CN201437550U - Magnetron sputtering coating equipment - Google Patents
Magnetron sputtering coating equipment Download PDFInfo
- Publication number
- CN201437550U CN201437550U CN2009200580105U CN200920058010U CN201437550U CN 201437550 U CN201437550 U CN 201437550U CN 2009200580105 U CN2009200580105 U CN 2009200580105U CN 200920058010 U CN200920058010 U CN 200920058010U CN 201437550 U CN201437550 U CN 201437550U
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- magnetron sputtering
- master wheel
- plated film
- gear
- coating
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Abstract
The utility model discloses magnetron sputtering coating equipment, which comprises a vacuum set, a coating box connected with the vacuum set, a left door cover hinged with the left side of the coating box and a right door cover hinged with the right side of the coating box, wherein the left door cover and the right door cover are all provided with a workpiece clamping device. In the magnetron sputtering coating equipment, when one of the door covers is closed to vacuumize and carry out the magnetron sputtering coating simultaneously, and the coated workpiece can be disassembled and the workpiece to be coated can be clamped on the other door cover, so that the work efficiency of the whole equipment can be improved. The utility model not only has the function of the coating of a planar sputtering target, but also has the function of the coating of a rotating cylinder sputtering target, wherein the workpiece clamping device has the function of composite rotation, so that the process of the coating is more uniform, and better effect of the coating can be achieved.
Description
Technical field
The utility model relates to a kind of vacuum coating film equipment, relates in particular to a kind of magnetron sputtering film device that is used for carrying out on the hub for vehicle wheel surface plated film.
Background technology
In existing coating technique, the magnetron sputtering film device is an application vacuum coating film equipment extremely widely, is widely used in the process for plating artistic products, decoratees fields such as ornament, toy.Coating technique is mainly used at product surfaces such as the plastics that pre-treatment is good, potteries and is coated with metallic film, imitative golden film, thereby obtains light attractive in appearance, inexpensive plastics, ceramic surface metallization goods.So far still be not used for being coated with specially the magnetron sputtering film device of automotive hub.
In addition, the sputtering target as the core component in the existing magnetron sputtering film device is divided into cylinder and Rectangular Planar Magnetron Sputtering Target.Generally be only to have the circular structure or only have the planar target structure in the existing magnetron sputtering film device, still do not have the magnetron sputtering film device that circular and planar target combine.
Summary of the invention
Deficiency at existing magnetron sputtering film device existence, the technical problems to be solved in the utility model provides a kind of high efficiency of complete machine, the magnetron sputtering film device that not only has the plated film function of plane sputtering target but also have the plated film function of cylinder sputtering target.
In order to solve the problems of the technologies described above, the technical scheme that the utility model adopted is: a kind of magnetron sputtering film device, comprise and vacuumize unit, vacuumize the plated film case that unit is connected with this, described magnetron sputtering film device also comprises the left-hand door lid that is articulated in plated film case left side, the right door closure that is articulated in plated film case right side, and described left-hand door lid is equipped with the clamping workpiece device with described right door closure.
As the improvement of such scheme, be provided with plane sputtering target in the described plated film case.
As the improvement of such scheme, be provided with two plane sputtering targets in the described plated film case, described plane sputtering target is arranged at the left and right sides in the plated film case.
As the improvement of such scheme, described left-hand door lid is equipped with the rotating cylindrical sputtering target with described right door closure.
As the improvement of such scheme, it is half-cylindrical that described plated film case integral body is.
As the improvement of such scheme, described left-hand door lid all is half-cylindrical with described right door closure.
As the improvement of such scheme, described clamping workpiece device has the rotatable jointed shaft that is installed on described left-hand door lid or described right door closure.
Improvement as such scheme, described clamping workpiece device comprise the fixed gear that is fixedly installed in left-hand door lid or right door closure and motor, by the guided bearing assembly be installed on master wheel on the fixed gear, be arranged at motor rotating shaft and the flange, the support bar of fixedlying connected master wheel and flange that be arranged in parallel with the driving gear of described master wheel engagement, with master wheel, be articulated in the end that workholder, workholder between flange and the master wheel be articulated in master wheel and be provided with pinion(gear), this pinion(gear) and fixed gear mesh.
As the improvement of such scheme, described workholder is a ㄈ shape workholder.
As the improvement of such scheme, described master wheel is an annular bull gear, and the guided bearing assembly comprises the rolling bearing that is arranged between fixed gear and the master wheel, the inboard Limit Bearing that limits the position of annular bull gear of inner ring surface that is arranged at annular bull gear.
As the improvement of such scheme, described clamping workpiece device also comprise be articulated in described master wheel and with the pinion of described pinion.
As the improvement of such scheme, described clamping workpiece device comprises six groups of intermeshing pinion(gear)s and pinion, and described pinion is along the circumferential uniform distribution of master wheel, and wherein four pinion(gear)s are along the circumferential uniform distribution of master wheel.
The beneficial effects of the utility model are: be hinged with left-hand door lid, right door closure respectively in the both sides of the plated film case of magnetron sputtering film device, and the left-hand door lid is equipped with the clamping workpiece device with right door closure, a door closure such as left-hand door lid close vacuumize and the process of magnetron sputtering plating in, can on another door closure such as right door closure, dismantle the workpiece of finishing plated film, workpiece to be coated on the clamping then, therefore the working efficiency of complete machine improves greatly, and its efficient is near the twice of the filming equipment of existing simple gate lid.
Filming equipment in the utility model can also not only comprise plane sputtering target but also comprise the rotating cylindrical sputtering target, not only has the function of plane sputtering target but also have the function of cylinder sputtering target, existing filming equipment need respectively dispose a plane sputtering target filming equipment and a cylinder sputtering target filming equipment just can be realized identical functions, thereby improved the range of application of vacuum coating film equipment, a vacuum coating film equipment can be finished the work of the sputter coating of two kinds of forms.
Description of drawings
Fig. 1 is each arrangement of components formation level synoptic diagram of magnetron sputtering film device;
Fig. 2 is the structural representation of plated film case and door closure;
Fig. 3 is the structural representation of clamping workpiece device;
Fig. 4 is the vertical view of Fig. 3;
Fig. 5 is the transmission synoptic diagram of clamping workpiece device.
Embodiment
Further specify embodiment of the present utility model below in conjunction with accompanying drawing.
As shown in Figure 1 and Figure 2, a kind of magnetron sputtering film device of the utility model comprises the magnetron sputtering coater that vacuumizes unit 10, has vacuum film coating chamber.Coating equipment comprises plated film case 12 and door closure, and door closure closes up the back and becomes the enclosed vacuum coating chamber with the plated film box-shaped, this vacuum film coating chamber with vacuumize unit 10 and be connected, under the effect that vacuumizes unit 10, produce vacuum effectiveness; Be provided with the workholder of magnetron sputtering target, clamping workpiece etc. in the coating equipment.Clamping just can carry out magnetron sputtering plating after having the coating equipment of workpiece to produce vacuum effectiveness.
Plated film case 12 with vacuumize unit 10 and be connected, described magnetron sputtering film device also comprises the left-hand door lid 16 that is articulated in plated film case left side, the right door closure 18 that is articulated in plated film case right side, described left-hand door lid 16 is equipped with the clamping workpiece device with described right door closure 18.In the utility model, be hinged with left-hand door lid 16, right door closure 18 respectively in the both sides of the plated film case 12 of magnetron sputtering film device, and left-hand door lid 16 is equipped with the clamping workpiece device with right door closure 18, left-hand door lid 16 close vacuumize and the process of magnetron sputtering plating in, can on right door closure 18, dismantle the workpiece of finishing plated film, workpiece to be coated on the clamping then, therefore the working efficiency of complete machine improves greatly, and its efficient is near the twice of the filming equipment of existing simple gate lid.
More preferably, be provided with plane sputtering target 22 in the described plated film case 12, make this magnetron sputtering film device have plane sputter function.Rotating cylindrical sputtering target 25 can certainly be set in plated film case 12 makes it have cylinder sputter function.
More preferably, be provided with two plane sputtering targets 22 in the described plated film case, described plane sputtering target 22 is arranged at the left and right sides in the plated film case.Symmetrically arranged two plane sputtering targets 22 can carry out work simultaneously, make plated film efficient improve greatly, also can form twin target and be coated with more high-grade reaction composite membrane.
More preferably, described left-hand door lid 16 is equipped with rotating cylindrical sputtering target 25 with described right door closure 18.Thereby the filming equipment in the utility model can also not only comprise plane sputtering target but also comprise the cylinder sputtering target, not only has the function of plane sputtering target but also have the function of cylinder sputtering target, existing filming equipment need respectively dispose a plane sputtering target filming equipment and a cylinder sputtering target filming equipment just can be realized identical functions, thereby improved the range of application of vacuum coating film equipment, a vacuum coating film equipment can be finished the work of the sputter coating of two kinds of forms.
More preferably, it is half-cylindrical that described plated film case 12 integral body are, and when plated film case 12 formed coating chamber with one of them door closure, columniform outside surface can better be resisted external atmosphere pressure, can improve effective usage space of coating chamber simultaneously.
More preferably, described left-hand door lid 16 all is half-cylindrical with described right door closure 18.When plated film case and one of them door closure formed coating chamber, one of them effect of columniform outside surface was better to resist external atmosphere pressure, can improve effective usage space of coating chamber simultaneously.
More preferably, described clamping workpiece device has the rotatable jointed shaft that is installed on described left-hand door lid or described right door closure.This clamping workpiece device rotates around jointed shaft by electric motor driving, can be so that workpiece rotates continuously in the process of sputter coating and makes workpiece plated film is even everywhere.
More preferably, described clamping workpiece device comprise the fixed gear 32 that is fixedly installed in left-hand door lid 16 or right door closure 18 and motor 33, by guided bearing assembly 50 be installed on master wheel 35 on the fixed gear 32, be arranged at motor 33 rotating shaft and the flange 38, the support bar 39 of fixedlying connected master wheel 35 and flange 38 that be arranged in parallel with the driving gear 36 of described master wheel 35 engagements, with master wheel 35, be articulated in the workholder 55 between flange 38 and the master wheel 35, the end that workholder 55 is articulated in master wheel 35 is provided with pinion(gear) 58, this pinion(gear) 58 and fixed gear 32 mesh.
More preferably, described work rest 55 is a ㄈ shape workholder, the workpiece 60 that is clamped in workholder like this is located on the axle of workholder 55 jointed shafts, and workholder 55 rotation process workpiece are made spinning motion simultaneously rather than rotated around work rest, make coating effects better.
More preferably, described master wheel 35 is annular bull gears, and guided bearing assembly 50 comprises the rolling bearing 52 that is arranged between fixed gear 32 and the master wheel 35, the inboard Limit Bearing 53 that limits the position of annular bull gear of inner ring surface that is arranged at annular bull gear.
Under the driving of motor, master wheel 35 rotatablely moves with parts such as flange 38, support bar 39, ㄈ shape workholder 55, pinion(gear)s 58; Simultaneously not only because pinion(gear) 58 and fixed gear 32 engagements and pinion(gear) 58 but also be articulated on the master wheel 35, under the acting in conjunction of co-axial master wheel 35 and fixed gear 32, pinion(gear) 58 self produces the motion of rotating around jointed shaft, and drives ㄈ shape workholder 55 around the jointed shaft rotation.Therefore can be the axle rotation of pinion(gear) 58 and rotate with the axle of master wheel 35 simultaneously around the jointed shaft of ㄈ shape workholder 55 so that be clamped in the workpiece of ㄈ shape workholder 55 around master wheel, thereby make workpiece in coating chamber, do compound rotatablely moving, make that the coating process plated film is even, coating effects is good, plated film efficient height.Columniform coating chamber also provides enough spaces for above-mentioned each parts rotatablely move, and has saved the material of plated film case and door closure simultaneously to greatest extent, has also reduced vacuumizing required power loss, thereby has reduced cost significantly.
With reference to figure 3, Fig. 4, master wheel 35 is provided with the pinion 59 with pinion(gear) 58 engagements, and pinion(gear) 58 all is articulated in master wheel 35 with the axle of pinion 59.In the time need carrying out plated film to bigger workpiece, workholder 55 can be installed on pinion(gear) 58, can install less workpiece this moment, and diagram can be held four groups of workpiece and carry out plated film, and supplying the rotary space of the workpiece rotation of each workholder is big rotary space 64; In the time need carrying out plated film to less workpiece, workholder 55 can be installed on pinion 59, can install more workpiece this moment, diagram can be held six groups of workpiece and carry out plated film, supplying the rotary space of the workpiece rotation of each workholder is big rotary space 66, has further improved the working efficiency of complete machine.In order to realize above-mentioned operation, described clamping workpiece device comprises six groups of intermeshing pinion(gear)s and pinion, and described pinion is along the circumferential uniform distribution of master wheel, and wherein four pinion(gear)s are along the circumferential uniform distribution of master wheel.
In the utility model, sidewall at the plated film case is equipped with two or more rectangle plane targets 22, in the middle of left-hand door lid 16 and right door closure 18, a rotating cylindrical target 25 is housed respectively, formation has the sputtering target structure of planar target and cylindrical target simultaneously, selects planar target or cylindrical target to be coated with wheel hub or to be coated with composite membrane according to the different process requirement in the time of can satisfying plated film.This filming equipment adopts a Room two-door structure, each gate also is equipped with the composite rotating transmission mechanism of clamping hub for vehicle wheel, can in plated film, carry out the clamping workpiece of wheel hub, improved the working efficiency of complete machine, do compound rotatablely moving at the coating process workpiece, in rotation, make revolution motion, improved workpiece greatly by the efficient of plating, obtain plating everywhere, plated film is evenly effective.
Above disclosed only is preferred embodiment of the present utility model, can not limit the interest field of the utility model certainly with this, and therefore the equivalent variations of being done according to the utility model claim still belongs to the scope that the utility model is contained.
Claims (9)
1. magnetron sputtering film device, comprise and vacuumize unit, vacuumize the plated film case that unit is connected with this, it is characterized in that: described magnetron sputtering film device also comprises the left-hand door lid that is articulated in plated film case left side, the right door closure that is articulated in plated film case right side, described left-hand door lid is equipped with the clamping workpiece device with described right door closure, is provided with plane sputtering target in the described plated film case.
2. magnetron sputtering film device according to claim 1 is characterized in that: be provided with two plane sputtering targets in the described plated film case, described plane sputtering target is arranged at the left and right sides in the plated film case.
3. magnetron sputtering film device according to claim 1 and 2 is characterized in that: described left-hand door lid is equipped with the rotating cylindrical sputtering target with described right door closure.
4. magnetron sputtering film device according to claim 1 and 2 is characterized in that: described plated film case integral body is half-cylindrical.
5. magnetron sputtering film device according to claim 1 is characterized in that: described left-hand door lid all is half-cylindrical with described right door closure.
6. magnetron sputtering film device according to claim 1 is characterized in that: described clamping workpiece device has the rotatable jointed shaft that is installed on described left-hand door lid or described right door closure.
7. magnetron sputtering film device according to claim 1, it is characterized in that: described clamping workpiece device comprise the fixed gear that is fixedly installed in left-hand door lid or right door closure and motor, by the guided bearing assembly be installed on master wheel on the fixed gear, be arranged at motor rotating shaft and the flange, the support bar of fixedlying connected master wheel and flange that be arranged in parallel with the driving gear of described master wheel engagement, with master wheel, be articulated in the end that workholder, workholder between flange and the master wheel be articulated in master wheel and be provided with pinion(gear), this pinion(gear) and fixed gear mesh.
8. magnetron sputtering film device according to claim 7 is characterized in that: described workholder is a Contraband shape workholder.
9. magnetron sputtering film device according to claim 7, it is characterized in that: described master wheel is an annular bull gear, and the guided bearing assembly comprises the rolling bearing that is arranged between fixed gear and the master wheel, the inboard Limit Bearing that limits the position of annular bull gear of inner ring surface that is arranged at annular bull gear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200580105U CN201437550U (en) | 2009-06-08 | 2009-06-08 | Magnetron sputtering coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200580105U CN201437550U (en) | 2009-06-08 | 2009-06-08 | Magnetron sputtering coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201437550U true CN201437550U (en) | 2010-04-14 |
Family
ID=42399526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200580105U Expired - Fee Related CN201437550U (en) | 2009-06-08 | 2009-06-08 | Magnetron sputtering coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201437550U (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534539A (en) * | 2011-12-31 | 2012-07-04 | 肇庆市腾胜真空技术工程有限公司 | Double-plate or double-side film coating system |
| CN103290382A (en) * | 2013-05-15 | 2013-09-11 | 宁波韵升股份有限公司 | Planetary workpiece frame of vacuum coating machine |
| CN106399927A (en) * | 2016-09-30 | 2017-02-15 | 东莞市联洲知识产权运营管理有限公司 | Coating box provided with inclined type closing door |
| CN106435469A (en) * | 2016-09-30 | 2017-02-22 | 东莞市联洲知识产权运营管理有限公司 | Coating box with incline translation combined automatic closed door |
| CN106477907A (en) * | 2016-09-30 | 2017-03-08 | 东莞市联洲知识产权运营管理有限公司 | A kind of plated film case with linkage door close |
| CN107022738A (en) * | 2017-05-08 | 2017-08-08 | 江苏瑞尔光学有限公司 | A kind of glasses lens plated gate of Double-face horizontal |
| CN108277468A (en) * | 2018-02-26 | 2018-07-13 | 沈阳中北真空技术有限公司 | A kind of magnetron sputtering optical coating apparatus and film plating process with vacuum machine arm |
| CN110218976A (en) * | 2019-07-17 | 2019-09-10 | 南通职业大学 | A kind of components automatic film coating device |
| CN113136553A (en) * | 2021-04-23 | 2021-07-20 | 深圳市乐苏科技有限公司 | Film coating equipment and film coating process for mobile phone camera lens |
-
2009
- 2009-06-08 CN CN2009200580105U patent/CN201437550U/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102534539A (en) * | 2011-12-31 | 2012-07-04 | 肇庆市腾胜真空技术工程有限公司 | Double-plate or double-side film coating system |
| CN102534539B (en) * | 2011-12-31 | 2013-12-11 | 肇庆市腾胜真空技术工程有限公司 | Double-plate or double-side film coating system |
| CN103290382A (en) * | 2013-05-15 | 2013-09-11 | 宁波韵升股份有限公司 | Planetary workpiece frame of vacuum coating machine |
| CN103290382B (en) * | 2013-05-15 | 2015-09-09 | 宁波韵升股份有限公司 | The planetary work rest of a kind of vacuum plating unit |
| CN106399927A (en) * | 2016-09-30 | 2017-02-15 | 东莞市联洲知识产权运营管理有限公司 | Coating box provided with inclined type closing door |
| CN106435469A (en) * | 2016-09-30 | 2017-02-22 | 东莞市联洲知识产权运营管理有限公司 | Coating box with incline translation combined automatic closed door |
| CN106477907A (en) * | 2016-09-30 | 2017-03-08 | 东莞市联洲知识产权运营管理有限公司 | A kind of plated film case with linkage door close |
| CN106477907B (en) * | 2016-09-30 | 2019-05-03 | 吴筱雨 | A kind of plated film case with linkage door close |
| CN107022738A (en) * | 2017-05-08 | 2017-08-08 | 江苏瑞尔光学有限公司 | A kind of glasses lens plated gate of Double-face horizontal |
| CN108277468A (en) * | 2018-02-26 | 2018-07-13 | 沈阳中北真空技术有限公司 | A kind of magnetron sputtering optical coating apparatus and film plating process with vacuum machine arm |
| CN110218976A (en) * | 2019-07-17 | 2019-09-10 | 南通职业大学 | A kind of components automatic film coating device |
| CN113136553A (en) * | 2021-04-23 | 2021-07-20 | 深圳市乐苏科技有限公司 | Film coating equipment and film coating process for mobile phone camera lens |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100414 Termination date: 20140608 |