CN205473956U - A coating by vaporization crucible for OLED - Google Patents
A coating by vaporization crucible for OLED Download PDFInfo
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- CN205473956U CN205473956U CN201620007287.5U CN201620007287U CN205473956U CN 205473956 U CN205473956 U CN 205473956U CN 201620007287 U CN201620007287 U CN 201620007287U CN 205473956 U CN205473956 U CN 205473956U
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Abstract
The utility model relates to a display technical field especially relates to a OLED's coating by vaporization crucible. The utility model provides a coating by vaporization crucible for OLED, including the crucible body, the crucible body constitutes an upper end open -ended cavity, be equipped with first heating mechanism on the outer wall of crucible body, be equipped with at least one second heating mechanism in the cavity cavity, heat the coating by vaporization in the coating by vaporization process through two organic material of heating mechanisms in to the crucible, can make that the temperature between each partial material reaches unanimity in the crucible, solved among the prior art because of each in regional temperature degradation of producing of the organic material local overheat that results in of homogeneous not in the crucible, can guarantee the performance of OLED device, it is simultaneously owing to adopt two heating mechanisms, stronger, better to organic material's heating effect to organic material's heating efficiency, the coating by vaporization in -process can be solved and coating film uneven thickness's problem is makeed along with the consumption of material.
Description
Technical field
This utility model relates to display technology field, particularly relates to the evaporation crucible of a kind of OLED.
Background technology
In recent years, due to organic electroluminescence device (Organic Light Emitting Device, OLED) have high efficiency, high brightness, low in energy consumption, contrast is high, fast response time and can realize the advantages such as large area photoelectric display, has great application prospect in flat pannel display and efficient illumination field and causes extensive concern.
The evaporation source that OLED evaporation uses is divided into two kinds, and one is linear evaporation source, and another kind is an evaporation source, and the organic material 2 of use is also classified into two big classes, fusion and subliming type.Traditional evaporation source is as shown in Figure 1, crucible body 1 ' outer wall is only heated by heater, owing to the heat conductivility of organic material 2 is poor, cause the material temperature of crucible central area and the material temperature heterogeneity at crucible internal walls in heating process, existence must thermograde so that peripheral material hot-spot and produce deterioration；The effect of Fig. 2 to Fig. 3 change can be produced for subliming type material, the i.e. material at edge is first deposited with and the material at center is not also deposited with, evaporation rate so can be caused unstable, and evaporation rate to be stablized is necessary for constantly promoting heating-up temperature, finally result in material degradation, and then affect the performance of OLED.Further, since the poor heat conduction of organic material 2, so the crucible that the big height of bore is low cannot be used, narrow long type crucible can only be selected, so can cause being deposited with thickness heterogeneity.
Utility model content
(1) to solve the technical problem that
The technical problems to be solved in the utility model is: existing evaporation crucible is during evaporation, the temperature of central area organic material and the temperature heterogeneity of organic material at crucible internal walls, easily occur that peripheral organic material hot-spot produces deterioration, and the poor heat conduction due to organic material, so cannot use bore greatly, the lowest crucible, narrow long type crucible can only be selected, so can cause being deposited with thickness heterogeneity.
(2) technical scheme
In order to solve above-mentioned technical problem, this utility model provides a kind of evaporation crucible for OLED, including crucible body, described crucible body constitutes the hollow cavity of a upper end open, the outside wall surface of described crucible body is provided with the first heating arrangements, is provided with at least one second heating arrangements in described hollow cavity.
Alternatively, described first heating arrangements is to be additionally provided with the first temperature sensor on the electrical heating wire being located at crucible body outer surface, the outer surface of described crucible body.
Alternatively, described second heating arrangements includes the cylinder of heating rod and tubulose, one end of described cylinder seals, form the receiving chamber of an one end open, described receiving intracavity is located at by described heating rod, the opening of described cylinder is connected with the diapire of described crucible body, and the diapire of described crucible body offers, with described cylinder junction, the through hole connected with described receiving chamber.
Alternatively, described receiving intracavity is additionally provided with the second temperature sensor.
Alternatively, described cylinder is one-body molded with described crucible body.
Alternatively, described second heating arrangements is provided with one, and described second heating arrangements is located at the middle part of described hollow cavity.
Alternatively, described second heating arrangements is provided with multiple, and one of them the second heating arrangements is located at the middle part of described hollow cavity.
Alternatively, being additionally provided with at least one heat-conducting piece in described hollow cavity, described hollow cavity is divided into territory, multiple material containing area by described heat-conducting piece.
Alternatively, it is equipped with second heating arrangements in each territory, described material containing area.
Alternatively, described heat-conducting piece is the heat-conducting plate of rectangle, and one end of described heat-conducting plate is connected with the outer wall of described cylinder, and the other end is connected with the sidewall of described crucible body.
Alternatively, described heat-conducting plate is provided with multiple, and the angle between adjacent two heat-conducting plates is equal.
Alternatively, described heat-conducting plate is corrugated plating.
Alternatively, described heat-conducting piece is the heat conducting wall of the tubular coaxial with described cylinder, and the lower end of described heat conducting wall is connected with the diapire of described crucible body.
Alternatively, the heat conductivity of described heat-conducting piece is more than or equal to the heat conductivity of described crucible body.
Alternatively, described crucible body is cylindrical structure or cube structure.
(3) beneficial effect
Technique scheme of the present utility model has the advantage that this utility model provides a kind of evaporation crucible for OLED, including crucible body, described crucible body constitutes the hollow cavity of a upper end open, the outside wall surface of described crucible body is provided with the first heating arrangements, is provided with at least one second heating arrangements in described hollow cavity；The outside wall surface of described crucible body is provided with the first heating arrangements, second heating arrangements is set in hollow cavity, by two heating arrangements, the organic material in crucible is carried out heating in evaporation process to be deposited with, the temperature between each several part material can be made in crucible to reach unanimity, solve in prior art because of temperature heterogeneity and the organic material hot-spot that causes and the deterioration produced in regional in crucible, it can be ensured that the performance of OLED；Simultaneously because use two heating arrangements, higher, more preferable for the heats of organic material to the heating efficiency of organic material, therefore heavy caliber and the most relatively low crucible body can be used, the most both can meet the requirement of evaporation, during can solving again to be deposited with, make the problem that coating film thickness is uneven along with the consumption of material.
Accompanying drawing explanation
This utility model is above-mentioned and/or the advantage of additional aspect will be apparent from easy to understand, wherein from combining the accompanying drawings below description to embodiment:
Fig. 1 prior art is deposited with the structural representation of crucible；
Fig. 2 is the evaporation crucible of the prior art structural representation when not heating；
Fig. 3 is the structural representation after evaporation crucible of the prior art heats a period of time；
Fig. 4 is the structural representation of the evaporation crucible for OLED described in the embodiment of the present application one；
Fig. 5 is the upward view of Fig. 4；
Fig. 6 is the structural representation of the evaporation crucible for OLED described in this utility model embodiment two；
Fig. 7 is the top view of Fig. 6；
Fig. 8 be the heat-conducting piece described in this utility model embodiment three be the structural representation of heat-conducting plate；
Fig. 9 is the top view of Fig. 8；
Figure 10 is that in this utility model embodiment three, heat-conducting plate is the structural representation of the evaporation crucible for OLED of corrugated plating；
Figure 11 be heat-conducting piece be tubular heat conducting wall for OLED evaporation crucible structural representation；
Figure 12 is the top view of Figure 11；
Figure 13 is the structural representation of the evaporation crucible for OLED described in embodiment four；
Figure 14 is the top view of Figure 13；
Figure 15 is that in embodiment four, heat-conducting plate is the structural representation of the evaporation crucible for OLED of corrugated plating；
Figure 16 is the structural representation of electrical heating wire；
Figure 17 is the structural representation of heating rod.
Wherein in Fig. 1 to Figure 17, corresponding relation between reference and component names is:
1 ', crucible body, 2, organic material, 1, crucible body, 11, hollow cavity, 12, electrical heating wire, 13, through hole, 14, the second heating arrangements, 141, cylinder, 142, heating rod, the 143, second temperature sensor, 15, heat-conducting piece, 151, heat-conducting plate, 1511, corrugated plating, 152, heat conducting wall, 16, territory, material containing area.
Detailed description of the invention
In description of the present utility model, it should be noted that, term " " center ", " longitudinally ", " laterally ", on " ", D score, " front ", " afterwards ", " left ", " right ", " vertically ", " level ", " push up ", " end ", " " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, it is for only for ease of description this utility model and simplifies description, rather than indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to restriction of the present utility model.Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint relative importance.
In description of the present utility model, it should be noted that unless otherwise clearly defined and limited, term " is installed ", " being connected ", " connection " should be interpreted broadly, and connects for example, it may be fixing, it is also possible to be to removably connect, or be integrally connected；Can be to be mechanically connected, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible to be indirectly connected to by intermediary, can be the connection of two element internals.For the ordinary skill in the art, above-mentioned term concrete meaning in this utility model can be understood with concrete condition.Additionally, in description of the present utility model, except as otherwise noted, " multiple " are meant that two or more.
For making the purpose of this utility model embodiment, technical scheme and advantage clearer, below in conjunction with the accompanying drawing in this utility model embodiment, technical scheme in this utility model embodiment is clearly and completely described, obviously, described embodiment is a part of embodiment of the present utility model rather than whole embodiments.Based on the embodiment in this utility model, the every other embodiment that those of ordinary skill in the art are obtained on the premise of not making creative work, broadly fall into the scope of this utility model protection.
As shown in Figure 4, this utility model provides a kind of evaporation crucible for OLED, including crucible body 1, described crucible body 1 constitutes the hollow cavity 11 of a upper end open, the outside wall surface of described crucible body 1 is provided with the first heating arrangements, is provided with at least one second heating arrangements 14 in described hollow cavity 11.The evaporation crucible that this utility model provides, the outside wall surface of described crucible body 1 is provided with the first heating arrangements, second heating arrangements 14 is set in hollow cavity 11, by two heating arrangements, the organic material in crucible is carried out heating in evaporation process to be deposited with, the temperature between each several part material can be made in crucible to reach unanimity, solve in prior art because of temperature heterogeneity and the organic material hot-spot that causes and the deterioration produced in regional in crucible, it can be ensured that the performance of OLED；Simultaneously because use two heating arrangements, higher, more preferable for the heats of organic material to the heating efficiency of organic material, therefore heavy caliber and the most relatively low crucible body 1 can be used, the most both can meet the requirement of evaporation, during can solving again to be deposited with, make the problem that coating film thickness is uneven along with the consumption of material.
Embodiment one
As shown in Figure 4 and Figure 5, present embodiments provide a kind of evaporation crucible for OLED and include crucible body 1, described crucible body 1 constitutes the hollow cavity 11 of a upper end open, the outside wall surface of described crucible body 1 is provided with the first heating arrangements, second heating arrangements 14 it is provided with in described hollow cavity 11, by two heating arrangements, the organic material in crucible is carried out heating in evaporation process to be deposited with, the temperature between each several part material can be made in crucible to reach unanimity, solve in prior art because of temperature heterogeneity and deterioration that the organic material hot-spot that causes produces in regional in crucible, can ensure that the performance of OLED；Simultaneously because use two heating arrangements, higher, more preferable for the heats of organic material to the heating efficiency of organic material, therefore heavy caliber and the most relatively low crucible body 1 can be used, the most both can meet the requirement of evaporation, during can solving again to be deposited with, make the problem that coating film thickness is uneven along with the consumption of material.
Alternatively, described first heating arrangements is the electrical heating wire 12 (as shown in figure 16) being located in crucible body 1 outside wall surface, it is energized by electrical heating wire 12 during evaporation and the organic material in hollow cavity 11 is heated, in the outside wall surface of described crucible body 1, it is additionally provided with the first temperature sensor (not shown), for the temperature of detection crucible body 1 in real time simultaneously；nullDescribed second heating arrangements 14 includes the cylinder 141 of heating rod 142 (as shown in figure 17) and tubulose，One end of described cylinder 141 seals，Form the receiving chamber of an one end open，Described receiving intracavity is located at by described heating rod 142，The opening of described cylinder 141 is connected with the diapire of described crucible body 1，The diapire of described crucible body 1 offers, with described cylinder 141 junction, the through hole 13 connected with described receiving chamber，Heating rod 142 puts into described receiving intracavity by described through hole 13，The wire being simultaneously connected with heating rod 142 is connected with extraneous power supply by described through hole 13，The generation heat so that heating rod 142 can be energized，Preferably，Described cylinder 141 is one-body molded with described crucible body 1，The most described cylinder 141 is diapire one section of tubular structure upwardly of described crucible body 1，And the sealing of described tubular structure upper end，Lower ending opening，Such evaporation crucible is easy to manufacture，Follow-up assembly work can be avoided；Can certainly be cylinder 141 be split-type structural with crucible body 1, after now needing heating rod 142 is arranged on receiving intracavity, then be fixed on unified on the diapire of crucible body 1.
Described second heating arrangements 14 is fixed on the middle part of described hollow cavity 11, so ensure that the second heating arrangements 14 is equal to the distance between the inwall of crucible body 1 all directions, identical to the heat of all directions transmission, it is able to ensure that in crucible body 1 homogeneity of temperature in regional, as shown in Figure 4, described crucible body 1 is cylindrical structure, described cylinder 141 is coaxially disposed with described crucible body 1, the concrete shape of certain described crucible body 1 can also be other shapes, such as rectangular structure or cube structure；
Described receiving intracavity is additionally provided with the second temperature sensor 143 (as shown in figure 17), is detected the temperature of cylinder 141 by the second temperature sensor 143；Alternatively, described second temperature sensor 143 is located on the inwall of described cylinder 141 or is located on described heating rod 142；Can be that the organic materials accommodating intracavity is heated by the first heating arrangements and the second heating arrangements 14 simultaneously in use；Can also be the most only by the first heating arrangements, organic material to be heated (now the first heating arrangements is as main heating source), and by temperature T1 of the first temperature sensor measurement crucible body 1 sidewall, and heating rod 142 puts into receiving intracavity by the through hole 13 bottom crucible body 1, now the second temperature sensor 143 on cylinder 141 or heating rod 142 detects temperature T2 of cylinder 141, as temperature T1 ＞ T2, heating rod 142 is energized, make the second heating arrangements 14 start the organic material in hollow cavity 11 and heat (now the second heating arrangements 14 is auxiliary thermal source), the temperature of the material made in crucible in regional reaches unanimity.
Embodiment two
The present embodiment is substantially the same with the content in embodiment one, and it differs primarily in that and is provided with multiple second heating arrangements 14 in the present embodiment in described hollow cavity 11；As shown in Figure 6 and Figure 7, being provided with multiple second heating arrangements 14 in described crucible body 1, one of them second heating arrangements 14 is located at and is fixed on described middle part, and other multiple second heating arrangements 14 are uniformly distributed in described hollow cavity 11；So the temperature of the further the organic material ensured in crucible body 1 in regional can keep consistent, multiple second heating arrangements 14 is set simultaneously, higher, more preferable for the heats of organic material to the heating efficiency of organic material, therefore heavy caliber and the most relatively low crucible body 1 can be used, the most both can meet the requirement of evaporation, during can solving again to be deposited with, make the problem that coating film thickness is uneven along with the consumption of material.As shown in Figure 6, described crucible body 1 is cylindrical structure, and described cylinder 141 is coaxially disposed with described crucible body 1, and the concrete shape of certain described crucible body 1 can also be other shapes, such as rectangular structure or cube structure.
Alternatively, described first heating arrangements is the electrical heating wire 12 being located in crucible body 1 outside wall surface, it is energized by electrical heating wire 12 during evaporation and the organic material in hollow cavity 11 is heated, in the outside wall surface of described crucible body 1, it is additionally provided with the first temperature sensor simultaneously, is used for detecting in real time the temperature of crucible body 1；nullDescribed second heating arrangements 14 includes the cylinder 141 of heating rod 142 and tubulose，One end of described cylinder 141 seals，Form the receiving chamber of an one end open，Described receiving intracavity is located at by described heating rod 142，The opening of described cylinder 141 is connected with the diapire of described crucible body 1，The diapire of described crucible body 1 offers, with described cylinder 141 junction, the through hole 13 connected with described receiving chamber，Heating rod 142 puts into described receiving intracavity by described through hole 13，The wire being simultaneously connected with heating rod 142 is connected with extraneous power supply by described through hole 13，The generation heat so that heating rod 142 can be energized，Preferably，Described cylinder 141 is one-body molded with described crucible body 1，The most described cylinder 141 is diapire one section of tubular structure upwardly of described crucible body 1，And the sealing of described tubular structure upper end，Lower ending opening，Such evaporation crucible is easy to manufacture，Follow-up assembly work can be avoided；Can certainly be cylinder 141 be split-type structural with crucible body 1, after now needing heating rod 142 is arranged on receiving intracavity, then be fixed on unified on the diapire of crucible body 1.
Wherein, it is additionally provided with the second temperature sensor 143 in receiving chamber in the second heating arrangements 14 being located at middle part, can certainly be that each second heating arrangements 14 is equipped with second temperature sensor 143, detected the temperature of cylinder 141 by the second temperature sensor 143, the most described second temperature sensor 143 is located on the inwall of described cylinder 141 or is located on described heating rod 142；Can be that the organic materials accommodating intracavity is heated by the first heating arrangements and the second heating arrangements 14 simultaneously in use；Can also be to be merely by ground heating arrangements at the beginning organic material heats (now the first heating arrangements is as main heating source), and by peripheral temperature T1 near crucible body 1 sidewall of the first temperature sensor measurement crucible, it is now placed in the second temperature sensor 143 on the cylinder 141 of the second heating arrangements 14 in the middle part of hollow cavity 11 or heating rod 142 to detect temperature T2 of cylinder 141, as temperature T1 ＞ T2, heating rod 142 is energized, make the second heating arrangements 14 start the organic material in hollow cavity 11 and heat (now the second heating arrangements 14 is auxiliary thermal source), the temperature of the material made in crucible in regional reaches unanimity.
Embodiment three
nullAs shown in Fig. 8 to Figure 12，The present embodiment is substantially the same with the technical scheme in embodiment one，It differs primarily in that，At least one heat-conducting piece 15 it is provided with in the present embodiment in described hollow cavity 11，Described hollow cavity 11 is separated into territory, multiple material containing area 16 by described heat-conducting piece 15，When organic material is put into crucible，Organic material will be located in territory, multiple material containing area 16，When organic material being heated by the first heating arrangements and the second heating arrangements 14，Heat can be conducted to heat-conducting piece 15 by the inwall of the inwall of crucible body 1 and cylinder 141，Organic material is heated by crucible by subregion，So organic material can rapidly pre-warming，The distribution of heat simultaneously is the most evenly，The uniformity that organic material in crucible is heated can be improved，Improve the display effect of OLED display device.
Alternatively, as shown in Fig. 8 to Figure 10, described heat-transfer device is provided with multiple heat-transfer device, its described heat-transfer device is the heat-conducting plate 151 of rectangle, one end of described rectangle heat-conducting plate 151 is connected with the inwall of crucible body 1, the other end is connected with the lateral wall of described cylinder 141 and described hollow cavity 11 is divided into territory, multiple material containing area 16, wherein the lower end of heat-conducting plate 151 is connected with the diapire of described crucible body 1, certainly the lower end of heat-conducting plate 151 can also be unsettled setting, all it is capable of rapidly pre-warming organic material, make the purpose of the uniform heat distribution of organic material in crucible body 1；Preferably, angle between multiple described heat-conducting plates 151 set is equal, as shown in Fig. 8 to Figure 10, described heat-conducting plate 151 is provided with six, six described heat-conducting plates 151 angle between any two is 60 °, described hollow cavity 11 is divided into territory, six material containing areas 16, certainly, described heat-conducting plate 151 is not limited only to six, it is also possible to three, four or five etc. all can realize the purpose of the application；It should be noted that multiple heat-conducting plates 151 can also be irregular being arranged in described hollow cavity 11, the most multiple described heat-conducting plates 151 hollow cavity 11 is separated multiple volume not wait territory, material containing area 16, equally realize the application purpose.
Alternatively, as shown in Figure 10, described heat-conducting plate 151 is corrugated plating 1511, and corrugated plating 1511 can increase the heat exchange area between organic material, for organic material preheating faster, the rate of heat addition is higher.
Certainly, described heat-conducting piece 15 can also be other structures, as is illustrated by figs. 11 and 12, described heat-conducting piece 15 is the heat conducting wall 152 being located at the described interior tubular coaxial with described cylinder 141 of hollow cavity 11, the lower end of described heat conducting wall 152 is connected with the diapire of described crucible body 1, by the heat conducting wall 152 of tubular, described hollow cavity 11 is divided into the territory, material containing area 16 of multiple annular, it is capable of rapidly pre-warming organic material equally, it it is the purpose of the uniform heat distribution of organic material in crucible body 1, its objective is without departing from design philosophy of the present utility model, the protection domain of the application should be belonged to.
Alternatively, the heat conductivity of described heat-conducting piece 15 is more than or equal to the heat conductivity of described crucible body 1, and higher heat conductivity, advantageously in conduction of heat, can improve the uniformity that organic material in crucible body 1 is heated；Preferably, described heat-conducting piece 15 is one-body molded with described crucible body 1；Then certain described heat-conducting piece 15 can also be fixed on by modes such as welding in the hollow cavity 11 of described crucible body 1 with described crucible body 1 in split-type structural.
Embodiment four
nullThe present embodiment is substantially the same with the technical scheme in embodiment two，It differs primarily in that in the hollow cavity 11 being provided with multiple second heating arrangements 14 also at least provided with a heat-conducting piece 15，As shown in FIG. 13 to 15，Multiple heat-conducting piece 15 it is provided with in described hollow cavity 11，Described hollow cavity 11 is separated into territory, multiple material containing area 16 by described heat-conducting piece 15，When organic material is put into crucible，Organic material will be located in territory, multiple material containing area 16，When organic material being heated by the first heating arrangements and the second heating arrangements 14，Heat can be conducted to heat-conducting piece 15 by the inwall of the inwall of crucible body 1 and cylinder 141，Organic material is heated by crucible by subregion，So organic material can rapidly pre-warming，The distribution of heat simultaneously is the most evenly，The uniformity that organic material in crucible is heated can be improved，Improve the display effect of OLED display device.
Alternatively, as shown in FIG. 13 to 15, described heat-conducting piece 15 is provided with multiple, described hollow cavity 11 is divided into territory, multiple material containing area 16 by multiple described heat-conducting pieces 15, and in territory, material containing area 16 each described, it is equipped with second heating arrangements 14, is additionally provided with second heating arrangements 14 simultaneously at the middle part of hollow cavity 11；The speed for organic material heating can be further enhanced, it can be ensured that in crucible body 1, the temperature of the organic material in regional reaches unanimity by arranging multiple heat-conducting piece 15 and multiple second heating arrangements 14.
Preferably, its described heat-conducting piece 15 is the heat-conducting plate 151 of rectangle, one end of described rectangle heat-conducting plate 151 is connected with the inwall of crucible body 1, the other end is connected with the lateral wall of described cylinder 141, described hollow cavity 11 is divided into territory, multiple material containing area 16, wherein the lower end of heat-conducting plate 151 is connected with the diapire of described crucible body 1, certainly the lower end of heat-conducting plate 151 can also be unsettled setting, all it is capable of rapidly pre-warming organic material, makes the purpose of the uniform heat distribution of organic material in crucible body 1；Preferably, angle between multiple described heat-conducting plates 151 set is equal, as shown in FIG. 13 to 15, described heat-conducting plate 151 is provided with six, six described heat-conducting plates 151 angle between any two is 60 °, described hollow cavity 11 is divided into territory, six material containing areas 16, and the most described second heating arrangements 14 is provided with seven, is equipped with second heating arrangements 14 in each territory, material containing area 16；Certainly, described heat-conducting plate 151 is not limited only to six, it is also possible to three, four or five, all can realize the purpose of the application；It should be noted that multiple heat-conducting plates 151 can also be irregular being arranged in described hollow cavity 11, the most multiple described heat-conducting plates 151 hollow cavity 11 is separated multiple volume not wait territory, material containing area 16, equally realize the application purpose.
Alternatively, as shown in figure 15, described heat-conducting plate 151 is corrugated plating 1511, and corrugated plating 1511 can increase the heat exchange area between organic material, for organic material preheating faster, the rate of heat addition is higher.
Certainly; described heat-conducting piece 15 can also be other structures; described heat-conducting piece 15 be located at as described in hollow cavity 11 with as described in the heat conducting wall 152 of the coaxial tubular of cylinder 141; the lower end of described heat conducting wall 152 is connected with the diapire of described crucible body 1; by the heat conducting wall 152 of tubular, described hollow cavity 11 is divided into the territory, material containing area 16 of multiple annular; it is capable of rapidly pre-warming organic material equally; it it is the purpose of the uniform heat distribution of organic material in crucible body 1; its objective, without departing from design philosophy of the present utility model, should belong to the protection domain of the application.
Alternatively, the heat conductivity of described heat-conducting piece 15 is more than or equal to the heat conductivity of described crucible body 1, and higher heat conductivity, advantageously in conduction of heat, can improve the uniformity that organic material in crucible body 1 is heated；Preferably, described heat-conducting piece 15 is one-body molded with described crucible body 1；Then certain described heat-conducting piece 15 can also be fixed on by modes such as welding in the hollow cavity 11 of described crucible body 1 with the described old split-type structural of crucible body 1.
In sum, this utility model provides a kind of evaporation crucible for OLED, and including crucible body, described crucible body constitutes the hollow cavity of a upper end open, the outside wall surface of described crucible body is provided with the first heating arrangements, is provided with at least one second heating arrangements in described hollow cavity；The outside wall surface of described crucible body is provided with the first heating arrangements, second heating arrangements is set in hollow cavity, by two heating arrangements, the organic material in crucible is carried out heating in evaporation process to be deposited with, the temperature between each several part material can be made in crucible to reach unanimity, solve in prior art because of temperature heterogeneity and the organic material hot-spot that causes and the deterioration produced in regional in crucible, it can be ensured that the performance of OLED；Simultaneously because use two heating arrangements, higher, more preferable for the heats of organic material to the heating efficiency of organic material, therefore heavy caliber and the most relatively low crucible body can be used, the most both can meet the requirement of evaporation, during can solving again to be deposited with, make the problem that coating film thickness is uneven along with the consumption of material.
Last it is noted that above example is only in order to illustrate the technical solution of the utility model, it is not intended to limit；Although this utility model being described in detail with reference to previous embodiment, it will be understood by those within the art that: the technical scheme described in foregoing embodiments still can be modified by it, or wherein portion of techniques feature is carried out equivalent；And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of this utility model each embodiment technical scheme.
Claims (16)
1. the evaporation crucible for OLED, it is characterized in that: include crucible body, described crucible body constitutes the hollow cavity of a upper end open, and the outside wall surface of described crucible body is provided with the first heating arrangements, is provided with at least one second heating arrangements in described hollow cavity.
Evaporation crucible for OLED the most according to claim 1, it is characterised in that: described first heating arrangements is to be additionally provided with the first temperature sensor on the electrical heating wire being located at crucible body outer surface, the outer surface of described crucible body.
Evaporation crucible for OLED the most according to claim 2, it is characterized in that: described second heating arrangements includes the cylinder of heating rod and tubulose, one end of described cylinder seals, form the receiving chamber of an one end open, described receiving intracavity is located at by described heating rod, the opening of described cylinder is connected with the diapire of described crucible body, and the diapire of described crucible body offers, with described cylinder junction, the through hole connected with described receiving chamber.
Evaporation crucible for OLED the most according to claim 3, it is characterised in that: described receiving intracavity is additionally provided with the second temperature sensor.
Evaporation crucible for OLED the most according to claim 3, it is characterised in that: described cylinder is one-body molded with described crucible body.
6. according to the evaporation crucible for OLED described in any one of claim 3-5, it is characterised in that: described second heating arrangements is provided with one, and described second heating arrangements is located at the middle part of described hollow cavity.
7. according to the evaporation crucible for OLED described in any one of claim 3-5, it is characterised in that: described second heating arrangements is provided with multiple, and one of them the second heating arrangements is located at the middle part of described hollow cavity.
Evaporation crucible for OLED the most according to claim 6, it is characterised in that: being additionally provided with at least one heat-conducting piece in described hollow cavity, described hollow cavity is divided into territory, multiple material containing area by described heat-conducting piece.
Evaporation crucible for OLED the most according to claim 7, it is characterised in that: being additionally provided with at least one heat-conducting piece in described hollow cavity, described hollow cavity is divided into territory, multiple material containing area by described heat-conducting piece.
Evaporation crucible for OLED the most according to claim 9, it is characterised in that: it is equipped with second heating arrangements in each territory, described material containing area.
The 11. evaporation crucibles for OLED according to claim 8 or claim 9, it is characterised in that: described heat-conducting piece is the heat-conducting plate of rectangle, and one end of described heat-conducting plate is connected with the outer wall of described cylinder, and the other end is connected with the sidewall of described crucible body.
The 12. evaporation crucibles for OLED according to claim 11, it is characterised in that: described heat-conducting plate is provided with multiple, and the angle between adjacent two heat-conducting plates is equal.
The 13. evaporation crucibles for OLED according to claim 11, it is characterised in that: described heat-conducting plate is corrugated plating.
The 14. evaporation crucibles for OLED according to claim 8 or claim 9, it is characterised in that: described heat-conducting piece is the heat conducting wall of the tubular coaxial with described cylinder, and the lower end of described heat conducting wall is connected with the diapire of described crucible body.
The 15. evaporation crucibles for OLED according to claim 8 or claim 9, it is characterised in that: the heat conductivity of described heat-conducting piece is more than or equal to the heat conductivity of described crucible body.
The 16. evaporation crucibles for OLED according to claim 1, it is characterised in that: described crucible body is cylindrical structure or cube structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620007287.5U CN205473956U (en) | 2016-01-04 | 2016-01-04 | A coating by vaporization crucible for OLED |
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| CN107058958A (en) * | 2017-05-27 | 2017-08-18 | 京东方科技集团股份有限公司 | One kind evaporation crucible and evaporated device |
| CN107142454A (en) * | 2017-07-19 | 2017-09-08 | 京东方科技集团股份有限公司 | Crucible and evaporation coating device is deposited |
| CN107190237A (en) * | 2017-06-26 | 2017-09-22 | 深圳市华星光电技术有限公司 | Evaporation source heating system |
| CN107513689A (en) * | 2017-10-11 | 2017-12-26 | 新乡市百合光电有限公司 | A kind of oil film evaporation coating device on lens protection piece |
| CN107829070A (en) * | 2017-12-14 | 2018-03-23 | 深圳先进技术研究院 | Conductive structure and heating evaporation component |
| WO2018120381A1 (en) * | 2016-12-28 | 2018-07-05 | 武汉华星光电技术有限公司 | High-frequency induced evaporation source apparatus |
| CN109609914A (en) * | 2019-02-27 | 2019-04-12 | 昆山国显光电有限公司 | A kind of crucible and its method for heating and controlling, evaporated device |
| WO2019090967A1 (en) * | 2017-11-08 | 2019-05-16 | 深圳市华星光电半导体显示技术有限公司 | Crucible and evaporation method |
| CN114686819A (en) * | 2020-12-28 | 2022-07-01 | Tcl科技集团股份有限公司 | Crucible cover and crucible |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2018120381A1 (en) * | 2016-12-28 | 2018-07-05 | 武汉华星光电技术有限公司 | High-frequency induced evaporation source apparatus |
| CN107058958A (en) * | 2017-05-27 | 2017-08-18 | 京东方科技集团股份有限公司 | One kind evaporation crucible and evaporated device |
| CN107190237A (en) * | 2017-06-26 | 2017-09-22 | 深圳市华星光电技术有限公司 | Evaporation source heating system |
| US20180371606A1 (en) * | 2017-06-26 | 2018-12-27 | Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Evaporation source heating system |
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| CN107142454A (en) * | 2017-07-19 | 2017-09-08 | 京东方科技集团股份有限公司 | Crucible and evaporation coating device is deposited |
| CN107513689A (en) * | 2017-10-11 | 2017-12-26 | 新乡市百合光电有限公司 | A kind of oil film evaporation coating device on lens protection piece |
| WO2019090967A1 (en) * | 2017-11-08 | 2019-05-16 | 深圳市华星光电半导体显示技术有限公司 | Crucible and evaporation method |
| CN107829070A (en) * | 2017-12-14 | 2018-03-23 | 深圳先进技术研究院 | Conductive structure and heating evaporation component |
| CN109609914A (en) * | 2019-02-27 | 2019-04-12 | 昆山国显光电有限公司 | A kind of crucible and its method for heating and controlling, evaporated device |
| CN114686819A (en) * | 2020-12-28 | 2022-07-01 | Tcl科技集团股份有限公司 | Crucible cover and crucible |
| CN114686819B (en) * | 2020-12-28 | 2024-02-09 | Tcl科技集团股份有限公司 | Crucible cover and crucible |
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