CN111895924B - Automatic lens thickness measuring device - Google Patents

Automatic lens thickness measuring device Download PDF

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Publication number
CN111895924B
CN111895924B CN202010682616.7A CN202010682616A CN111895924B CN 111895924 B CN111895924 B CN 111895924B CN 202010682616 A CN202010682616 A CN 202010682616A CN 111895924 B CN111895924 B CN 111895924B
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China
Prior art keywords
lens
measurement
automatic
motion platform
thickness
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CN111895924A (en
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邓建南
王晗
张嘉荣
卓少木
朱相优
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Guangzhou Jingdian Technology Co ltd
Guangdong University of Technology
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Guangzhou Jingdian Technology Co ltd
Guangdong University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Abstract

The invention provides an automatic measuring device for lens thickness. The automatic lens thickness measuring device comprises: a two-dimensional module; the lens tray is arranged on one side of the two-dimensional module, and a plurality of lenses can be placed on the lens tray; a precision motion platform mounted on one side of the lens tray; the non-contact measurement module is arranged above the precision motion platform and is used for performing non-contact measurement on the lens; the contact type measurement module is arranged above the precision motion platform and is used for carrying out contact type measurement on the lens. The automatic measuring device for the thickness of the lens has the advantages of automatic batch detection, high measuring efficiency and low labor cost.

Description

Automatic lens thickness measuring device
Technical Field
The invention relates to the technical field of optical measurement, in particular to an automatic lens thickness measuring device.
Background
At present, various aspheric lenses play irreplaceable roles in military, civil and other precision optical products, and increasingly strict design indexes ensure that the requirements on processing detection precision and the like of the aspheric lenses are higher and higher. In the last detection procedure of the aspheric lens, the central thickness value of the aspheric lens is one of the key indexes for judging whether the aspheric lens is qualified or not. The current lens measurement mainly has the following defects:
1) the existing infrared measurement mode does not consider the influence of the shape of the lens on the measurement result, and if the curvature of the surface of the lens is large, a gap can be formed, so that the measurement result has errors.
2) In the existing measuring device, because the edge diameter of a small lens is very small, the edge thickness of the lens cannot be accurately measured due to a large light spot of a sensor focus when non-contact measurement is adopted.
3) In existing measuring devices, the thickness of the lens is measured, in part, by a ruler, the measurement being affected by the accuracy of the ruler, the minimum index value, and manual readings.
4) In the existing measuring device, the centering mode of the lens is either fixed according to the groove or manually adjusted, and some lenses are even adjusted in one dimension, so that certain centering errors exist.
5) The principle of the existing optical measurement method is that a light signal is emitted according to a light condensation source, and the light signal is refracted through a lens, so that the positions of light condensation points are different. The thickness of the lens is obtained by calculating the difference between the positions of the light-gathering points under the refraction condition and the non-refraction condition. However, the curvature of the aspherical lens also affects the refractive index, which causes a certain trouble and error in calculation.
6) In the existing device, the degree of automation is low, and manual replacement of the measurement lens is adopted, so that interference of human factors exists.
The existing method mainly depends on manual operation of a dial indicator for measurement, so that the measurement efficiency is low, the labor cost is high, certain human factors exist in manual measurement, the measurement precision and stability cannot be guaranteed, and even a lens can be scratched; in addition, if one surface of the dial indicator for measurement is sunken, the measuring rod has a certain diameter, so that a gap is formed between the lens and the measuring rod during measurement, the central part cannot be contacted, and the measurement result is inaccurate.
Therefore, there is a need to provide a new automatic lens thickness measuring device to solve the above-mentioned technical problems.
Disclosure of Invention
The invention aims to provide an automatic lens thickness measuring device which can realize automatic batch detection, has high measuring efficiency and low labor cost.
In order to solve the above technical problems, the present invention provides an automatic lens thickness measuring device, comprising: a two-dimensional module;
the lens tray is arranged on one side of the two-dimensional module, and a plurality of lenses can be placed on the lens tray;
the precise motion platform is arranged on one side of the lens tray and can move on an X axis and a Y axis, the top side of the precise motion platform is provided with the measurement platform, the measurement platform comprises a first rotary table, and the top side of the first rotary table is provided with the guide fixture;
the non-contact measurement module is arranged above the precision motion platform and is used for measuring the central thickness of the lens, the non-contact measurement module comprises a laser coaxial displacement sensor, and a three-dimensional optical adjusting frame is arranged on the top side of the laser coaxial displacement sensor;
the contact type measuring module is installed above the precision motion platform and used for conducting edge thickness measurement on the lens, the contact type measuring module comprises a servo closed-loop motion platform, a contact type sensor and an automatic centering fixture are installed on the servo closed-loop motion platform, the automatic centering fixture is located below the contact type sensor, a second rotary table is installed on the top side of the automatic centering fixture, and the first rotary table and the second rotary table rotate coaxially.
Preferably, the two-dimensional module 1 is provided with a first suction cup 12 and a second suction cup 13.
Preferably, a buffer device is installed on the servo closed-loop motion platform, the buffer device is installed on one side of the contact sensor, and the buffer device is located above the second rotary table.
Preferably, the buffer device comprises a screw, a spring is sleeved on the screw, and a miniature linear guide rail is installed on the bottom side of the screw.
Preferably, a vacuum adsorption device is installed on the measuring platform.
For measuring the central thickness, a novel 'confocal principle' is adopted, laser is emitted through a laser coaxial displacement sensor and is reflected on the upper surface and the lower surface of a lens, so that the displacement between the sensor and the upper surface and the lower surface of the lens is obtained, and the displacement between the upper surface and the lower surface is differed to obtain the thickness. Errors due to contact or clearance problems are avoided.
When the center positioning mode is changed, and the thickness is measured, the signal emitted by the sensor can be reflected on the upper surface of the lens under the movement of the precise displacement table, so that the displacement between the sensor and the upper surface of the lens is obtained. And the upper computer software obtains the surface profile of the lens by processing the displacement data, calculates the central point of the lens by adopting a central analysis algorithm, and then controls the precise displacement table to be positioned to the central point of the lens measurement. When the thickness of the edge is measured, the automatic centering fixture is used for clamping the measuring die, and according to the rotation symmetry characteristic of the aspheric lens, the edge of the lens is clamped by the upper rotary table and the lower rotary table to rotate at the same speed and the same direction at high speed so as to realize mechanical automatic eccentric correction and find out the central position of the lens. The contact sensor is used to determine whether the measurement mold contacts the lens.
The measured data are corrected, the upper computer software compares the measured thickness with the actual thickness to obtain a scaling formula, and the scaling formula is applied to the lenses with the same curvature, so that the reliability of the data is improved.
Automatic change and detect in batches, utilize two axle modules to accomplish and wait to detect the change of lens and detected lens, avoided the interference of human factor, improve the precision that detection efficiency and detected.
For the measurement of the lens edge thickness, the lens edge thickness is measured by contact. The relative height is obtained through the high-precision feedback position of the servo + grating motion platform, and the edge thickness precision measurement is realized.
The flexible buffer protection design is adopted, the linear guide rail is provided with the buffer design, and the micro-adjustment can be realized according to the sizes and types of different lenses.
Compared with the related art, the automatic measuring device for the thickness of the lens provided by the invention has the following beneficial effects:
1. by utilizing a non-contact measurement and contact measurement method, the center thickness is measured by utilizing a non-contact measurement method and adopting a novel confocal principle, laser is emitted by a laser coaxial displacement sensor and is reflected on the upper surface and the lower surface of a lens, so that the displacement between the sensor and the upper surface and the lower surface of the lens is obtained, and the thickness is obtained by subtracting the displacement from the upper surface and the lower surface of the lens; and (3) measuring the edge thickness, obtaining the relative height through a servo + grating high-precision feedback position, and realizing the edge thickness precision measurement by using a high-precision contact sensor detection mode.
2. The upper computer analyzes the surface type data and controls the precise displacement table to be positioned to a measurement central point, the precise displacement table performs central positioning according to the actual condition of the lens, and the central error is small; when the edge thickness is measured, the automatic centering fixture is used for clamping the measuring mould, and according to the rotation symmetry characteristic of the aspheric lens, the edge of the lens is clamped by the upper rotary table and the lower rotary table to rotate at the same speed and the same direction at high speed so as to realize mechanical automatic eccentric correction and find out the central position of the lens; the positioning and the measurement of the edge thickness of the lens are realized by signals transmitted by the contact sensor and a servo closed-loop mode.
3. The upper computer software of the invention can compare the actual data with the measured data to obtain a scaling formula; according to different lens models (different curvatures), the upper computer software selects different scaling formulas for correction; the upper computer software carries out secondary processing on the measured data, can measure the lens models with different curvatures, and enables the measuring result to be more reliable.
4. The invention can realize the automatic batch detection of the lenses and can solve the problems of low lens measuring efficiency, high labor cost and influence of human factors.
Drawings
FIG. 1 is a schematic structural diagram of an automatic measuring device for lens thickness according to a preferred embodiment of the present invention;
FIG. 2 is a schematic diagram of the contact measurement module shown in FIG. 1;
FIG. 3 is a schematic structural view of the lens shown in FIG. 1;
reference numbers in the figures: 1. the device comprises a two-dimensional module, 2, a lens tray, 3, a precision motion platform, 4, a measuring platform, 5, a guide fixture, 6, a laser coaxial displacement sensor, 7, a three-dimensional optical adjusting frame, 8, an automatic centering fixture, 9, a buffer device, 10, a contact type sensor, 11, a servo closed-loop motion platform, 12, a first sucker, 13, a second sucker, 14, a first rotary table, 15, a second rotary table, 1a, a lens, 2a and an annular mold.
Detailed Description
The invention is further described with reference to the following figures and embodiments.
Please refer to fig. 1, fig. 2 and fig. 3 in combination, wherein fig. 1 is a schematic structural diagram of an automatic measuring device for lens thickness according to a preferred embodiment of the present invention; FIG. 2 is an enlarged view of portion A of FIG. 1; fig. 3 is an enlarged schematic view of a portion B shown in fig. 1. The automatic lens thickness measuring device comprises: a two-dimensional module 1;
the lens tray 2 is arranged on one side of the two-dimensional module 1, and a plurality of lenses 1a can be placed on the lens tray 2;
the precise motion platform 3 is installed on one side of the lens tray 2, the precise motion platform 3 can move along the XY axes, the top side of the precise motion platform 3 is provided with a measurement platform 4, the measurement platform 4 comprises a first rotary table 14, and the top side of the first rotary table 14 is provided with a guide fixture 5;
the non-contact measurement module is arranged above the precision motion platform 3 and is used for measuring the central thickness of the lens, the non-contact measurement module comprises a laser coaxial displacement sensor 6, and a three-dimensional optical adjusting frame 7 is arranged on the top side of the laser coaxial displacement sensor 6;
the contact type measuring module is arranged above the precision motion platform 3 and used for measuring the edge thickness of the lens, the contact type measuring module comprises a servo closed-loop motion platform 11, a contact sensor 10 and an automatic centering fixture 8 are arranged on the servo closed-loop motion platform 11, the automatic centering fixture 8 is located below the contact sensor 10, a second rotary table 15 is arranged on the top side of the automatic centering fixture 8, and the first rotary table 14 and the second rotary table 15 rotate coaxially.
The two-dimensional module 1 is provided with a first sucker 12 and a second sucker 13.
And a buffer device 9 is installed on the servo closed-loop motion platform 11, the buffer device 9 is installed on one side of the contact sensor 10, and the buffer device 9 is positioned above the second rotary table 15.
The buffer device 9 comprises a screw 9-1, a spring 9-2 is sleeved on the screw 9-1, and a miniature linear guide rail 9-3 is installed on the bottom side of the screw 9-1.
And a vacuum adsorption device is arranged on the measuring platform 4.
The measuring method is characterized in that a non-contact measuring method and a contact measuring method are utilized, the center thickness is measured by a non-contact measuring method, a novel confocal principle is adopted, laser is emitted by a laser coaxial displacement sensor and reflected on the upper surface and the lower surface of a lens, so that the displacement between the sensor and the upper surface and the lower surface of the lens is obtained, and the thickness is obtained by subtracting. And measuring the edge thickness, and obtaining the relative height through the servo and the high-precision feedback position of the precision motion platform to realize the precision measurement of the edge thickness.
The lens to be detected is conveyed to the detection table through the biaxial module in a positioning mode, after being guided and corrected by the air claw, the vacuum generator generates suction, and the lens is fixed in a vacuum adsorption mode. When the thickness is measured, under the movement of the precision biaxial displacement table XY, the signal emitted by the sensor can be reflected on the upper surface of the lens. Thereby obtaining the displacement of the sensor relative to the upper surface of the lens. And the upper computer software obtains a surface profile by processing the displacement data, calculates the central point of the lens by adopting a central analysis algorithm, and then controls the biaxial displacement table to be positioned to the central point of the lens measurement. When the thickness of the edge is measured, the automatic centering fixture is used for clamping the measuring die, and according to the rotation symmetry characteristic of the aspheric lens, the edge of the lens is clamped by the upper rotary table and the lower rotary table to rotate at the same speed and the same direction at high speed so as to realize mechanical automatic eccentric correction and find out the central position of the lens. The positioning and the measurement of the edge thickness of the lens are realized by signals transmitted by the contact sensor and a servo closed-loop mode.
Data correction-the reflected signal received by the sensor is affected by the curvature of the lens. In order to solve the problem, the upper computer software obtains a scaling formula by comparing the measured thickness with the actual thickness. And according to different lens models (different curvatures), the upper computer software selects different scaling formulas for correction.
According to the upper surface profile data obtained by the upper computer software, the upper computer software controls the two-axis precision displacement table to enable the measuring point to be symmetrical to the center of the lens.
The measurement of the center thickness and the edge thickness is realized by adopting a non-contact and contact combined mode.
And the upper computer software compares the actual data with the measured data to obtain a scaling formula. And applied to lenses of the same curvature.
The lens to be detected is conveyed to the detection table through the two-axis module, after the air claw is used for guiding, the vacuum generator generates suction, and the lens is fixed in a vacuum adsorption mode. And controlling the motion of the precision biaxial displacement table XY in the XY direction.
Since the measurement range of the sensor is limited, fine tuning of the manual displacement table ensures that the sensor is within the effective measurement range.
Before measurement, the sensor is adjusted to be perpendicular to the detection table through the three-dimensional optical adjusting frame, and the accuracy of the measured lens thickness is ensured.
Structural implementation of the overall measurement scheme.
The flexible buffer protection design can realize micro-adjustment according to different sizes and types of lenses.
The working principle of the automatic measuring device for the thickness of the lens provided by the invention is as follows:
the method comprises the following steps: the lens tray 2 filled with the same type of lens to be detected is placed on a precision motion platform and is positioned by pins.
Step two: and adjusting the three-dimensional optical adjusting frame 7 to enable the optical axis of the laser coaxial displacement sensor 6 to vertically irradiate the measuring platform 4.
Step three: the model of the lens to be detected, the size parameters of the lens tray 2, the actual thickness values of the front 2 lenses of the lens tray 2 and the scanning range are input on the software of the upper computer, and then a measurement start button is clicked.
Step four: the first suction plate 12 on the lens two-dimensional module 1 sucks one lens on the lens tray 2 in sequence and moves to the vicinity of the precision displacement table 3.
Step five: if the double-shaft precision displacement table 3 is in an idle state, the two-dimensional module 1 can place the lens on the measuring platform 4, then returns to the lens tray 2 to absorb another lens to be measured, and then returns to the position near the precision displacement table 3; if the precision displacement table 3 is still measuring, after waiting for the upper computer software to send a signal of finishing the measurement, the lens is put on the measuring platform 4, then the lens tray 2 is returned to absorb another lens to be measured, and finally the lens tray is returned to the position near the precision displacement table 3.
Step six: and (3) starting a cylinder on the guide clamp 5, guiding the lens, preliminarily aligning the center of the lens to the optical axis of the laser coaxial displacement sensor 6, and after the guide, adsorbing and fixing the lens to be detected by the measuring platform 4 by using a vacuum adsorption device.
Step seven: the X-axis and Y-axis of the precision stage 3 are scanned in a predetermined range, and the upper computer software records the position information and height information of each scanning point. After scanning is finished, the upper computer software processes data, a maximum value or a minimum value of the middle point is obtained, and the controller controls the X axis and the Y axis to move so that the center of the lens is aligned with the optical axis of the laser coaxial displacement sensor 6.
Step eight: and the upper computer software switches the sensor measuring mode to a thickness measuring mode to measure the thickness of the lens at the point, namely the center thickness.
Step nine: the precision displacement table 3 moves linearly along the XY axes to the position under the contact type measuring module, the annular measuring edge thickness mold is clamped on the centering fixture 8 automatically, after the automatic centering is completed, the first rotary table 14 and the second rotary table 15 rotate coaxially, the center position of the lens is found, the initial position height at the moment is recorded, and the rotation is stopped. The servo closed loop and the precision motion platform drive the contact sensor 10 and the whole body to move downwards. When the mould and the lens edge are thick and stable, the contact sensor 10 feeds back a signal, the buffer device 9 can provide buffer protection at the moment, and the resolution of the contact sensor 10 can reach 0.1 micron; the edge thickness can be measured by taking the difference between the initial position and the final stable position fed back by the servo closed loop and the grating of the motion platform; returning to the initial position after the measurement is finished; subsequently, the lens three-dimensional module 1 is moved to the measuring platform 4, and the second suction cup 13 is used to suck the lens and place the lens back on the original position of the lens tray 2.
Step ten: and repeating the fifth step to the ninth step, and comparing the measured values of the first 2 lenses with the actual thickness input on the upper computer software to obtain a scaling formula for measuring the later lenses.
Step eleven: and (5) after the lenses on the lens tray 2 are completely measured, taking away the lens tray 2, placing a new tray with the lenses, and repeating the step one.
Compared with the related art, the automatic measuring device for the thickness of the lens provided by the invention has the following beneficial effects:
the invention provides an automatic measuring device for lens thickness, which comprises a lens, a lens body, a displacement sensor, a lens, a central thickness measuring device and a central thickness measuring device, wherein the lens body is provided with a central thickness measuring device, the central thickness measuring device is provided with a non-contact measuring device, a novel confocal principle is adopted, laser is emitted through the laser coaxial displacement sensor, the laser is reflected on the upper surface and the lower surface of the lens body, and therefore the displacement between the sensor and the upper surface and the lower surface of the lens body is obtained, and the thickness is obtained by carrying out subtraction; and (3) measuring the edge thickness, obtaining the relative height through a servo + grating high-precision feedback position, and realizing the edge thickness precision measurement by using a high-precision contact sensor detection mode.
2. The upper computer analyzes the surface type data and controls the precise displacement table to be positioned to a measurement central point, the precise displacement table performs central positioning according to the actual condition of the lens, and the central error is small; when the edge thickness is measured, the automatic centering fixture is used for clamping the measuring mould, and according to the rotation symmetry characteristic of the aspheric lens, the edge of the lens is clamped by the upper rotary table and the lower rotary table to rotate at the same speed and the same direction at high speed so as to realize mechanical automatic eccentric correction and find out the central position of the lens; the positioning and the measurement of the edge thickness of the lens are realized by signals transmitted by the contact sensor and a servo closed-loop mode.
3. The upper computer software of the invention can compare the actual data with the measured data to obtain a scaling formula; according to different lens models (different curvatures), the upper computer software selects different scaling formulas for correction; the upper computer software carries out secondary processing on the measured data, can measure the lens models with different curvatures, and enables the measuring result to be more reliable.
4. The invention can realize the automatic batch detection of the lenses and can solve the problems of low lens measuring efficiency, high labor cost and influence of human factors.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims (5)

1. An automatic lens thickness measuring device, comprising:
a two-dimensional module;
the lens tray is arranged on one side of the two-dimensional module, and a plurality of lenses can be placed on the lens tray;
the precise motion platform is arranged on one side of the lens tray and can move on an X axis and a Y axis, the top side of the precise motion platform is provided with the measurement platform, the measurement platform comprises a first rotary table, and the top side of the first rotary table is provided with the guide fixture;
the non-contact measurement module is arranged above the precision motion platform and is used for measuring the central thickness of the lens, the non-contact measurement module comprises a laser coaxial displacement sensor, and a three-dimensional optical adjusting frame is arranged on the top side of the laser coaxial displacement sensor;
the contact type measuring module is installed above the precision motion platform and used for conducting edge thickness measurement on the lens, the contact type measuring module comprises a servo closed-loop motion platform, a contact type sensor and an automatic centering fixture are installed on the servo closed-loop motion platform, the automatic centering fixture is located below the contact type sensor, a second rotary table is installed on the top side of the automatic centering fixture, and the first rotary table and the second rotary table rotate coaxially.
2. The automatic lens thickness measuring device according to claim 1, characterized in that said two-dimensional module (1) is equipped with a first suction cup (12) and a second suction cup (13).
3. The automatic lens thickness measuring device according to claim 1, wherein a buffer device is mounted on the servo closed-loop motion platform, the buffer device is mounted on one side of the contact sensor, and the buffer device is located above the second turntable.
4. The automatic lens thickness measuring device according to claim 3, wherein the buffer device comprises a screw, a spring is sleeved on the screw, and a micro linear guide rail is installed on the bottom side of the screw.
5. The automatic lens thickness measuring device according to claim 1, wherein a vacuum suction device is mounted on the measuring platform.
CN202010682616.7A 2020-07-15 2020-07-15 Automatic lens thickness measuring device Active CN111895924B (en)

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CN114264242A (en) * 2021-12-22 2022-04-01 江西联益光学有限公司 Lens measuring equipment and measuring method thereof
CN114777716B (en) * 2022-06-20 2022-09-23 菏泽鲁信光学科技有限公司 Lens thickness detector

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