CN214572203U - Drum-type continuous evaporation coating machine - Google Patents
Drum-type continuous evaporation coating machine Download PDFInfo
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- CN214572203U CN214572203U CN202022641546.9U CN202022641546U CN214572203U CN 214572203 U CN214572203 U CN 214572203U CN 202022641546 U CN202022641546 U CN 202022641546U CN 214572203 U CN214572203 U CN 214572203U
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- chamber
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- evaporation chamber
- process evaporation
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- 238000001704 evaporation Methods 0.000 title claims abstract description 91
- 230000008020 evaporation Effects 0.000 title claims abstract description 87
- 238000000576 coating method Methods 0.000 title claims abstract description 65
- 239000011248 coating agent Substances 0.000 title claims abstract description 62
- 238000000034 method Methods 0.000 claims abstract description 56
- 230000008569 process Effects 0.000 claims abstract description 56
- 230000007246 mechanism Effects 0.000 claims abstract description 25
- 230000005540 biological transmission Effects 0.000 claims description 12
- 238000005086 pumping Methods 0.000 claims description 5
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000009834 vaporization Methods 0.000 claims description 2
- 230000008016 vaporization Effects 0.000 claims description 2
- 239000011521 glass Substances 0.000 abstract description 7
- 239000002699 waste material Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 6
- 239000007888 film coating Substances 0.000 description 4
- 238000009501 film coating Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000012788 optical film Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
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Abstract
A drum-type continuous evaporation coating machine comprises a process evaporation chamber, wherein two buffer chambers are respectively arranged on two sides of the process evaporation chamber, each buffer chamber is of an independent cavity structure and is provided with a closed door for entering and exiting the process evaporation chamber, each buffer chamber is correspondingly provided with an upper segment and a lower segment, a workpiece rack for mounting a workpiece to be coated is arranged on each upper segment and each lower segment, the workpiece rack is conveyed into the designated buffer chamber through a conveying mechanism and enters the process evaporation chamber through the buffer chamber for coating, the scheme can realize the continuous evaporation coating during the coating of glass products, and the coating of the products is finished on the premise that the environment of the process evaporation chamber is relatively unchanged, so that the film forming quality of the products is improved, the time for repeatedly exhausting and exhausting gas in the process chamber is also reduced, the generation efficiency is improved, and the resource waste is reduced.
Description
Technical Field
The utility model relates to a vacuum evaporation coating equipment technical field, specific drum-type continuous evaporation coating machine that says so.
Background
Currently, glass processing enterprises generally take the following steps in order to improve the overall performance of glass products: applying a high-purity metal film or compound film on the surface of glass under a vacuum condition, wherein the common equipment in the process is a vacuum coating machine; at present, related enterprises at home and abroad all adopt single-cavity intermittent evaporation equipment, and the structure of the equipment is generally as follows: the evaporation process chamber with a single cavity is arranged, the lower part of the evaporation process chamber is provided with an electronic evaporation device, the upper part of the evaporation process chamber forms a film coating working cavity for coating a glass product, and the working process is as follows: a product to be coated and a workpiece frame are loaded on a rotating mechanism in an evaporation chamber from a door opened on the front surface of the evaporation chamber by a worker, then the evaporation chamber is closed, the evaporation chamber is vacuumized, when the evaporation chamber is in high vacuum (less than or equal to 5x10-3 pa), an electronic evaporation device is started to coat, when coating is finished, the door of the evaporation chamber is opened by the worker, the workpiece frame is manually taken out from the evaporation chamber to carry out sheet unloading work, then sheet loading is carried out, and the next cycle is started. Therefore, each time a coating process is carried out, the evaporation process chamber needs to be repeatedly pumped and deflated, so that the production efficiency is low, the stability of the processed product is relatively poor, and the repeated pumping and deflation operation also causes great resource waste.
SUMMERY OF THE UTILITY MODEL
For solving the technical problem, the utility model aims at providing a drum-type coating machine that evaporates in succession carries out with the mode of evaporating in succession during can realizing the glass product coating film to guarantee under the relatively unchangeable prerequisite of technology evaporating chamber environment, accomplish the coating film of product, so not only improved the film quality of product, also reduced the time that the gassing was taken out repeatedly to the technology room simultaneously, thereby improved production efficiency, reduced the wasting of resources.
The utility model adopts the technical proposal that:
a drum-type continuous evaporation coating machine comprises a process evaporation chamber, wherein an electronic evaporation device is arranged in a cavity at the lower part of the process evaporation chamber, a coating working cavity for coating a product is formed at the upper part of the process evaporation chamber and is positioned at two sides of the coating working cavity, a sealing door for entering and exiting the coating working cavity is arranged on the process evaporation chamber, a buffer chamber is respectively arranged at two sides of the process evaporation chamber, the buffer chamber at each side is of an independent cavity structure and is provided with a sealing door for entering and exiting the cavity of the buffer chamber, each buffer chamber is correspondingly provided with an upper segment and a lower segment, a workpiece rack for mounting a workpiece to be coated is arranged on each upper segment and the lower segment, and the workpiece rack is conveyed into a designated buffer chamber through a conveying mechanism and enters the process evaporation chamber through the buffer chamber for coating;
the vacuum air pumping system is also arranged and respectively adjusts and controls the air pressure of the process evaporation chamber and the air pressure of the buffer chambers positioned at the two sides of the process evaporation chamber.
Further optimization, the process evaporation chamber and the buffer chamber are provided with closing doors for entrance and exit, which are flap valves.
Further optimized, 2-4 groups of electronic evaporation devices are arranged at the lower part of the process evaporation chamber.
Further optimization, a positioning mechanism for limiting the position of the workpiece frame is arranged in the coating working cavity.
The film coating device is characterized in that the workpiece frame comprises an insulating chassis, a rotating frame arranged on the insulating chassis, a film loading roller frame which is arranged on the rotating frame and can rotate freely and a transmission connecting assembly, a workpiece to be coated is arranged on the film loading roller frame, the driving mechanism outputs power, the rotating frame is driven by the transmission connecting assembly to revolve and the film loading roller frame rotates around the axis of the rotating frame, and therefore the workpiece to be coated can be coated uniformly in the film coating chamber.
Further optimizing, still be equipped with top actuating mechanism, top actuating mechanism connect on technology evaporation chamber upper cover, top actuating mechanism's power take off end stretches into and is connected with transmission coupling assembling in the coating film working chamber and transmits rotary power for the work piece frame.
The utility model has the advantages that:
one of them, this scheme is through the first innovation, optimizes whole coating equipment, sets up the buffer chamber in technology evaporating chamber both sides, can realize going on with the continuous coating by vaporization mode during the glass product coating film, can guarantee under the relatively unchangeable prerequisite of technology evaporating chamber environment, accomplishes the coating film of product, has so not only improved the film quality of product, has also reduced the time that the technology room takes out the gassing repeatedly simultaneously to improve production efficiency, reduced the wasting of resources.
Secondly, power is introduced from the outside of the evaporation chamber to lead the workpiece to be plated on the trolley to continuously revolve and rotate by optimizing the mounting structure of the workpiece frame, so that the uniformity of evaporation coating is ensured; and after the evaporation is finished, the power introduced before can be timely disengaged so that the trolley can be conveniently conveyed out from the cavity roller way, the plated product can be conveniently taken out subsequently and the workpiece to be plated can be conveniently loaded again, and the continuous operation of the whole optical film plating machine is ensured.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
fig. 2 is a schematic structural view of the top drive mechanism in a state of being connected to the work rest.
FIG. 3 is a schematic diagram of the structure of an electronic evaporation device in a process evaporation chamber.
Fig. 4 is a schematic structural view of the workpiece holder.
Reference numerals: 1. the device comprises a first upper and lower segment, a second upper and lower segment, a first buffer chamber, a second buffer chamber, a process evaporation chamber, a 51 electronic evaporation device, a 52 coating working chamber, a 53 top driving mechanism, a 6 transmission mechanism, a 7 workpiece frame, a 71 insulation chassis, a 72 rotating frame, a 73 piece loading roller frame, a 74 workpiece to be coated, a 75 transmission connecting assembly, a 76 guide wheel assembly, a 77 supporting wheel, 8 flap valves I and 9, flap valves II and 10, flap valves III and 11 and a flap valve IV.
Detailed Description
The present invention is specifically described below by way of exemplary embodiments. It should be understood, however, that elements, structures and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.
It should be noted that: unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by those of ordinary skill in the art to which the invention belongs. The use of "first," "second," and similar terms in the description and in the claims does not indicate any order, quantity, or importance, but rather is used to distinguish one element from another. Also, the use of the terms "a," "an," or "the" and similar referents do not denote a limitation of quantity, but rather denote the presence of at least one. The word "comprise" or "comprises", and the like, indicates that the element or item listed before "comprises" or "comprising" covers the element or item listed after "comprising" or "comprises" and its equivalents, but does not exclude other elements or items.
A drum-type continuous evaporation coating machine comprises a process evaporation chamber 5, wherein an electronic evaporation device 51 is arranged in a cavity at the lower part of the process evaporation chamber 5, a coating working cavity 52 for coating a product is formed at the upper part of the process evaporation chamber, the electronic evaporation device is positioned at two sides of the coating working cavity, a closed door for entering and exiting the coating working cavity is arranged on the process evaporation chamber, a buffer chamber is respectively arranged at two sides of the process evaporation chamber, the buffer chamber at each side is of an independent cavity structure and is provided with a closed door for entering and exiting the cavity of the buffer chamber, each buffer chamber is correspondingly provided with an upper segment and a lower segment, a workpiece rack for mounting a workpiece to be coated is arranged on each upper segment and each lower segment, the workpiece rack is conveyed into a designated buffer chamber through a conveying mechanism and enters the process evaporation chamber through the buffer chamber for coating; the vacuum air pumping system is also arranged and respectively adjusts and controls the air pressure of the process evaporation chamber and the air pressure of the buffer chambers positioned at the two sides of the process evaporation chamber.
The detailed structure of the present solution is described below with reference to the accompanying drawings: as shown in figures 1-4, a drum-type continuous vapor deposition coating machine is composed of a first upper and lower segment 1, a first buffer chamber 3, a second upper and lower segment 2, a second buffer chamber 4 and a process evaporation chamber 5, wherein the first upper and lower segments 1 and the first buffer chamber 3 are disposed at one side of the process evaporation chamber 5, the second upper and lower segments 2 and the second buffer chamber 4 are disposed at the other side of the process evaporation chamber 5, since the first buffer chamber 3 and the second buffer chamber 4 are respectively an independent chamber structure, two sides of the device are required to be provided with closing doors for entering and exiting, the closing doors can adopt flap valves, the workpiece frame 7 is sent into a designated buffer chamber through a conveying mechanism 6 and enters a process evaporation chamber through the buffer chamber for coating, 2-4 groups of electronic evaporation devices 51 are arranged at the lower part of the process evaporation chamber 5, and the evaporation devices can simultaneously evaporate one material to realize the co-evaporation of the materials. Thereby ensuring the generation efficiency of the coating film; a coating working cavity 52 for coating a product is formed at the upper part of the process evaporation chamber 5, and a positioning mechanism for limiting the position of the workpiece frame is arranged in the coating working cavity 52, so that the workpiece frame 7 can be quickly positioned when moving to a specified position.
It should be noted that: in the scheme, the workpiece holder 7 comprises an insulating chassis 71, a rotating frame 72 arranged on the insulating chassis, a loading roller frame 73 which is arranged on the rotating frame and can rotate freely, and a transmission connecting assembly 75, a workpiece 74 to be coated is arranged on the loading roller frame 73, a plurality of guide wheel assemblies 76 and supporting wheels 77 are further arranged on the periphery of the rotating frame 72, an external driving mechanism outputs power, the loading roller frame rotates around the axis of the loading roller frame when the rotating frame is driven to revolve by the transmission connecting assembly 75, and the workpiece to be coated is uniformly coated in a coating chamber. The scheme realizes that power is introduced from the outside of the evaporation chamber to lead the workpiece to be plated on the trolley to continuously revolve and rotate, thereby ensuring the uniformity of evaporation coating; and after the evaporation is finished, the power introduced before can be timely disengaged so that the trolley can be conveniently conveyed out from the cavity roller way, the plated product can be conveniently taken out subsequently and the workpiece to be plated can be conveniently loaded again, and the continuous operation of the whole optical film plating machine is ensured.
It should be noted that: the power mechanism is introduced from the outside in the scheme, namely: the top driving mechanism 53 is connected to the upper cover of the process evaporation chamber 5, and the power output end of the top driving mechanism 53 extends into the coating working cavity 52 to be connected with the transmission connecting assembly 75 and transmits the rotary power to the workpiece frame.
In this embodiment, the conveying mechanism 6 may be a roller type conveying assembly.
The scheme has the following specific working process:
firstly, the process evaporation chamber 5 starts to exhaust, when the process evaporation chamber is in high vacuum (less than or equal to 5x10-3 pa), the first buffer chamber 3 is in an atmospheric state, the workpiece frame 7 is transferred into the first buffer chamber 3 from the first upper and lower segments 1 through the transfer mechanism 6, then the flap valve I8 is closed, the first buffer chamber 3 starts to evacuate, when the vacuum is evacuated to be less than or equal to 5pa, the flap valve II 9 is opened, the workpiece frame 7 enters the process evaporation chamber 5, the flap valve II 9 is closed, the first buffer chamber 3 starts to evacuate, when the vacuum is evacuated to be less than or equal to 5pa, pressure maintaining is waited, meanwhile, the coating process chamber also starts to exhaust, and after the coating vacuum degree (less than or equal to 5x10-3 pa) is reached, coating starts to be performed. Meanwhile, the workpiece rack on the other side is loaded with the workpieces which are not coated, after the workpieces are loaded, the second buffer chamber 4 is opened, the workpiece rack 7 is transferred into the second buffer chamber 4 from the second upper and lower segments 2 through the transmission roller 6, then the flap valve IV 11 is closed, the second buffer chamber 4 is vacuumized, when the vacuum is vacuumized to be less than or equal to 5pa, after the workpieces in the process evaporation chamber 5 are finished, the flap valve II 9 is opened, the workpiece rack 7 is transferred back into the first buffer chamber 3, the flap valve II 9 is closed, then the first buffer chamber 3 is vented, the workpiece rack is transferred back to the first upper and lower segments 1, the unloading and loading of the workpieces are finished, and the next cycle is started. Meanwhile, the flap valve III 10 is opened, the workpiece trolley 7 enters the process evaporation chamber 5, then the flap valve III 10 is closed, the second buffer chamber 4 starts to be vacuumized, the pressure is maintained after the vacuum pumping is less than or equal to 5pa, meanwhile, the coating process chamber starts to be pumped, and the coating starts to be coated after the coating vacuum degree (less than or equal to 5x10-3 pa) is reached. And after the workpiece on the workpiece rack is coated, opening the flap valve IV 11, starting to transfer the workpiece rack back to the second buffer chamber 4, closing the flap valve IV 11, then releasing the atmosphere in the second buffer chamber 4, transferring the workpiece rack back to the second upper and lower segments 2, finishing the unloading and loading of the workpiece, and entering the next cycle. Therefore, the alternate film coating of the workpiece can be finished, and the production efficiency of the equipment is improved.
It should be noted that, although the present invention has been described with reference to the above embodiments, the present invention may have other embodiments. Various modifications and changes may be made by those skilled in the art without departing from the spirit and scope of the invention, and it is intended that all such modifications and changes fall within the scope of the appended claims and their equivalents.
Claims (6)
1. The utility model provides a continuous coating by vaporization coating machine of drum-type which characterized in that: the device comprises a process evaporation chamber, wherein an electronic evaporation device is arranged in a cavity at the lower part of the process evaporation chamber, a coating working cavity for coating a product is formed at the upper part of the process evaporation chamber and is positioned at two sides of the coating working cavity, a closed door for entering and exiting the coating working cavity is arranged on the process evaporation chamber, a buffer chamber is respectively arranged at two sides of the process evaporation chamber, the buffer chamber at each side is of an independent cavity structure and is provided with the closed door for entering and exiting the cavity of the buffer chamber, each buffer chamber is correspondingly provided with an upper segment and a lower segment, a workpiece rack for mounting a workpiece to be coated is arranged on each upper segment and each lower segment, and the workpiece rack is conveyed into a designated buffer chamber through a conveying mechanism and enters the process evaporation chamber through the buffer chamber for coating;
the vacuum air pumping system is also arranged and respectively adjusts and controls the air pressure of the process evaporation chamber and the air pressure of the buffer chambers positioned at the two sides of the process evaporation chamber.
2. The roller type continuous vapor deposition coating machine of claim 1, wherein: the process evaporation chamber and the buffer chamber are provided with closing doors for inlet and outlet, which are flap valves.
3. The roller type continuous vapor deposition coating machine of claim 1, wherein: the lower part of the process evaporation chamber is provided with 2-4 groups of electronic evaporation devices.
4. The roller type continuous vapor deposition coating machine of claim 1, wherein: and a positioning mechanism for limiting the position of the workpiece frame is arranged in the coating working cavity.
5. The roller type continuous vapor deposition coating machine of claim 1, wherein: the workpiece frame comprises an insulating chassis, a rotating frame arranged on the insulating chassis, a piece loading roller frame which is arranged on the rotating frame and can rotate freely and a transmission connecting assembly, a workpiece to be coated is arranged on the piece loading roller frame, a driving mechanism outputs power, the rotating frame is driven by the transmission connecting assembly to revolve and the piece loading roller frame rotates around the axis of the rotating frame, and therefore the workpiece to be coated can be coated uniformly in the coating cavity.
6. A roller type continuous evaporation coating machine as claimed in claim 1 or 5, characterized in that: the top driving mechanism is connected to the upper cover of the process evaporation chamber, and the power output end of the top driving mechanism extends into the coating working cavity to be connected with the transmission connecting assembly and transmits rotary power to the workpiece frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022641546.9U CN214572203U (en) | 2020-11-16 | 2020-11-16 | Drum-type continuous evaporation coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022641546.9U CN214572203U (en) | 2020-11-16 | 2020-11-16 | Drum-type continuous evaporation coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN214572203U true CN214572203U (en) | 2021-11-02 |
Family
ID=78358575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202022641546.9U Active CN214572203U (en) | 2020-11-16 | 2020-11-16 | Drum-type continuous evaporation coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN214572203U (en) |
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2020
- 2020-11-16 CN CN202022641546.9U patent/CN214572203U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240123 Address after: Zone C, 4th Floor, Building 1, No. 328 Guanghua Road, Xiaokunshan Town, Songjiang District, Shanghai, 200000 Patentee after: Shanghai Beibo Vacuum Coating Technology Co.,Ltd. Country or region after: China Address before: 3 / F, 328 Guanghua Road, science and Technology Park, Songjiang District, Shanghai Patentee before: SHANGHAI NORTHGLASS COATING TECHNOLOGY INDUSTRIAL Co.,Ltd. Country or region before: China |
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| TR01 | Transfer of patent right |