KR101192525B1 - A Linear Deposition Source With Direct Heating - Google Patents

Abstract

The present invention relates to a configuration of a deposition source, comprising a heater and a cover heater that can cover the top and bottom of the crucible and the heater for heating the material, and the direct heating type to ensure the uniformity of the large-area thin film The shape of the opening of the injection nozzle was adjusted to the cover heater for the purpose, and the inside of the heater was composed of an insulator for the uniformity of resistance when heating the metallic material. It was designed to minimize the tilting of the material even if the level of the deposition source is shifted.

In addition, by changing the position of the nozzle for injecting the material to enable the upward, downward and lateral deposition, the flux guide of the fence structure is installed around the nozzle so that the material is deposited only where desired.

In addition, in order to compensate for the end effect, the width of the slot or the diameter of the hole slot was changed, and further, a groove was formed in the heater at the outer edge of the crucible to drastically reduce the influence of the cooler at the end of the evaporation source on the heater side.

Deposition source, insulator crucible, cover heater, end effect, flux guide, resistance

Description

Linear Deposition Source With Direct Heating

FIELD OF THE INVENTION The present invention relates to deposition sources used to deposit various thin films, such as metals or organic materials, and more particularly, a heater that heats the deposition source to directly heat the crucible (or boat) of the deposition source. The present invention relates to a linear deposition source in which the shape of a material injection hole is adjusted to obtain a uniformity of a large-area thin film while maintaining the heating temperature at a high temperature.

In the process of manufacturing semiconductors, display devices, and solar cells, most of the processes include thin film deposition.In particular, in the manufacture of metal thin films, heaters are installed in crucibles to evaporate materials. Many direct heating methods have been adopted to evaporate the material by heating. Such a direct heating method is advantageous in that the temperature of the material is high, but since the open type boat is used, the uniformity of the thin film cannot be obtained in the large-area thin film deposition. That is, with reference to Figure 1 will be described in detail as follows.

1 illustrates a deposition source including a filling part 10 and a filling part 10 filling a material, and the deposition source fills a material in a heater 11 capable of heating the filling part 10. By forming a crucible structure that can be connected to the heater 11 is shown a direct heating method structure for heating the material.

In the case of thin film deposition by the direct heating method, the distribution of material to be sprayed is a Gaussian distribution having a high density at the center portion and a lower density toward the outer portion. Is thin so that the thickness uniformity of the thin film is not obtained. As a result, in order to obtain a uniform thin film thickness, it is common to rotate a substrate to be deposited, but it is difficult to apply such a method to a large area substrate.

Also, the deposition of the deposition material can only be directed upward, and the downward deposition source for depositing the substrate under the deposition source cannot be installed in a direction perpendicular to the ground and spraying the material horizontally. There is a limit that can not be used.

In addition, since the deposition source of FIG. 1 is made of a material having electrical conductivity such as metal and exhibits electrical resistance, it can generate Joule heat when voltage is applied, and thus takes the configuration to directly heat the material filled in the filling part. When the material to be filled and heated to the part is metallic or ion-coupled material, since the material spreads in the filling part according to melting, the melt together with the deposition source body including the heater lowers the overall electrical resistance, thereby causing a problem in that the heating efficiency gradually decreases.

In addition, all of the prior art shown in FIG. 1, when the deposition source is distorted due to heat stress as the heating source is directly heated, or if the deposition source is tilted without being leveled for any other reason, the material in the boat is directed to one side. As a result, the distribution of material density to be injected is changed and the thickness distribution of the thin film becomes uneven.

In addition, in the prior art, since both ends of the deposition source are connected to a power source to heat the filling part, the end of the deposition source to which the power source is connected is not directly in contact with the material, and is a portion separated from the material. Electrical conduction (smooth flow of current) may be important.

 On the other hand, various types of deposition sources have been tried to obtain the uniformity of the thickness of the large-area thin film, and among them, there are indirect heating methods for constructing a cover heater in which the distribution of the injection hole is controlled and heating the circumference of the deposition source with filament or the like. In this case, there is a problem that the heating temperature does not rise as high as the direct heating method.

Accordingly, an object of the present invention is to provide a new linear deposition source of a high efficiency direct heating method that can be applied to a large area substrate, and to achieve the deposition of a thin film having a uniform thickness distribution without rotation of a large area substrate. .

In addition, another object of the present invention is to provide a structure of a deposition source that can implement the material injection direction of the deposition source to the bottom, left or right as well as the upper side for thin film deposition.

In addition, another object of the present invention is to prevent the phenomenon that the thickness of the thin film is very uneven according to the material in the boat is pulled to one side even if the deposition source itself is stressed due to thermal expansion due to heat or tilted horizontally for some other reason. It is to provide a new boat structure in the deposition source that can be.

Still another object of the present invention is to provide a deposition source with a renewed structure of the power supply connection so that the generation of Joule heat required to heat the boat by lowering the electrical resistance of the power supply connection is more generated in the boat.

Further, another object of the present invention is to provide a vapor deposition source having a new structure so that the temperature of both ends of the boat is not lowered compared to the center of the boat.

The present invention provides a crucible containing a deposition material;
A heater for seating the crucible; And
A cover heater covering the heater;
The heater and the cover heater are all directly heated by connecting a power source, the blower is formed in the cover heater, the blower is directly heated by the power source,
In order to prevent cold air from the cooler connected to the shortest end of the heater to be transferred to the heater, a plurality of parallel grooves formed by digging the end portion may be provided at an end portion located toward the center of the power supply connection portion. .

delete

delete

delete

In addition, the present invention, the ejection outlet is a vapor deposition source, characterized in that the ejection opening is reduced in shape toward the center portion so as to eliminate the end effect (end effect), any one of the bottom-up, top-down or side-down Can be provided.

In addition, the present invention may provide a deposition source, characterized in that the crucible is coated with an insulator therein, or by mounting a separate insulator crucible therein.

In addition, the present invention can provide a deposition source, characterized in that the crucible seated on the heater is composed of one crucible or several small crucibles.

In addition, the present invention, the deposition source may provide a deposition source, characterized in that the power connection portion which is the end of the heater and the cover heater is formed by the wing portion to increase the cross-sectional area.

The present invention may provide a deposition source, wherein the outlet of the cover heater is formed in an injection slot or a hole shape, and further includes a fence-shaped flux guide on the injection slot or hole.

According to the present invention, it is possible to construct a deposition source including a crucible made of an insulator, which is easy to manufacture without a coating process while the overall electrical resistance does not change with melting of the material even during the heating of the metallic material.

In addition, according to the present invention, the heating efficiency can be improved by providing a cover heater, and by providing a spray nozzle or a hole of the deposit on the cover heater, a uniform thin film can be obtained without rotating the substrate even in a large area deposition. have.

In addition, according to the present invention, since a large number of small crucibles can be placed in a long linear deposition source, even if the horizontal deposition of the linear deposition source is inclined or tilted, the material inside the crucible can be reduced to either side. It may not damage the uniformity of the thin film.

In addition, according to the present invention, due to the fence-shaped flux guide on the injection slot or hole of the cover heater to increase the uniformity of the thin film thickness distribution and solve the problem that the material is deposited on the heat reflector near the deposition source to be contaminated. .

In addition, according to the present invention, by forming an injection slot or a hole formed on the cover heater on the upper surface or the side surface of the cover heater it can provide an applicability that can be utilized for both down deposition, up deposition and vertical structure deposition, etc. have.

In addition, according to the present invention, it is possible to form a wing at the end of the heater and / or cover heater to reduce the electrical resistance at the electrode connection portion to heat the material heating portion more efficiently.

In addition, according to the present invention, by forming a single groove or a double groove in the heater portion located toward the center of the crucible from the wing portion, the resistance of the end is increased so that the heating efficiency of the end does not fall compared to the crucible center, the long linear The end heating low phenomenon which may occur in a vapor deposition source can be eliminated.

Therefore, according to the present invention, a high quality thin film can be obtained as a whole by improving the heating efficiency and uniformizing the thin film thickness distribution due to the direct heating.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

The deposition source illustrated in FIG. 2 insulates the material from the heater 11 by performing an insulator coating 20 inside the filling part 10 formed in the heater 11.

Figure 3 shows the configuration of the deposition source according to the present invention, Figure 3 (a) is a plan view of the deposition source, (b) is a front view, (c) enters the filling portion 10 of the heater 11 It is a front view of the insulator crucible 30. 4 is a cross-sectional view illustrating a state in which the insulator crucible 30 is assembled to the filling part 10.

That is, in the present embodiment, instead of coating the inner surface of the concavely-filled filling part 10 in the form of a crucible so as to put the material inside the heater, the separate insulator crucible 30 made of an insulator is replaced with a heater ( The structure which fits into the filling part 10 of 11) was taken. It is possible to omit the insulation coating process for the heater filling part which is expensive and requires a lot of effort, but it is possible to reduce the electric resistance of the entire heater due to the spreading due to the melting of the electrically conductive material during material deposition. It adds the advantage of being prevented by effort.

However, unless the metallic material is deposited, such an insulator coating or a separate insulated crucible is not necessary, and thus, the deposition source of the present invention can be constituted only by the heater 11 including the crucible.
In addition, instead of configuring a separate insulator crucible 30 as described above, the heater filling unit 10 may be formed by applying an insulator coating.

5 is a view showing the cover heater 50 according to the present invention, Figure 5 (a) is a plan view of the cover heater 50 and (b) is a state in which the cover heater 50 is covered with the heater 11 Sectional drawing showing evaporation and spraying of materials.

When the material is put into the crucible seated on the heater 11 as described above, the power is supplied to both ends of the heater 11 to evaporate and spray the material, and as shown in FIG. 5, the cover heater 50 is mounted to cover the heater 11. ) And the cover heater 50 together, the heating efficiency is much higher. That is, by the direct heating method, a complicated configuration and low heating efficiency according to an indirect heating method such as filament can be brought to a simple configuration and high heating efficiency.

In addition, the cover heater 50 forms a nozzle for injecting the material, and as shown in Figs. 6 (a) to 6 (c), the slot nozzle 51, the hole nozzle 60 or the width adjusting slot nozzle 61 Can be formed. In particular, the hole nozzle 60 and the width adjusting slot nozzle 61 of FIGS. 6 (b) and (c) have a small injection amount of material at the center, unlike the slot nozzle 51 having a predetermined width of FIG. 6 (a). In the outer part, the hole size and slot width were made larger in the outer part than in the center so that the amount of injection of the material was higher. In the case of the slot nozzle 51 having a constant width, since the injection of the material has a Gaussian distribution that becomes thicker at the center and becomes thinner toward the outer portion, the material distribution is made constant regardless of the position, thereby making the thickness of the thin film constant. For sake. Therefore, the present invention can achieve both the heating efficiency and the end effect removal.

In addition, the inventors of the present invention, in order to solve the fact that in the case of a general deposition source, the injection of the material is not necessarily made only on the substrate, but also in other places around it, in particular, the material is coated and contaminated on the heat reflector installed for concentration of heat. In addition, by installing a flux guide 70 in the form of a fence around the inlet of the spray nozzle, the injection of the material can be focused toward the substrate (see FIG. 7).

In addition, although not shown in the drawing, when the internal linear crucible of the deposition source due to heating is displaced due to stress, the material may not be distributed at a uniform height but may be oriented to one side, which is a thin film thickness. Since it leads to nonuniformity, in the present embodiment, it was possible to mount several crucibles with short lengths. Multiple short crucible configurations significantly mitigate the material's deflection and prevent non-uniform film thicknesses.

8 is a cross-sectional view showing various positions of the spray nozzle according to the present invention.

FIG. 8 (a) shows an upward deposition source in which the spray nozzle is formed above the cover heater 50, and FIG. 8 (b) shows a downward deposition source in which the spray nozzle is formed in the heater 11 instead of the cover heater 50. FIG. Shows. In the case of the downward deposition source, the spray nozzle is formed to penetrate the body of the heater 11 outside the insulator crucible 30 filling the material so that the vaporized material is reflected from the upper surface of the cover heater 50 and sprayed downward. . Looking at the material flux 53 shown in FIG. 8 it is easy to see the injection mechanism.

In the case of FIG. 8C, an injection nozzle is formed on the side surface of the cover heater 50 to enable the injection of the material in the horizontal direction. Such a configuration can be applied to a system in which deposition is performed with the installation of the substrate in a vertical direction rather than a horizontal direction.

Next, FIGS. 9 and 10 relate to an end structure of the heater, and are configured to adjust the electrical resistance.

FIG. 9A is a plan view illustrating an end structure of the heater 11, and FIG. 9B is a cross-sectional view of the heater 11 and the cover heater 50 coupled to each other.

The ends of the heater 11 and the cover heater 50 are connected to a power source for heating, and the electric resistance component of the heater generates Joule heat to heat the crucible and the material therein. Therefore, the power supply connection does not need to be heated to a high temperature, and the smoother the flow of current is, the better the electrical resistance is in the case of a part having a material, so it is better to be heated to a high temperature. Accordingly, the inventors of the present invention increase the cross-sectional area of the power supply connecting portion, which is the end of the heater 11 and the cover heater 50, to reduce the electrical resistance. That is, the wing unit 90 illustrated in FIG. 9 (a) is configured to configure the power connection unit in a wider width than the overall width of the heater.

In addition, FIG. 10 shows a configuration for increasing resistance of an end (that is, an inner end rather than a power supply connection) of a heater which may have a heat loss.

The shortest part of the heater is generally connected to a cooler, and the heater end tends to cancel the heating effect, resulting in a drop in temperature. Accordingly, the groove 110 is formed in parallel to the heater end to block the cold air so that the heating effect can be rapidly transmitted toward the inside of the heater.

Therefore, the present inventors form a groove 110 in the outer portion of the heater in which the crucible is seated, that is, the heater portion toward the crucible center side from the wing portion 90 to lengthen the path between the heating portion and the cooling portion. The temperature was allowed to rise rapidly in the heating section.

The groove 110 may be formed at both ends of the cover heater 50 and the heater 11 as shown in FIG. 10 (b), and the width of the groove 110 on the heater 11 side may be increased. have.

In addition, as shown in FIG. 10 (c), two or more grooves 110 may be formed side by side instead of one at each end of each heater, or a groove may be formed with other deformations.

In addition, although not shown in the drawings, a wire-type material feeder or a pellet-type material feeder capable of filling a material may be installed in the deposition source of the present embodiment to perform a continuous process for a long time. This continuous process increases productivity and ultimately results in price competitiveness.

The rights of the present invention are not limited to the embodiments described above, but are defined by the claims, and those skilled in the art can make various modifications and adaptations within the scope of the claims. It is self-evident.

1 is a plan view and a sectional view of a conventional deposition source including a filler 10 and a filler 10 for filling a material;

2 is a plan view and a cross-sectional view of a conventional deposition source having an insulator coating 20 inside a filling part 10 formed in a heater 11.

Figure 3 (a) is a plan view of a deposition source according to the present invention, (b) is a front view, (c) is a front view of the insulator crucible 30 to enter the filling portion 10 of the heater (11).

4 is a cross-sectional view illustrating a state in which the insulator crucible 30 is assembled to the filling part 10.

5 (a) is a plan view of the cover heater 50 and FIG. 5 (b) is a cross-sectional view showing the evaporation and spraying of the material in the state in which the cover heater 50 is covered with the heater (11).

6 (a) to 6 (c) are plan views showing the slot nozzle 51, the hole nozzle 60, or the width adjusting slot nozzle 61. FIG.

7 (a) to 7 (d) are a plan view and a cross-sectional view showing the configuration of the flux guide according to the present invention.

8 (a) to (c) are cross-sectional views showing various positions of the spray nozzle according to the present invention.

9 (a) is a plan view for showing the end structure of the heater 11, Figure 9 (b) is a cross-sectional view of a state in which the heater 11 and the cover heater 50 is coupled.

10 (a) to 10 (c) are plan and cross-sectional views showing the configuration of the groove 110 for increasing the end resistance of the heater which may have heat loss.

Description of the Related Art [0002]

10: filling unit 11: heater

30: insulator crucible 50: cover heater

51: slot nozzle 60: hole nozzle

61: width adjustment slot nozzle 90: wing

110: home

Claims (7)

A crucible containing a deposition material; A heater for seating the crucible; And A cover heater covering the heater; The heater and the cover heater are all directly heated by connecting a power source, the blower is formed in the cover heater, the blower is directly heated by the power source, And a plurality of parallel grooves formed by digging a part of the end portion at an end portion located toward the center of the power supply connection portion so that cold air from the cooler connected to the shortest end of the heater does not transfer to the heater portion. The vapor deposition source according to claim 1, wherein the jet port has a shape in which the jet port area decreases toward the center portion so as to cancel end effects, and is any one of a bottom-up, a top-down, and a lateral type. The deposition source according to claim 1 or 2, wherein the crucible is formed by coating an insulator therein or by mounting a separate insulator crucible therein. 4. The deposition source of claim 3, wherein the crucible seated on the heater is composed of one crucible or several small crucibles. The deposition source according to claim 1, wherein the deposition source is an end portion of the heater and the cover heater formed of a wing to increase its cross-sectional area. delete The deposition source of claim 1, wherein the outlet of the cover heater is formed in an injection slot or hole shape, and further includes a fence-shaped flux guide on the injection slot or hole.

Images