CN216303980U - PVD decoration coating machine - Google Patents

PVD decoration coating machine Download PDF

Info

Publication number
CN216303980U
CN216303980U CN202121481459.XU CN202121481459U CN216303980U CN 216303980 U CN216303980 U CN 216303980U CN 202121481459 U CN202121481459 U CN 202121481459U CN 216303980 U CN216303980 U CN 216303980U
Authority
CN
China
Prior art keywords
pvd
furnace body
hanging rod
coating machine
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202121481459.XU
Other languages
Chinese (zh)
Inventor
黄兴盛
张绍璞
范刚
夏绪干
谢英伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xiamen Apisi Intelligent Manufacturing System Co ltd
Original Assignee
Xiamen Apisi Intelligent Manufacturing System Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xiamen Apisi Intelligent Manufacturing System Co ltd filed Critical Xiamen Apisi Intelligent Manufacturing System Co ltd
Priority to CN202121481459.XU priority Critical patent/CN216303980U/en
Application granted granted Critical
Publication of CN216303980U publication Critical patent/CN216303980U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

The utility model discloses a PVD (physical vapor deposition) decorative coating machine, which comprises a PVD furnace body, a vacuum pump set, a hanging rod assembly, a target assembly and an electric control assembly, wherein the vacuum pump set is communicated with the PVD furnace body, and the target assembly is arranged on the PVD furnace body; the hanging rod assembly comprises a rotating frame piece and a hanging rod, the rotating frame piece is installed in the middle of the PVD furnace body, and the ratio of the inner diameter to the height of the PVD furnace body is 0.4-0.5. The film coating machine disclosed by the utility model has the advantages that through the improvement of the structure, the production period is shortened, the labor and material cost is saved, the color difference of the product is reduced by more than 10%, and meanwhile, the yield of the product can be improved by more than 20%.

Description

PVD decoration coating machine
Technical Field
The utility model relates to a PVD decorative coating machine.
Background
The existing PVD decorative coating machine has the following problems:
firstly, a plurality of hanging rods can be arranged in the conventional rotating frame, and during coating production, the color difference of products of each hanging rod is large, the thickness of a coating layer is uneven, and the yield of the products is only about 60%.
Secondly, the production mode of the existing production line is mass mixed line production, the difficulty of production scheduling is large, and the packaging and mixing of the production line are easily caused.
Thirdly, the time for plating 1 furnace products in the current production line needs 55 minutes, and the production period is long.
Fourthly, when the production process is unstable, the product of the hanging rod of the whole furnace is easy to be poor, and great waste is formed.
Fifth, the existing production method requires manual hanging operation one rod by one rod.
Disclosure of Invention
In order to solve the technical problems, the utility model aims to provide a PVD (physical vapor deposition) decorative coating machine.
The utility model is realized by the following technical scheme: a PVD decorative coating machine comprises a PVD furnace body, a vacuum pump set, a hanging rod assembly, a target assembly and an electric control assembly, wherein the vacuum pump set is communicated with the PVD furnace body, and the target assembly is arranged on the PVD furnace body; the hanging rod assembly comprises a rotating frame piece and a hanging rod, the rotating frame piece is installed in the middle of the PVD furnace body, and the ratio of the inner diameter to the height of the PVD furnace body is 0.4-0.5.
Preferably, the hanging rod is a single hanging rod, and the hanging rod is arranged in the middle of the PVD furnace body.
Preferably, the rotating frame part comprises a speed regulating motor, a sealing structure and a hanger positioning structure, a rotating shaft of the speed regulating motor is coaxially connected with the hanger positioning structure, and the hanging rod is connected and arranged on the hanger positioning structure.
Preferably, the sealing structure is arranged between the speed regulating motor and the hanger positioning structure, and the sealing structure is sealed in an oil seal mode.
Preferably, the vacuum pump set comprises a vacuum pump and a vacuum pipeline, and the vacuum pipeline is communicated with the PVD furnace body.
Preferably, the vacuum pump is a molecular pump, and the molecular pump and the gate valve are matched to realize the opening and closing effect.
Preferably, the target assembly comprises a sputtering target mechanism, an ion source mechanism and an electric arc target mechanism, and the sputtering target mechanism, the ion source mechanism and the electric arc target mechanism are all arranged on the PVD furnace body.
Preferably, the sputtering target mechanism is arranged in parallel with the hanging rod.
Preferably, the electric arc target mechanisms are equidistantly distributed on the side surface of the PVD furnace body.
Preferably, the automatic hanging device further comprises a hanging robot, and the hanging robot is used for automatic hanging operation of the hanging rod.
The film coating machine disclosed by the utility model has the advantages that through the improvement of the structure, the production period is shortened, the labor and material cost is saved, the color difference of the product is reduced by more than 10%, and meanwhile, the yield of the product can be improved by more than 20%.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings needed for the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a perspective view of the vacuum pump unit of the present invention.
Fig. 3 and 4 are perspective and plan views of a turret member of the utility model.
Fig. 5 is a perspective view of a sputtering target mechanism of the present invention.
Fig. 6 is a perspective view of the ion source mechanism of the present invention.
Fig. 7 and 8 are perspective and plan views of the arc target mechanism of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without any inventive step, are within the scope of the present invention.
Referring to the attached drawings 1 to 8 of the specification, the PVD decorative coating machine comprises a PVD furnace body 1, a vacuum pump set 2, a hanging rod assembly 3, a target assembly 4 and an electric control assembly 5, wherein the hanging rod assembly 3 is installed in the middle of the PVD furnace body 1, the PVD furnace body 1 can be installed on a rack s, the distances of sputtering target particles bombarding the surfaces of products on the hanging rods are equal during coating, the risk of cross coating cannot be generated, the PVD furnace body 1 is also provided with a furnace door 11, and after the furnace door is opened, a robot can be used for hanging operation; preferably, the ratio of the inner diameter to the height of the PVD furnace body is 0.4-0.5, compared with a conventional coating machine, the furnace body design of the coating machine can reduce the vacuumizing duration by 60%, reduce the coating time by 80%, reduce the production coating period, and can quickly switch coating production among different products, so that the production efficiency is greatly improved. The vacuum pump group 2 comprises a vacuum pump 21 and a vacuum pipeline 22, the vacuum pipeline 22 is communicated with the PVD furnace body 1, so that the PVD furnace body 1 is vacuumized, and the vacuum pump 21 can be a molecular pump which is matched with a gate valve to realize the opening and closing effect.
The hanging rod assembly 3 comprises a rotating frame piece 31 and a hanging rod 32, the rotating frame piece 31 comprises a speed regulating motor a1, a sealing structure a2 and a hanger positioning structure a3, the speed regulating motor a1 is installed in the rack s, a rotating shaft of the speed regulating motor a1 is coaxially connected with the hanger positioning structure a3, the rotating shaft of the speed regulating motor can drive the hanger positioning structure a3 to rotate for 360 degrees and can adjust the speed of the hanger positioning structure a3, the hanging rod assembly is suitable for different products, the film thickness and the color consistency of the coated products are good, and the yield can reach more than 90%; the sealing structure a2 is arranged between the speed regulating motor a1 and the hanger positioning structure a3, and the sealing structure a2 can be sealed in an oil-sealing manner; above-mentioned peg 32 is installed on this hanger location structure a3, the preferred, this peg 32 installation sets up in the positive centre of PVD furnace body 1, and then make the product on the peg can be very even accept the bombardment of sputtering target particle, form the unanimous electro-coated film layer of colour, thickness is unanimous, in addition, this peg 32 adopts the mode of single peg to set up on this hanger location structure a3, make the product carry out single peg coating in the furnace body, only plate a product at every turn, improve the homogeneity of coating film, and do not have the production risk of compounding, thereby improve the quality of product, can improve the flexibility of production simultaneously. In a preferred embodiment, the coating machine also adopts the hanging robot 6 to carry out automatic hanging operation, thereby releasing manpower, reducing the labor intensity of workers, improving the efficiency and saving the cost.
The target assembly 4 comprises a sputtering target mechanism 41, an ion source mechanism 42 and an electric arc target mechanism 43, the sputtering target mechanism 41 is arranged in parallel with the arrangement direction of the hanging rod 32, the sputtering target mechanism 41 is arranged on the upper surface k1 of the PVD furnace body 1, meanwhile, the sputtering target mechanism 41 can be arranged at two ends of the upper surface of the PVD furnace body in a symmetrical mode, the sputtering target mechanism 41 can drive a sputtering target to rotate in a gear meshing mode, and the film layer uniformity of the hanging rod product is further improved; furthermore, the ion source mechanisms 42 are also arranged on the upper surface k1 of the PVD furnace body 1, the ion source mechanisms 42 are also symmetrically arranged at two ends of the upper surface k1 of the PVD furnace body 1, and each ion source mechanism 42 is arranged adjacent to each sputtering target mechanism 41; in addition, above-mentioned arc target mechanism 43 then installs and sets up in the side k2 of PVD furnace body 1, and the side k2 of this PVD furnace body can equidistant evenly distributed have a plurality of arc target mechanisms 43, and of course, these some arc target mechanisms 43 can be laid with the mode of symmetry in the both sides of PVD furnace body 1 to improve the homogeneity of coating, thereby make the coating film mode of furnace body diversified, the practicality is strong. The film coating machine disclosed by the utility model has the advantages that through the improvement of the structure, the production period is shortened, the labor and material cost is saved, the color difference of the product is reduced by more than 10%, and meanwhile, the yield of the product can be improved by more than 20%.
While the foregoing description shows and describes the preferred embodiments of the present invention, it is to be understood that the utility model is not limited to the forms disclosed herein, but is not intended to be exhaustive or to exclude other embodiments and may be used in various other combinations, modifications, and environments and is capable of changes within the scope of the inventive concept as expressed herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the utility model as defined by the appended claims.

Claims (10)

1. A PVD decorative coating machine is characterized by comprising a PVD furnace body, a vacuum pump set, a hanging rod assembly, a target assembly and an electric control assembly, wherein the vacuum pump set is communicated with the PVD furnace body, and the target assembly is arranged on the PVD furnace body; the hanging rod assembly comprises a rotating frame piece and a hanging rod, the rotating frame piece is installed in the middle of the PVD furnace body, and the ratio of the inner diameter to the height of the PVD furnace body is 0.4-0.5.
2. The PVD decorative coating machine of claim 1, wherein the hanging rod is a single hanging rod, the hanging rod is positioned in the middle of the PVD furnace body.
3. A PVD decorative coater according to any of claims 1 or 2, wherein said turret member comprises a speed adjusting motor, a sealing structure and a hanger positioning structure, wherein a rotating shaft of said speed adjusting motor is coaxially connected to said hanger positioning structure, and said hanging rod is connected to said hanger positioning structure.
4. The PVD decorative coating machine of claim 3, wherein the sealing structure is disposed between the adjustable speed motor and the hanger positioning structure, and the sealing structure is sealed in an oil seal manner.
5. The PVD decorative coating machine of claim 1, wherein the vacuum pump assembly comprises a vacuum pump and a vacuum conduit, the vacuum conduit being in communication with the PVD furnace body.
6. The PVD decorative coating machine of claim 1, wherein the vacuum pump is a molecular pump, and the molecular pump and a gate valve are matched to achieve an on-off effect.
7. The PVD decorative coater of claim 1 wherein said target assembly comprises a sputter target mechanism, an ion source mechanism and an arc target mechanism, said sputter target mechanism, said ion source mechanism and said arc target mechanism being disposed on said PVD furnace.
8. The PVD decorative coating machine of claim 7, wherein the sputter target mechanism is disposed parallel to the hanger bar.
9. The PVD decorative coating machine of claim 7, wherein the arc target mechanisms are equidistantly arranged on a side surface of the PVD furnace body.
10. A PVD decorative coater as recited in claim 1, further comprising a hang-up robot, said hang-up robot adapted to automatically hang up a hanging rod.
CN202121481459.XU 2021-06-30 2021-06-30 PVD decoration coating machine Active CN216303980U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121481459.XU CN216303980U (en) 2021-06-30 2021-06-30 PVD decoration coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121481459.XU CN216303980U (en) 2021-06-30 2021-06-30 PVD decoration coating machine

Publications (1)

Publication Number Publication Date
CN216303980U true CN216303980U (en) 2022-04-15

Family

ID=81085869

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121481459.XU Active CN216303980U (en) 2021-06-30 2021-06-30 PVD decoration coating machine

Country Status (1)

Country Link
CN (1) CN216303980U (en)

Similar Documents

Publication Publication Date Title
CN105543792B (en) Magnetic control sputtering device and magnetically controlled sputter method
CN216303980U (en) PVD decoration coating machine
CN115261799B (en) Surface layer vacuum coating process of temperature control valve
CN207313699U (en) A kind of bend glass coating apparatus
CN113549890A (en) PVD decoration coating machine
CN109082633A (en) Tool surface wearing layer plane formula arc deposited coating film production line
CN214572209U (en) Vacuum coating equipment
CN202576553U (en) Magnetron sputtering target material
CN101988187B (en) Vacuum magnetron sputtering color plating equipment
CN206666637U (en) A kind of high-efficiency vacuum electroplanting device with mixed plating
CN203284458U (en) Vacuum ion film plating production line
CN102290338B (en) Room-temperature large-area deposition production process for transparent conductive film
KR100268216B1 (en) An ion plating apparatus and method using large sized hollow cathod discharge gun
CN104388905B (en) Diode sputtering coating equipment used for coating inner wall of vacuum cup
CN112921286A (en) Production method of gradient U-shaped coating
CN205443435U (en) Roller conveyors among coating production line constructs
CN202226911U (en) Single-tube direct current sputtering glass coating equipment
CN209816268U (en) Vacuum coating machine
CN103741110A (en) Production technology of vacuum coating antique copper
CN207958490U (en) The vacuum magnetic control coating equipment of Nd-Fe-B permanent magnetic is made for heavy rare earth diffusion method
CN109722639A (en) A kind of horizontal magnetic control film coating production line
CN220034647U (en) Continuous film plating equipment for metal bipolar plate of fuel cell
CN205934011U (en) Compound scanning magnetic field coating machine
CN203846098U (en) Magnetron sputtering system
CN209127541U (en) A kind of metal plate mass production facilities

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant