CN215163114U

CN215163114U - Storage tank and coating film support plate

Info

Publication number: CN215163114U
Application number: CN202121494416.5U
Authority: CN
Inventors: 梅志纲; 辛科; 周肃; 陈光羽; 李建清; 吴建晓; 龚道仁
Original assignee: Anhui Huasheng New Energy Technology Co ltd
Current assignee: Anhui Huasheng New Energy Technology Co ltd
Priority date: 2021-06-30
Filing date: 2021-06-30
Publication date: 2021-12-14
Anticipated expiration: 2031-06-30

Abstract

The application provides a containing groove and a coated carrier plate, and belongs to the technical field of solar cell preparation. An edge member extending towards the periphery is arranged at the upper opening of the accommodating groove, and the accommodating groove is detachably connected with the film coating carrier plate through the edge member; at least part of the side wall of the containing groove is provided with a supporting member, and the supporting member is used for bearing the piece to be coated. The film-coating carrier plate comprises a carrier plate body and a containing groove, wherein the carrier plate body is of a frame-shaped structure, at least one through hole is formed in the carrier plate body and used for placing the containing groove, and the edge component is detachably connected with a frame of the carrier plate body. Through the processing scheme, the method has higher use flexibility and utilization rate, reduces the influence on the production process, and improves the production yield.

Description

Storage tank and coating film support plate

Technical Field

The application relates to the technical field of solar cell preparation, in particular to a containing groove and a coating carrier plate.

Background

PECVD (Plasma Enhanced Chemical Vapor Deposition) is a commonly used coating technique in the process of preparing solar cells, and when the technique is used, a carrier plate made of special materials is required to be used as a carrier for coating a silicon wafer.

In the prior art, a film-coating carrier plate for a solar cell PECVD process is usually a large complete carrier plate, a plurality of grid grooves for placing silicon wafers are arranged on the carrier plate, and the carrier plate and the grid grooves have integrity and consistency in structure. The inventors found that the following problems exist in the process of using the carrier plate: if only one or a few of the cells in a whole carrier are damaged or damaged, the coating process cannot be normally performed, and the whole carrier must be temporarily discarded to repair or solve the problem of the cells in the carrier, resulting in delay of the process and production yield. It can be seen that due to the structural integrity and relevance of the carrier, the cells that are not in question cannot be put into use because of the few or partial cells that are in question, which is a double waste in productivity time and equipment resources.

SUMMERY OF THE UTILITY MODEL

In view of the above, the present application provides a receiving groove and a coated carrier plate, which at least partially solve the problems in the prior art.

In a first aspect, the utility model provides a containing groove, which is applied to a film coating carrier plate, wherein an edge component extending to the periphery is arranged at the upper opening of the containing groove, and the containing groove is detachably connected with the film coating carrier plate through the edge component;

at least part of the side wall of the accommodating groove is provided with a supporting member, and the supporting member is used for bearing the piece to be coated.

According to a specific implementation manner of the embodiment of the application, the edge member of the containing groove is a quadrangle with a right angle, an arc quadrangle with a corner or a quadrangle with a chamfer on a corner.

According to a specific implementation manner of the embodiment of the application, the supporting member is a step-shaped member or a quarter-cylinder-shaped member disposed at the bottom of the side wall of the accommodating groove.

According to a specific implementation manner of the embodiment of the application, the height of the supporting member is smaller than the height of the side wall of the accommodating groove.

According to a specific implementation manner of the embodiment of the application, the piece to be coated is a silicon wafer or a silicon wafer subjected to preorder processing.

In a second aspect, the present invention further provides a coated carrier plate, which comprises a carrier plate body and a storage tank as in any one of the embodiments of the first aspect, wherein the carrier plate body is a frame-shaped structure, at least one through hole is provided on the carrier plate body, the through hole is used for placing the storage tank, and the edge member is detachably connected to the frame of the carrier plate body.

According to a specific implementation manner of the embodiment of the application, the arrangement manner of the through holes is that M rows and N columns are arranged, and M, N is a natural number greater than or equal to 1.

According to a specific implementation manner of the embodiment of the application, the edge member is detachably connected with the frame of the carrier body in one or more manners of a suspension type, a slot type and an embedded type.

According to a specific implementation manner of the embodiment of the application, the planar shape defined by the side walls of the accommodating groove is a quadrangle with right-angled corners, a quadrangle with arc corners or a quadrangle with chamfer corners.

According to a specific implementation manner of the embodiment of the application, the through hole is in the shape of a quadrangle with right-angled corners, an arc-shaped quadrangle or a quadrangle with a chamfer at the corner.

Advantageous effects

According to the accommodating groove and the coating carrier plate provided by the utility model, the accommodating groove is detachably arranged on the coating carrier plate, when one or more accommodating grooves have problems, the maintenance or the replacement can be selectively carried out, the use flexibility and the utilization rate are higher, the influence on the production process is reduced, and the production yield is improved; the utility model provides a storage tank and support plate body can have multiple change, different combination according to the actual demand, can apply to the coating equipment of various different specifications in a flexible way according to actual conditions, and the practicality is very strong.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

Fig. 1 is a top view of a containing groove according to an embodiment of the present invention;

fig. 2 is a top view of an accommodating groove according to an embodiment of the present invention;

fig. 3 is a side view of an accommodating groove according to an embodiment of the present invention;

fig. 4 is a side view of an accommodating groove according to an embodiment of the present invention;

fig. 5 is a schematic view of a film-coating carrier according to an embodiment of the present invention;

fig. 6 is a carrier body of a coated carrier according to an embodiment of the present invention;

fig. 7 is a carrier body of a coated carrier according to an embodiment of the present invention.

In the figure: 100. a carrier plate body; 101. a containing groove; 102. a support member; 103. an edge member; 104. and a through hole.

Detailed Description

The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

The following description of the embodiments of the present application is provided by way of specific examples, and other advantages and effects of the present application will be readily apparent to those skilled in the art from the disclosure herein. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. The present application is capable of other and different embodiments and its several details are capable of modifications and/or changes in various respects, all without departing from the spirit of the present application. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It is noted that various aspects of the embodiments are described below within the scope of the appended claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present application, one skilled in the art should appreciate that one aspect described herein may be implemented independently of any other aspects and that two or more of these aspects may be combined in various ways. For example, an apparatus may be implemented and/or a method practiced using any number of the aspects set forth herein. Additionally, such an apparatus may be implemented and/or such a method may be practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.

It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present application, and the drawings only show the components related to the present application rather than the number, shape and size of the components in actual implementation, and the type, amount and ratio of the components in actual implementation may be changed arbitrarily, and the layout of the components may be more complicated.

In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects may be practiced without these specific details.

In a first aspect, the present invention provides a storage tank for a coated carrier plate, and the storage tank 101 provided by the present invention will be described in detail with reference to fig. 1-4.

Referring to fig. 1-2, an edge member 103 extending to the periphery is disposed at an upper opening of the receiving groove 101, and the receiving groove 101 is detachably connected to the carrier plate via the edge member 103. At least part of the side wall of the accommodating groove 101 is provided with a supporting member 102, and the supporting member 102 is used for bearing the piece to be coated.

The shape defined by the side wall of the containing groove 101 is a quadrangle with arc-shaped corners, and it should be noted that the shape of the containing groove 101 should match the shape of the piece to be coated placed therein, and therefore, the shape is not limited to the quadrangle with arc-shaped corners, and may also be a quadrangle with right-angle sides, or a quadrangle with chamfer, or an octagon, etc.

The size of the accommodating groove 101 should be matched with the size of a to-be-coated piece placed in the accommodating groove, the to-be-coated piece may be a silicon wafer or a pre-processed silicon wafer or other types of coated substrates, and the pre-processed silicon wafer may be a silicon wafer subjected to a plurality of process steps such as texturing and cleaning.

In one embodiment, the support member 102 is provided along the inner sidewall of the container 101 in a complete circle. It should be noted that the supporting member 102 may also be partially disposed on each side wall of the receiving groove 101, or disposed on one of the opposite side walls, and the disposing manner is not limited to the structure illustrated in the embodiment. The supporting member 102 mainly plays a supporting role, so as to prevent the part to be coated from directly contacting the carrier plate at the bottom of the accommodating groove 101, and thus, the subsequent coating process of the part to be coated is not affected.

Further, the edge member 103 of the receiving groove 101 has a rectangular shape, a square shape with curved corners, or a square shape with chamfered corners.

In one embodiment, the edge member 103 of the receiving groove 101 has a rectangular shape, as shown in fig. 1.

In another embodiment, the edge member 103 of the receiving groove 101 has a quadrilateral shape with arc-shaped corners, as shown in fig. 2.

Further, the supporting member 102 is a step-shaped member disposed at the bottom of the sidewall of the receiving groove 101, as shown in fig. 3, or the supporting member 102 is a quarter-cylinder-shaped member, as shown in fig. 4. It should be noted that the shape of the supporting member 102 may be adjusted according to practical applications, and is not limited to the range illustrated in this embodiment, and it is preferable that the supporting member 102 can reliably support the to-be-coated member, and prevent the to-be-coated member from sliding down to contact with the bottom of the accommodating groove 101.

Specifically, the height of the supporting member 102 is smaller than the height of the side wall of the accommodating groove 101, so that a part to be coated can be conveniently placed for normal coating.

In a second aspect, the present invention further provides a coated carrier plate, which comprises a carrier plate body 100 and a receiving groove 101 as in any one of the embodiments of the first aspect, wherein the carrier plate body is a frame-shaped structure, the carrier plate body is provided with at least one through hole 104, the through hole 104 is used for placing the receiving groove 101, the edge member 103 is detachably connected to the frame of the carrier plate body, and the specific structure is as shown in fig. 5-7.

More specifically, the arrangement of the through holes 104 may be M rows and N columns, and M, N is a natural number greater than or equal to 1, that is, the through holes 104 are uniformly arranged, so as to arrange more accommodating grooves 101 on the carrier body 100 as much as possible, and further arrange more members to be coated on one coating carrier, thereby improving the coating efficiency.

In one embodiment, the through holes 104 are arranged in three rows and three columns, that is, there are 9 through holes 104, and 9 accommodating grooves 101 can be placed therein, that is, 9 pieces to be coated can be simultaneously processed. Because the containing grooves 101 are detachably connected with the carrier plate body 100, when one or more of the containing grooves 101 are in a problem and need to be maintained or replaced, the defective containing grooves 101 are only required to be detached, and the next repair or replacement treatment is carried out, so that the whole coated carrier plate does not need to be detached to stop coating, the utilization rate of the carrier plate can be improved by arranging the detachable containing grooves 101, and the coating efficiency can also be improved.

Further, the edge member 103 is detachably connected to the frame of the carrier body 100 in one or more of a hanging type, a slot type and an embedded type.

Preferably, the detachable connection between the edge member 103 and the frame of the carrier body 100 is a suspension type, and a suspension type connection structure is adopted, so that the preparation process is simple and the use is convenient.

In the above embodiments, the edge member 103 may be configured as a hanging structure, and specifically, the edge member 103 may be configured perpendicular to the side wall of the receiving groove 101, such as the edge member 103 in fig. 3 to 4. When in use, the edge member 103 is hung on the sidewall of the through hole 104, that is, on the frame of the carrier body 100, only by placing the receiving groove 101 into the through hole 104, and the operation is simple and convenient.

The edge member 103 may be disposed along the opening of the receiving groove 101 in a complete circle or partially disposed along the opening of the receiving groove 103 according to actual requirements, so as to achieve the detachable connection between the receiving groove 101 and the film-coated carrier plate.

Further, the shape of the through hole 104 is a quadrangle with right-angled corners, a quadrangle with arc corners, or a quadrangle with chamfered corners.

In one embodiment, the through-hole 104 is shaped as a quadrilateral with right-angled corners, as shown in FIG. 6. In another embodiment, the through-hole 104 is shaped as a quadrangle having arc-shaped corners, as shown in fig. 7. It should be noted that the shape of the through hole 104 is adapted to the shape of the receiving groove 101. For example, the through hole 104 having a quadrilateral shape with arc corners can accommodate the receiving groove 101 having a quadrilateral shape with a right angle in the edge member 103, specifically, the carrier body shown in fig. 6 can be applied to the receiving groove 101 shown in fig. 1, and the carrier body shown in fig. 7 can be applied to the receiving groove 101 shown in fig. 2. Of course, the shape of the through hole 104 may be other structures, such as a circle, an octagon, a diamond, and other shapes, and it is preferable to be able to support the accommodation groove 101.

The utility model provides an embodiment improves the coating film support plate device of prior art, and is different with current support plate the utility model discloses the coating film support plate that describes sets up the support plate of integration into the support plate that a plurality of parts make up and form, also promptly storage tank detachable support plate, has higher use flexibility and utilization ratio. The utility model provides a support plate can have multiple change, different combinations, can apply to the coating film equipment of various different specifications according to actual conditions in a flexible way, and the practicality is very strong.

The above description is only for the specific embodiments of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present application should be covered within the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A containing groove is applied to a film coating carrier plate and is characterized in that,

an edge member extending towards the periphery is arranged at the upper opening of the accommodating groove, and the accommodating groove is detachably connected with the film coating carrier plate through the edge member;

2. The receiving tank of claim 1 wherein the edge members of the receiving tank are square in shape, curved at corners, or chamfered.

3. The container according to claim 1, wherein the support member is a stepped member or a quarter-cylindrical member provided at a bottom of a sidewall of the container.

4. The receiving tank of claim 3, wherein the height of the support member is less than the height of the side wall of the receiving tank.

5. The accommodating tank according to any one of claims 1 to 4, wherein the member to be coated is a silicon wafer or a silicon wafer subjected to a preceding process.

6. A carrier plate for coating film, comprising a carrier plate body and the receiving slot of any one of claims 1 to 5, wherein the carrier plate body is a frame-shaped structure, at least one through hole is formed on the carrier plate body, the through hole is used for placing the receiving slot, and the edge member is detachably connected with the frame of the carrier plate body.

7. The plating carrier plate of claim 6, wherein the arrangement of the through holes is M rows and N columns, and M, N is a natural number greater than or equal to 1.

8. The plating carrier plate of claim 6, wherein the edge member is detachably connected to the frame of the carrier plate body in one or more of a hanging type, a slot type and an embedded type.

9. The carrier plate according to any one of claims 6 to 8, wherein the side walls of the container groove define a rectangular shape, an arc shape or a chamfered shape.

10. The plating carrier plate according to any of claims 6 to 8, wherein the through-holes have a rectangular shape with right angles at the corners, an arc-shaped shape with curved corners, or a rectangular shape with chamfered corners.