat transfer surface temperature rises, the heat transfer speed reduces, namely the heat scatters and disappears, take away less heat in unit interval. The further heated cooling water passes through the furnace wall 1, passes through the heat transfer interface, the temperature of the heated cooling water is raised, the temperature gradient of the thermal field heat-insulating cylinder is reduced, the temperature gradient is further reduced, the heat transfer speed is reduced, and the heat loss is further reduced. The water entering the cooling system 3 has the original heat in the single crystal furnace before entering, so that the temperature difference of the whole cooling system is small, the temperature of the furnace wall 1 and the furnace bottom 2 is reduced to ensure normal production, meanwhile, the influence on the thermal field in the single crystal furnace is small, and the stability of the thermal field in the single crystal furnace is facilitated.
The cooling system 3 is replaced by the integral cooling of the application through the existing sectional type cooling, only local transformation is needed to be carried out on the cooling system of the existing single crystal furnace (the water outlet of the furnace bottom and the cooling water inlet under the furnace wall in the existing process are communicated through a pipeline, and the cooling water outlet under the furnace wall and the cooling water inlet on the furnace wall are communicated through a pipeline), so that the transformation is very convenient.
In one or more specific embodiments of the present application, for effective heat utilization, the jacket water inlet 51 is located below the jacket water outlet 52, the cooling water is from bottom to top, the temperature difference during exchange is large, and more heat is taken away from the exhaust gas.
In one or more specific embodiments of the present application, a coil 53 is installed in an interlayer of the jacket 5, fig. 3 is a schematic view of an overall structure of the jacket 5, fig. 4 is a schematic view of a structure of the coil 53, in fig. 3 and 4, a cross-sectional round mouth of the jacket 5 is the same from bottom to top, the coil 53 is spiral, a jacket water outlet 52 is connected with an upper port of the coil 53, and a jacket water inlet 51 is connected with a lower port of the coil 53. The arrangement of the coil 53 increases the heat exchange area and improves the heat utilization.
In one or more specific embodiments of the present application, a coil 53 is installed in an interlayer of the jacket 5, fig. 5 is a schematic view of an overall structure of the jacket 5, fig. 6 is a schematic view of a structure of the coil 53, in fig. 5 and fig. 6, a cross-sectional round mouth size of the jacket 5 is sequentially reduced from bottom to top, the coil 53 is spiral, a jacket water outlet 52 is connected with an upper port of the coil 53, and a jacket water inlet 51 is connected with a lower port of the coil 53. The size of the circular opening of the section of the jacket 5 is reduced from bottom to top in sequence, the temperature of the tail gas is fully considered to be reduced gradually after heat exchange from top to bottom, and the heat efficiency utilization is further improved.
Based on the heat exchange system of the single crystal furnace, the utility model also provides the single crystal furnace.
A single crystal furnace comprises a furnace wall 1 and a furnace bottom 2, wherein two tail gas pipelines 4 are connected to the furnace bottom 2, the single crystal furnace is further provided with a single crystal furnace heat exchange system, the single crystal furnace heat exchange system comprises two cooling systems 3 and two jackets 5, the jackets 5 arranged on the tail gas pipelines 4 and used for exchanging heat with tail gas, the two cooling systems 3 are symmetrically arranged on the furnace wall 1 and the furnace bottom 2, one jacket 5 is arranged on one tail gas pipeline 4, one jacket 5 is connected with one cooling system 3 through a connecting pipe 6, each jacket 5 is provided with a jacket water inlet 51 and a jacket water outlet 52, each cooling system 3 is provided with a cooling water inlet 31 and a cooling water outlet 32, the cooling water inlet 31 is arranged on the furnace bottom 2, and the cooling water outlet 32 is arranged on the upper portion of the furnace wall 1.
In one or more specific embodiments of the present application, for effective heat utilization, the jacket water inlet 51 is located below the jacket water outlet 52, the cooling water is from bottom to top, the temperature difference during exchange is large, and more heat is taken away from the exhaust gas.
In one or more specific embodiments of the present application, a coil 53 is installed in an interlayer of the jacket 5, fig. 3 is a schematic view of an overall structure of the jacket 5, fig. 4 is a schematic view of a structure of the coil 53, in fig. 3 and 4, a cross-sectional round mouth of the jacket 5 is the same from bottom to top, the coil 53 is spiral, a jacket water outlet 52 is connected with an upper port of the coil 53, and a jacket water inlet 51 is connected with a lower port of the coil 53.
In one or more specific embodiments of the present application, a coil 53 is installed in an interlayer of the jacket 5, fig. 5 is a schematic view of an overall structure of the jacket 5, fig. 6 is a schematic view of a structure of the coil 53, in fig. 5 and fig. 6, a cross-sectional round mouth size of the jacket 5 is sequentially reduced from bottom to top, the coil 53 is spiral, a jacket water outlet 52 is connected with an upper port of the coil 53, and a jacket water inlet 51 is connected with a lower port of the coil 53.
In the description of the present invention, it should be noted that unless otherwise specifically stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may include, for example, a fixed connection, an indirect connection through an intermediary, a connection between two elements, or an interaction between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless specifically stated otherwise.
The terms "first," "second," "third," "fourth," and the like in the description and in the claims of the present application and in the drawings described above, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the utility model has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and these modifications or substitutions do not depart from the spirit of the corresponding technical solutions of the embodiments of the present invention.
Claims (6)
1. The heat exchange system of the single crystal furnace is characterized by comprising two cooling systems (3) and two jackets (5), wherein the two cooling systems (3) are symmetrically arranged on the furnace wall and the furnace bottom of the single crystal furnace, each jacket (5) is arranged on a tail gas pipeline of the single crystal furnace, each jacket (5) is connected with one cooling system (3) through a connecting pipe (6), each jacket (5) is provided with a jacket water inlet (51) and a jacket water outlet (52), each cooling system (3) is provided with a cooling water inlet (31) and a cooling water outlet (32), the cooling water inlet (31) is arranged at the furnace bottom of the single crystal furnace, and the cooling water outlet (32) is arranged at the upper part of the furnace wall of the single crystal furnace.
2. The heat exchange system of the single crystal furnace of claim 1, wherein the jacket water inlet (51) is positioned below the jacket water outlet (52).
3. The heat exchange system of the single crystal furnace according to claim 2, wherein a coil (53) matched with the interlayer is arranged in the interlayer of the jacket (5), the coil (53) is spiral, a jacket water outlet (52) is connected with an upper port of the coil (53), and a jacket water inlet (51) is connected with a lower port of the coil (53).
4. The heat exchange system of the single crystal furnace according to claim 3, characterized in that the cross-sectional round mouths of the jackets (5) are equal in size from bottom to top.
5. The heat exchange system of the single crystal furnace according to claim 3, wherein the size of the cross-sectional round mouth of the jacket (5) is reduced from bottom to top.
6. A single crystal furnace, characterized in that the single crystal furnace is provided with a heat exchange system of the single crystal furnace according to any one of claims 1 to 5.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220381414.3U CN216765119U (en) | 2022-02-22 | 2022-02-22 | Single crystal furnace heat exchange system and single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220381414.3U CN216765119U (en) | 2022-02-22 | 2022-02-22 | Single crystal furnace heat exchange system and single crystal furnace |
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| Publication Number | Publication Date |
|---|---|
| CN216765119U true CN216765119U (en) | 2022-06-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220381414.3U Active CN216765119U (en) | 2022-02-22 | 2022-02-22 | Single crystal furnace heat exchange system and single crystal furnace |
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| Country | Link |
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| CN (1) | CN216765119U (en) |
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- 2022-02-22 CN CN202220381414.3U patent/CN216765119U/en active Active
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