CN214068702U - FFU system linkage circulating structure suitable for wet process equipment - Google Patents

Abstract

The utility model discloses a FFU system linkage circulating structure suitable for wet process equipment, which has the technical scheme that the FFU system linkage circulating structure comprises a shell, a separation component is arranged in the shell to separate an air flow space into a first space and a second space, two ventilation components are arranged on a third clapboard to mutually communicate a process groove body area and an exhaust area, a containing component is arranged on the third clapboard to prevent acid gas from flowing back, a blocking component is arranged on the second clapboard to prevent condensation liquid from entering the ventilation components, an adjusting component is arranged in an exhaust pipe to adjust the opening size of the exhaust pipe, a flow guide component is arranged on the air flow space to accelerate the flow velocity of gas in the air flow space, a hidden component is arranged on the shell to accommodate electric wires of an FFU shell, and an embedded component is arranged between the FFU shell and a wiring shell, the FFU shell and the wiring shell are communicated with each other, and the FFU shell is positioned by arranging the positioning component on the shell.

Description

FFU system linkage circulating structure suitable for wet process equipment

Technical Field

The utility model relates to a wet process equipment technical field, more specifically the FFU system linkage circulating structure who says so relates to a be applicable to wet process equipment.

Background

The wet method equipment comprises a shell, wherein the shell comprises an airflow space, a mechanical arm area, a process tank body area and an air exhaust area, the process tank body area is positioned between the mechanical arm area and the air exhaust area, the air exhaust equipment is arranged outside the air exhaust area, the airflow space is positioned above the mechanical arm area and the process tank body area, a first partition plate is arranged between the mechanical arm area and the process tank body area, a second partition plate is arranged in the process tank body area, a third partition plate is arranged between the process tank body area and the air exhaust area, an FFU system is arranged on the top surface of the shell and comprises an FFU shell;

the wet chemical reaction can be carried out in the process tank area, the chemical reaction can generate acid gas, a part of the acid gas can be volatilized upwards to the gas flow space, the acid gas can corrode a machine in wet equipment, and the service life of the machine is influenced, so that the acid gas needs to be treated, the acid gas is usually pumped out of the equipment by using air pumping equipment, when the air pumping equipment works, the pressure and the temperature in the process tank area can be changed, liquid generated in the wet chemical reaction process can form condensation liquid, and fresh gas flow is injected into the shell through an FFU system while the acid gas is pumped out;

be provided with the opening on the third baffle usually, be provided with the pipeline in the extraction area usually, air exhaust equipment during operation, the sour gas in the technology cell body region gets into the pipeline from the opening, then discharge to the shell outside through the pipeline, when the sour gas in the pipeline is too much to make when the sour gas can't in time discharge, can lead to sour gas backward flow to the opening part, then backward flow to technology cell body region, sour gas flows around the inside of shell, causes gaseous bad circulation, and can lead to the fact the corruption to the machine in the shell.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art exists, the utility model aims to provide a FFU system linkage circulating structure suitable for wet process equipment for prevent the sour gas backward flow.

In order to achieve the above purpose, the utility model provides a following technical scheme: a linkage circulating structure of an FFU system suitable for wet equipment comprises a shell, wherein a separation assembly is arranged in the shell and is used for separating an airflow space into a first space and a second space, two ventilating assemblies are arranged on a third partition plate and are used for communicating a process tank body area with an exhaust area, a containing assembly is arranged on one side, away from the process tank body area, of the third partition plate and is used for preventing acid gas from flowing back, the containing assembly comprises a containing box, a containing groove is formed in the containing box, a blocking assembly is arranged on the second partition plate and comprises a baffle plate, the baffle plate is used for preventing condensation liquid from entering the ventilating assembly, an exhaust pipe is arranged in the exhaust area, an adjusting assembly is arranged in the exhaust pipe and is used for adjusting the size of an opening of the exhaust pipe, when the air extraction equipment works, the acid gas sequentially passes through the ventilation assembly, the accommodating assembly and the exhaust pipe;

the air flow space is provided with a flow guide assembly, the flow guide assembly comprises a first flow guide plate and a second flow guide plate, one end of the first flow guide plate and one end of the second flow guide plate are fixedly connected with the top wall of the shell, the first flow guide plate and the second flow guide plate are obliquely arranged, the distance between the ends, close to the top surface of the shell, of the first flow guide plate and the second flow guide plate is larger than the distance between the ends, far away from the top surface of the shell, of the first flow guide plate and the second flow guide plate, the shell is provided with a concealing assembly, the concealing assembly comprises a wiring shell, the wiring shell is provided with a wiring groove, the wiring groove is used for accommodating wires of the FFU shell, the side surface of the wiring shell is provided with a first through hole, the first through hole is communicated with the wiring groove, and an embedded assembly is arranged between the FFU shell and the wiring shell, the embedded component comprises a connecting piece, an embedded part is arranged between the connecting piece and the wiring shell, the embedded part comprises a spring pressing key, the spring pressing key is matched with the first through hole, so that one part of the spring pressing key is located in the wiring groove, an electric wire penetrates through the connecting piece and the spring pressing key to enter the wiring groove, a positioning component is arranged on the shell and comprises two first positioning parts, an accommodating space is formed between the two first positioning parts and used for accommodating an FFU shell, the first positioning parts comprise first positioning plates and two second positioning plates, the two second positioning plates are integrally formed through the first positioning plates, one of the first positioning plates is located between the FFU shell and the wiring shell, and the second through hole is formed in the first positioning plate.

As a further improvement of the utility model, the partition subassembly includes first division board and second division board, first division board can be dismantled with first baffle top surface and be connected, the second division board with the connection can be dismantled to the shell roof, the second division board is located first division board top, first division board with leave the clearance between the second division board.

As a further improvement, the two intercommunicating pores have been seted up on the second baffle, the subassembly of ventilating includes the connecting plate, the connecting plate with intercommunicating pore looks adaptation and one-to-one, be provided with a plurality of group's portion of ventilating on the connecting plate, the portion of ventilating includes the air vent that a plurality of set up side by side, all be provided with the filter screen on the intercommunicating pore, the air vent is for the circulation of sour gas.

As a further improvement of the present invention, a plurality of stoppers are provided on the baffle plate to prevent the condensate from falling.

As a further improvement, the adjusting part includes the regulating plate and adjusts the pole, adjust the pole with the blast pipe inner wall rotates the connection, adjust the pole with the connection can be dismantled to the regulating plate, be provided with baroceptor on the regulating plate, baroceptor is used for detecting the atmospheric pressure in the blast pipe to adjust the opening size of blast pipe according to atmospheric pressure.

As a further improvement, the inner diameter of the exhaust pipe is close to the intercommunicating pore is far away from the intercommunicating pore reduces gradually, the protective layer is arranged on the inner wall of the exhaust pipe, so that the flow rate of the acid gas is accelerated.

As a further improvement of the utility model, two the intercommunicating pore all with the holding tank link up each other, the length that holds the box is the same with the length of third baffle, the height that holds the box is greater than the height of connecting plate, the width that holds the box is less than the fourth of blast pipe length, and be greater than the fifth of blast pipe length, it is used for preventing the sour gas backward flow to hold the box.

As a further improvement, the utility model discloses a be provided with atmosphere portion on the shell, atmosphere portion includes first atmosphere water conservancy diversion hole and second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with the shell top surface is all seted up in second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with first space link up each other, second atmosphere water conservancy diversion hole with the second space link up each other, first atmosphere water conservancy diversion hole with be formed with the linkage segment between the second atmosphere water conservancy diversion hole, the second division board with the connection can be dismantled to the linkage segment, first guide plate is located in the first space, the second guide plate is located in the second space, the FFU system passes through first atmosphere water conservancy diversion hole with second atmosphere water conservancy diversion hole to the inside air current that injects into of shell for the air current can get into first space and second space.

As a further improvement of the utility model, two be provided with two second location portions between the first location portion, first location portion with second location portion one-to-one, second location portion includes the third locating plate, the third locating plate is with corresponding first locating plate is parallel to each other, just the third locating plate is with corresponding be provided with a plurality of elastic components between the first locating plate, make the FFU casing remain stable in the shell top through the elastic component.

As a further improvement, the housing bottom is provided with a plurality of universal wheels, the universal wheel is convenient for the housing to move to other positions.

The utility model has the advantages that: the utility model divides the air flow space into a first space and a second space by arranging the separation component in the shell, the third clapboard is provided with two ventilating components, so that the process tank body area and the exhaust area are communicated with each other, the third clapboard is provided with a containing assembly to prevent acid gas from flowing back, the second clapboard is provided with a blocking assembly to prevent condensed liquid from entering the ventilating assembly, the size of the opening of the exhaust pipe is adjusted by arranging the adjusting component in the exhaust pipe, the flow velocity of the gas in the gas flow space is accelerated by arranging the flow guide component on the gas flow space, the hidden assembly is arranged on the shell to accommodate the electric wires of the FFU shell, the embedded assembly is arranged between the FFU shell and the wiring shell, the FFU shell and the wiring shell are communicated with each other, and the FFU shell is positioned by arranging the positioning component on the shell.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is an enlarged schematic view of the present invention at A in FIG. 1;

fig. 3 is a schematic front view of the present invention;

fig. 4 is an enlarged schematic view of fig. 3B according to the present invention;

fig. 5 is a schematic top view of the present invention.

Reference numerals: 1. a partition assembly; 11. a first partition plate; 12. a second partition plate; 2. a vent assembly; 21. a connecting plate; 22. a ventilation section; 3. a containment assembly; 31. accommodating the box; 4. a blocking component; 41. a baffle plate; 5. an adjustment assembly; 51. an adjusting plate; 52. adjusting a rod; 6. a flow guide assembly; 61. a first baffle; 62. a second baffle; 7. a concealment assembly; 71. a wiring shell; 8. a fitting assembly; 81. a connecting member; 82. a fitting portion; 83. a spring-pressing key; 9. a positioning assembly; 91. a first positioning plate; 92. a second positioning plate; 10. an exhaust pipe; 13. an atmosphere section; 131. a first atmosphere guiding hole; 132. a second atmosphere guiding hole; 133. a connecting section; 14. a universal wheel.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

Referring to fig. 1 to 5, the FFU system linkage circulation structure for wet process equipment of this embodiment includes a housing, a separation assembly 1 is disposed in the housing, the separation assembly 1 is configured to separate an air flow space into a first space and a second space, the air flow space is located above a robot arm region and a process tank region, the first space is located above the robot arm region, the second space is located above the process tank region, a chemical reaction is performed in the process tank region, the chemical reaction generates an acid gas, the acid gas generally volatilizes upward, an air exhaust region is disposed at one side of the process tank, a part of the acid gas can be exhausted to the outside of the housing for emission treatment, but a small part of the acid gas continuously volatilizes upward and enters the second space, the separation assembly 1 includes a first separation plate 11 and a second separation plate 12, and the space through which the robot arm region and the process tank region communicate with each other is reduced by the first separation plate 11 and the second separation plate 12, make and circulate the sour gas to the first space from the second space and reduce, prevent that sour gas from causing the corruption to the regional apparatus of robotic arm, first division board 11 can be dismantled with first division board top surface and be connected, second division board 12 can be dismantled with the shell roof and be connected, first division board 11 and second division board 12 can be dismantled with first division board and shell respectively through the bolt and be connected, when first division board 11 and second division board 12 receive sour gas to corrode and damage, be convenient for replace fast, second division board 12 is located first division board 11 top, leave the clearance between first division board 11 and the second division board 12, make first space and second space link up each other, be convenient for form good circulation.

The third clapboard is provided with two ventilation components 2, the ventilation components 2 are used for communicating the process tank body area with the exhaust area, so that the acid gas can flow from the process tank body area to the exhaust area, so that the acid gas is exhausted, the exhaust amount of the acid gas is controlled by the adjusting component 5, so that the stability of the gas environment is maintained, the second clapboard is provided with two communication holes, usually, the second clapboard is directly provided with an opening with a larger range, the air extraction equipment directly extracts the acid gas through the opening, the efficiency of extracting the acid gas is improved by arranging the two communication holes, so that the efficiency of extracting the acid gas is higher than that of arranging one opening, each ventilation component 2 comprises a connecting plate 21, the connecting plates 21 are matched with the communication holes and correspond to one another, the connecting plates 21 can cover the communication holes, so that the acid gas flows to the exhaust area through the communication holes, so that the acid gas is exhausted, and control the discharged volume of sour gas through adjusting part 5, in order to maintain the stability of gaseous environment, be provided with a plurality of groups portion 22 of ventilating on the connecting plate 21, portion 22 of ventilating includes the air vent that a plurality of set up side by side, the cross-sectional area of air vent is less, the regional space of technology cell body is great, when air extraction equipment during operation, sour gas flows to the air vent from the regional flow direction of technology cell body, make the velocity of flow of the sour gas that is close to the air vent be greater than the velocity of flow of the sour gas of keeping away from the air vent, sour gas flow speed accelerates, make the efficiency that sour gas was taken out improve, sour gas corrosion machine has been prevented, all be provided with the filter screen on the air vent, prevent that other debris from being inhaled blast pipe 10, block up blast pipe 10.

The third partition board is provided with a containing component 3 on one side far away from the process tank body area, the containing component 3 is used for preventing acid gas from flowing back, when the acid gas in the exhaust pipe 10 is too much to be discharged in time, the acid gas can flow back to the vent hole and then flow back to the process tank body area, the acid gas flows back and forth in the shell to cause poor circulation of the gas and cause corrosion to the machine in the shell, therefore, the containing component 3 is required to be arranged between the connecting board 21 and the exhaust pipe 10 to prevent the acid gas from flowing back through the containing component, the containing component 3 comprises a containing box 31, a containing groove is arranged in the containing box 31, the two communicating holes are communicated with the containing groove, the length of the containing box 31 is the same as that of the third partition board, the height of the containing box 31 is greater than that of the connecting board 21, the width of the containing box 31 is less than one fourth of the length of the exhaust pipe 10 and greater than one fifth of the length of the exhaust pipe 10, when the during operation of air exhaust equipment, sour gas is regional from the technology cell body through subassembly 2 of ventilating, then gets into in the holding tank, holds the space in the box 31 great, prevents that sour gas flow is too fast when, holds box 31 and is full of by sour gas, and sour gas flows back to the technology cell body region, causes the corruption to the machine.

Be provided with on the second baffle and block subassembly 4, air extraction equipment during operation, pressure and temperature in the technology cell area can change, make the liquid that produces among the wet process chemical reaction process form the condensate liquid, block subassembly 4 and be used for preventing the condensate liquid from getting into subassembly 2 of ventilating, block subassembly 4 including baffle 41, baffle 41 is used for preventing the condensate liquid from getting into subassembly 2 of ventilating, when air extraction equipment during operation, the condensate liquid flows to subassembly 2 of ventilating under air extraction equipment's drive, before reaching subassembly 2 of ventilating, reach baffle 41 first, consequently can be attached to on baffle 41, avoided the condensate liquid to reach subassembly 2 of ventilating and on attached to subassembly 2 of ventilating, do not influence the normal circulation of sour gas. The baffle 41 is provided with a plurality of blocking members (not shown in the figure) for preventing the condensed liquid from falling, the blocking members are four baffle plates 41, the baffle plates 41 are fixed on the baffle 41 in parallel, the condensed liquid may slide down when being attached to the baffle 41, and the sliding condensed liquid is collected on the baffle 41 through the baffle 41 to prevent the condensed liquid from falling down and polluting the machine.

The exhaust pipe 10 is arranged in the exhaust area, one end of the exhaust pipe 10 is communicated with the containing groove, the other end of the exhaust pipe 10 is communicated with the exhaust equipment, when the exhaust equipment works, acid gas passes through the ventilation component 2 from the process groove area and enters the containing groove, and then is exhausted to the outside of the shell through the exhaust pipe 10, the acid gas is effectively exhausted, so that the acid gas cannot corrode a machine, when the exhaust equipment works, the acid gas passes through the ventilation component 2, the containing component 3 and the exhaust pipe 10 in sequence, the adjusting component 5 is arranged in the exhaust pipe 10, the adjusting component 5 is used for adjusting the size of an opening of the exhaust pipe 10, when too much gas exists in the shell, the opening of the exhaust pipe 10 is adjusted to be large through the adjusting component 5, so that the gas exhausted from the exhaust equipment to the outside of the shell is increased, when too much gas exists in the shell, the opening of the exhaust pipe 10 is adjusted to be small through the adjusting component 5, make the gas that air extraction equipment took outside the shell reduce, thereby maintain the relative stability of the inside gaseous environment of shell, adjusting component 5 includes regulating plate 51 and regulation pole 52, when the gas in the shell was too much, rotate inside exhaust pipe 10 through regulation pole 52, drive regulating plate 51 and rotate inside exhaust pipe 10, make the interval between the top and the bottom of regulating plate 51 and the inner wall of exhaust pipe 10 grow, make the opening of exhaust pipe 10 increase, the gas that air extraction equipment took outside the shell increases, when the gas in the shell was too little, rotate inside exhaust pipe 10 through regulation pole 52, drive regulating plate 51 and rotate inside exhaust pipe 10, make the interval between the top and the bottom of regulating plate 51 and the inner wall of exhaust pipe 10 diminish, make the opening of exhaust pipe 10 diminish, the gas that air extraction equipment took outside the shell reduces, thereby maintain the relative stability of the inside gaseous environment of shell, the adjusting rod 52 is rotatably connected with the inner wall of the exhaust pipe 10, the adjusting rod 52 is detachably connected with the adjusting plate 51, and the adjusting plate 51 is provided with an air pressure sensor. The air pressure sensor is used for detecting the amount of air in the shell, when the air pressure sensor detects that the pressure of the air in the shell is too high, the air in the shell is too much, the adjusting rod 52 rotates in the exhaust pipe 10, the adjusting plate 51 is driven to rotate in the exhaust pipe 10, so that the distance between the top and bottom of the adjusting plate 51 and the inner wall of the exhaust pipe 10 becomes larger, the opening of the exhaust pipe 10 is enlarged, the gas drawn out to the outside of the housing by the air drawing device is increased, when the air pressure sensor detects that the air pressure in the shell is too small, the air pressure sensor indicates that the air in the shell is too little, the adjusting rod 52 rotates in the exhaust pipe 10, the adjusting plate 51 is driven to rotate in the exhaust pipe 10, so that the distance between the top and bottom of the adjusting plate 51 and the inner wall of the exhaust pipe 10 becomes small, and the gas exhausted from the exhaust apparatus to the outside of the housing is reduced, so that the gas environment is kept relatively stable. The internal diameter of blast pipe 10 is along being close to the intercommunicating pore to keeping away from the intercommunicating pore and reducing gradually, and when sour gas passed through blast pipe 10, the space that sour gas can circulate reduced gradually for the velocity of flow of sour gas increases, has accelerated sour gas exhaust speed, is provided with the protective layer on the blast pipe 10 inner wall, the material of inoxidizing coating is the polyethylene trimer, and the protective layer is used for protecting blast pipe 10, prevents that long-time sour gas from leading to blast pipe 10 to be corroded through blast pipe 10.

Referring to fig. 1 to 5, an atmosphere portion 13 is disposed on the housing, an FFU system is disposed on the top surface of the housing, the FFU system includes an FFU casing, the FFU system injects fresh gas into the housing through a first atmosphere guiding hole 131 and a second atmosphere guiding hole 132, the acid gas is brought back to the process tank region under the flowing action of the fresh gas and is exhausted through an air extractor, the atmosphere portion 13 includes a first atmosphere guiding hole 131 and a second atmosphere guiding hole 132, the first atmosphere guiding hole 131 and the second atmosphere guiding hole 132 are both opened on the top surface of the housing, the first atmosphere guiding hole 131 is communicated with the first space, the second atmosphere guiding hole 132 is communicated with the second space, the FFU system is located above the housing, the FFU system is communicated with the interior of the housing through the first atmosphere guiding hole 131 and the second atmosphere guiding hole 132, the FFU system ventilates the first space through the first atmosphere guiding hole 131, the second space is ventilated through the second atmosphere diversion hole 132, so that acid gas cannot stay in the first space and the second space, the instrument is protected from being damaged, a connecting section 133 is formed between the first atmosphere diversion hole 131 and the second atmosphere diversion hole 132, the second partition plate 12 is detachably connected with the connecting section 133 through bolts, and when the second partition plate 12 is corroded by the acid gas and damaged, the second partition plate is convenient to replace quickly.

The air flow space is provided with a flow guide assembly 6, the flow velocity of air flow injected into the first space and the second space by the FFU system can be accelerated by arranging the flow guide assembly 6, so that acid gas flows back to the upper part of the process tank body area under the action of gas with higher flow velocity, and is further extracted through an air extraction area, the flow guide assembly 6 comprises a first flow guide plate 61 and a second flow guide plate 62, one end of the first flow guide plate 61 and one end of the second flow guide plate 62 are fixedly connected with the top wall of the shell, the first flow guide plate 61 and the second flow guide plate 62 are obliquely arranged, the distance between the ends of the first flow guide plate 61 and the second flow guide plate 62 close to the top surface of the shell is larger than the distance between the ends of the first flow guide plate 61 and the second flow guide plate 62 far away from the top surface of the shell, the first flow guide plate 61 is positioned in the first space, the first flow guide plate 61 is obliquely arranged, the distance between the first flow guide plate 61 and the second partition plate 12 is smaller and smaller from the top of the bottom of the shell to the bottom of the shell, when the air of the FFU system passes through the first guide plate 61 from top to bottom, the flowing space of the air flow is smaller and smaller, so the flow rate of the air flow is faster, the flow rate of the air at the first space is faster, and the flow rate of the acid gas at the gap between the first partition plate 11 and the second partition plate 12 is slower, so the acid gas cannot enter the first space through the gap between the first partition plate 11 and the second partition plate 12, and cannot corrode the instruments in the robot arm area, the second guide plate 62 is located in the second space, the second guide plate 62 is obliquely arranged, the distance between the second guide plate 62 and the second partition plate 12 is smaller and smaller from the top of the housing to the bottom of the housing, when the air of the FFU system passes through the second guide plate 62 from top to bottom, the flowing space of the air flow is smaller and smaller, so the flow rate of the air flow is faster, the air flow rate at the second space is faster, and the flow rate of the acid gas in the second space is slower, the acid gases in the second space can thus be moved together away from the second space under the flow of the gas in the second space and then be evacuated by the suction device.

Be provided with on the shell and conceal the subassembly 7, conceal the subassembly 7 including walking line casing 71, the FFU system needs the wiring, the electric wire exposes for a long time in the air and can make and pile up a large amount of dusts on the electric wire, thereby accelerate the ageing speed of electric wire, increase the potential safety hazard, it makes the electric wire of FFU system can be accomodate in the trough to walk the line casing 71 through setting up, in order to prevent that the electric wire from ageing, it has seted up the trough on the line casing 71, the trough is used for accomodating the electric wire of FFU casing, prevent that the electric wire from being stained with the ash, walk the first through-hole of casing 71 side and seted up, first through-hole and trough link up each other, first through-hole is used for connecting the suppress key 83, suppress key 83 and first through-hole mutual block, make the electric wire that gets into first through-hole through suppress key 83 can not suffer from breaking away from and damaging because suppress key 83 and first through-hole each other.

The embedded component 8 is arranged between the FFU shell and the wiring shell 71, through the arrangement of the embedded component 8, the electric wires between the FFU shell and the wiring shell 71 can be communicated with each other, so that the electric wires can be accommodated, the embedded component 8 comprises a connecting piece 81, an embedded part 82 is arranged between the connecting piece 81 and the wiring shell 71, the embedded part 82 enables the connecting piece 81 and the wiring shell 71 to be connected with each other and not to be separated, the electric wires entering the wiring shell 71 through the connecting piece 81 are prevented from being damaged due to the fact that the connecting piece 81 is separated from the wiring shell 71, the embedded part 82 comprises a spring pressing key 83, the spring pressing key 83 is matched with a first through hole, so that one part of the spring pressing key 83 is located in the wiring groove, the electric wires pass through the connecting piece 81 and the spring pressing key 83 to enter the wiring groove, when the spring pressing key 83 is required to be connected with the first through hole, an operator packs the spring pressing key 83 into the first through hole to be, so that the snap key 83 cannot be separated from the first through hole, and a part of the snap key 83 is located in the wiring groove, and at this time, the electric wire can pass through the connecting piece 81 and the snap key 83 to enter the wiring groove.

The positioning component 9 is arranged on the shell, the FFU shell can be effectively installed by arranging the positioning component 9, so that the FFU shell is kept stable above the shell, the air flow of the FFU system is prevented from directly flowing to the outside of the shell through a gap between the FFU shell and the top surface of the shell, and the air tightness of the device is ensured, the positioning component 9 comprises two first positioning parts, an accommodating space is formed between the two first positioning parts and is used for accommodating the FFU shell, the first positioning parts comprise a first positioning plate 91 and two second positioning plates 92, the two second positioning plates 92 are integrally formed through the first positioning plate 91, one first positioning plate 91 is positioned between the FFU shell and the wiring shell 71, and is provided with a second through hole which is used for penetrating through the connecting piece 81, so that one end of the connecting piece 81 can be connected with the FFU shell, and the electric wire of the FFU system can enter the wiring shell 71 through the connecting piece 81 for accommodating, two second positioning parts (not shown in the figure) are arranged between the two first positioning parts, the first positioning parts correspond to the second positioning parts one by one, the second positioning parts comprise third positioning plates, the third positioning plates are parallel to the corresponding first positioning plates 91, a plurality of elastic parts are arranged between the third positioning plates and the corresponding first positioning plates 91, the number of the elastic parts is four, when the FFU shell needs to be fixed, an operator inserts the FFU shell into a space between the two third positioning plates, the FFU shell extrudes the two third positioning plates which are oppositely arranged outwards through the FFU shell, so that the compression springs between the first positioning plates 91 and the third positioning plates are stressed and compressed, the FFU shell enters the space between the two third positioning plates, the FFU shell is fixed between the two third positioning plates through the restoring force of the compression springs, and the air flow of the FFU system is prevented from directly flowing to the outside of the FFU shell through the gap between the FFU shell and the top surface of the shell, ensuring the air tightness of the device. The bottom of the shell is provided with a plurality of universal wheels 14, the number of universal wheels 14 is four, when needing to carry out the wet process experiment in other places, does not need operating personnel to difficultly move the shell, is convenient for remove the shell to the place that needs to carry out the experiment through universal wheel 14 and carries out the wet process experiment.

The working principle is as follows: when needs fixed FFU casing, operating personnel fills in the space between two third locating plates with the FFU casing, outwards extrude two third locating plates that set up relatively through the FFU casing, make the compression spring atress compression between first locating plate 91 and the third locating plate, the FFU casing gets into the space between two third locating plates, make the FFU casing fixed between two third locating plates through compression spring's restoring force, prevent that the air current of FFU system from directly circulating to the shell outside through the clearance between FFU casing and the shell top surface, guarantee the gas tightness of device. One end and the FFU casing of connecting piece 81 are connected, the other end of connecting piece 81 is connected with the suppress key 83, when needs are connected suppress key 83 with walk line casing 71, operating personnel packs into the suppress key 83 in the first through-hole, so that suppress key 83 and the mutual block of first through-hole, make suppress key 83 unable follow first through-hole and break away from, suppress a part of key 83 and be located the trough, the electric wire of FFU system can pass connecting piece 81 and suppress key 83 and accomodate in the trough at this moment.

The FFU system is ventilated into a first space through a first atmosphere diversion hole 131 and is ventilated into a second space through a second atmosphere diversion hole 132, airflow in the first space flows to a robot arm area after passing through the first space, airflow in the second space flows to a process tank body area after passing through the second space, after chemical reaction is carried out in the process tank body area, acid gas is volatilized upwards to the second space, the acid gas is difficult to enter the first space through a first partition plate 11 and a second partition plate 12, instruments in the robot arm area are prevented from being corroded, the first diversion plate 61 is obliquely arranged, after the airflow flows through the first diversion plate 61 from top to bottom, the speed of the airflow is increased, so that the acid gas in the second space is prevented from entering the first space and corroding the instruments in the robot arm area, the second diversion plate 62 is obliquely arranged, and after the airflow flows through the second diversion plate 62 from top to bottom, the speed of air current becomes fast, and the gas velocity of flow of second space department is very fast, and the velocity of flow of the sour gas in the second space is comparatively slow, therefore the sour gas in the second space can keep away from the second space together under the drive of the gas in second space, later take out through air exhaust equipment.

When the air extraction equipment works, the pressure and the temperature in the process tank area can be changed, so that liquid generated in the wet chemical reaction process forms condensation liquid, the condensation liquid flows to the ventilation assembly 2 under the driving of the air extraction equipment, and the condensation liquid firstly reaches the baffle plate 41 before reaching the position of the ventilation assembly 2, so that the condensation liquid can be attached to the baffle plate 41, the condensation liquid is prevented from reaching the position of the ventilation assembly 2 and being attached to the ventilation assembly 2, and the normal circulation of acid gas is not influenced. When gas is through the air vent of subassembly 2 of ventilating, because the cross-sectional area of air vent is less, the regional space of technology cell body is great, and sour gas flows to the air vent from the regional flow direction of technology cell body for the velocity of flow of the sour gas that is close to the air vent is greater than the velocity of flow of the sour gas of keeping away from the air vent, and sour gas flow speed accelerates, makes the efficiency that sour gas took out improve, has prevented sour gas corrosion machine. When gas passes through the accommodating groove of the accommodating component 3, because the space in the accommodating box 31 is large, when the flow speed of acid gas is prevented from being too fast, the accommodating box 31 is filled with the acid gas, the acid gas flows back to the area of the process groove body and corrodes the machine, when the gas flows through the exhaust pipe 10, the gas outflow quantity is adjusted through the adjusting component 5 in the exhaust pipe 10, when the pressure sensor detects that the gas pressure in the shell is too high, the gas in the shell is excessive, the adjusting rod 52 rotates in the exhaust pipe 10 to drive the adjusting plate 51 to rotate in the exhaust pipe 10, the distance between the top and the bottom of the adjusting plate 51 and the inner wall of the exhaust pipe 10 is increased, the gas pumped out of the shell by the air pumping equipment is increased, when the pressure sensor detects that the gas pressure in the shell is too low, the gas in the shell is excessively low, the adjusting rod 52 rotates in the exhaust pipe 10, drive regulating plate 51 and rotate in the inside of blast pipe 10 for the top of regulating plate 51 and the interval of bottom and blast pipe 10 inner wall diminish, the gas that air exhaust equipment took outside the shell reduces, makes gaseous environment keep relatively stable.

Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (10)

1. The utility model provides a FFU system linkage cycle structure suitable for wet process equipment, includes the shell, its characterized in that: the gas-acid tank is characterized in that a separation assembly (1) is arranged in the shell, the separation assembly (1) is used for separating an airflow space into a first space and a second space, two ventilation assemblies (2) are arranged on a third partition plate, the ventilation assemblies (2) are used for communicating a process tank body area and an exhaust area with each other, an accommodating assembly (3) is arranged on one side, away from the process tank body area, of the third partition plate, the accommodating assembly (3) is used for preventing acid gas from flowing back, the accommodating assembly (3) comprises an accommodating box (31), an accommodating groove is formed in the accommodating box (31), a blocking assembly (4) is arranged on the second partition plate, the blocking assembly (4) comprises a baffle plate (41), the baffle plate (41) is used for preventing condensation liquid from entering the ventilation assembly (2), an exhaust pipe (10) is arranged in the exhaust area, and an adjusting assembly (5) is arranged in the exhaust pipe (10), the adjusting assembly (5) is used for adjusting the size of the opening of the exhaust pipe (10), and when the air extraction equipment works, the sour gas sequentially passes through the ventilation assembly (2), the accommodating assembly (3) and the exhaust pipe (10);

the air flow space is provided with a flow guide assembly (6), the flow guide assembly (6) comprises a first flow guide plate (61) and a second flow guide plate (62), one end of each of the first flow guide plate (61) and the second flow guide plate (62) is fixedly connected with the top wall of the shell, the first flow guide plate (61) and the second flow guide plate (62) are obliquely arranged, the distance between the ends, close to the top surface of the shell, of the first flow guide plate (61) and the second flow guide plate (62) is larger than the distance between the ends, far away from the top surface of the shell, of the first flow guide plate (61) and the second flow guide plate (62), the shell is provided with a concealing assembly (7), the concealing assembly (7) comprises a wiring shell (71), a wiring groove is formed in the wiring shell (71), the wiring groove is used for accommodating electric wires of an FFU shell, and a first through hole is formed in the side surface of the wiring shell (71), the first through hole is communicated with the wiring groove, an embedded component (8) is arranged between the FFU shell and the wiring shell (71), the embedded component (8) comprises a connecting piece (81), an embedded part (82) is arranged between the connecting piece (81) and the wiring shell (71), the embedded part (82) comprises a spring pressing key (83), the spring pressing key (83) is matched with the first through hole, so that one part of the spring pressing key (83) is positioned in the wiring groove, an electric wire passes through the connecting piece (81) and the spring pressing key (83) to enter the wiring groove, a positioning component (9) is arranged on the shell, the positioning component (9) comprises two first positioning parts, an accommodating space is formed between the two first positioning parts and used for accommodating the FFU shell, the first positioning part comprises a first positioning plate (91) and two second positioning plates (92), the two second positioning plates (92) are integrally formed through the first positioning plate (91), one of the first positioning plates (91) is located between the FFU shell and the routing shell (71), and a second through hole is formed in the first positioning plate.

2. The FFU system linkage cycle structure applicable to the wet process equipment according to claim 1, wherein: divide subassembly (1) to include first division board (11) and second division board (12), first division board (11) can be dismantled with first division board top surface and be connected, second division board (12) with the connection can be dismantled to the shell roof, second division board (12) are located first division board (11) top, first division board (11) with leave the clearance between second division board (12).

3. The FFU system linkage cycle structure applicable to the wet process equipment according to claim 2, wherein: two communicating holes are formed in the second partition plate, the ventilation assembly (2) comprises a connecting plate (21), the connecting plate (21) is matched with the communicating holes and corresponds to the communicating holes one by one, a plurality of groups of ventilation parts (22) are arranged on the connecting plate (21), each ventilation part (22) comprises a plurality of ventilation holes arranged in parallel, and filter screens are arranged on the communicating holes.

4. The FFU system linkage cycle structure suitable for the wet process equipment according to claim 3, wherein: the baffle (41) is provided with a plurality of blocking pieces for preventing the condensation liquid from falling.

5. The FFU system linkage cycle structure suitable for the wet process equipment according to claim 4, wherein: adjusting part (5) include regulating plate (51) and adjust pole (52), adjust pole (52) with blast pipe (10) inner wall rotates and connects, adjust pole (52) with regulating plate (51) can be dismantled and be connected, be provided with air pressure sensor on regulating plate (51).

6. The FFU system linkage cycle structure suitable for the wet process equipment according to claim 5, wherein: the inner diameter of the exhaust pipe (10) is gradually reduced from the position close to the communicating hole to the position far away from the communicating hole, and a protective layer is arranged on the inner wall of the exhaust pipe (10).

7. The FFU system linkage cycle structure suitable for the wet process equipment according to claim 6, wherein: the two communicating holes are communicated with the accommodating groove, the length of the accommodating box (31) is the same as that of the third partition plate, the height of the accommodating box (31) is larger than that of the connecting plate (21), and the width of the accommodating box (31) is smaller than one fourth of the length of the exhaust pipe (10) and larger than one fifth of the length of the exhaust pipe (10).

8. The FFU system linkage cycle structure applicable to the wet process equipment according to claim 2, wherein: be provided with atmosphere portion (13) on the shell, atmosphere portion (13) include first atmosphere water conservancy diversion hole (131) and second atmosphere water conservancy diversion hole (132), first atmosphere water conservancy diversion hole (131) with second atmosphere water conservancy diversion hole (132) are all seted up in the shell top surface, first atmosphere water conservancy diversion hole (131) with first space link up each other, second atmosphere water conservancy diversion hole (132) with the second space link up each other, first atmosphere water conservancy diversion hole (131) with be formed with linkage segment (133) between second atmosphere water conservancy diversion hole (132), second division board (12) with connection segment (133) can be dismantled, first guide plate (61) are located in the first space, second guide plate (62) are located in the second space.

9. The FFU system linkage cycle structure applicable to the wet process equipment according to claim 8, wherein: two second positioning portions are arranged between the two first positioning portions, the first positioning portions correspond to the second positioning portions in a one-to-one mode, each second positioning portion comprises a third positioning plate, the third positioning plates are parallel to the corresponding first positioning plates (91), and a plurality of elastic pieces are arranged between the third positioning plates and the corresponding first positioning plates (91).

10. The FFU system linkage cycle structure applicable to the wet process equipment according to claim 1, wherein: the bottom of the shell is provided with a plurality of universal wheels (14).

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