CN214736209U - 一种碳化硅单晶锭生长设备 - Google Patents
一种碳化硅单晶锭生长设备 Download PDFInfo
- Publication number
- CN214736209U CN214736209U CN202120795658.1U CN202120795658U CN214736209U CN 214736209 U CN214736209 U CN 214736209U CN 202120795658 U CN202120795658 U CN 202120795658U CN 214736209 U CN214736209 U CN 214736209U
- Authority
- CN
- China
- Prior art keywords
- heating
- graphite
- cavity
- crystal ingot
- silicon carbide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 57
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 30
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 23
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 85
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 84
- 239000010439 graphite Substances 0.000 claims abstract description 84
- 239000000463 material Substances 0.000 claims abstract description 76
- 230000008022 sublimation Effects 0.000 claims abstract description 25
- 238000000859 sublimation Methods 0.000 claims abstract description 25
- 238000000926 separation method Methods 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims description 94
- 239000007789 gas Substances 0.000 claims description 34
- 230000007246 mechanism Effects 0.000 claims description 26
- 239000012159 carrier gas Substances 0.000 claims description 15
- 239000007787 solid Substances 0.000 claims description 12
- 238000011084 recovery Methods 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 6
- 230000005674 electromagnetic induction Effects 0.000 claims description 3
- 230000001737 promoting effect Effects 0.000 claims description 3
- 239000011148 porous material Substances 0.000 claims description 2
- 238000009413 insulation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 19
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000002360 preparation method Methods 0.000 abstract description 7
- 239000002245 particle Substances 0.000 abstract description 4
- 239000000843 powder Substances 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 abstract description 3
- 230000002860 competitive effect Effects 0.000 abstract description 3
- 238000013461 design Methods 0.000 abstract description 3
- 239000007792 gaseous phase Substances 0.000 abstract description 3
- 238000012545 processing Methods 0.000 abstract description 3
- 239000012071 phase Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000000155 melt Substances 0.000 description 4
- 239000002243 precursor Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000010288 cold spraying Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 210000000664 rectum Anatomy 0.000 description 2
- 230000002829 reductive effect Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005092 sublimation method Methods 0.000 description 2
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- -1 alkanes and alkenes Chemical class 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000002468 ceramisation Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000005130 seeded sublimation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202120795658.1U CN214736209U (zh) | 2021-04-19 | 2021-04-19 | 一种碳化硅单晶锭生长设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202120795658.1U CN214736209U (zh) | 2021-04-19 | 2021-04-19 | 一种碳化硅单晶锭生长设备 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN214736209U true CN214736209U (zh) | 2021-11-16 |
Family
ID=78603934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202120795658.1U Active CN214736209U (zh) | 2021-04-19 | 2021-04-19 | 一种碳化硅单晶锭生长设备 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN214736209U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113005512A (zh) * | 2021-04-19 | 2021-06-22 | 芯璨半导体科技(山东)有限公司 | 一种碳化硅单晶锭生长设备及方法 |
CN116334737A (zh) * | 2023-04-11 | 2023-06-27 | 通威微电子有限公司 | 一种碳化硅废料液相法回收用坩埚、回收装置及回收方法 |
-
2021
- 2021-04-19 CN CN202120795658.1U patent/CN214736209U/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113005512A (zh) * | 2021-04-19 | 2021-06-22 | 芯璨半导体科技(山东)有限公司 | 一种碳化硅单晶锭生长设备及方法 |
CN113005512B (zh) * | 2021-04-19 | 2023-08-08 | 北京利宝生科技有限公司 | 一种碳化硅单晶锭生长设备及方法 |
CN116334737A (zh) * | 2023-04-11 | 2023-06-27 | 通威微电子有限公司 | 一种碳化硅废料液相法回收用坩埚、回收装置及回收方法 |
CN116334737B (zh) * | 2023-04-11 | 2023-12-05 | 通威微电子有限公司 | 一种碳化硅废料液相法回收用坩埚、回收装置及回收方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN113005512B (zh) | 一种碳化硅单晶锭生长设备及方法 | |
CN214736209U (zh) | 一种碳化硅单晶锭生长设备 | |
JP6384842B2 (ja) | 昇華法を用いて炭化珪素結晶体を高速に製造する装置とその方法 | |
CN102639438B (zh) | 用于生产硅的反应器和方法 | |
CN112831840A (zh) | 一种单晶生长装置 | |
CN108686596A (zh) | 微粒制造装置以及微粒制造方法 | |
CN217922435U (zh) | 一种可连续生长碳化硅晶体的新型石墨坩埚装置 | |
CN104760955B (zh) | 生产大颗粒金刚石的方法和设备 | |
JP2003527295A (ja) | 炭化ケイ素の大型単結晶を作るための軸芯勾配輸送装置及び方法 | |
KR20200056073A (ko) | 직류 플라즈마 아크를 이용한 나노 분말의 제조 장치 및 제조 방법 | |
JP2004018370A (ja) | シリコンの製造装置および方法 | |
CN109989103A (zh) | 一种循环加热合成大颗粒SiC粉料的方法 | |
CN1671869A (zh) | 含稀土类金属的合金的制造系统 | |
US20100050932A1 (en) | Apparatus and Method of Direct Electric Melting a Feedstock | |
WO2018020821A1 (ja) | 単結晶製造装置 | |
CN117187960A (zh) | 提高大尺寸晶体掺杂效率的坩埚及碳化硅晶体掺杂方法 | |
CN100434573C (zh) | 等离子体焰流生长大尺寸氮化铝晶体的方法 | |
CN214736210U (zh) | 一种碳化硅蒸汽制备装置 | |
CN108296489B (zh) | 一种制备高温化合物块晶的方法 | |
CN214736208U (zh) | 一种升华气相物质分离装置 | |
EP1984544A2 (en) | Silicon carbide formation by alternating pulses | |
CN102787305A (zh) | 一种减少化学气相沉积过程中杂质沉积的装置及方法 | |
JP2022049185A (ja) | ケイ酸リチウムおよびケイ素の生成方法 | |
KR102082685B1 (ko) | 합금 분말의 제조 장치 및 이 제조 장치를 이용하는 합금 분말의 제조 방법 | |
CN103998648A (zh) | 用于经由化学气相沉积处理的材料生产的筒形反应器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20211122 Address after: 100176 935, floor 9, building 2, yard 38, Kechuang Fifth Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing libaosheng Technology Co.,Ltd. Address before: Room 501, 5th floor, 3749 Erhuan East Road, Licheng District, Jinan City, Shandong Province Patentee before: XINCAN semiconductor technology (Shandong) Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240603 Address after: 101300 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang Second Road) Patentee after: Beijing Changlong Zhixin Semiconductor Co.,Ltd. Country or region after: China Address before: 100176 935, floor 9, building 2, yard 38, Kechuang Fifth Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: Beijing libaosheng Technology Co.,Ltd. Country or region before: China |