CN101519770A - Production line for coating solar heat-collecting pipe - Google Patents

Production line for coating solar heat-collecting pipe Download PDF

Info

Publication number
CN101519770A
CN101519770A CN200810010513A CN200810010513A CN101519770A CN 101519770 A CN101519770 A CN 101519770A CN 200810010513 A CN200810010513 A CN 200810010513A CN 200810010513 A CN200810010513 A CN 200810010513A CN 101519770 A CN101519770 A CN 101519770A
Authority
CN
China
Prior art keywords
chamber
coating
chain
solar heat
production line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN200810010513A
Other languages
Chinese (zh)
Inventor
王光华
郭保安
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenyang Bellavac Vacuum Tech Co Ltd
Original Assignee
Shenyang Bellavac Vacuum Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenyang Bellavac Vacuum Tech Co Ltd filed Critical Shenyang Bellavac Vacuum Tech Co Ltd
Priority to CN200810010513A priority Critical patent/CN101519770A/en
Publication of CN101519770A publication Critical patent/CN101519770A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

A production line for coating solar heat-collecting pipes belongs to an improved structure of the production device for coating the solar heat-collecting pipes. The invention provides a production line which is used for coating the solar heat-collecting pipes and is of high production efficiency and good coating quality. The production line comprises an external ring track; the key point of the structure is characterized in that the external ring track is sequentially provided with a pipe inlet chamber, a coating chamber, a pipe outlet chamber and a coating chamber; the inlet and the outlet of the pipe outlet chamber are provided with a gate valve and a track turnout respectively; the pipe inlet chamber, the coating chamber and the pipe outlet chamber are connected with a vacuum device respectively; workpiece frame chains are arranged on the external ring track and internal ring tracks, wherein the internal ring tracks are arranged in the pipe inlet chamber, the coating chamber and the pipe outlet chamber; the workpiece frame chain consists of workpiece frames which not only can rotate around the external ring track and the internal ring track but also can self revolve; the internal ring track is internally provided with a magnetically controlled target; a pulling fork beside the external ring track is arranged on a chain between two chain wheels; and a pulling block is arranged on the workpiece frame chain correspondingly to the pulling fork.

Description

Production line for coating solar heat-collecting pipe
Technical field:
The invention belongs to the improvement of coating solar heat-collecting pipe production equipment structure.
Background technology:
In the prior art, magnetron sputtering coater is used in coating solar heat-collecting pipe production usually.This machine comprises transmission mechanism, vacuum unit, magnetic controlling target, inflation system etc.; Each production cycle need vacuumize again, and therefore, production efficiency is low, and power consumption is big; In addition, the magnetron sputtering target in coating chamber will often be exposed in the atmosphere, and the easy oxidation of target has influenced the quality of rete.
Summary of the invention:
The present invention is exactly at the problems referred to above, provides a kind of production efficiency height, the production line for coating solar heat-collecting pipe that coating quality is good.
For achieving the above object, the present invention adopts following technical scheme, the present invention includes the outer shroud rail, its structural feature is to be disposed with inlet pipe chamber, coating chamber on the outer shroud rail, to go out to manage the chamber, and inlet pipe chamber, coating chamber, the ingress that goes out to manage the chamber, exit are respectively arranged with the family of power and influence, track fork; Inlet pipe chamber, coating chamber, go out to manage the chamber and link to each other with vacuum unit respectively; Outer shroud rail and inlet pipe chamber, coating chamber, go out to manage indoor interior ring rail and be provided with the work rest chain, the work rest chain is by both can be around outer shroud rail, the running of interior ring rail, but the work rest of rotation connects to form again, is provided with magnetic controlling target in the interior ring rail; The shift fork of outer shroud trackside side is arranged on two chains between the sprocket wheel; Work rest chain corresponding to shift fork is provided with shifting block.
Beneficial effect of the present invention:
1, production efficiency height:
The present invention makes a plurality of work rest chains that Glass tubing is housed, and revolves round the sun continuously or rotation along the production line of outer shroud rail, interior ring rail; Under vacuum state, carry out the sputter of magnetic controlling target continuously again to Glass tubing, therefore, the production efficiency height; Per six minutes, produce the plated film of 38 Glass tubings at least;
2, coating quality is good:
Plated film of the present invention is to work under vacuum condition all the time, has avoided target because of often being exposed to the pollution that atmosphere causes, and has guaranteed the quality of rete.
Description of drawings:
Fig. 1 is a structural representation of the present invention;
Fig. 2 is interior ring rail of the present invention and dependency structure synoptic diagram;
Fig. 3 is the A-A sectional view of Fig. 2;
Fig. 4 is that the B of Fig. 2 is to view;
Fig. 5 is the C-C sectional view of Fig. 2;
Fig. 6 is the structural representation of work rest of the present invention;
Fig. 7 is shift fork of the present invention and dependency structure synoptic diagram;
Fig. 8 be Fig. 7 D to the rotation synoptic diagram.
Embodiment:
The present invention includes outer shroud rail 12, be disposed with inlet pipe chamber 14, coating chamber 7 on the outer shroud rail 12, go out to manage chamber 6, inlet pipe chamber 14, coating chamber 7, the ingress that goes out to manage chamber 6, exit are respectively arranged with the family of power and influence 21, track fork 35; Inlet pipe chamber 14, coating chamber 7, go out to manage chamber 6 and link to each other with vacuum unit 1 respectively; Outer shroud rail 12 and inlet pipe chamber 14, coating chamber 7, the interior ring rail 13 that goes out to manage in the chamber 6 are provided with work rest chain 18, work rest chain 18 is by both turning round around outer shroud rail 12, interior ring rail 13, but the work rest 29 of rotation again connects to form, and is provided with magnetic controlling target 17 in the interior ring rail 13; The shift fork 9 of outer shroud rail 12 sides is arranged on two chains 11 between the sprocket wheel 8; Work rest chain 18 corresponding to shift fork 9 is provided with shifting block 10.
The top of work rest 29 is provided with the carriage 47 of Glass tubing 44; The bottom of work rest 29 is provided with and interior ring rail 13 corresponding rolling wheel 46; Be provided with between carriage 47 and the roller 46 with the rotation chain 27 on the rotation chain drum 28 be meshed from rotary chain wheel 43, with the revolution chain 26 shift forks 22 corresponding shifting blocks 23 on the revolution chain drum 25.
Track fork 35 is fixed on the axle 30 of outer shroud rail 12, and the both sides at track fork 35 are respectively arranged with outer supporting rail 32, the interior supporting rail 31 of the roller 46 of work rest 29; When axle 30 rotates, make outer supporting rail 32 consistent at track fork 35, or supporting rail 31 is consistent with outer shroud rail 12 in making, just makes work rest chain 18 enter interior ring rail 13 or enter outer shroud rail 12 and turn round with the outer supporting rail 36 of interior ring rail 13.
Revolution chain drum 25 is provided with the floating roller 19 that is meshed with revolution chain 26; So that revolution chain 26 steady runnings.
For work rest 29 is operated steadily reliably, can the outside of work rest 29 and inboard be respectively arranged with interior ring rail 13 outside limiting plate 24, interior limiting plate 37 corresponding outside position-limited wheel 45, interior position-limited wheel 41.
The revolving chain wheel 39 that is meshed with revolution chain 26 is driven by coaxial follow-up pulley 42, and follow-up pulley 42 links to each other with the sprocket wheel on the motor 34 15 by chain 38.
For guaranteeing the coating effects and the production efficiency of Glass tubing 44, three or more coating chambers 7 can be set.
Inlet pipe chamber 14, the interior ring rail 13 and the outer shroud rail 12 that go out to manage in chamber 6, the coating chamber 7 all can be oblate track.
Vacuum unit 1 can be mechanical pump 2, diffusion pump 5, lobe pump 4, holding pump 3 and makes up respectively.
Sprocket wheel 15 is driven by motor 34.
Below in conjunction with a description of drawings course of action of the present invention:
At first, Glass tubing to be plated 44 is contained on the work rest chain 18, then the work rest chain 18 that installs being run to 14 outer shroud rails, 12 positions, inlet pipe chamber waits, when receiving instruction, the family of power and influence 21 opens immediately, work rest chain 18 enters inlet pipe chamber 14, the family of power and influence 21 closes, and inlet pipe chamber 14 vacuumizes immediately, when vacuum tightness be evacuated to≤8 * 10 -3Handkerchief, the valve 21 that opens the door, work rest chain 18 enters coating chamber 7, revolve round the sun and rotation along oblate track, 7 pairs of Glass tubings of coating chamber, 44 metallizing counterdies, plated film finishes, open the family of power and influence 21, enter second coating chamber 7, fill reactant gases plating deielectric-coating, open the family of power and influence 21 then, enter the 3rd coating chamber 7, use with the quadrat method coating ahsorption membrane by processing requirement, plated film finishes and opens the family of power and influence 21, enter out pipe chamber 6, go out to manage and open the family of power and influence 21 after exitting in chamber 6, go out the pipe ring rail outside work rest chain 18 runs to and prepare to unload pipe.Go out to manage chamber 6 after the family of power and influence 21 closes and vacuumize at once, when vacuum tightness be evacuated to≤8 * 10 -3Handkerchief is prepared to connect coating chamber 7 work rest chains 18 again, begins the next production cycle.

Claims (8)

1, production line for coating solar heat-collecting pipe, comprise outer shroud rail (12), it is characterized in that being disposed with inlet pipe chamber (14), coating chamber (7) on the outer shroud rail (12), going out to manage chamber (6), inlet pipe chamber (14), coating chamber (7), the ingress that goes out to manage chamber (6), exit are respectively arranged with the family of power and influence (21), track fork (35); Inlet pipe chamber (14), coating chamber (7), go out to manage the same respectively vacuum unit in chamber (6) (1) and link to each other; Outer shroud rail (12) and inlet pipe chamber (14), coating chamber (7), the interior ring rail (13) that goes out to manage in the chamber (6) are provided with work rest chain (18), work rest chain (18) is by both turning round around outer shroud rail (12), interior ring rail (13), but the work rest of rotation (29) connects to form again, is provided with magnetic controlling target (17) in the interior ring rail (13); The shift fork (9) of outer shroud rail (12) side is arranged on the chain (11) between two sprocket wheels (8); Work rest chain (18) corresponding to shift fork (9) is provided with shifting block (10).
2, production line for coating solar heat-collecting pipe according to claim 1 is characterized in that the top of work rest (29) is provided with the carriage (47) of Glass tubing (44); The bottom of work rest (29) is provided with and interior ring rail (13) corresponding rolling wheel (46); Be provided with between carriage (47) and the roller (46) with the rotation chain (27) on the rotation chain drum (28) be meshed from rotary chain wheel (43), with the corresponding shifting block (23) of revolution chain (26) shift fork (22) on the revolution chain drum (25).
3, production line for coating solar heat-collecting pipe according to claim 1, it is characterized in that track fork (35) is fixed on the axle (30) of outer shroud rail (12), the both sides of track fork (35) are respectively arranged with outer supporting rail (32), the interior supporting rail (31) of the roller (46) of work rest (29).
4, production line for coating solar heat-collecting pipe according to claim 2, the chain drum (25) that it is characterized in that revolving round the sun is provided with the floating roller (19) that is meshed with revolution chain (26).
5, production line for coating solar heat-collecting pipe according to claim 1, it is characterized in that the outside of work rest (29) and inboard be respectively arranged with interior ring rail (13) outside limiting plate (24), interior limiting plate (37) corresponding outside position-limited wheel (45), interior position-limited wheel (41).
6, production line for coating solar heat-collecting pipe according to claim 2, it is characterized in that the revolving chain wheel (39) that is meshed with revolution chain (26) is driven by coaxial follow-up pulley (42), follow-up pulley (42) links to each other by the sprocket wheel (15) on the same motor of chain (38) (34).
7, production line for coating solar heat-collecting pipe according to claim 1 is characterized in that being provided with three coating chambers (7).
8, production line for coating solar heat-collecting pipe according to claim 1, the interior ring rail (13) and the outer shroud rail (12) of it is characterized in that inlet pipe chamber (14), go out to manage chamber (6), coating chamber (7) is interior are oblate track.
CN200810010513A 2008-02-29 2008-02-29 Production line for coating solar heat-collecting pipe Pending CN101519770A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200810010513A CN101519770A (en) 2008-02-29 2008-02-29 Production line for coating solar heat-collecting pipe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200810010513A CN101519770A (en) 2008-02-29 2008-02-29 Production line for coating solar heat-collecting pipe

Publications (1)

Publication Number Publication Date
CN101519770A true CN101519770A (en) 2009-09-02

Family

ID=41080563

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200810010513A Pending CN101519770A (en) 2008-02-29 2008-02-29 Production line for coating solar heat-collecting pipe

Country Status (1)

Country Link
CN (1) CN101519770A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103774102A (en) * 2012-10-19 2014-05-07 陕西拓日新能源科技有限公司 Magnetron sputtering equipment and method for aluminum film deposition on back surface of amorphous silicon
CN107010135A (en) * 2017-04-14 2017-08-04 中科新松有限公司 Climb wall composite crawler
CN109457237A (en) * 2018-12-29 2019-03-12 沧州天瑞星光热技术有限公司 A kind of double flute suspended solar evacuated collector tube coating apparatus and film plating process
CN109852935A (en) * 2019-04-15 2019-06-07 浙江世宏实业有限公司 A kind of plating color equipment for cosmetic tube is set
CN110205595A (en) * 2019-06-12 2019-09-06 河北道荣新能源科技有限公司 Intracavity magnetron sputtering apparatus and method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2732757Y (en) * 2004-07-15 2005-10-12 北京清华阳光能源开发有限责任公司 Continuous coating device for coating capable of selectively absorbing solar spectrum
CN201176455Y (en) * 2008-02-29 2009-01-07 沈阳百乐真空技术有限公司 Coating production line of solar energy heat collecting tube

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2732757Y (en) * 2004-07-15 2005-10-12 北京清华阳光能源开发有限责任公司 Continuous coating device for coating capable of selectively absorbing solar spectrum
CN201176455Y (en) * 2008-02-29 2009-01-07 沈阳百乐真空技术有限公司 Coating production line of solar energy heat collecting tube

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103774102A (en) * 2012-10-19 2014-05-07 陕西拓日新能源科技有限公司 Magnetron sputtering equipment and method for aluminum film deposition on back surface of amorphous silicon
CN107010135A (en) * 2017-04-14 2017-08-04 中科新松有限公司 Climb wall composite crawler
CN109457237A (en) * 2018-12-29 2019-03-12 沧州天瑞星光热技术有限公司 A kind of double flute suspended solar evacuated collector tube coating apparatus and film plating process
CN109852935A (en) * 2019-04-15 2019-06-07 浙江世宏实业有限公司 A kind of plating color equipment for cosmetic tube is set
CN109852935B (en) * 2019-04-15 2023-08-22 浙江世宏实业有限公司 Color plating device for cosmetic tube
CN110205595A (en) * 2019-06-12 2019-09-06 河北道荣新能源科技有限公司 Intracavity magnetron sputtering apparatus and method
CN110205595B (en) * 2019-06-12 2023-10-27 北京道荣新兴能源有限公司 Inner cavity type magnetron sputtering equipment and method

Similar Documents

Publication Publication Date Title
CN101519770A (en) Production line for coating solar heat-collecting pipe
CN101724825B (en) Continuous vacuum coating method and special equipment thereof
CN101353782B (en) Large area anti-reflection conductive film continuous magnetron sputtering film coating production line
CN202347079U (en) Three-chamber vacuum high-temperature and low-pressure continuous carburization equipment
CN107058947B (en) It is used to prepare fuel battery metal double polar plate amorphous carbon-film magnetron sputtering continuous lines
CN107365973A (en) A kind of vacuum coating production line and film plating process
CN105226333B (en) Integral battery door formation system
CN101958371A (en) Device for manufacturing copper indium gallium selenium (CIGS) thin-film solar cells
CN103290382B (en) The planetary work rest of a kind of vacuum plating unit
CN112981346B (en) Multi-chamber magnetic control multilayer optical coating equipment and coating method
CN201176455Y (en) Coating production line of solar energy heat collecting tube
CN209493624U (en) The more targets of three station of dual chamber splash magnetic-controlled sputtering coating equipment altogether
CN211471569U (en) Automatic change quick pickling cleaning line of novel steel pipe
CN111286706B (en) Double-chamber three-station multi-target co-sputtering magnetron sputtering coating method
CN203794983U (en) Chemical vapor deposition device with sliding rail for preparing graphene
CN210030885U (en) Array type multi-furnace-tube PECVD equipment
CN203284458U (en) Vacuum ion film plating production line
CN102220559B (en) Production method and production device of flat solar-energy heat-absorbing film-coated plate
CN112663072A (en) Automatic change quick pickling cleaning line of novel steel pipe
CN200974865Y (en) Continuous vacuum coating apparatus
CN206635398U (en) A kind of thermal evaporation coating machine
CN102086507B (en) Sputtering device
CN201972666U (en) Closed oil pipe direct-fired heating and soaking type cleaning device
CN114059034A (en) Special vacuum continuous beat type coating system
CN201530860U (en) Three-room-two-lock coating machine for solar energy collecting pipes

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C12 Rejection of a patent application after its publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20090902