CN107829070A - Conductive structure and heating evaporation component - Google Patents
Conductive structure and heating evaporation component Download PDFInfo
- Publication number
- CN107829070A CN107829070A CN201711338269.0A CN201711338269A CN107829070A CN 107829070 A CN107829070 A CN 107829070A CN 201711338269 A CN201711338269 A CN 201711338269A CN 107829070 A CN107829070 A CN 107829070A
- Authority
- CN
- China
- Prior art keywords
- heat conducting
- conductive structure
- crucible
- conducting pipe
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Abstract
The invention discloses a kind of conductive structure, including some heat conducting pipes, the every heat conducting pipe is inner hollow and the tubular body with opening, the outer wall of some heat conducting pipes is bonded to each other fixation, and the cross sectional shape of the radial direction of some heat conducting pipes to fit together is in grille-like.Present invention also offers a kind of heating evaporation component, including crucible and above-mentioned conductive structure, the geomery of the conductive structure matches with the crucible, the conductive structure is arranged in the crucible, and the outer wall of the heat conducting pipe of the conductive structure outermost contacts with the inwall of the crucible.A kind of conductive structure and heating evaporation component provided by the present invention, conductive structure is formed using more heat conducting pipes, form more sub- evaporation bodies, the interference between sub- evaporation body can be reduced, it can will also close on inside the quick conductive crucible of sidewall of crucible heat of heating source, promote the Uniformity of Temperature Field under nonequilibrium state.
Description
Technical field
The present invention relates to filming equipment field, more specifically to a kind of conductive structure and heating evaporation component.
Background technology
Evaporation coating is one of technology of vacuum PVD plated films.Evaporation coating equipment is generally divided into vacuum cavity, vacuum acquirement
System, thermal evaporation system, electric-control system are formed.Thermal evaporation system includes container for evaporation (evaporator crucible, evaporation boat etc.), resistance wire
Heater or other heaters, heat shield system, heating temperature-control system are formed.Technical process is placed in crucible by raw material is evaporated
In, make coating raw material that solid-liquid-gas phase transition process occur using heating mode in vacuum environment, evaporation raw material is heated to fusing point
Boil-off gas is produced at liquid level above or boil-off gas is directly produced by solid-state with the pattern of distilling, in crucible opening or nozzle
Place sprays.Boil-off gas runs into relative low temperature substrate in vacuum cavity, is deposited on substrate surface and forms film.Pass through evaporator man
Skill can form simple substance membrane, can also realize compound film by coevaporation.In practice produces, evaporation coating again can be with
It is divided into point source thermal evaporation, line source thermal evaporation, electron beam evaporation etc..
During thermal evaporation coating process, resistance type heater is usually placed in side or bottom (the line source evaporation of crucible
Heater need to also be arranged around jet pipe, nozzle).Although one can be belonged to inside thermal field by multilayer screen in theory
Approximate closed hot isolated blob, it can make it that evaporating material reaches thermal balance by long-time preheating.But due to evaporation technology
Necessarily setting opening or nozzle will evaporate unstrpped gas export heating zone to erupt arrival coated surface, realize evaporation coating function,
Therefore actual process process be non-thermal equilbrium state, and closed under the conditions of environment micro-turbulence, in raw material heating source position, away from plus
The position of thermal source, close between the position of evaporation liquid level and can produce non-uniform temperature in short-term.This temperature unevenness is easy
Cause boiling phenomenon, local in ie in solution produces bubble, rises damaged in liquid surface, is also easy to produce droplet in the process
Splash goes out crucible or nozzle arrangements.The drops falling and splashing of splash can produce serious quality to coated surface and injure in coated surface.This
Kind expulsion events are in the liquid evaporation technique, big evaporation capacity technical process and relatively large evaporator crucible structure of poor thermal conductivity
It is more serious.
The content of the invention
The technical problems to be solved by the invention are overcome the deficiencies in the prior art, there is provided one kind can keeping temperature it is uniform
The conductive structure of distribution.
In order to realize above-mentioned purpose, present invention employs following technical scheme：
A kind of conductive structure, including some heat conducting pipes, the every heat conducting pipe are inner hollow and the pipe with opening
Shape body, the outer wall of some heat conducting pipes is bonded to each other fixation, and is bonded described some be fixed together and leads
The cross sectional shape of the radial direction of heat pipe is in grille-like.
Preferably, wherein one end of the every heat conducting pipe is provided with the opening, and some heat conducting pipes offer
One end of the opening is concordantly set.
Preferably, the both ends of the every heat conducting pipe are equipped with the opening, and the both ends of some heat conducting pipes point
It is not concordant.
Preferably, the cross sectional shape of the radial direction of the every heat conducting pipe is appointing in circular, quadrangle or hexagon
Meaning is a kind of.
Preferably, the material of the heat conducting pipe is copper, gold, silver, tantalum, molybdenum, tungsten, graphite, quartz, aluminum oxide, carbon fiber, heat
Solve at least one of boron nitride and carborundum.
It is described to lead present invention also offers a kind of heating evaporation component, including crucible and any above-mentioned conductive structure
The geomery of heat structure is matched with the crucible, and the conductive structure is arranged in the crucible, and the conductive structure is most
The outer wall of the heat conducting pipe of periphery contacts with the inwall of the crucible.
Preferably, the height of the conductive structure is 4th/1st to five/3rd of the crucible height.
A kind of conductive structure and heating evaporation component provided by the present invention, conductive structure is formed using more heat conducting pipes,
More sub- evaporation bodies are formed, on the one hand can reduce the interference between sub- evaporation body, on the other hand, the earthenware that closes on heating source will make it that
Inside the quick conductive crucible of crucible wall heat, promote the Uniformity of Temperature Field under nonequilibrium state.
Brief description of the drawings
Fig. 1 is the heat conducting pipe schematic diagram of the embodiment of the present invention.
Fig. 2 is the conductive structure schematic diagram of the embodiment of the present invention.
Fig. 3 is the heating evaporation component diagram of the embodiment of the present invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further described.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and do not have to
It is of the invention in limiting.
With reference to shown in Fig. 1, the conductive structure in the present embodiment can be used for evaporation coating field, and conductive structure 30 includes some
Root heat conducting pipe 10, wherein every heat conducting pipe 10 is inner hollow and the tubular body with opening 11, some heat conducting pipes 10 it is outer
Wall 12 is bonded to each other fixation, forms conductive structure 30, and be bonded the radial direction for some heat conducting pipes 10 being fixed together
Cross sectional shape is in grille-like.Heat conducting pipe 10 is used to accommodate material to be evaporated, equivalent to the one son evaporation of every heat conducting pipe 10
Body, the buffer action of the tube wall of one side heat conducting pipe 10 reduce the mutual disturbance between each sub- evaporation body, and reduce big
Scope to flow disturbance, on the other hand because each heat conducting pipe 10 is that mutual thermal conductivity is logical so that close on heating source sidewall of crucible,
The heat of bottom, which can be quickly transmitted to inside crucible, allows the heat of the sidewall of crucible for closing on heating source, bottom quickly to conduct
Inside to crucible and close at liquid level, promote the Uniformity of Temperature Field under nonequilibrium state., promote the temperature under nonequilibrium state
Field uniformity.
Specifically, one end of every heat conducting pipe 10 is provided with opening 11 and the other end and closed, and some heat conducting pipes 10 open up
One end of opening 11 is concordantly set, i.e., the opening 11 of every heat conducting pipe 10, can be by opening 11 by material to be evaporated towards consistent
Fit into heat conducting pipe 10.Certainly in other embodiments, the both ends of every heat conducting pipe 10 are equipped with opening 11, and some
Align respectively at the both ends of heat conducting pipe 10.
As the presently preferred embodiments, the cross sectional shape in the radial direction of heat conducting pipe 10 is circular, correspondingly some heat conduction
The cross sectional shape that pipe 10 is brought into close contact the conductive structure 30 that connection is formed is generally circular.Certainly in other embodiments, heat
The cross sectional shape in the radial direction of pipe 10 can also be triangle, quadrangle and hexagon etc., correspondingly, conductive structure 30
Section can be with roughly triangular, four deformations and hexagon etc..
Further, each heat conducting pipe 10 is fixedly connected by the way of welding.
Specifically, when selecting the making material of heat conducting pipe 10, consider that thermal conductivity, heat resistance, material compatibility, vacuum are fitted
It is good that heat conduction can be selected with property, thermal coefficient of expansion, wellability and workability with evaporation solution, therefore the material of heat conducting pipe 10
Good metal such as copper, gold, silver, tantalum, molybdenum, tungsten etc.；Or ceramic material such as high purity graphite, high purity quartz, the height that corrosion resistance is strong
Pure alumina, carbon fiber, pyrolytic boron nitride, carborundum etc..Certainly also metal and Ceramic bond can be formed composite, such as
Heat conducting pipe 10 is prepared using metal, one layer of ceramic membrane is formed on the surface of heat conducting pipe 10 using the coating process of vapour deposition；Or
Person prepares heat conducting pipe 10 using ceramic material, thin in the surface of heat conducting pipe 10 formation layer of metal using the coating process of vapour deposition
Film.
As shown in Fig. 2 the invention also discloses a kind of heating evaporation component, heating evaporation component includes crucible 20 and above-mentioned
Conductive structure 30, the geomery of conductive structure 30 matches with crucible 20, and the main body of crucible 20 is an end seal in the present embodiment
Close and cylindrical structure that the other end is open, conductive structure 30 is arranged in crucible 20, and the heat conduction of the outermost of conductive structure 30
The outer wall 12 of pipe 10 abuts with the inwall of crucible 20, and the heat of the side wall of such crucible 20 can quickly pass from the heat conducting pipe 10 of outer ring
It is directed at the heat conducting pipe 10 of inner ring so that conductive structure 30 is overall to be heated evenly.The opening 11 of other heat conducting pipe 10 is towards crucible master
The opening end of body, the material after heated evaporation spray from opening 11.
Further, the height of conductive structure 30 and the charging of crucible 20 are flux matched, specifically the height of conductive structure 30
4th/1st to five/3rd of the height of crucible 20 are set to, as the presently preferred embodiments, the height of conductive structure 30 is set to crucible 20
2/3rds of height.
In other embodiments, the main body of crucible 20 can also be other shapes, and for example, diameter is from upper end to lower end
The inverted round stage bodily form to successively decrease, now conductive structure 30 can be made up of some highly different heat conducting pipes 10, internally positioned heat conduction
The height of pipe 10 to the heat conducting pipe 10 positioned at outer ring is successively decreased successively, and the upper surface of each heat conducting pipe 10 is concordant, such heat conduction knot
Structure 30 is substantially in reverse frustoconic.
A kind of conductive structure and heating evaporation component provided by the present invention, conductive structure is formed using more heat conducting pipes,
More sub- evaporation bodies are formed, on the one hand can reduce the interference between sub- evaporation body, on the other hand, the earthenware that closes on heating source will make it that
Inside the quick conductive crucible of crucible wall heat, promote the Uniformity of Temperature Field under nonequilibrium state.
The embodiment of the present invention is described in detail above, although having show and described some implementations
Example, it will be understood by those skilled in the art that limiting the of the invention of its scope by claim and its equivalent not departing from
In the case of principle and spirit, these embodiments can be modified and perfect, these are changed and improved also should be in the present invention
Protection domain in.
Claims (8)
1. a kind of conductive structure, it is characterised in that including some heat conducting pipes (10), the every heat conducting pipe (10) is in inside
Tubular body empty and with opening (11), the outer wall (12) of some heat conducting pipes (10) is bonded to each other fixation, and is bonded
The cross sectional shape of the radial direction for some heat conducting pipes (10) being fixed together is in grille-like.
2. conductive structure according to claim 1, it is characterised in that wherein one end of the every heat conducting pipe (10) is provided with
The opening (11), one end for offering the opening (11) of some heat conducting pipes (10) are concordantly set.
3. conductive structure according to claim 1, it is characterised in that the both ends of the every heat conducting pipe (10) are all provided with
Opening (11) is stated, and the both ends difference of some heat conducting pipes (10) is concordant.
4. the conductive structure according to Claims 2 or 3, it is characterised in that the radial direction of the every heat conducting pipe (10)
Cross sectional shape be any one in circular, quadrangle or hexagon.
5. the conductive structure according to Claims 2 or 3, it is characterised in that some heat conducting pipes (10) pass through welding
Mode fix.
6. conductive structure according to claim 1, it is characterised in that the material of the heat conducting pipe (10) be copper, gold, silver,
At least one of tantalum, molybdenum, tungsten, graphite, quartz, aluminum oxide, carbon fiber, pyrolytic boron nitride and carborundum.
7. a kind of heating evaporation component, it is characterised in that including the heat conduction described in crucible (20) and any one of claim 1 to 6
Structure (30), the geomery of the conductive structure (30) match with the crucible (20), and the conductive structure (30) is arranged at
In the crucible (20), outer wall (12) and the crucible of the heat conducting pipe (10) of the outermost of the conductive structure (30)
(20) inwall contact.
8. heating evaporation component according to claim 7, it is characterised in that the height of the conductive structure (30) is described
4th/to five/3rd of crucible (20) height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711338269.0A CN107829070A (en) | 2017-12-14 | 2017-12-14 | Conductive structure and heating evaporation component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711338269.0A CN107829070A (en) | 2017-12-14 | 2017-12-14 | Conductive structure and heating evaporation component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107829070A true CN107829070A (en) | 2018-03-23 |
Family
ID=61644375
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711338269.0A Pending CN107829070A (en) | 2017-12-14 | 2017-12-14 | Conductive structure and heating evaporation component |
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| Country | Link |
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| CN (1) | CN107829070A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110106477A (en) * | 2019-05-22 | 2019-08-09 | 南开大学 | The Pintsch process metal evaporation sources of graphite cored structure |
| WO2020113676A1 (en) * | 2018-12-05 | 2020-06-11 | 深圳市华星光电技术有限公司 | Evaporation crucible |
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| US20080173241A1 (en) * | 2006-12-19 | 2008-07-24 | Scott Wayne Priddy | Vapor deposition sources and methods |
| KR20140104230A (en) * | 2013-02-20 | 2014-08-28 | 롬엔드하스전자재료코리아유한회사 | An Inner Tube For Sublimation Purification Apparatus |
| CN205473956U (en) * | 2016-01-04 | 2016-08-17 | 鄂尔多斯市源盛光电有限责任公司 | A coating by vaporization crucible for OLED |
| CN206396318U (en) * | 2017-01-24 | 2017-08-11 | 京东方科技集团股份有限公司 | A kind of crucible |
| CN207760417U (en) * | 2017-12-14 | 2018-08-24 | 深圳先进技术研究院 | Conductive structure and heating evaporation component |
-
2017
- 2017-12-14 CN CN201711338269.0A patent/CN107829070A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080173241A1 (en) * | 2006-12-19 | 2008-07-24 | Scott Wayne Priddy | Vapor deposition sources and methods |
| KR20140104230A (en) * | 2013-02-20 | 2014-08-28 | 롬엔드하스전자재료코리아유한회사 | An Inner Tube For Sublimation Purification Apparatus |
| CN205473956U (en) * | 2016-01-04 | 2016-08-17 | 鄂尔多斯市源盛光电有限责任公司 | A coating by vaporization crucible for OLED |
| CN206396318U (en) * | 2017-01-24 | 2017-08-11 | 京东方科技集团股份有限公司 | A kind of crucible |
| CN207760417U (en) * | 2017-12-14 | 2018-08-24 | 深圳先进技术研究院 | Conductive structure and heating evaporation component |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020113676A1 (en) * | 2018-12-05 | 2020-06-11 | 深圳市华星光电技术有限公司 | Evaporation crucible |
| CN110106477A (en) * | 2019-05-22 | 2019-08-09 | 南开大学 | The Pintsch process metal evaporation sources of graphite cored structure |
| CN110106477B (en) * | 2019-05-22 | 2021-03-30 | 南开大学 | High-temperature cracking metal evaporation source with graphite core structure |
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