CN214441712U

CN214441712U - FFU system installation structure convenient to dismouting

Info

Publication number: CN214441712U
Application number: CN202120175145.0U
Authority: CN
Inventors: 方超; 邓信甫; 刘大威; 陈丁堃
Original assignee: Zhiwei Semiconductor Shanghai Co Ltd; PNC Process Systems Co Ltd
Current assignee: Zhiwei Semiconductor Shanghai Co Ltd; PNC Process Systems Co Ltd
Priority date: 2021-01-21
Filing date: 2021-01-21
Publication date: 2021-10-22
Anticipated expiration: 2031-01-21

Abstract

The utility model discloses a FFU system installation structure convenient for disassembly and assembly, which has the technical proposal that the FFU system installation structure comprises a shell, a separating part and a flow guide part are arranged in the shell, the separating part comprises a separating plate, the separating plate separates an airflow space into a first space and a second space, the flow guide part comprises a first flow guide plate and a second flow guide plate, one end of the first flow guide plate and one end of the second flow guide plate are both fixedly connected with the top wall of the shell, the first flow guide plate and the second flow guide plate are both obliquely arranged, the distance between the ends of the first flow guide plate and the second flow guide plate close to the top surface of the shell is larger than the distance between the ends of the first flow guide plate and the second flow guide plate far away from the top surface of the shell, after the gas passes through the first flow guide plate and the second flow guide plate, the flow velocity of the gas is accelerated due to the reduction of the flowing space of the gas, the flow velocity of the gas in the airflow space is faster than that of the acid gas, so that a small part of the acid gas volatilized from a process tank body area to the airflow space is driven by fresh gas, and reflowing to the process tank area.

Description

FFU system installation structure convenient to dismouting

Technical Field

The utility model relates to a FFU installation technical field, more specifically the FFU system installation structure convenient to dismouting that says so relates to one kind.

Background

Semiconductor equipment includes the shell, including the air space in the shell, the robotic arm is regional, the technology cell body is regional and the region of bleeding, the technology cell body is regional to be located between the robotic arm region and the region of bleeding, the regional outside of bleeding is provided with air exhaust equipment, the air space is located the regional top of robotic arm and technology cell body, be provided with the FFU system on the shell top surface, the FFU system includes the FFU casing, can carry out chemical reaction in the technology cell body region, chemical reaction can produce sour gas, use air exhaust equipment to take sour gas out to the equipment outside from the technology cell body region, simultaneously through the inside fresh air current of pouring into of FFU system to the shell.

Most of the acid gas can be directly pumped out of the shell through the air pumping equipment, but a small part of the acid gas still volatilizes upwards to the air flow space from the process tank body area, and the part of the upwards volatilized acid gas is difficult to return to the process tank body area for pumping.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art exists, the utility model aims to provide a FFU system mount structure convenient to dismouting for make the sour gas that upwards volatilizees can get back to the technology cell body region and take out and remove.

In order to achieve the above purpose, the utility model provides a following technical scheme: an FFU system mounting structure convenient to disassemble and assemble comprises a shell, wherein a partition part and a flow guide part are arranged in the shell, the partition part comprises a partition plate, the partition plate divides an airflow space into a first space and a second space, the flow guide part comprises a first flow guide plate and a second flow guide plate, one end of each of the first flow guide plate and the second flow guide plate is fixedly connected with the top wall of the shell, the first flow guide plate and the second flow guide plate are obliquely arranged, and the distance between the ends, close to the top surface of the shell, of the first flow guide plate and the second flow guide plate is larger than the distance between the ends, far away from the top surface of the shell, of the first flow guide plate and the second flow guide plate;

the top surface of the shell is provided with a concealing assembly, the concealing assembly comprises a wiring shell, a wiring groove is formed in the wiring shell and used for accommodating electric wires of the FFU shell, a first through hole is formed in the side surface of the wiring shell, and the first through hole is communicated with the wiring groove;

the embedded component comprises a connecting piece, an embedded part is arranged between the connecting piece and the wiring shell, the embedded part comprises a spring pressing key, the spring pressing key is matched with the first through hole, so that one part of the spring pressing key is located in the wiring groove, and an electric wire penetrates through the connecting piece and enters the wiring groove.

As a further improvement of the utility model, the first guide plate is located in the first space, the second guide plate is located in the second space, first guide plate with the second guide plate is the arc, just first guide plate with the just right one side of second guide plate all is formed with the concave part, be provided with the blotter on the concave part.

As a further improvement of the present invention, the first guide plate and the distance between the division plates are smaller than the second guide plate and the distance between the division plates, so that the gas flow rate in the first space is greater than the gas flow rate in the second space.

As a further improvement, division board fixed connection is between the relative both sides inner wall of shell, the shape of cross section of division board is trapezoidal, just the division board is crescent along the cross-sectional area of shell top to shell bottom, the division board is close to contained angle between the side of first guide plate and the shell top surface is 87 degrees, and the division board is used for with first space with second space alternate segregation.

As a further improvement, the utility model provides an atmosphere portion is provided with on the shell, and atmosphere portion includes first atmosphere water conservancy diversion hole and second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with the shell top surface is all seted up in second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with first space link up each other, second atmosphere water conservancy diversion hole with the second space link up each other, first atmosphere water conservancy diversion hole with be formed with the linkage segment between the second atmosphere water conservancy diversion hole, the division board with linkage segment fixed connection, the FFU system passes through first atmosphere water conservancy diversion hole with second atmosphere water conservancy diversion hole to the inside air current that injects into of shell for the air current can get into first space and second space.

As a further improvement of the utility model, two first fixed orificess have been seted up on the shell top surface, be provided with the fixed plate on the shell, two second fixed orificess have been seted up on the fixed plate, the second fixed orifices with first fixed orifices one-to-one, just the second fixed orifices is located first fixed orifices top, the both ends of walking the line casing all are formed with the hem, the third fixed orifices has been seted up on the hem, the third fixed orifices with second fixed orifices one-to-one, just the third fixed orifices is located second fixed orifices top for the bolt can pass first fixed orifices the second fixed orifices with the third fixed orifices makes walk the line casing the fixed plate with the shell can reciprocal anchorage.

As a further improvement, the second through hole has been seted up on the suppress key, the third through hole has been seted up in the connecting piece, first through hole with the third through hole passes through the second through hole link up each other, the aperture of first through hole is greater than the second through hole with the aperture of third through hole for the electric wire can pass first through hole the second through hole with the third through hole.

As a further improvement of the utility model, the first through-hole the second through-hole with all be provided with the sponge in the third through-hole for the electric wire can not worn and torn.

As a further improvement, two draw-in grooves have been seted up to first through-hole inner wall, two the draw-in groove sets up relatively, the both sides face that the bullet pressed the key relatively all is formed with the convex part, the convex part with draw-in groove one-to-one and looks adaptation, the convex part be used for with the mutual block of draw-in groove makes the bullet press the key with the mutual block of first through-hole.

As a further improvement, the wiring shell is provided with a cover body, a plurality of guiding pieces are arranged in the wiring groove, and the guiding pieces are used for guiding the trend of the electric wire.

The utility model has the advantages that: the utility model discloses a set up partition portion and water conservancy diversion portion in the shell, separate into first space and second space with the air current space through the partition portion, water conservancy diversion portion is including first guide plate and the second guide plate that the slope set up, gaseous after first guide plate and second guide plate, because gaseous circulation space reduces, make the velocity of flow of gas accelerate, gaseous velocity of flow in the air current space is faster than the velocity of flow of sour gas, make the small part volatilize to the acid gas of air current space from the technology cell body region under fresh gas's drive, flow back to the technology cell body region again, then use air extraction equipment to take out sour gas to the equipment outside from the technology cell body region, through setting up hidden subassembly on the shell, in order to accomodate the electric wire of FFU casing, through setting up gomphosis portion between FFU casing and the line casing, make the FFU casing with walk the line casing and link up each other.

Drawings

Fig. 1 is a schematic front view of the present invention;

fig. 2 is an enlarged schematic view of a portion a in fig. 1 according to the present invention.

Reference numerals: 1. a housing; 2. a partition portion; 21. a partition plate; 3. a flow guide part; 31. a first baffle; 32. a second baffle; 4. a concealment assembly; 41. a wiring shell; 5. a fitting assembly; 51. a connecting member; 52. a fitting portion; 521. a spring-pressing key; 6. an atmosphere section; 61. a first atmosphere guiding hole; 62. a second atmosphere guiding hole; 63. a connecting section; 7. and (7) fixing the plate.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

Referring to fig. 1 and 2, the FFU system installation structure convenient to disassemble and assemble in this embodiment includes a housing 1, a partition 2 and a flow guide 3 are disposed in the housing 1, the partition 2 includes a partition 21, the partition 21 partitions an air flow space into a first space and a second space, the air flow space is located above a robot arm area and a process tank area, the first space is located above the robot arm area, the second space is located above the process tank area, a chemical reaction is performed in the process tank area, the chemical reaction generates acid gas, the acid gas generally volatilizes upwards, an air exhaust area is disposed at one side of the process tank, a part of the acid gas can be exhausted outside the housing 1, but still a small part of the acid gas continuously volatilizes upwards and enters the second space, the upwards volatilized acid gas is difficult to return to the process tank area for exhausting, and the separated part of the acid gas returns to the process tank area through the partition 2 and the flow guide 3, then, the air is extracted by an air extractor, an atmosphere part 6 is arranged on the shell 1, an FFU system is arranged on the top surface of the shell 1, the FFU system comprises an FFU shell, the FFU system injects fresh air flow into the shell 1 through a first atmosphere diversion hole 61 and a second atmosphere diversion hole 62, acid gas is brought back to the area of the process tank body under the flowing action of the fresh air and is exhausted by the air extractor, the atmosphere part 6 comprises a first atmosphere diversion hole 61 and a second atmosphere diversion hole 62, the first atmosphere diversion hole 61 and the second atmosphere diversion hole 62 are both arranged on the top surface of the shell 1, the first atmosphere diversion hole 61 is communicated with the first space, the second atmosphere diversion hole 62 is communicated with the second space, the FFU system is arranged above the shell 1, the FFU system is communicated with the interior of the shell 1 through the first atmosphere diversion hole 61 and the second atmosphere diversion hole 62, the FFU system ventilates to the first space through the first atmosphere diversion hole 61, and ventilating the second space through the second atmosphere diversion hole 62 so that the acid gas cannot stay in the first space and the second space and the instruments are protected from being damaged, a connecting section 63 is formed between the first atmosphere diversion hole 61 and the second atmosphere diversion hole 62, and the partition plate 21 is fixedly connected with the connecting section 63. By arranging the partition plate 21, the gases in the first space and the second space are difficult to mutually circulate, the acid gas is prevented from entering the first space through the second space, the corrosion of the acid gas to the instruments in the robot arm area is prevented, the partition plate 21 is fixedly connected between the inner walls at two opposite sides of the shell 1, the cross section of the partition plate 21 is trapezoidal, and the cross section area of the partition plate 21 from the top of the shell 1 to the bottom of the shell 1 is gradually increased, when the air of the FFU system passes through the partition plate 21 from top to bottom, the space through which the air flows becomes smaller and smaller, so that the flow rate of the air flow becomes faster, the flow rate of the air at the first space becomes faster, the flow rate of the acid gas in the gap between the first space and the second space is slow, so the acid gas can not enter the first space through the gap between the first space and the second space and can not corrode the apparatus in the robot arm area, the angle between the side of the partition plate 21 near the first baffle 31 and the top of the housing 1 is 87 degrees. The flow guiding part 3 comprises a first flow guiding plate 31 and a second flow guiding plate 32, the flow velocity of the air flow injected into the first space and the second space by the FFU system can be accelerated by arranging the flow guiding part 3, so that the acid gas in the second space flows back to the upper part of the process tank body area under the action of the gas with higher flow velocity, and then is extracted through the air extraction area, one ends of the first flow guiding plate 31 and the second flow guiding plate 32 are fixedly connected with the top wall of the shell 1, the first flow guiding plate 31 and the second flow guiding plate 32 are obliquely arranged, the distance between the ends, close to the top surface of the shell 1, of the first flow guiding plate 31 and the second flow guiding plate 32 is larger than the distance between the ends, far away from the top surface of the shell 1, of the first flow guiding plate 31 is positioned in the first space, the first flow guiding plate 31 is obliquely arranged, the distance between the first flow guiding plate 31 and the partition plate 21 is smaller and smaller from the top of the shell 1 to the bottom of the shell 1, when the gas of the FFU system passes through the first guide plate 31 from top to bottom, the flowing space of the gas flow is smaller and smaller, so the flow rate of the gas flow is faster, the gas flow rate at the first space is fast, and the flow rate of the acid gas at the gap between the first space and the second space is slow, so the acid gas can not enter the first space through the gap between the first space and the second space, and can not corrode the instruments in the robot arm area, the second guide plate 32 is positioned in the second space, because the second guide plate 32 is obliquely arranged, the distance between the second guide plate 32 and the partition plate 21 is smaller and smaller from the top of the shell 1 to the bottom of the shell 1, when the gas of the FFU system passes through the second guide plate 32 from top to bottom, the flowing space of the gas flow is smaller and smaller, so the flowing rate of the gas flow is faster, the gas flow rate at the second space is faster, and the flowing rate of the acid gas in the second space is slower, therefore, the acid gas in the second space can be kept away from the second space together under the flowing of the gas in the second space and is pumped out, the first guide plate 31 and the second guide plate 32 are both arc-shaped plates, a concave part is formed on one side opposite to the first guide plate 31 and the second guide plate 32, and a buffer pad is arranged on the concave part. The air of the FFU system circulates to the first guide plate 31 and the second guide plate 32 for a long time, resulting in that the first guide plate 31 and the second guide plate 32 are easily damaged, the first guide plate 31 and the second guide plate 32 are protected by providing the buffer pad, and the first guide plate 31 and the second guide plate 32 are provided in an arc shape, so that the air has a buffered space, the first guide plate 31 and the second guide plate 32 are prevented from being damaged, the distance between the first guide plate 31 and the partition plate 21 is smaller than the distance between the second guide plate 32 and the partition plate 21, the air flow velocity in the first space is greater than the air flow velocity in the second space, so that the acid gas in the second space cannot enter the first space.

The top surface of the shell 1 is provided with a concealing component 4, the concealing component 4 comprises a wiring shell 41, an FFU system needs wiring, wires are exposed in the air for a long time to cause a large amount of dust to be accumulated on the wires, thereby accelerating the aging speed of the wires and increasing the potential safety hazard, the wires of the FFU system can be accommodated in the wiring slots by arranging the wiring shell 41 to prevent the aging of the wires, the wiring shell 41 is provided with wiring slots for accommodating the wires of the FFU shell to prevent the wires from being stained with dust, the side surface of the wiring shell 41 is provided with a first through hole which is communicated with the wiring slots and is used for connecting a spring pressing key 521, the spring pressing key 521 is mutually clamped with the first through hole, so that the wires entering the first through hole through the spring pressing key 521 cannot be damaged because the spring pressing key 521 is separated from the first through hole, the top surface of the shell 1 is provided with two first fixing holes, the fixing plate 7 is located above the shell 1, the wiring shell 41 is located above the shell 1, the fixing plate 7 and the wiring shell 41 are fixed with each other through the first fixing hole, the second fixing hole and the third fixing hole, the wiring shell 41 is prevented from being moved to damage an electric wire, the fixing plate 7 is arranged on the shell 1, the two second fixing holes are formed in the fixing plate 7 and correspond to the first fixing holes one to one, the second fixing holes are located above the first fixing holes, folded edges are formed in two ends of the wiring shell 41, the third fixing hole is formed in each folded edge and corresponds to the second fixing hole one to one, the third fixing hole is located above the second fixing hole, when the shell 1, the fixing plate 7 and the wiring shell 41 are required to be fixed with each other, an operator uses bolts to sequentially penetrate through the corresponding first fixing hole, the second fixing hole and the third fixing hole, and accordingly the shell 1, Fixed plate 7 with walk line casing 41 reciprocal anchorage, prevent to walk line casing 41 and remove and damage the electric wire, walk to be provided with the lid (not shown in the figure) on the line casing 41, the cabling inslot is provided with a plurality of guides (not shown in the figure), the guide is used for guiding the electric wire trend, the guide is the arc deflector, arc deflector and cabling groove diapire fixed connection, the electric wire can twine on the arc deflector, the electric wire is directly put into the cabling inslot and can lead to the electric wire in the cabling inslot in disorder, when the electric wire needs to be put in order, operating personnel open the lid, arrange in order the electric wire through the arc deflector in the cabling inslot, in order to keep neatly.

The embedded component 5 is arranged between the FFU shell and the wiring shell 41, and through the arrangement of the embedded component 5, the electric wires between the FFU shell and the wiring shell 41 can be communicated with each other, so that the electric wires can be stored, the embedded component 5 comprises a connecting piece 51, an embedded part 52 is arranged between the connecting piece 51 and the wiring shell 41, the embedded part 52 enables the connecting piece 51 and the wiring shell 41 to be connected with each other and not to be separated, the electric wires entering the wiring shell 41 through the connecting piece 51 are prevented from being damaged due to the fact that the connecting piece 51 and the wiring shell 41 are separated from each other, the embedded part 52 comprises a spring pressing key 521, the spring pressing key 521 is matched with a first through hole, so that one part of the spring pressing key 521 is located in the wiring groove, the electric wires pass through the connecting piece 51 and the spring pressing key 521 to enter the wiring groove, the inner wall of the first through hole is provided with two clamping grooves which are arranged oppositely, and convex parts are formed on two opposite side surfaces of the spring pressing key 521, the convex parts correspond to the clamping grooves one by one and are matched with the clamping grooves. When the resilient key 521 is required to be connected with the first through hole, an operator plugs the resilient key 521 into the first through hole, the convex part on the resilient key 521 is made of rubber, when the resilient key 521 is plugged into the first through hole, the convex part deforms until the convex part reaches the corresponding clamping groove, the convex part recovers deformation, so that the convex part on the resilient key 521 is clamped with the clamping groove on the corresponding first through hole, the resilient key 521 is further clamped with the first through hole, the resilient key 521 cannot be separated from the first through hole, the wire damage caused by the separation of the resilient key 521 from the first through hole is prevented, the resilient key 521 is provided with a second through hole, the connecting piece 51 is provided with a third through hole, the first through hole and the third through hole are communicated with each other through the second through hole, the connecting piece 51 is connected with the shell 41 through the resilient key 521, and the wire of the FFU routing system can sequentially enter the third through hole, the first through hole, the second through hole, the resilient key 521, the second through hole, the convex part and the convex part, Second through-hole on the suppress key 521 and walk the first through-hole on the line casing 41, finally get into the wiring inslot, prevent that the electric wire from being stained with the ash, the aperture of first through-hole is greater than the aperture of second through-hole and third through-hole, the aperture of first through-hole is enough to hold suppress key 521, the aperture of second through-hole and third through-hole is enough to pass through the electric wire of FFU system, first through-hole, all be provided with the sponge in second through-hole and the third through-hole, it makes the electric wire can not worn and torn when passing first through-hole, in second through-hole and the third through-hole to set up the sponge.

The working principle is as follows: the FFU system is ventilated into a first space through a first atmosphere diversion hole 61 and is ventilated into a second space through a second atmosphere diversion hole 62, airflow in the first space flows to a robot arm area after passing through the first space, airflow in the second space flows to a process tank body area after passing through the second space, after chemical reaction is carried out in the process tank body area, acid gas is upwards volatilized to the second space, the acid gas is difficult to enter the first space through a partition plate 21, instruments in the robot arm area are not corroded, the first diversion plate 31 is obliquely arranged, the speed of the airflow is increased after the airflow flows through the first diversion plate 31 from top to bottom, so that the acid gas in the second space is prevented from entering the first space, the instruments in the robot arm area are corroded, the second diversion plate 32 is obliquely arranged, after the airflow flows through the second diversion plate 32 from top to bottom, the speed of the airflow is increased, and the flow rate of the gas in the second space is increased, the flow rate of the acid gas in the second space is relatively slow, so that the acid gas in the second space can be driven by the gas in the second space to be away from the second space together and be pumped out.

Wire casing 41 makes the electric wire of FFU system can be accomodate at the wiring inslot through setting up to prevent that the electric wire from ageing, when needs are fixed shell 1, fixed plate 7 and wire casing 41 each other, operating personnel uses the bolt to pass corresponding first fixed orifices, second fixed orifices and third fixed orifices in proper order, makes shell 1, fixed plate 7 and wire casing 41 reciprocal anchorage, prevents to walk that wire casing 41 removes damage electric wire.

When the FFU shell is required to be connected with the routing shell 41, an operator plugs the spring pressing key 521 into the first through hole, the convex part on the spring pressing key 521 is made of rubber, when the spring pressing key 521 is plugged into the first through hole, the convex part deforms, and when the convex part reaches the corresponding clamping groove, the convex part recovers deformation, so that the convex part on the spring pressing key 521 is clamped with the clamping groove on the corresponding first through hole, the spring pressing key 521 is further clamped with the first through hole, the spring pressing key 521 cannot be separated from the first through hole, the wire damage caused by the separation of the spring pressing key 521 from the first through hole is prevented, the connecting piece 51 is connected with the routing shell 41 through the spring pressing key 521, the wire of the FFU system can sequentially enter the third through hole in the connecting piece 51, the second through hole on the spring pressing key 521 and the first through hole in the routing shell 41, and the wire is finally stored in the routing slot.

Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a FFU system mounting structure convenient to dismouting, includes shell (1), its characterized in that: the air flow separation device is characterized in that a partition part (2) and a flow guide part (3) are arranged in the shell (1), the partition part (2) comprises a partition plate (21), the partition plate (21) divides an air flow space into a first space and a second space, the flow guide part (3) comprises a first flow guide plate (31) and a second flow guide plate (32), one ends of the first flow guide plate (31) and the second flow guide plate (32) are fixedly connected with the top wall of the shell (1), the first flow guide plate (31) and the second flow guide plate (32) are obliquely arranged, and the distance between the ends, close to the top surface of the shell (1), of the first flow guide plate (31) and the second flow guide plate (32) is greater than the distance between the ends, far away from the top surface of the shell (1), of the first flow guide plate (31) and the second flow guide plate (32);

the top surface of the shell (1) is provided with a concealing assembly (4), the concealing assembly (4) comprises a wiring shell (41), a wiring groove is formed in the wiring shell (41) and used for accommodating wires of an FFU shell, a first through hole is formed in the side surface of the wiring shell (41), and the first through hole is communicated with the wiring groove;

the FFU shell with be provided with gomphosis subassembly (5) between walking line casing (41), gomphosis subassembly (5) include connecting piece (51), connecting piece (51) with be provided with gomphosis portion (52) between walking line casing (41), gomphosis portion (52) are including suppressing key (521), suppress key (521) with first through-hole looks adaptation, so that suppress key (521) partly be located the trough inslot, the electric wire passes connecting piece (51) with suppress key (521) and get into the trough inslot.

2. An FFU system mounting structure facilitating disassembly and assembly as claimed in claim 1, wherein: the first guide plate (31) is located in the first space, the second guide plate (32) is located in the second space, the first guide plate (31) and the second guide plate (32) are both arc-shaped plates, a concave portion is formed on one side, right opposite to the first guide plate (31) and the second guide plate (32), of each concave portion, and a buffering cushion is arranged on each concave portion.

3. An FFU system mounting structure facilitating attachment and detachment of claim 2, wherein: the distance between the first baffle (31) and the partition plate (21) is smaller than the distance between the second baffle (32) and the partition plate (21).

4. An FFU system mounting structure convenient to dismount and mount as claimed in claim 3, wherein: division board (21) fixed connection is between the relative both sides inner wall of shell (1), the shape of cross section of division board (21) is trapezoidal, just division board (21) increase gradually along the cross-sectional area of shell (1) top to shell (1) bottom, division board (21) are close to contained angle between the side of first guide plate (31) and shell (1) top surface is 87 degrees.

5. An FFU system mounting structure facilitating disassembly and assembly as claimed in claim 1, wherein: be provided with atmosphere portion (6) on shell (1), atmosphere portion (6) include first atmosphere water conservancy diversion hole (61) and second atmosphere water conservancy diversion hole (62), first atmosphere water conservancy diversion hole (61) with second atmosphere water conservancy diversion hole (62) are all seted up in shell (1) top surface, first atmosphere water conservancy diversion hole (61) with first space link up each other, second atmosphere water conservancy diversion hole (62) with the second space link up each other, first atmosphere water conservancy diversion hole (61) with be formed with linkage segment (63) between second atmosphere water conservancy diversion hole (62), division board (21) with linkage segment (63) fixed connection.

6. An FFU system mounting structure facilitating disassembly and assembly as claimed in claim 1, wherein: the improved cable routing device is characterized in that two first fixing holes are formed in the top surface of the shell (1), a fixing plate (7) is arranged on the shell (1), two second fixing holes are formed in the fixing plate (7), the second fixing holes correspond to the first fixing holes one to one, the second fixing holes are located above the first fixing holes, folded edges are formed at two ends of the cable routing shell (41), third fixing holes are formed in the folded edges and correspond to the second fixing holes one to one, and the third fixing holes are located above the second fixing holes.

7. An FFU system mounting structure facilitating disassembly and assembly as claimed in claim 1, wherein: the elastic pressing key (521) is provided with a second through hole, the connecting piece (51) is internally provided with a third through hole, the first through hole and the third through hole are communicated with each other through the second through hole, and the aperture of the first through hole is larger than that of the second through hole and that of the third through hole.

8. An FFU system mounting structure facilitating disassembly and assembly as claimed in claim 7, wherein: sponges are arranged in the first through hole, the second through hole and the third through hole.

9. An FFU system mounting structure facilitating disassembly and assembly as claimed in claim 8, wherein: two clamping grooves are formed in the inner wall of the first through hole, the two clamping grooves are arranged oppositely, convex parts are formed on two opposite side faces of the elastic pressing key (521), and the convex parts correspond to the clamping grooves one to one and are matched with the clamping grooves.

10. An FFU system mounting structure facilitating disassembly and assembly as claimed in claim 1, wherein: the wiring shell (41) is provided with a cover body, a plurality of guiding pieces are arranged in the wiring groove, and the guiding pieces are used for guiding the trend of the electric wire.