CN203284458U - Vacuum ion film plating production line - Google Patents
Vacuum ion film plating production line Download PDFInfo
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- CN203284458U CN203284458U CN2013202212477U CN201320221247U CN203284458U CN 203284458 U CN203284458 U CN 203284458U CN 2013202212477 U CN2013202212477 U CN 2013202212477U CN 201320221247 U CN201320221247 U CN 201320221247U CN 203284458 U CN203284458 U CN 203284458U
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- heater
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- unwheeling
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Abstract
A vacuum ion film plating production line belongs to the technical field of vacuum film plating, and comprises an electrical control system, furnace body main engines, vacuum units and a transmission system, wherein the number of the furnace body main engines is at least three; one of the furnace body main engines positioned at the two ends is a pre-vacuum chamber, and the other one furnace body main engine is a deflation chamber; the rest furnace body main engines positioned in the middle are film plating chambers; overturn type isolation gate valves are arranged at the end parts of the pre-vacuum chamber and the deflation chamber; the two adjacent furnace body main engines are connected through an overturn type isolation gate valve; each furnace body main engine is equipped with an independent vacuum unit; the transmission system comprises a plurality of workpiece unwheelings, external material flow trollies and transmission mechanisms independently mounted in the furnace bodies. Compared with a stand-alone, the production line has the great advantages in aspects of off-take potential, film formation quality, equipment cost and the like. The production line device is compact in structure and high in reliability, and can improve the production efficiency.
Description
Technical field
The utility model relates to a kind of vacuum ion plating film production line, belongs to technical field of vacuum plating.
Background technology
As everyone knows, the vacuum ion plating membrane technique is the coating technique that grows up on vacuum-evaporation and two kinds of coating technique bases of vacuum sputtering.It can prepare the TiC film of flavous TiN film, black, brown TiAlN film and green ZrO film etc.The rete that obtains has the characteristics such as strong adhesion, difficult drop-off, diffraction are good, even thickness, coating is fine and close, porosity is low.Simultaneously, can plate material wide, all can be coated with metal or metal reaction film on metal and non-metal surfaces, save noble metal material, pollution-free.As a kind of comparatively desirable decorative coveringn preparation method, the ion plating decorative coveringn develops into plating sanitary ware, body of a motor car etc. from plating mobile phone shell, watchcase, watchband, has been widely used in many fields that daily life and Industrial products are decorated.
This class coating equipment usually by: three parts such as body of heater main frame, air-bleed system, electrical control cubicles form.Roughly process is as follows for single stove formula coating equipment plated film: 1. the hanger that installs workpiece to be plated is arranged on the interior pivoted frame of vacuum chamber.2. be evacuated to 6.0x10
-3Pa, Heating temperature: 200 degree, the pivoted frame rotating speed: 3 turn/the min.3. applying argon gas is to vacuum 1.5x10
0Pa, open bias voltage 800V, the Bombardment and cleaning substrate.4. applying argon gas and acetylene gas are to vacuum 5x10
-1Pa, play cylindrical target, starts plated film.5. plated film is complete, descent of temperature, and workpiece is come out of the stove.
The shortcoming of single stove formula ion film coating machine is: 1. production efficiency is low, and to be coated with the TiC black film as example, being coated with a stove goods on average needs 5 hours, because often go out a stove goods, just need again empty stove evacuation to wash target, clean the target surface cleaning of polluting, and then workpiece to be plated is put into plated film in stove.2. film quality is unstable, is mainly because can not guarantee that plated film atmosphere is identical between every stove goods.3. every unit needs the special messenger to be responsible for, and cost of human resources is high.Above several problem has restricted the development of each plated film factory.
Summary of the invention
The utility model provides a kind of vacuum ion plating film production line for existing the problems referred to above in prior art, and its main purpose is: enhance productivity, improve coating quality, save production cost.
The purpose of this utility model is achieved through the following technical solutions: the vacuum ion plating film production line, comprise electrical control system, body of heater main frame, vacuum unit, transmission system, it is characterized in that: described body of heater host number is at least 3, be positioned at the body of heater main frame at two ends, one as pre-vacuum chamber, one as venting chambers, body of heater main frame in the middle of all the other are positioned at is as coating chamber, pre-vacuum chamber, venting chambers end are provided with the turnover plate type isolation family of power and influence, isolate the family of power and influence by turnover plate type between two adjacent body of heater main frames and connect, the equipped cover independent vacuum unit of each body of heater main frame.
Described transmission system comprises the unwheeling of some cover workpiece, external logistics dolly and independently is arranged on the interior transmission rig of each body of heater.
Described workpiece unwheeling forms by several dollies are hinged, and each dolly, by two wheel supportings, is equipped with centre rotational axis in the car body mid-way, and sprocket wheel is connected on centre rotational axis by key; The dolly front end that is positioned at head is installed guide deflection sheave.
Described external logistics vehicle structure is: line slideway and ring-shaped guide rail are installed on car body, every cover logistics trolley can load a cover workpiece unwheeling, ring-shaped guide rail workpiece unwheeling driving gear dish is installed with one heart, drive fluted disc and rotate by driven by motor, be used for stirring the workpiece unwheeling.
transmission rig in described each body of heater is: in each body of heater base plate central position, be coaxially installed with fixing chain plate, rotatable rotary-tray and fixing outer loop orbit, installation site sensor on the body of heater base plate, one circle chain is installed on the circumference of chain plate, the sprocket engagement of chain plate and each workpiece unwheeling, the turning axle of rotary-tray by motor through the step-down gear driven rotary, turning axle is incorporated in body of heater by tightness system, the dolly drive post consistent with the dolly quantity of every cover workpiece unwheeling is installed on rotary-tray, outer loop orbit is arranged on the body of heater base plate by insulating element, on loop orbit, self-lubricating device is installed outside, each body of heater and turnover plate type isolation family of power and influence junction are equipped with the line slideway and the straight ring cutting that link together and change guide rail, line slideway directly is fixed on the body of heater base plate by seal, be processed with the wheel guiding groove on guide surface, straight ring cutting changes guide rail and is driven by cylinder through tightness system, at straight ring cutting, changes on guide rail and is provided with guidance device.
The beneficial effects of the utility model: vacuum ion membrane plating product line device compact construction, the reliability that the utility model provides be high, can enhance productivity, improve coating quality, save production cost.Transmission adopted the Multi-layer transmission technology, after rotary-tray formation closed circle is sailed in the workpiece unwheeling into, driving a whole set of workpiece unwheeling by rotary-tray moves in a circle, nothing motion between workpiece unwheeling and rotary-tray, be converted into the pivoted frame operating mode of unit this moment, and only when the workpiece unwheeling was transmitted between vacuum chamber, the workpiece unwheeling just can be taken exercises by relative guide rail, this point greatly reduces the probability that the transmission fault occurs, and has guaranteed the stability of system.
This vacuum ion plating film production line, can be according at least 3 body of heater main frames of needs of production setting, concrete quantity can increase as required, the embodiment of the present application accompanying drawing is take 5 body of heater main frames as example, be coated with equally the TiC black film, in the quantity-produced situation, can be coated with 5 stove goods in 5 hours, on average per hour can be coated with 1 stove goods, and the unit of a same configuration needs 5 hours ability to produce a stove goods.From production capacity, the production capacity of 5 conjuncted production lines is equivalent to the production capacity of 5 units of same configuration.From coating quality, the quality of forming film of production line is higher, and the product color difference is less, because 3 coating chambers of production line can not destroy vacuum for a long time, make like this atmosphere in plated film district keep long-term consistence, this point is the key factor that guarantees coating quality.And the complete stove goods of the every plating of unit all needs to expose atmosphere, and this just causes the plated film atmosphere of every stove goods to have JND, finally can cause the quality product between every stove to have slight difference.The equipment investment cost: the price of a cover production line approximates greatly the price of 4 units, and cost of use (electricity charge, water rate etc.) is slightly less than 4 units.In sum, no matter production line compares unit from production capacity, quality of forming film, and all respects such as equipment cost all tool have great advantage.
Description of drawings
Fig. 1 is vacuum ion plating film production line general plane layout drawing.
Fig. 2 is workpiece unwheeling sectional view.
Fig. 3 is external logistics dolly sectional view.
Fig. 4 is the transmission rig sectional view of each body of heater inside.
Fig. 5 is the connection state figure that line slideway and straight ring cutting change guide rail.
Fig. 6 is that straight ring cutting changes the guide rail sectional view.
Embodiment
the vacuum ion plating film production line, comprise electrical control system 6, at least 3 body of heater main frames, vacuum unit and transmission system, the body of heater main frame is function-differentiated is pre-vacuum chamber 1, coating chamber 2, venting chambers 3, wherein pre-vacuum chamber 1, venting chambers 3 arranges respectively one, be placed on the two ends of production line, the quantity of coating chamber 2 can increase as required, as shown in Figure 1, coating chamber 2 quantity of the present embodiment are 3, isolating the family of power and influence 4 by turnover plate type between adjacent body of heater main frame connects, pre-vacuum chamber 1, venting chambers 3 ends also are respectively equipped with the turnover plate type isolation family of power and influence 4, each body of heater main frame is an equipped cover independent vacuum unit 5 respectively.
Each component function is as follows: the family of power and influence 4 is in order to realize isolation or the connection between each body of heater main frame in the turnover plate type isolation.Perhaps be positioned at the isolation of production line end pre-vacuum chamber 1, venting chambers 3 and atmospheric side or be communicated with.
Pre-vacuum chamber 1: for workpiece to be plated is done the plating pre-treatment: workpiece degasification, workpiece preheat with the workpiece aura and clean, and for the workpiece unwheeling is sent to coating chamber from pre-vacuum chamber, create vacuum condition.
Coating chamber 2: this chamber is equipped with magnetron sputtering cylindrical target and arc evaporation source,, if indoor have a workpiece to be plated, is the workpiece coating process, if indoor do not have a workpiece to be plated, for washing the target process.
Venting chambers 3: for having plated the workpiece slow cooling of rete, after cooling is completed, venting, the valve that opens the door, be sent to the workpiece unwheeling on the external logistics car.
Vacuum unit 5 main pumps are molecular pump, in order to vacuumizing in each body of heater main frame chamber.
Electrical control system 6 by: PLC+ touch-screen+control, metrical instrument etc. form, and realize the PLC program control operation.
Transmission system: transmission system comprises the unwheeling of some cover workpiece, external logistics dolly 24 and independently is arranged on the interior transmission rig of each body of heater, in order to realize the automatic transmission of workpiece to be plated.Its concrete structure position relationship is as follows:
The workpiece unwheeling, as shown in Figure 2, the unwheeling of every cover workpiece, by 18 hinged forming of dolly, can be done translational motion, also can move in a circle.Every dolly is supported by two wheels 19.The car body mid-way is equipped with centre rotational axis 20, and sprocket wheel 21 is connected on centre rotational axis 20 by key 22.A car of every cover dolly is slightly different from other dolly, and a car front portion is equipped with guide deflection sheave 23, can guide a whole set of dolly and become translational motion by circumferential motion.
The inner transmission rig of body of heater: in each body of heater main frame, independently transmission rig is installed, as shown in Fig. 4-6, some position transducers 29 is installed on the body of heater base plate, realize the automatic transmission of workpiece unwheeling between each chamber by position transducer 29.Each body of heater base plate central position is coaxially installed with fixing chain plate 30, rotatable rotary-tray 31 and fixing outer loop orbit 32.one circle chain 33 is installed on the circumference of chain plate 30, this chain plate 30 does rotation movement the central shaft of workpiece unwheeling with the sprocket engagement of each workpiece unwheeling, the turning axle of rotary-tray 31 by motor 35 through step-down gear 36 driven rotary, turning axle is incorporated in body of heater by tightness system 34, 18 dolly drive post 37 are installed on rotary-tray 31, each drive post 37 is stirred a dolly and it is closed into after closed circle drive dolly and do revolution motion, outer loop orbit 32 is arranged on the body of heater base plate by insulating element 38, self-lubricating device 39 is installed on loop orbit 32 outside to be strapped in dolly on circumference by the friction with car wheel.Line slideway 40 is installed in body of heater and turnover plate type isolation family of power and influence junction and straight ring cutting changes guide rail 41, line slideway 40 and straight ring cutting change guide rail 41 and link together, line slideway 40 directly is fixed on the body of heater base plate by seal 42, be processed with wheel guiding groove 43 on guide surface, pilot trolley is done translational motion.Straight ring cutting changes guide rail 41 and is driven by cylinder 45 through tightness system 44, when straight ring cutting changes guide rail 41 and rises with the common formation circuit orbit of the outer loop orbit 32 of pallet, the workpiece unwheeling can only be moved in a circle, straight ring cutting changes guide rail 41 while falling, a car guide deflection sheave of the guidance device 46 restriction workpiece unwheelings on it, guide it and do translational motion, thereby drive a whole set of dolly, do translational motion.
Claims (5)
1. vacuum ion plating film production line, comprise electrical control system, body of heater main frame, vacuum unit, transmission system, it is characterized in that: described body of heater host number is at least 3, be positioned at the body of heater main frame at two ends, one as pre-vacuum chamber, one as venting chambers, the body of heater main frames in the middle of all the other are as coating chamber, pre-vacuum chamber, venting chambers end are provided with the turnover plate type isolation family of power and influence, isolate the family of power and influence by turnover plate type between two adjacent body of heater main frames and connect, the equipped cover independent vacuum unit of each body of heater main frame.
2. vacuum ion plating film production line according to claim 1 is characterized in that: described transmission system comprises the unwheeling of some cover workpiece, external logistics dolly and independently is arranged on transmission rig in each body of heater.
3. vacuum ion plating film production line according to claim 2, it is characterized in that: described workpiece unwheeling forms by several dollies are hinged, each dolly, by two wheel supportings, is equipped with centre rotational axis in the car body mid-way, and sprocket wheel is connected on centre rotational axis by key; The dolly front end that is positioned at head is installed guide deflection sheave.
4. vacuum ion plating film production line according to claim 2, it is characterized in that: described external logistics vehicle structure is: line slideway and ring-shaped guide rail are installed on car body, every cover logistics trolley can load a cover workpiece unwheeling, at ring-shaped guide rail workpiece unwheeling driving gear dish is installed with one heart, drive fluted disc and rotate by driven by motor, be used for stirring the workpiece unwheeling.
5. according to claim 2 or 3 or 4 described vacuum ion plating film production lines, it is characterized in that: the transmission rig in described each body of heater is: in each body of heater base plate central position, be coaxially installed with fixing chain plate, rotatable rotary-tray and fixing outer loop orbit, installation site sensor on the body of heater base plate, one circle chain is installed on the circumference of chain plate, the sprocket engagement of chain plate and each workpiece unwheeling, the turning axle of rotary-tray by motor through the step-down gear driven rotary, turning axle is incorporated in body of heater by tightness system, the dolly drive post consistent with the dolly quantity of every cover workpiece unwheeling is installed on rotary-tray, outer loop orbit is arranged on the body of heater base plate by insulating element, on loop orbit, self-lubricating device is installed outside, each body of heater and turnover plate type isolation family of power and influence junction are equipped with the line slideway and the straight ring cutting that link together and change guide rail, line slideway directly is fixed on the body of heater base plate by seal, be processed with the wheel guiding groove on guide surface, straight ring cutting changes guide rail and is driven by cylinder through tightness system, at straight ring cutting, changes on guide rail and is provided with guidance device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202212477U CN203284458U (en) | 2013-04-27 | 2013-04-27 | Vacuum ion film plating production line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013202212477U CN203284458U (en) | 2013-04-27 | 2013-04-27 | Vacuum ion film plating production line |
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| Publication Number | Publication Date |
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| CN203284458U true CN203284458U (en) | 2013-11-13 |
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ID=49540831
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013202212477U Expired - Fee Related CN203284458U (en) | 2013-04-27 | 2013-04-27 | Vacuum ion film plating production line |
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|---|---|
| CN (1) | CN203284458U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104353589A (en) * | 2014-11-14 | 2015-02-18 | 江苏利诺科技发展有限公司 | Mobile phone coating device |
| CN113061870A (en) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | Continuous vacuum coating production line and method for optical thin film component |
| CN113479581A (en) * | 2021-06-23 | 2021-10-08 | 光驰科技(上海)有限公司 | Annular conveying system for conveying in vacuum coating equipment |
-
2013
- 2013-04-27 CN CN2013202212477U patent/CN203284458U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104353589A (en) * | 2014-11-14 | 2015-02-18 | 江苏利诺科技发展有限公司 | Mobile phone coating device |
| CN113061870A (en) * | 2021-04-02 | 2021-07-02 | 泸州韶光智造科技有限公司 | Continuous vacuum coating production line and method for optical thin film component |
| CN113479581A (en) * | 2021-06-23 | 2021-10-08 | 光驰科技(上海)有限公司 | Annular conveying system for conveying in vacuum coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131113 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |