CN105296934B - A kind of linear evaporation source and evaporated device - Google Patents
A kind of linear evaporation source and evaporated device Download PDFInfo
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- CN105296934B CN105296934B CN201510761075.6A CN201510761075A CN105296934B CN 105296934 B CN105296934 B CN 105296934B CN 201510761075 A CN201510761075 A CN 201510761075A CN 105296934 B CN105296934 B CN 105296934B
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- crucible
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Abstract
The invention discloses a kind of linear evaporation source and evaporated devices, to reduce the generation of spray nozzle clogging phenomenon, improve vapor deposition efficiency.Wherein, linear evaporation source, including：The crucible of one end open, the interior hollow chamber being equipped with for housing evaporation material of crucible；It is enclosed in crucible outside, the primary heater of heat is provided for crucible；Lid closes the overhead guard of crucible openend, and overhead guard is equipped with multiple nozzles being used for the evaporation material for treating plated substrate injection caburation；It further includes：The secondary heater of identical heat is provided for each nozzle, secondary heater includes：The fire end of the outer surface of corresponding nozzle is corresponded and is wrapped in nozzle.
Description
Technical field
The present invention relates to evaporated device technical field, more particularly to a kind of linear evaporation source and evaporated device.
Background technology
In recent years, display of organic electroluminescence (OLED) is gradually more closed as a kind of novel FPD
Note.Due to its have actively shine, light emission luminance height, high resolution, wide viewing angle, fast response time, low energy consumption and can flexibility
The features such as change, becomes the next-generation display technology it is possible that instead of liquid crystal display.
Evaporation coating device is the experiment and production equipment applied to field of film preparation, in organic electroluminescent LED
(OLED), the organic photoelectrics field such as organic solar batteries (OPV), organic field effect tube (OFET) is widely used.
Organic Light Emitting Diode (Organic Light-Emitting Diode, abbreviation OLED) is by being deposited organic material
To make the carrier blocking layers and organic luminous layer that form OLED display device.The evaporation source of OLED evaporation coating devices now point
For dot evaporation source and linear evaporation source.The organic vapor deposition material being deposited in evaporation source is mainly divided to two kinds, and one kind is subliming type
Organic material, it is another then be fusion organic material.Wherein, subliming type organic material mainly directly adds organic material
Heat, organic material distillation is cooled on substrate again for gaseous state forms organic film；Fusion organic material then first melts after the heating
It is gaseous state to heat up again for liquid, is finally cooled on substrate again and forms organic film.
Multiple nozzles of the linear sources used at present generally by crucible and above crucible form, crucible and nozzle periphery
Edge is equipped with heater strip, by being heated to crucible, evaporation material therein is made to become steam, the steam after crucible inner homogeneous
It is ejected on substrate and forms a film from nozzle.
But in the case where using linear evaporation source, since temperature is uneven when the heat of evaporation source emits to spray nozzle part
It is even, it may occur that the phenomenon that evaporation material plug nozzle, to reduce vapor deposition efficiency.
Invention content
The object of the present invention is to provide a kind of linear evaporation source and evaporated device, to reduce the hair of spray nozzle clogging phenomenon
It is raw, improve vapor deposition efficiency.
In order to achieve the above objectives, the present invention provides following technical solutions：
The present invention provides a kind of linear evaporation source, including：The crucible of one end open, the crucible is interior to be equipped with to house
The hollow chamber of evaporation material；It is enclosed in the crucible outside, the primary heater of heat is provided for the crucible；Described in lid closes
The overhead guard of crucible openend, the overhead guard are equipped with multiple nozzles being used for the evaporation material for treating plated substrate injection caburation；Also
Including：
The secondary heater of heat is provided for each nozzle, the secondary heater includes：With the nozzle one by one
The fire end of outer surface that is corresponding and being wrapped in the corresponding nozzle.
Linear evaporation source provided by the invention, by setting secondary heater in the outside of each nozzle so that nozzle is each
Partial temperature is uniform, avoids the temperature at nozzle different or relatively low, and evaporation material temperature reduction at nozzle is caused to be cooled to
The generation of the phenomenon that solid plug nozzle, and then vapor deposition efficiency can be improved.
In some optional embodiments, the secondary heater be even heat distribution heating plate, and it is described plus
Hot plate is equipped with the one-to-one first through hole of the nozzle to form multiple fire ends.Heating plate can be electrical heating
Plate, heating plate are equipped with the conducting wire being electrically connected with external power supply, and certainly, the material that heating plate can also have self-heating is made.
In some optional embodiments, the material of the heating plate is 6061T6 aluminium.6061T6 high intensity, high rigidity
(more than HV90 degree) good processing effect, oxidation effectiveness is good, and no trachoma stomata, flatness is preferable, improves processing efficiency,
Reduce material cost.
In some optional embodiments, it is tightly connected between the overhead guard and the crucible by sealing ring.Sealing
The generation for the phenomenon that setting of circle can prevent the evaporation material in crucible from being overflowed out of crucible after gasifying.
In some optional embodiments, the material of the sealing ring includes：In nickel, 304 stainless steels, 316L stainless steels
Any one.
In some optional embodiments, the first diffuser plate is equipped in the overhead guard, first diffuser plate is located at institute
It states between secondary heater and the crucible, first diffuser plate is equipped with and one-to-one first outlet of the nozzle
Mouthful, and the aperture of first gas outlet is adjustable.The effect of this first gas outlet is：The gas evaporated in crucible can be radiated,
According to the size and location of mouth, can uniformly to radiate by the gas of nozzle.In addition, the aperture because of the first gas outlet
It is adjustable, so the exit dose that the material in adjustable crucible passes through the first gas outlet so that can keep certain pressure inside crucible
Power.
In some optional embodiments, the second diffuser plate is equipped in the crucible, second diffuser plate is located at institute
Between stating the evaporation material in the first diffuser plate and the crucible, second diffuser plate is equipped with to be corresponded with the nozzle
The second gas outlet, and the aperture of second gas outlet is adjustable.The effect of this second gas outlet is：It can will evaporate in crucible
Gas radiates, and according to the size and location of mouth, can uniformly to radiate by the gas of nozzle.In addition, go out because of second
The aperture of gas port is adjustable, so the exit dose that the material in adjustable crucible passes through the first gas outlet so that can be protected inside crucible
Hold certain pressure.
In some optional embodiments, the primary heater includes：The master being distributed along the crucible short transverse
Heating part and auxiliary heating part.Main heating part and auxiliary heating part can control respectively to the heat that crucible exports, and auxiliary heating part can be with
According to evaporation material number, selection is opened or the temperature that is not turned on and is exported after opening.
In some optional embodiments, each nozzle is equipped with nozzle cover, and the nozzle cover is equipped at least
One spray orifice.In this way convenient for control nozzle emitted dose, the uniformity of coating film thickness on substrate is improved.
At least one baffle is equipped in some optional embodiments, in the crucible with by the hollow cavity of the crucible
Room is divided into multiple sub-chamber.The uniformity of evaporation material evaporation can be improved in this way.
In some optional embodiments, it is additionally provided with to measure the vapor deposition film thickness treated on plated substrate on the overhead guard
Measurement nozzle.The setting of nozzle is measured convenient for measuring the thickness of the evaporation film on substrate to be deposited, gas is by measuring nozzle
It emits in the system (commonly referred to as Thickness Monitor) for measuring thickness, is deposited by the system for measuring thickness
The thickness of film, and the service life of measurement quartz element can be improved.
In some optional embodiments, above-mentioned linear evaporation source further includes：For accommodating the crucible, the first heating
The shell of device, overhead guard and secondary heater, the head cover of the shell, which is equipped with, to be corresponded and allows corresponding with the nozzle
The second through-hole for passing through of the nozzle, the head cover of the shell be additionally provided with corresponded at least one measurement nozzle and
Allow the corresponding third through-hole for measuring nozzle and passing through.The setting of shell can be in order to keep the temperature crucible, and can be with
The heat that evaporation source generates is prevented to be directly injected to treat on plated substrate.
In some optional embodiments, the medial surface of the shell is equipped with reflecting plate.The setting of reflecting plate is used for
The heat being distributed on outer casing inner wall in the heat that primary heater is generated reflexes to crucible outer wall, improves primary heater
The efficiency of heating surface.
In some optional embodiments, the material of the reflecting plate includes：Titanium, 304 stainless steels, 316L stainless steels,
Any one in molybdenum, tantalum.
In some optional embodiments, the lateral wall of the shell is equipped with cooling device.The setting of cooling device, can
It is lost in from the outer wall of shell to avoid heat, prevents that neighbouring object is caused to scald, certain shell can also use thermal insulation
Material is made, and can also play generation the phenomenon that preventing from causing neighbouring object scald.Above-mentioned cooling device can be cold
But line or be internally provided with cooling liquid cooling tube.
The present invention also provides a kind of evaporated device, including linear evaporation source described in any one of the above embodiments.Due to above-mentioned line
Shape evaporation source can reduce the generation of spray nozzle clogging phenomenon, can improve vapor deposition efficiency.Therefore evaporated device provided by the invention, tool
There is preferable performance, and production efficiency can be improved.
Description of the drawings
Fig. 1 is linear a kind of structure diagram of evaporation source provided in an embodiment of the present invention；
Fig. 2 is another structure diagram of linear evaporation source provided in an embodiment of the present invention；
Fig. 3 is the structural solid figure of the secondary heater of linear evaporation source provided in an embodiment of the present invention；
Fig. 4 is the interior section structure diagram of linear evaporation source provided in an embodiment of the present invention；
Fig. 5 is the structure diagram of the primary heater of linear evaporation source provided in an embodiment of the present invention；
Fig. 6 is the internal structure schematic diagram of the crucible of linear evaporation source provided in an embodiment of the present invention.
Reference numeral：
1- crucible 11- sub-chamber
12- baffle 21- primary heaters
The main auxiliary heating parts of heating part 212- of 211-
22- secondary heater 221- first through hole
3- overhead guard 31- nozzles
311- nozzle cover 4- sealing rings
51- the first diffuser plate the second diffuser plates of 52-
6- measures nozzle 7- shells
71- head cover 8- cooling devices
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment belongs to the range of patent protection of the present invention.
As depicted in figs. 1 and 2, wherein：Fig. 1 is linear a kind of structure diagram of evaporation source provided in an embodiment of the present invention；
Fig. 2 is another structure diagram of linear evaporation source provided in an embodiment of the present invention；Linear evaporation source provided by the invention, packet
It includes：The crucible 1 of one end open, the interior hollow chamber being equipped with for housing evaporation material of crucible 1；It is enclosed in 1 outside of crucible, is earthenware
Crucible 1 provides the primary heater 21 of heat；Lid closes the overhead guard 3 of 1 openend of crucible, and overhead guard 3 is equipped with multiple be used for base to be plated
The nozzle 31 of the evaporation material of plate injection caburation；It further includes：
The secondary heater 22 of identical heat is provided for each nozzle 31, secondary heater 22 includes：With nozzle 31 1
One corresponds to, and be wrapped in the fire end of the outer surface of corresponding nozzle 31.
Linear evaporation source provided by the invention, by setting secondary heater 22 in the outside of each nozzle 31 so that spray
The temperature of 31 each section of mouth is uniform, avoids the temperature at nozzle 31 different or relatively low, leads to evaporation material temperature at nozzle 31
The generation for the phenomenon that being cooled to solid plug nozzle 31 is reduced, and then vapor deposition efficiency can be improved.
The concrete structure of above-mentioned secondary heater 22 can there are many, in a kind of specific embodiment, as shown in figure 3, Fig. 3
The structural solid figure of secondary heater for linear evaporation source provided in an embodiment of the present invention；Secondary heater 22 is even heat
The heating plate of distribution, and heating plate is equipped with and corresponds first through hole 221 with nozzle 31 to form multiple fire ends.Heating plate
Can be electric boiling plate, electric boiling plate is equipped with the conducting wire being electrically connected with external power supply, and certainly, heating plate can also be sent out by itself
The material of heat is made.
The material of above-mentioned heating plate is 6061T6 aluminium.6061T6 high intensity, high rigidity are good (more than HV90 degree)
Processing effect, oxidation effectiveness is good, and no trachoma stomata, flatness is preferable, improves processing efficiency, reduces material cost.
As shown in figure 4, Fig. 4 is the interior section structure diagram of linear evaporation source provided in an embodiment of the present invention；Overhead guard 3
It is tightly connected between crucible 1 by sealing ring 4.The setting of sealing ring 4 can prevent evaporation material in crucible 1 gasify after from
The generation for the phenomenon that being overflowed in crucible 1.
The material of above-mentioned sealing ring 4 includes：Any one in nickel, 304 stainless steels, 316L stainless steels.
As shown in figure 4, being equipped with the first diffuser plate 51 on the inner wall of overhead guard 3, the first diffuser plate 51 is located at secondary heater
Between 22 and crucible 1, the first diffuser plate 51 be equipped with nozzle 31 one-to-one first gas outlet, and the first gas outlet is opened
It spends adjustable.The setting of first diffuser plate can keep the pressure inside crucible so that evaporation source uniformly radiates, and prevents evaporation source
The generation of spillover, prevents evaporation source from disperseing.The effect of this first gas outlet is：The gas evaporated in crucible 1 can be radiated,
According to the size and location of the first gas outlet, can uniformly to radiate by the gas of nozzle 31.In addition, go out because of first
The aperture of gas port is adjustable, so the exit dose that the material in adjustable crucible 1 passes through the first gas outlet so that 1 inside energy of crucible
Keep certain pressure.
Further, the second diffuser plate 52 is equipped in crucible 1, the second diffuser plate 52 is located at the first diffuser plate 51 and crucible 1
Between interior evaporation material, the second diffuser plate 52 is equipped with and 31 one-to-one second gas outlet of nozzle, and the second gas outlet
Aperture it is adjustable.The setting of second diffuser plate can keep the pressure inside crucible so that evaporation source uniformly radiates, and prevents from steaming
Rise the generation of spillover, prevents evaporation source from disperseing.The effect of this second gas outlet is：The gas that can will be evaporated in crucible 1
Radiation, according to the size and location of the second gas outlet, can uniformly to radiate by the gas of nozzle 31.In addition, because
The aperture of second gas outlet is adjustable, so the exit dose that the material in adjustable crucible passes through the first gas outlet so that in crucible
Portion can keep certain pressure.
The concrete structure of above-mentioned primary heater 21 can also there are many, in a kind of optional embodiment, such as Fig. 5 institutes
Show, Fig. 5 is the structure diagram of the primary heater 21 of linear evaporation source provided in an embodiment of the present invention；Primary heater 21 wraps
It includes：The main heating part 211 and auxiliary heating part 212 being distributed along 1 short transverse of crucible.Earthenware is given in main heating part 211 and auxiliary heating part 212
Crucible 1 export heat can control respectively, auxiliary heating part 212 can according to evaporation material number, selection open or be not turned on
And the temperature that exports after opening, the uniformity of evaporation material in crucible 1 can be further improved.
In a kind of optional embodiment, as shown in figure 4, each nozzle 31 is equipped with nozzle cover 311, on nozzle cover 311
Equipped at least one spray orifice.In this way convenient for control 31 emitted dose of nozzle, the uniformity of coating film thickness on substrate is improved.
As shown in fig. 6, Fig. 6 is the internal structure schematic diagram of the crucible 1 of linear evaporation source provided in an embodiment of the present invention；Earthenware
At least one baffle 12 is equipped in crucible 1 so that the hollow chamber of crucible 1 is divided into multiple sub-chamber 11.Vapor deposition material can be improved in this way
Expect the uniformity of evaporation.
In a kind of preferable embodiment, it is additionally provided with to measure the measurement for treating the film thickness of the vapor deposition on plated substrate on overhead guard
Nozzle 6.The setting of nozzle 6 is measured convenient for measuring the thickness of the evaporation film on substrate to be deposited, gas is by measuring emission nozzles
Onto the system (commonly referred to as Thickness Monitor) for measuring thickness, evaporation film is obtained by the system for measuring thickness
Thickness, and the service life of measurement quartz element can be improved.
The heat that crucible 1 generates in order to prevent scatters and disappears, as shown in Figure 1, above-mentioned linear evaporation source further includes：For accommodating earthenware
Crucible 1, primary heater 21, overhead guard 3 and secondary heater 22 shell 7, the head cover 71 of shell 7 is equipped with nozzle 31 one by one
The second through-hole corresponding and that corresponding nozzle 31 is allowed to pass through, the head cover 71 of shell 7 are additionally provided with and at least one measurement nozzle 6 one
One corresponds to and allows the third through-hole that corresponding measurement nozzle 6 passes through.The setting of shell 7 can in order to be kept the temperature to crucible 1,
And the heat that can prevent evaporation source from generating is directly injected to and treats on plated substrate.
Further, the medial surface of shell is equipped with reflecting plate.The setting of reflecting plate is for primary heater 21 to be generated
Heat in the heat that is distributed on 7 inner wall of shell reflex to 1 outer wall of crucible, improve the efficiency of heating surface of primary heater 21.
The material of said reflection plate includes any one in titanium, 304 stainless steels, 316L stainless steels, molybdenum, tantalum.
In preferable embodiment, the lateral wall of shell 7 is equipped with cooling device 8.The setting of cooling device 8, can be to avoid
Heat is lost in from the outer wall of shell 7, prevents that neighbouring object is caused to scald, and certain shell 7 can also use heat-insulating material
It is made, generation the phenomenon that preventing from causing neighbouring object scald can also be played.Above-mentioned cooling device 8 can be cooling line
Or it is internally provided with the cooling tube of cooling liquid.
The present invention also provides a kind of evaporated device, including linear evaporation source described in any one of the above embodiments.Due to above-mentioned line
Shape evaporation source can reduce the generation of spray nozzle clogging phenomenon, can improve vapor deposition efficiency.Therefore evaporated device provided by the invention, tool
There is preferable performance, and production efficiency can be improved.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art
God and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to include these modifications and variations.
Claims (14)
1. a kind of linear evaporation source, including：The crucible of one end open, the crucible is interior to be equipped with to house the hollow of evaporation material
Chamber；It is enclosed in the crucible outside, the primary heater of heat is provided for the crucible；Lid closes the top of the crucible openend
Cover, the overhead guard are equipped with multiple nozzles being used for the evaporation material for treating plated substrate injection caburation；It is characterized in that, it also wraps
It includes：
The secondary heater of heat is provided for each nozzle, the secondary heater includes：Corresponded with the nozzle,
And it is wrapped in the fire end of the outer surface of the corresponding nozzle；
The first diffuser plate is equipped in the overhead guard, first diffuser plate between the secondary heater and the crucible,
First diffuser plate be equipped with one-to-one first gas outlet of the nozzle, and the aperture of first gas outlet can
It adjusts；
The second diffuser plate is equipped in the crucible, second diffuser plate is located at the steaming in first diffuser plate and the crucible
Between plating material, second diffuser plate is equipped with and one-to-one second gas outlet of the nozzle, and second outlet
The aperture of mouth is adjustable.
2. linear evaporation source as described in claim 1, which is characterized in that the secondary heater adds for even heat distribution
Hot plate, and the heating plate is equipped with the one-to-one first through hole of the nozzle to form multiple fire ends.
3. linear evaporation source as claimed in claim 2, which is characterized in that the material of the heating plate is 6061T6 aluminium.
4. linear evaporation source as claimed in claim 2, which is characterized in that pass through sealing ring between the overhead guard and the crucible
It is tightly connected.
5. linear evaporation source as claimed in claim 4, which is characterized in that the material of the sealing ring includes：It is nickel, 304 stainless
Any one in steel, 316L stainless steels.
6. linear evaporation source as described in claim 1, which is characterized in that the primary heater includes：Along crucible height
Spend the main heating part of directional spreding and auxiliary heating part.
7. linear evaporation source as described in claim 1, which is characterized in that each nozzle is equipped with nozzle cover, the spray
Mouth is covered equipped at least one spray orifice.
8. linear evaporation source as described in claim 1, which is characterized in that at least one baffle is equipped in the crucible with by institute
The hollow chamber for stating crucible is divided into multiple sub-chamber.
9. such as the linear evaporation source of claim 1~8 any one of them, which is characterized in that be additionally provided with to survey on the overhead guard
Amount treats the measurement nozzle of the vapor deposition film thickness on plated substrate.
10. linear evaporation source as claimed in claim 9, which is characterized in that further include：For accommodate the crucible, first plus
The shell of hot device, overhead guard and secondary heater, the head cover of the shell, which is equipped with, to be corresponded with the nozzle and allows pair
The second through-hole that the nozzle answered passes through, the head cover of the shell, which is additionally provided with, to be corresponded and permits at least one measurement nozzle
Perhaps the corresponding third through-hole for measuring nozzle and passing through.
11. linear evaporation source as claimed in claim 10, which is characterized in that the medial surface of the shell is equipped with reflecting plate.
12. linear evaporation source as claimed in claim 11, which is characterized in that the material of the reflecting plate includes：Titanium, 304 are not
It becomes rusty steel, 316L stainless steels, molybdenum, any one in tantalum.
13. linear evaporation source as claimed in claim 10, which is characterized in that the lateral wall of the shell is equipped with cooling device.
14. a kind of evaporated device, which is characterized in that including such as linear evaporation source of claim 1~13 any one of them.
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| CN201510761075.6A CN105296934B (en) | 2015-11-09 | 2015-11-09 | A kind of linear evaporation source and evaporated device |
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| CN201510761075.6A CN105296934B (en) | 2015-11-09 | 2015-11-09 | A kind of linear evaporation source and evaporated device |
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| CN105296934B true CN105296934B (en) | 2018-06-19 |
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| CN110373633A (en) * | 2019-07-16 | 2019-10-25 | 福建华佳彩有限公司 | A kind of OLED crucible for vapor plating |
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