CN214830626U - Crucible cover with homodisperse shower nozzle - Google Patents
Crucible cover with homodisperse shower nozzle Download PDFInfo
- Publication number
- CN214830626U CN214830626U CN202121165323.8U CN202121165323U CN214830626U CN 214830626 U CN214830626 U CN 214830626U CN 202121165323 U CN202121165323 U CN 202121165323U CN 214830626 U CN214830626 U CN 214830626U
- Authority
- CN
- China
- Prior art keywords
- crucible
- cover plate
- shower nozzle
- cover
- crucible cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a crucible lid with homodisperse shower nozzle relates to crucible technical field, specifically is a crucible lid with homodisperse shower nozzle, including crucible lid body, crucible body, the shower nozzle hole has been seted up on the surface of crucible lid body. This crucible lid with homodisperse shower nozzle, through the shower nozzle hole, first apron, the second apron, the cooperation of third apron and end cap is used, when spraying plating is carried out to needs, according to evaporation material's size, thereby take the third apron away selectively, second apron or first apron, drive the inner chamber that the end cap is followed the shower nozzle hole and take out, thereby spill suitable shower nozzle size, the use area that traditional crucible lid that has homodisperse shower nozzle can not adjust the shower nozzle according to actual need has been avoided, lead to spraying plating vapour to spray plating other regional problems of material, the practicality of this crucible lid with homodisperse shower nozzle has been improved.
Description
Technical Field
The utility model relates to a crucible technical field specifically is a crucible lid with homodisperse shower nozzle.
Background
The OLED is also called organic electroluminescent display and organic light emitting semiconductor, belongs to a current type organic light emitting device, and is a phenomenon of emitting light by injecting and compounding current carriers, the light emitting intensity is in direct proportion to the injected current, in the OLED processing process, the crucible is needed to be used for evaporating OLED materials, in order to ensure the uniformity of the evaporation on the OLED surface, the vapor needs to be uniformly dispersed when the vapor passes through the crucible cover, however, the crucible cover with the uniformly dispersed spray head can not adjust the using area of the spray head according to actual needs, so that spraying vapor is sprayed to other areas of the spraying material, meanwhile, when the spraying temperature of the existing crucible cover with the uniformly-dispersed spray head does not meet the requirement, steam is emitted to spray on the surface of a spraying material, so that the spraying quality is influenced, and the requirement of the existing crucible cover with the uniformly-dispersed spray head cannot be met.
SUMMERY OF THE UTILITY MODEL
The utility model provides a crucible lid with homodisperse shower nozzle, to the not enough of prior art, the problem of proposing in the above-mentioned background art has been solved.
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: a crucible cover with a uniformly-dispersed spray head comprises a crucible cover body and a crucible body, wherein spray head holes are formed in the surface of the crucible cover body, the number of the spray head holes is multiple, the spray head holes are uniformly distributed in the surface of the crucible cover body, heating wires are arranged in the crucible cover body, a first cover plate is placed on the surface of the crucible cover body, a first placing groove is formed in the surface of the first cover plate, a first supporting block is fixedly connected to the inner wall of the first placing groove, a second cover plate is placed on the surface of the first supporting block and located in the inner cavity of the first placing groove, a second placing groove is formed in the surface of the second cover plate, a second supporting block is fixedly connected to the inner wall of the second placing groove, a third cover plate is placed on the surface of the second supporting block and located in the inner cavity of the second placing groove, and plugs are fixedly connected to the bottom surfaces of the first cover plate, the second cover plate and the third cover plate, one end of the plug penetrates through the inner cavity of the nozzle hole and extends to the bottom of the crucible cover body, and the side face of the plug is attached to the inner wall of the nozzle hole.
Preferably, a temperature sensor is arranged at the top end of one of the plugs, a digital display board is fixedly mounted on the surface of the third cover plate, and the temperature sensor is electrically connected with the digital display board.
Preferably, the bottom of the crucible cover body is provided with a buckling groove, and the top of the crucible cover body extends to an inner cavity of the buckling groove.
Preferably, the surfaces of the first cover plate, the second cover plate and the third cover plate are respectively and fixedly provided with a cover plate handle.
Preferably, crucible cover handles are fixedly arranged on two side faces of the crucible cover body.
Preferably, the surfaces of the first cover plate, the second cover plate and the third cover plate are located on the same plane.
The utility model provides a crucible lid with homodisperse shower nozzle possesses following beneficial effect:
1. this crucible lid with homodisperse shower nozzle, through the shower nozzle hole, first apron, the second apron, the cooperation of third apron and end cap is used, when spraying plating is carried out to needs, according to evaporation material's size, thereby take the third apron away selectively, second apron or first apron, drive the inner chamber that the end cap is followed the shower nozzle hole and take out, thereby spill suitable shower nozzle size, the use area that traditional crucible lid that has homodisperse shower nozzle can not adjust the shower nozzle according to actual need has been avoided, lead to spraying plating vapour to spray plating other regional problems of material, the practicality of this crucible lid with homodisperse shower nozzle has been improved.
2. This crucible lid with homodisperse shower nozzle, cooperation through temperature sensor and digital display board is used, temperature sensor detects the temperature of crucible body inner chamber, when the data that shows on the digital display board satisfies the requirement of spraying coating, tak eoff first apron away as required again, second apron or third apron, the crucible lid of having avoided traditional homodisperse shower nozzle just emits vapour when the temperature of spraying coating has not reached the requirement yet, the problem of the surface influence spraying coating quality of spraying coating material, the operating mass of this crucible lid with homodisperse shower nozzle has been improved, the heater strip through crucible lid body inside simultaneously can heat up the inside in shower nozzle hole, avoid spraying coating vapour to take place the cooling when the inner chamber in shower nozzle hole passes through, the stability of this crucible lid with homodisperse shower nozzle has been improved.
Drawings
FIG. 1 is a schematic cross-sectional view of a crucible cover body according to the present invention;
FIG. 2 is a schematic structural view of the crucible cover body of the present invention;
FIG. 3 is a schematic cross-sectional view of the front side of the present invention;
fig. 4 is an enlarged schematic view of the point a in the structure diagram of the present invention 3;
fig. 5 is a schematic structural diagram of the first cover plate of the present invention.
In the figure: 1. a crucible cover body; 2. a crucible body; 3. a nozzle hole; 4. heating wires; 5. a first cover plate; 6. a second cover plate; 7. a third cover plate; 8. a first placing groove; 9. a second placing groove; 10. a first support block; 11. a second support block; 12. a temperature sensor; 13. a plug; 14. a cover plate handle; 15. a crucible cover handle; 16. buckling the groove; 17. a digital display panel.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1 to 5, the present invention provides a technical solution: a crucible cover with a uniformly dispersed nozzle comprises a crucible cover body 1 and a crucible body 2, wherein the bottom of the crucible cover body 1 is provided with a buckling groove 16, the top of the crucible body 2 extends to an inner cavity of the buckling groove 16, the crucible cover body 1 and the crucible body 2 are tightly attached through the buckling groove 16, steam is prevented from overflowing from a gap between the crucible cover body 1 and the crucible body 2, crucible cover handles 15 are fixedly arranged on two side surfaces of the crucible cover body 1, the crucible cover handles 15 are made of heat insulating materials, the crucible cover body 1 is convenient to take by utilizing the crucible cover handles 15, nozzle holes 3 are formed in the surface of the crucible cover body 1, the nozzle holes 3 are distributed on the surface of the crucible cover body 1 in a plurality of numbers and are uniformly distributed on the surface of the crucible cover body 1, heating wires 4 are arranged inside the crucible cover body 1, and the inside of the nozzle holes 3 can be heated by the heating wires 4 inside the crucible cover body 1, the crucible cover with the uniformly dispersed spray head is prevented from being cooled when spraying steam passes through the inner cavity of the spray head hole 3, the stability of the crucible cover with the uniformly dispersed spray head is improved, a first cover plate 5 is placed on the surface of a crucible cover body 1, a first placing groove 8 is formed in the surface of the first cover plate 5, a first supporting block 10 is fixedly connected to the inner wall of the first placing groove 8, a second cover plate 6 is placed on the surface of the first supporting block 10 and positioned in the inner cavity of the first placing groove 8, a second placing groove 9 is formed in the surface of the second cover plate 6, a second supporting block 11 is fixedly connected to the inner wall of the second placing groove 9, a third cover plate 7 is placed on the surface of the second supporting block 11 and positioned in the inner cavity of the second placing groove 9, bottom surfaces of the first cover plate 5, the second cover plate 6 and the third cover plate 7 are fixedly connected with a cover plate plug 13, and cover plate handles 14 are respectively fixedly installed on the surfaces of the first cover plate 5, the second cover plate 6 and the third cover plate 7, the surfaces of the first cover plate 5, the second cover plate 6 and the third cover plate 7 are positioned on the same plane, one end of the plug 13 penetrates through the inner cavity of the nozzle hole 3 and extends to the bottom of the crucible cover body 1, the side surface of the plug 13 is attached to the inner wall of the nozzle hole 3, when spraying is needed, the third cover plate 7, the second cover plate 6 or the first cover plate 5 is selectively taken away according to the size of an evaporation material, the plug 13 is driven to be drawn out of the inner cavity of the nozzle hole 3, so that the proper size of the nozzle is leaked, the problem that spraying steam is sprayed to other areas of the spraying material due to the fact that the traditional crucible cover with the uniformly-dispersed nozzle cannot adjust the using area of the nozzle according to actual needs is solved, the practicability of the crucible cover with the uniformly-dispersed nozzle is improved, the temperature sensor 12 is arranged at the top end of one plug 13, and the digital display panel 17 is fixedly installed on the surface of the third cover plate 7, temperature sensor 12 and digital display board 17 electric connection, the cooperation that utilizes temperature sensor 12 and digital display board 17 is used, temperature sensor 12 detects the temperature of 2 inner chambers of crucible body, when the data that show on digital display board 17 satisfy the requirement of spraying coating, take away first apron 5 again as required, second apron 6 or third apron 7, the crucible lid of having avoided traditional homodisperse shower nozzle has just emitted vapour when the temperature of spraying coating has not reached the requirement, the problem of spraying coating quality is influenced to the surface of spraying coating material, the operating mass of this crucible lid that has the homodisperse shower nozzle has been improved.
In summary, in the crucible cover with the uniformly dispersed nozzle, when in use, raw materials required for evaporation are firstly put into the inner cavity of the crucible body 2, then the crucible cover body 1 is covered on the top of the crucible body 2, the crucible body 2 is heated to enable the evaporation raw materials to generate steam, the temperature sensor 12 detects the temperature of the inner cavity of the crucible body 2 and displays the detected temperature through the digital display board 17, when the temperature displayed on the digital display board 17 meets the temperature of the evaporation, the heating wire 4 is opened to heat the inner cavity of the nozzle hole 3, and then the first cover plate 5, the second cover plate 6 or the third cover plate 7 are selectively taken away according to the size of the evaporation materials, so that the spraying steam is sprayed out from the nozzle hole 3 to spray the spraying materials.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
Claims (6)
1. The utility model provides a crucible lid with homodisperse shower nozzle, includes crucible lid body (1), crucible body (2), its characterized in that: the crucible cover comprises a crucible cover body (1), wherein spray nozzle holes (3) are formed in the surface of the crucible cover body (1), a plurality of spray nozzle holes (3) are uniformly distributed in the surface of the crucible cover body (1), heating wires (4) are arranged in the crucible cover body (1), a first cover plate (5) is placed on the surface of the crucible cover body (1), a first placing groove (8) is formed in the surface of the first cover plate (5), a first supporting block (10) is fixedly connected to the inner wall of the first placing groove (8), a second cover plate (6) is placed on the surface of the first supporting block (10) and in an inner cavity of the first placing groove (8), a second placing groove (9) is formed in the surface of the second cover plate (6), a second supporting block (11) is fixedly connected to the inner wall of the second placing groove (9), a third cover plate (7) is placed on the surface of the second supporting block (11) and in an inner cavity of the second placing groove (9), the crucible cover is characterized in that bottom surfaces of the first cover plate (5), the second cover plate (6) and the third cover plate (7) are fixedly connected with plugs (13), one ends of the plugs (13) penetrate through inner cavities of the nozzle holes (3) and extend to the bottom of the crucible cover body (1), and side surfaces of the plugs (13) are attached to the inner walls of the nozzle holes (3).
2. A crucible cover having a uniformly dispersed showerhead in accordance with claim 1, wherein: the top end of one of the plugs (13) is provided with a temperature sensor (12), the surface of the third cover plate (7) is fixedly provided with a digital display plate (17), and the temperature sensor (12) is electrically connected with the digital display plate (17).
3. A crucible cover having a uniformly dispersed showerhead in accordance with claim 1, wherein: the bottom of the crucible cover body (1) is provided with a buckling groove (16), and the top of the crucible cover body (2) extends to an inner cavity of the buckling groove (16).
4. A crucible cover having a uniformly dispersed showerhead in accordance with claim 1, wherein: and cover plate handles (14) are fixedly arranged on the surfaces of the first cover plate (5), the second cover plate (6) and the third cover plate (7) respectively.
5. A crucible cover having a uniformly dispersed showerhead in accordance with claim 1, wherein: crucible cover handles (15) are fixedly arranged on two side faces of the crucible cover body (1).
6. A crucible cover having a uniformly dispersed showerhead in accordance with claim 1, wherein: the surfaces of the first cover plate (5), the second cover plate (6) and the third cover plate (7) are positioned on the same plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121165323.8U CN214830626U (en) | 2021-05-27 | 2021-05-27 | Crucible cover with homodisperse shower nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121165323.8U CN214830626U (en) | 2021-05-27 | 2021-05-27 | Crucible cover with homodisperse shower nozzle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214830626U true CN214830626U (en) | 2021-11-23 |
Family
ID=78780527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121165323.8U Active CN214830626U (en) | 2021-05-27 | 2021-05-27 | Crucible cover with homodisperse shower nozzle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214830626U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114774860A (en) * | 2022-04-08 | 2022-07-22 | 深圳市华星光电半导体显示技术有限公司 | Evaporation crucible and method for evaporating functional material on substrate by using evaporation crucible |
-
2021
- 2021-05-27 CN CN202121165323.8U patent/CN214830626U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114774860A (en) * | 2022-04-08 | 2022-07-22 | 深圳市华星光电半导体显示技术有限公司 | Evaporation crucible and method for evaporating functional material on substrate by using evaporation crucible |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105296934B (en) | A kind of linear evaporation source and evaporated device | |
| JP4440837B2 (en) | Evaporation source and vapor deposition apparatus employing the same | |
| KR100703427B1 (en) | Vapor deposition source and Vapor deposition apparatus having thereof | |
| KR101431043B1 (en) | Deposition apparatus | |
| CN214830626U (en) | Crucible cover with homodisperse shower nozzle | |
| CN205473956U (en) | A coating by vaporization crucible for OLED | |
| CN107299321B (en) | Evaporation source and evaporator | |
| CN113388815A (en) | Surface evaporation source structure suitable for crucible | |
| CN103726030B (en) | Precipitation equipment and the manufacturing method for using its organic light-emitting display device | |
| CN104178734A (en) | Evaporation coating device | |
| CN106920898A (en) | Mask plate and its manufacture method, OLED evaporation coating method | |
| KR101599505B1 (en) | Evaporation source for deposition apparatus | |
| JP4327319B2 (en) | Hinagata shower head and vacuum processing apparatus using the shower head | |
| CN107012432B (en) | A kind of evaporation source and evaporation coating device | |
| CN110373633A (en) | A kind of OLED crucible for vapor plating | |
| CN207749178U (en) | A kind of OLED vapor depositions crucible | |
| KR20070113044A (en) | Linear type evaporator for organic thin film vapor deposition | |
| CN215593171U (en) | Linear evaporation source crucible | |
| CN105088143B (en) | A kind of coating apparatus | |
| CN103924196B (en) | A kind of evaporation coating device | |
| CN214991804U (en) | Line source evaporation crucible | |
| KR102190640B1 (en) | Linear evaporation source | |
| CN209522906U (en) | A kind of vapor deposition crucible | |
| KR101233460B1 (en) | A Linear Deposition Source With Direct Heating | |
| KR101192525B1 (en) | A Linear Deposition Source With Direct Heating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Crucible cover with uniformly dispersed nozzle Effective date of registration: 20220311 Granted publication date: 20211123 Pledgee: Bank of Nanjing Co.,Ltd. Xuzhou Branch Pledgor: Jiangsu Weimeisi Semiconductor Technology Co.,Ltd. Registration number: Y2022320000109 |