CN105088143B - A kind of coating apparatus - Google Patents
A kind of coating apparatus Download PDFInfo
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- CN105088143B CN105088143B CN201510482216.0A CN201510482216A CN105088143B CN 105088143 B CN105088143 B CN 105088143B CN 201510482216 A CN201510482216 A CN 201510482216A CN 105088143 B CN105088143 B CN 105088143B
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- hole
- evaporation
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- radome fairing
- coating apparatus
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Abstract
The invention discloses a kind of coating apparatus, for by the evaporation surface coating of evaporation body, coating apparatus includes being positioned over the indoor evaporation source of vacuum and a chamber, cavity bottom opens up the air admission hole of some connection evaporation sources, the bottom of chamber is in each air admission hole towards indoor one radome fairing of side projection of chamber, cowling surface opens up some through holes, chamber roof opens up some ventholes, chamber roof by evaporation body with being arranged at intervals, the gasification substance that evaporation source produces enters radome fairing from air admission hole, enter chamber from the through hole of cowling surface, it is emitted and is deposited on by the evaporation surface of evaporation body by the venthole of chamber roof.By the above-mentioned means, the present invention can avoid direct impact of the material phase transformation to material evaporation venthole, the stability of evaporation rate is improved.
Description
Technical field
The present invention relates to display technology field, more particularly to a kind of coating apparatus for being used to prepare display device.
Background technology
Organic Electricity laser display (Organic Light-Emitting Diode, OLED) is spontaneous as the solid-state of a new generation
Light Display Technique, has the advantages such as ultra-thin, responsiveness is high, contrast is high, power consumption is low, in recent years industrialization compared to liquid crystal display
Speed is advanced by leaps and bounds.The technology of preparing of OLED mainstreams and method are vapour deposition methods at present, i.e., organic material is heated in vacuum cavity,
Making its distillation or fusion and gasification, the perforate through metal light cover deposits on the glass substrate into material vapor.
But since the thermal conductivity factor of organic material is very poor, and heating source causes to present up and down inside crucible there are the temperature difference
The section temperature difference and the horizontal temperature difference, so that the process stability of material evaporation is increasingly difficult to.In addition, some materials also exist
Different phase, it is easy to phase-state change occurs.For example, material in temperature-rise period, since material phase changes, such as becomes from solid-state
Gas can be discharged for molten state, material splash may be caused to go out evaporation source, pollutes heating source and cavity.Meanwhile evaporate source material
Material venthole is influenced by internal phase transformation, and evaporation rate is unstable, influences OLED element performance.
The content of the invention
The invention mainly solves the technical problem of providing a kind of processing procedure stabilization, the plated film for reducing material cracking loss fills
Put, can solve the problems, such as that material splash, consent and evaporation rate are unstable.
In order to solve the above technical problems, one aspect of the present invention is：A kind of coating apparatus is provided, for
By the evaporation surface coating of evaporation body, the coating apparatus includes being positioned over the indoor evaporation source of vacuum and a chamber, described
Cavity bottom opens up the air admission hole of some connection evaporation sources, and the bottom of the chamber is indoor towards chamber in each air admission hole
One radome fairing of side projection, the cowling surface open up some through holes, and the chamber roof opens up some ventholes, described
Chamber roof is arranged at intervals with described by evaporation body, and the gasification substance that the evaporation source produces enters described whole from the air admission hole
Stream cover, enters chamber from the through hole of the cowling surface, is emitted by the venthole of chamber roof and is deposited on the quilt
The evaporation surface of body is deposited.
Wherein, evaporation source is line source.
Wherein, radome fairing is hemispherical.
Wherein, radome fairing is pyramid.
Wherein, the through hole of radome fairing is circular hole.
Wherein, the through hole of radome fairing is square hole.
Wherein, the aperture area of air admission hole is more than the aperture area of through hole, and the aperture area of through hole is more than venthole
Aperture area.
Wherein, gasification substance from any air admission hole by any radome fairing any through hole can not straight line reach it is any
Venthole.
Wherein, radome fairing is made of metal material.
Wherein, radome fairing is made of nonmetallic materials.
The beneficial effects of the invention are as follows：The situation of the prior art is different from, the chamber interior of coating apparatus of the present invention is equipped with
Radome fairing, radome fairing offers through hole, needs the through hole for first passing through radome fairing to reach chamber after organic material gasification, effectively anti-
Only material splash, reduces material sticking around venthole, reduces the probability of plug-hole.The setting of radome fairing avoids material
Phase transformation directly the impacting to chamber venthole in gasification is expected, so as to reach the effect for the stability for improving evaporation rate
Fruit.
Brief description of the drawings
Fig. 1 is the schematic diagram of better embodiment of the present invention；
Fig. 2 is the part-structure figure of better embodiment of the present invention；
Fig. 3 is the schematic diagram of second embodiment of the invention；
Fig. 4 is the part-structure figure of third embodiment of the invention；
Fig. 5 is the part-structure figure of four embodiment of the invention；
Fig. 6 is the part-structure figure of fifth embodiment of the invention；
Fig. 7 is the part-structure figure of sixth embodiment of the invention.
Embodiment
The present invention is described in detail with embodiment below in conjunction with the accompanying drawings.
Refering to Fig. 1, coating apparatus of the present invention includes being positioned over the indoor evaporation source 10 of vacuum, by evaporation body 30 and is located at
Evaporation source 10 and by the chamber 50 between evaporation body 30.
The bottom of chamber 50 opens up the air admission hole 510 of some connection evaporation sources 10, and the bottom of chamber 20 is in each air admission hole
510 towards one radome fairing 520 of side projection in chamber 50.The height of radome fairing 520 is less than the height of chamber 50.Each rectification
Cover 520 surfaces and open up some through holes 530.The top of chamber 50 opens up some ventholes 540, and the top of chamber 50 is with being deposited
Body 30 is equipped with interval.Wherein, the aperture area of the air admission hole 510 of chamber 50 is more than the opening face of the through hole 530 of radome fairing 520
Product, the aperture area of through hole 530 are more than the aperture area of venthole 540.
Please with reference to Fig. 2, in first embodiment of the invention, radome fairing 520 is made of metal, can be directly welded at chamber
The inside of room 50.The bottom of radome fairing 520 is cylinder, and top is hemispherical.Through hole 530 is uniformly opened in radome fairing 520
The whole body, through hole 530 for circle.In other embodiments, radome fairing 520 can also be made by ceramics etc. are nonmetallic, be passed through
Through hole 530 can also be the other shapes such as square.
It refer to Fig. 3, in second embodiment of the invention, radome fairing 520 is cone, and through hole 530 is uniformly opened in
The whole body of centrum, through hole 530 are circle.In other embodiments, radome fairing 520 can also be other shapes such as pyramid
Shape, through hole 530 can also be the other shapes such as square.
It refer to Fig. 4, in third embodiment of the invention, the bottom of radome fairing 520 is cylinder, and top is hemispherical.
Through hole 530 is uniformly opened in the whole body of 520 top hemispherical of radome fairing.
It refer to Fig. 5, in four embodiment of the invention, radome fairing 520 is spherical for one, and through hole 530 is uniformly opened in
The whole body of radome fairing 520.
It refer to Fig. 6, in fifth embodiment of the invention, 520 bottom of radome fairing is cylindric, and top is cone, is passed through
Through hole 530 is uniformly opened in the whole body of radome fairing 520.In other embodiments, 520 bottom of radome fairing can also be tetragonous
Column, top are pyramid shape.
It refer to Fig. 7, in sixth embodiment of the invention, 520 bottom of radome fairing is cylinder, and top is cone, is passed through
Through hole 530 is uniformly opened in the top of radome fairing 520.In other embodiments, through hole 530 is uniformly opened in radome fairing
520 bottom.
Evaporation source 10 is line source, includes the material cell 100 of some proper alignments, each material cell 100 and chamber 50
Air admission hole 510 be connected.Some organic materials are placed in each material cell 100, these organic materials can be solid-state,
It can be solidliquid mixture.Heating material unit 100, with the rise of temperature, organic material undergoes phase transition to form gasification substance,
Since the air pressure in material cell 100 is higher than the air pressure in radome fairing 520, gasification substance by the air admission hole 510 of chamber 50 into
Enter radome fairing 520, since the air pressure in radome fairing 520 is higher than the air pressure in chamber 50, gasification substance is further through radome fairing 520
Some through holes 530 are distributed in inside chamber 50, and finally some ventholes 540 from the top of chamber 50, which are gushed out and are deposited on, is steamed
Plate the evaporation surface of body 30.Wherein, the position of reasonable computation air admission hole 510, through hole 530 and venthole 540 is passed through so that into
The center of circle in an at least hole on the same line can not be so that gasification in 540 3 hole of stomata 510, through hole 530 and venthole
Material can not any venthole of straight line arrival by any through hole 530 of any radome fairing 50 from any air admission hole 510
540, so as to improve the stability of evaporation rate.
Compared with prior art, the chamber interior of coating apparatus of the present invention is equipped with radome fairing, and radome fairing offers through hole,
Need the through hole for first passing through radome fairing to reach chamber after organic material gasification, effectively prevent material splash, reduce material and going out
Sticking around stomata, reduces the probability of plug-hole.The setting of radome fairing avoids phase transformation of the material in gasification to chamber
Room venthole directly impacts, so as to reach the effect for the stability for improving evaporation rate.
The foregoing is merely embodiments of the present invention, are not intended to limit the scope of the invention, every to utilize this
The equivalent structure or equivalent flow shift that description of the invention and accompanying drawing content are made, it is relevant to be directly or indirectly used in other
Technical field, is included within the scope of the present invention.
Claims (8)
- A kind of 1. coating apparatus, for by the evaporation surface coating of evaporation body, the coating apparatus to include being positioned over vacuum chamber Interior evaporation source and a chamber, the cavity bottom open up the air admission hole of some connection evaporation sources, the bottom of the chamber Portion opens up some perforations in each air admission hole towards indoor one radome fairing of side projection of the chamber, the cowling surface Hole, the chamber roof open up some ventholes, and the chamber roof is arranged at intervals with described by evaporation body, the evaporation source production Raw gasification substance enters the radome fairing from the air admission hole, enters the chamber from the through hole of the cowling surface Room, is emitted by the venthole of the chamber roof and is deposited on the evaporation surface by evaporation body；Wherein, the aperture area of the air admission hole is more than the aperture area of the through hole, and the aperture area of the through hole is big In the aperture area of the venthole；The gasification substance can not straight line by any through hole of any radome fairing from any air admission hole Reach any venthole.
- 2. coating apparatus according to claim 1, it is characterised in that：The evaporation source is line source.
- 3. coating apparatus according to claim 1, it is characterised in that：The radome fairing is hemispherical.
- 4. coating apparatus according to claim 1, it is characterised in that：The radome fairing is pyramid.
- 5. coating apparatus according to claim 1, it is characterised in that：The through hole of the radome fairing is circular hole.
- 6. coating apparatus according to claim 1, it is characterised in that：The through hole of the radome fairing is square hole.
- 7. coating apparatus according to claim 1, it is characterised in that：The radome fairing is made of metal material.
- 8. coating apparatus according to claim 1, it is characterised in that：The radome fairing is made of nonmetallic materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510482216.0A CN105088143B (en) | 2015-08-03 | 2015-08-03 | A kind of coating apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510482216.0A CN105088143B (en) | 2015-08-03 | 2015-08-03 | A kind of coating apparatus |
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| Publication Number | Publication Date |
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| CN105088143A CN105088143A (en) | 2015-11-25 |
| CN105088143B true CN105088143B (en) | 2018-05-11 |
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| CN201510482216.0A Active CN105088143B (en) | 2015-08-03 | 2015-08-03 | A kind of coating apparatus |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107058957A (en) * | 2017-04-18 | 2017-08-18 | 武汉华星光电技术有限公司 | A kind of evaporation source |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101445907A (en) * | 2007-11-27 | 2009-06-03 | 鸿富锦精密工业（深圳）有限公司 | Vapor deposition device |
| CN104099571A (en) * | 2013-04-01 | 2014-10-15 | 上海和辉光电有限公司 | Evaporation source component, film deposition device and film deposition method |
-
2015
- 2015-08-03 CN CN201510482216.0A patent/CN105088143B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101445907A (en) * | 2007-11-27 | 2009-06-03 | 鸿富锦精密工业（深圳）有限公司 | Vapor deposition device |
| CN104099571A (en) * | 2013-04-01 | 2014-10-15 | 上海和辉光电有限公司 | Evaporation source component, film deposition device and film deposition method |
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| Publication number | Publication date |
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| CN105088143A (en) | 2015-11-25 |
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