CN215865103U

CN215865103U - High-precision non-contact spacer ring thickness online high-speed measuring instrument

Info

Publication number: CN215865103U
Application number: CN202122294502.8U
Authority: CN
Inventors: 宋俊慧
Original assignee: Individual
Current assignee: Individual
Priority date: 2021-09-18
Filing date: 2021-09-18
Publication date: 2022-02-18
Anticipated expiration: 2031-09-18

Abstract

The utility model discloses a high-precision non-contact spacer ring thickness online high-speed measuring instrument, which comprises: the device comprises an M1 motion shaft, an M5 motion shaft, a door-shaped frame, a mounting plate, a C1 detection lens, a C2 detection lens, an M2 motion shaft, an M4 motion shaft, an M3 motion shaft, a spectrum confocal lens group and a computer processor, wherein a material taking tray is slidably mounted on the M1 motion shaft; the M5 moving shaft is provided with a receiving tray in a sliding way; the M5 motion shaft and the M1 motion shaft are arranged in parallel at intervals; the gate frame is arranged at one side of the M1 motion shaft and the M5 motion shaft and is perpendicular to the M1 motion shaft and the M5 motion shaft; the M1 moving shaft, the M5 moving shaft and the door-shaped frame are all arranged on the mounting plate; the C1 detection lens and the C2 detection lens are arranged on the door-shaped frame at intervals, and the C1 detection lens and the C2 detection lens are respectively arranged corresponding to the M1 movement axis and the M5 movement axis; on one hand, the spectrum confocal measurement belongs to high-precision measurement, and the theoretical detection precision is superior to 0.25 mu m.

Description

High-precision non-contact spacer ring thickness online high-speed measuring instrument

Technical Field

The utility model belongs to the field of photoelectric automatic detection equipment, and particularly relates to a high-precision non-contact spacer ring thickness online high-speed measuring instrument.

Background

In the production process of consumer-grade lenses (mobile phone lenses, tablet personal computer cameras, notebook cameras, vehicle-mounted lenses, security monitoring lenses and the like), the optical interval between the lenses is ensured by a spacer ring (an SOMA (silicon oxide film) or a metal spacer ring), and the production yield of the high-pixel cameras is extremely sensitive to the thickness error of the spacer ring, so that the spacer ring with the thickness size within the allowable error range is favorable for improving the assembly yield of the lenses;

in view of this, the utility model provides a high-precision non-contact spacer thickness online high-speed measuring instrument, so that a spacer with a proper thickness can be screened out quickly.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a high-precision non-contact spacer thickness online high-speed measuring instrument to solve the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme:

a high-precision non-contact spacer ring thickness online high-speed measuring instrument comprises:

the device comprises an M1 motion shaft, an M5 motion shaft, a door-shaped frame, a mounting plate, a C1 detection lens, a C2 detection lens, an M2 motion shaft, an M4 motion shaft, an M3 motion shaft, a spectrum confocal lens group and a computer processor, wherein a material taking tray is slidably mounted on the M1 motion shaft; the M5 moving shaft is provided with a receiving tray in a sliding way; the M5 motion shaft and the M1 motion shaft are arranged in parallel at intervals; the gate frame is arranged at one side of the M1 motion shaft and the M5 motion shaft and is perpendicular to the M1 motion shaft and the M5 motion shaft; the M1 moving shaft, the M5 moving shaft and the door-shaped frame are all arranged on the mounting plate; the C1 detection lens and the C2 detection lens are arranged on the door-shaped frame at intervals, and the C1 detection lens and the C2 detection lens are respectively arranged corresponding to the M1 movement axis and the M5 movement axis; the M2 movement shafts and the M4 movement shafts are arranged on the door-shaped frame and can slide along the length direction of the door-shaped frame, a G1 pneumatic guide rail is arranged on the M2 movement shaft, a P1 suction pen is arranged at the output end of the G1 pneumatic guide rail, a G2 pneumatic guide rail is arranged on the M4 movement shaft, and a P2 suction pen is arranged at the output end of the G2 pneumatic guide rail; the M3 motion shaft is arranged in parallel with the door-shaped frame, and a detection workpiece disc is slidably mounted on the M3 motion shaft; the spectrum confocal lens group is oppositely arranged on the door-shaped frame and the mounting plate; the spectrum confocal lens group is arranged between the C1 detection lens and the C2 detection lens;

the computer processor is respectively electrically connected with the M1 movement axis, the M5 movement axis, the C1 detection lens, the C2 detection lens, the M2 movement axis, the M4 movement axis, the M3 movement axis and the spectrum confocal lens group;

the material taking tray is driven by an M1 moving shaft to slide to reach the position below a C1 detection lens (namely the material taking position), the C1 detection lens judges the position of a space ring and the existence of the space ring, if the C1 detection lens cannot detect the space ring, the M1 moving shaft drives the space ring tray to move to the next position, if the C1 detection lens detects the space ring, an M2 moving shaft moves to the upper part of the space ring, a G1 pneumatic guide rail drives a P1 suction pen to suck the space ring, meanwhile, a detection workpiece disc moves to a feeding position under the drive of an M3 moving shaft, the P1 suction pen places the space ring to be detected at the workpiece position of the detection workpiece disc, the detection workpiece disc moves to the detection position under the drive of an M3 moving shaft, the upper and lower two groups of spectrum confocal lenses measure the upper and lower positions of the space ring and compare the upper and lower positions with the data of a standard sample to obtain the position differences D and D' with the data of the standard sample, and the actual size of the sample to be detected by calculation, after the test is finished, the workpiece disc is detected to move to a discharging position under the driving of the M3 moving shaft, if the detection result does not meet the preset condition, the spacing ring is sucked by the P2 suction pen and then is put into a waste barrel under the driving of the M4 moving shaft, if the detection result meets the preset condition, the material receiving tray is driven by the M5 moving shaft and moves to a material receiving position, the C2 detection lens judges whether the material receiving position on the material receiving tray is provided with the spacing ring and position information, if the material receiving position is not provided with the spacing ring, the material receiving tray moves to the next position, and if the material receiving position is provided with the spacing ring, the spacing ring is driven by the M4 moving shaft to place at the material receiving position on the material receiving tray after being sucked by the P2 suction pen.

The positioning accuracy of the M1 movement axis and the M5 movement axis is less than or equal to 5 mu M, the repetition accuracy is less than or equal to 5 mu M, and the horizontal and vertical straightness accuracy is less than or equal to 10 mu M/300 mm.

The flatness of the material taking tray and the material receiving tray is less than or equal to 10 mu m.

The adjusting precision of the C1 detection lens and the C2 detection lens is less than or equal to 20 microns, the working distance of the lens is more than or equal to 150mm, the resolution is less than or equal to 4.8 microns, and the distortion is less than or equal to 0.08%.

The positioning accuracy of the M2 motion shaft, the M3 motion shaft and the M4 motion shaft is less than or equal to 5 mu M, the repetition accuracy is less than or equal to 5 mu M, and the horizontal and vertical straightness accuracy is less than or equal to 10 mu M/300 mm.

The stroke adjustable range of the G1 pneumatic guide rail and the G2 pneumatic guide rail is 20-50 mm.

The adjustable air pressure range of the P1 suction pen and the P2 suction pen is 0-100 Pa.

The parallelism of the upper surface and the lower surface of the detection workpiece disc is less than or equal to 10 microns, the flatness of the detection position is less than or equal to 1 micron, the detection position has a negative vacuum air suction function, the air pressure is adjustable at 0-100 Pa, air suction is performed during thickness measurement, and the detection is stopped after the detection is finished.

The adjustment precision of the two groups of spectrum confocal lenses is less than or equal to 20 mu m; the measuring range of the lens is more than or equal to 3mm, the focal length is more than or equal to 5mm, and the measuring precision is +/-0.02% FS.

The beneficial technical effects of the utility model compared with the prior art are that,

an upper and lower centering spectrum confocal lens is adopted, on one hand, the spectrum confocal measurement belongs to high-precision measurement, and the theoretical detection precision is superior to 0.25 mu m; on the other hand, the double-light-path design can effectively reduce the system measurement error caused by the vibration of the machine.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a flow chart of the present invention;

fig. 3 is a schematic diagram of the detection principle of the confocal lens for the centered spectrum according to the present invention.

Fig. 4 shows the defocus of the upper surface of the standard sample (assumed) test sample as a function of wavelength.

Fig. 5 shows the relationship between the defocus amount of the lower surface of the standard sample (assumed) and the wavelength.

In the figure: 1. m1 motion axis; 2. a material taking tray; 3. c1 detecting the lens; 4. a P1 pipette; 5. g1 pneumatic guide rails; 6. m2 motion axis; 7. m4 motion axis; 8. g2 pneumatic guide rails; 9. a P2 pipette; 10. c2 detecting the lens; 11. a receiving tray; 12. m5 motion axis; 13. a waste bin; 14. a spectral confocal lens group; 15. m3 motion axis; 16. and detecting the workpiece disc.

Detailed Description

The utility model is further described with reference to the following figures and specific embodiments.

As shown in the figure, the high-precision non-contact spacer ring thickness online high-speed measuring instrument comprises:

the device comprises an M1 motion shaft 1, an M5 motion shaft 12, a door-shaped frame, a mounting plate, a C1 detection lens 3, a C2 detection lens 10, an M2 motion shaft 6, an M4 motion shaft 7, an M3 motion shaft 15, a spectrum confocal lens group 14 and a computer processor, wherein a material taking tray 2 is slidably mounted on the M1 motion shaft 1; the M5 moving shaft 12 is provided with a receiving tray 11 in a sliding way; the M5 motion shaft 12 is spaced apart from and parallel to the M1 motion shaft 1; the gate is erected at one side of the M1 movement shaft 1 and the M5 movement shaft 12 and is arranged perpendicular to the M1 movement shaft 1 and the M5 movement shaft 12; the M1 moving shaft 1, the M5 moving shaft 12 and the door-shaped frame are arranged on the mounting plate; the C1 detection lens 3 and the C2 detection lens 10 are arranged on the gantry at intervals, and the C1 detection lens 3 and the C2 detection lens 10 are respectively arranged corresponding to the M1 movement axis 1 and the M5 movement axis 12; the M2 movement shaft 6 and the M4 movement shaft 7 are both arranged on the door-shaped frame and can slide along the length direction of the door-shaped frame, a G1 pneumatic guide rail 5 is arranged on the M2 movement shaft 6, a P1 suction pen 4 is arranged at the output end of the G1 pneumatic guide rail 5, a G2 pneumatic guide rail 8 is arranged on the M4 movement shaft 7, and a P2 suction pen 9 is arranged at the output end of the G2 pneumatic guide rail 8; the M3 moving shaft 15 is arranged in parallel with the door frame, and a detection workpiece disc 16 is slidably mounted on the M3 moving shaft 15; the spectrum confocal lens group 14 is oppositely arranged on the door-shaped frame and the mounting plate; the spectrum confocal lens group 14 is arranged between the C1 detection lens 3 and the C2 detection lens 10;

the computer processor is respectively electrically connected with the M1 movement shaft 1, the M5 movement shaft 12, the C1 detection lens 3, the C2 detection lens 10, the M2 movement shaft 6, the M4 movement shaft 7, the M3 movement shaft 15 and the spectrum confocal lens group 14;

the P1 suction pen 4 and the P2 suction pen 9 are both pneumatic suction pens, and can flexibly grab a space ring from the material taking tray 2;

the material taking tray 2 slides under the driving of the M1 moving shaft 1 to reach the position below the C1 detection lens 3 (namely the material taking position), the C1 detection lens 3 judges the position of a space ring and whether the space ring exists or not, if the C1 detection lens 3 cannot detect the space ring, the M1 moving shaft 1 drives the space ring tray to move to the next position, if the C1 detection lens 3 detects the space ring, the M2 moving shaft 6 moves to the upper part of the space ring, the G1 pneumatic guide rail 5 drives the P1 suction pen 4 to suck the space ring, meanwhile, the detection workpiece disc 16 moves to the feeding position under the driving of the M3 moving shaft 15, the P1 suction pen 4 places the space ring to be detected at the workpiece position of the detection workpiece disc 16, the detection workpiece disc 16 moves to the detection position under the driving of the M3 moving shaft 15, the upper and lower spectral confocal lenses measure the upper and lower positions of the space ring and compare with the standard sample data to obtain the position difference D and D', the actual size of a sample to be detected is obtained through calculation, after the test is finished, the workpiece disc 16 is detected to move to a discharging position under the driving of the M3 moving shaft 15, if the detection result does not meet the preset condition, the spacing ring is sucked by the P2 suction pen 9 and then is put into the waste material barrel 13 under the driving of the M4 moving shaft 7, if the detection result meets the preset condition, the material receiving tray 11 is driven by the M5 moving shaft 12 and moves to a material receiving position, the presence or absence of the spacing ring and position information of the material receiving position on the material receiving tray 11 are judged by the C2 detection lens 10, if the material receiving position does not have the spacing ring, the material receiving tray 11 moves to the next position, and if the material receiving position has the spacing ring, the spacing ring is sucked by the P2 suction pen 9 and then is put into the material receiving position on the material receiving tray 11 under the driving of the M4 moving shaft 7.

The positioning precision of the M1 movement shaft 1 and the M5 movement shaft 12 is less than or equal to 5 mu M, the repetition precision is less than or equal to 5 mu M, and the horizontal and vertical straightness is less than or equal to 10 mu M/300 mm.

The flatness of the material taking tray 2 and the material receiving tray 11 is less than or equal to 10 mu m.

The adjusting precision of the C1 detection lens 3 and the C2 detection lens 10 is less than or equal to 20 microns, the working distance of the lenses is more than or equal to 150mm, the resolution is less than or equal to 4.8 microns, and the distortion is less than or equal to 0.08%.

The positioning precision of the M2 movement shaft 6, the M3 movement shaft 15 and the M4 movement shaft 7 is less than or equal to 5 mu M, the repetition precision is less than or equal to 5 mu M, and the horizontal and vertical straightness is less than or equal to 10 mu M/300 mm.

The stroke adjustable range of the G1 pneumatic guide rail 5 and the G2 pneumatic guide rail 8 is 20-50 mm.

The adjustable air pressure range of the P1 suction pen 4 and the P2 suction pen 9 is 0-100 Pa.

The parallelism of the upper surface and the lower surface of the detection workpiece disc 16 is less than or equal to 10 mu m, the flatness of the detection position is less than or equal to 1 mu m, the detection position has a negative vacuum air suction function, the air pressure is adjustable at 0-100 Pa, air suction is carried out during thickness measurement, and the detection is stopped after the detection is finished.

The vertical axis in fig. 4 and 5 is defocus, and the horizontal axis is wavelength; p1 in FIGS. 3 to 5 is the defocus of the upper surface of the standard sample, and P2 is the defocus of the upper surface of the test sample; p1 'is the defocus amount of the lower surface of the standard sample, and P2' is the defocus amount of the lower surface of the detection sample; a detection through hole is formed below the detection workpiece disc 16, the spectrum confocal lens 14 on the mounting plate extends upwards from the detection through hole to detect the lower surface of the spacing ring, and if dust and the like exist at the detection position, the spacing ring to be detected may be padded, so that the bottom surface of the spacing ring to be detected and the lower surface of the standard sample are not on the same horizontal line.

The utility model adopts the upper and lower centering spectrum confocal lens, on one hand, the spectrum confocal measurement belongs to high-precision measurement, and the theoretical detection precision is superior to 0.25 mu m; on the other hand, the double-light-path design can effectively reduce the system measurement error caused by the vibration of the machine.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention are intended to be included in the scope of the present invention.

Claims

1. The utility model provides an online high-speed measuring apparatu of high accuracy non-contact space ring thickness which characterized in that includes:

the material taking tray is driven by an M1 moving shaft to slide to reach the position below a C1 detection lens, the C1 detection lens judges the position of a space ring and whether the space ring exists, if the C1 detection lens cannot detect the space ring, the M1 moving shaft drives the space ring tray to move to the next position, if the C1 detection lens detects the space ring, an M2 moving shaft moves to the position above the space ring, a G1 pneumatic guide rail drives a P1 suction pen to suck the space ring, meanwhile, the detection workpiece disc moves to a feeding position under the drive of an M3 moving shaft, the P1 suction pen places the space ring to be detected at the workpiece position of the detection workpiece disc, the detection workpiece disc moves to a detection position under the drive of an M3 moving shaft, the upper and lower two groups of spectrum lenses measure the upper and lower positions of the space ring and compare with standard sample data to obtain the position differences D and D 'of the standard sample to be detected through calculation, the actual size of the sample to be detected is obtained, and after the test, the detection workpiece disc moves to the discharge position difference D and D' under the drive of the M3 detection shaft to the discharge position of the standard sample, if the detection result does not meet the preset condition, the spacing ring is sucked by the P2 suction pen and then is put into the waste material barrel under the driving of the M4 moving shaft, if the detection result meets the preset condition, the material receiving tray is driven by the M5 moving shaft to move to the material receiving position, the C2 detection lens is used for judging whether the material receiving position on the material receiving tray is provided with the spacing ring or not and position information, if the material receiving position is not provided with the spacing ring, the material receiving tray is moved to the next position, and if the material receiving position is provided with the spacing ring, the spacing ring is driven by the M4 moving shaft to be placed at the material receiving position on the material receiving tray after being sucked by the P2 suction pen.

2. The high-precision non-contact spacer thickness on-line high-speed measuring instrument as claimed in claim 1, wherein the positioning precision of M1 movement axis and M5 movement axis is less than or equal to 5 μ M, the repetition precision is less than or equal to 5 μ M, and the horizontal and vertical straightness is less than or equal to 10 μ M/300 mm.

3. The high-precision non-contact spacer ring thickness online high-speed measuring instrument as claimed in claim 2, wherein the flatness of the material taking tray and the material receiving tray is less than or equal to 10 μm.

4. The high-precision non-contact spacer ring thickness online high-speed measuring instrument as claimed in claim 3, wherein the C1 detecting lens and the C2 detecting lens have an adjustment precision of 20 μm or less, a lens working distance of 150mm or more, a resolution of 4.8 μm or less, and a distortion of 0.08% or less.

5. The high-precision non-contact type gauge for measuring the thickness of the space ring in the on-line high-speed manner as claimed in claim 4, wherein the positioning precision of the M2 movement axis, the M3 movement axis and the M4 movement axis is less than or equal to 5 μ M, the repetition precision is less than or equal to 5 μ M, and the horizontal and vertical straightness is less than or equal to 10 μ M/300 mm.

6. The high-precision non-contact type spacer thickness online high-speed measuring instrument as claimed in claim 5, wherein the stroke adjustable range of the G1 pneumatic guide rail and the G2 pneumatic guide rail is 20-50 mm.

7. The high-precision non-contact type spacer ring thickness online high-speed measuring instrument as claimed in claim 6, wherein the adjustable air pressure range of the P1 suction pen and the P2 suction pen is 0-100 Pa.

8. The high-precision non-contact spacer ring thickness on-line high-speed measuring instrument as claimed in claim 7, wherein the parallelism of the upper and lower surfaces of the detection workpiece disc is less than or equal to 10 μm, the flatness of the detection position is less than or equal to 1 μm, the detection position has a negative vacuum suction function, the air pressure is adjustable within 0-100 Pa, suction is performed during thickness measurement, and the detection is stopped after completion of the detection.

9. The high-precision non-contact spacer ring thickness online high-speed measuring instrument as claimed in claim 8, wherein the adjustment precision of the two sets of spectrum confocal lenses is less than or equal to 20 μm; the measuring range of the lens is more than or equal to 3mm, the focal length is more than or equal to 5mm, and the measuring precision is +/-0.02% FS.