CN213936137U - FFU system installation structure with good flow guide function - Google Patents
FFU system installation structure with good flow guide function Download PDFInfo
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- CN213936137U CN213936137U CN202120176836.2U CN202120176836U CN213936137U CN 213936137 U CN213936137 U CN 213936137U CN 202120176836 U CN202120176836 U CN 202120176836U CN 213936137 U CN213936137 U CN 213936137U
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Abstract
The utility model discloses a FFU system installation structure with good flow guiding function, which has the technical proposal that the FFU system installation structure comprises an air flow space, the air flow space is positioned at the top of a shell, a separating part and a flow guiding part are arranged in the air flow space, the air flow space is divided into a first space and a second space by a separating plate, a robot arm area is positioned below the first space, a process groove body area is positioned below the second space, after chemical reaction is carried out in the process groove body area, acid gas volatilizes upwards to the second space, the acid gas is difficult to enter the first space by the separating plate, so that instruments in the robot arm area are not corroded, a first flow guiding plate is arranged in the first space, a second flow guiding plate is arranged in the second space, the first flow guiding plate and the second flow guiding plate are both obliquely arranged, after air flow in the FFU system flows through the second flow guiding plate from top to bottom, the flow velocity of the air flow becomes fast, thereby driving the acid gas to be far away from the second space.
Description
Technical Field
The utility model relates to a FFU installation technical field, more specifically the utility model relates to a FFU system installation structure with good water conservancy diversion function that says so.
Background
The semiconductor device comprises a shell, wherein wet chemical reaction is generally required to be carried out in the shell, gas generated by the wet chemical reaction causes the gas environment of a process area inside the shell to become impure, and in order to maintain a pure and stable gas environment inside the shell, an FFU system is generally required to be installed on the shell and is used for providing a good atmosphere inside the shell, and the FFU system comprises an FFU shell;
the air flow space is positioned above the mechanical arm area and the process groove area, after the FFU system provides air flow to the inside of the shell, the air flow enters the air flow space firstly and then enters the mechanical arm area and the process groove area, chemical reaction can be carried out in the process groove area, acid gas can be generated through chemical reaction, and can corrode equipment in the FFU system.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art exists, the utility model aims to provide a FFU system mounting structure with good water conservancy diversion function avoids sour gas behind the chemical reaction to get into the robotic arm region, causes the corruption to the apparatus.
In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a FFU system mounting structure with good water conservancy diversion function, includes the air current space, the air current space is located the shell top, be provided with partition and water conservancy diversion portion in the air current space, the partition includes the division board, the division board will the air current space is separated into first space and second space, and the robotic arm region is located first space below, technology cell body region are located second space below, water conservancy diversion portion includes first guide plate and second guide plate, first guide plate is located in the first space, the second guide plate is located in the second space, first guide plate with the second guide plate all inclines to set up, first guide plate with the one end of second guide plate all with shell roof fixed connection, first guide plate with the second guide plate is close to the distance between the one end of shell top surface is greater than first guide plate with the second guide plate is kept away from the distance of shell top surface The distance between one ends, after the chemical reaction is carried out in the process tank area, the acid gas volatilizes upwards to the second space, the acid gas is difficult to enter the first space through the partition plate, so that instruments in the robot arm area are not corroded, the flow velocity of the gas flow in the FFU system is increased after the gas flow flows through the second guide plate from top to bottom, and the acid gas is driven to be far away from the second space.
As the utility model discloses a further improvement is provided with atmosphere portion on the shell, and atmosphere portion includes first atmosphere water conservancy diversion hole and second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with the shell top surface is all seted up in second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with first space link up each other, second atmosphere water conservancy diversion hole with the second space link up each other, the FFU system to first atmosphere water conservancy diversion hole with the downthehole ventilation of second atmosphere water conservancy diversion for inside gas gets into the shell.
As a further improvement of the present invention, first atmosphere water conservancy diversion hole with be formed with connecting portion between the second atmosphere water conservancy diversion hole, connecting portion include first connecting plate and second connecting plate, first connecting plate with second connecting plate an organic whole is formed, first connecting plate with the shell top surface is parallel, first connecting plate with second connecting plate mutually perpendicular, the division board with first connecting plate all is located the same side of second connecting plate, just the division board is located first connecting plate below, the division board with the contained angle of first connecting plate is 87 degrees, through the division board will first space with the separation of second space prevents that sour gas from getting into first space.
As a further improvement of the utility model, the first fixed orifices of a plurality of have been seted up at the division board top, a plurality of second fixed orifices has been seted up to second connecting plate bottom, first fixed orifices with second fixed orifices one-to-one makes the division board with the second connecting plate can reciprocal anchorage.
As a further improvement of the present invention, the first guide plate and the second guide plate and the included angle between the top surfaces of the housings are 45 degrees.
The utility model has the advantages that: the utility model discloses a set up partition and water conservancy diversion portion in air flow space, fall into first space and second space with air flow space through the division board, the robotic arm region is located first space below, technology cell body region is located second space below, after carrying out chemical reaction in the technology cell body region, sour gas upwards volatilizees to the second space, make sour gas be difficult to get into first space through the division board, make the regional apparatus of robotic arm not corroded, set up first guide plate in first space, set up the second guide plate in the second space, and first guide plate and second guide plate all incline the setting, after the air current in the FFU system down flows through the second guide plate from last, the velocity of flow of air current becomes fast, thereby it keeps away from the second space to drive sour gas.
Drawings
Fig. 1 is a schematic front view of the present invention;
fig. 2 is an enlarged schematic view of a portion a in fig. 1 according to the present invention.
Reference numerals: 1. an air flow space; 11. a first space; 12. a second space; 2. a partition portion; 21. a partition plate; 3. a flow guide part; 31. a first baffle; 32. a second baffle; 4. an atmosphere section; 41. a first atmosphere guiding hole; 42. a second atmosphere guiding hole; 5. a connecting portion; 51. a first connecting plate; 52. a second connecting plate.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.
Referring to fig. 1 and 2, an FFU system installation structure with a good flow guiding function according to this embodiment includes an air flow space 1, where the air flow space 1 is located above a robot arm region and a process tank region, a chemical reaction may occur in the process tank region, the chemical reaction may generate acid gas, the acid gas may generally volatilize upwards, an air exhaust region is disposed at one side of the process tank, a part of the acid gas may be exhausted to the outside of a housing for emission treatment, but still a small part of the acid gas may continue to volatilize upwards, enter a second space 12, then enter the first space 11 through a gap between the first space 11 and the second space 12, and finally enter the robot arm region to corrode an instrument, so that the durability of the instrument is reduced. The casing is provided with an atmosphere part 4, the acid gas can corrode equipment and needs to be treated, an FFU system is arranged on the casing, the FFU system injects air flow into the casing through the atmosphere part 4 and simultaneously removes the acid gas under the action of an air exhaust area, the atmosphere part 4 comprises a first atmosphere diversion hole 41 and a second atmosphere diversion hole 42, through arranging the two diversion holes, the air flow injected into the casing by the FFU system can be divided into two air flows, one air flow enters a first space 11 through a first diversion plate 31, the other air flow enters a second space 12 through a second diversion plate 32, the two air flows reduce mutually diffused gas under the isolation action of a partition plate 21, when the acid gas volatilizes and diffuses upwards to the second space 12, the acid gas can be brought back to the upper part of the process tank body area by the air flow injected into the second space 12 by the FFU system, then under the action of the air exhaust area, acid gas is brought to the outside of the shell, so that the acid gas cannot enter the robot arm area to corrode the instrument. The first atmosphere guiding hole 41 and the second atmosphere guiding hole 42 are both opened on the top surface of the housing, the first atmosphere guiding hole 41 is communicated with the first space 11, and the second atmosphere guiding hole 42 is communicated with the second space 12. The FFU system is positioned above the shell, the FFU system is communicated with the inside of the shell through a first atmosphere diversion hole 41 and a second atmosphere diversion hole 42, the FFU system is communicated with the first space 11 through the first atmosphere diversion hole 41 and is communicated with the second space 12 through the second atmosphere diversion hole 42, so that acid gas cannot stay in the first space 11 and the second space 12 to protect equipment from being damaged, the airflow space 1 is positioned at the top of the shell, a partition part 2 and a diversion part 3 are arranged in the airflow space 1, the gases in the first space 11 and the second space 12 are difficult to communicate with each other through the partition part 2, the acid gas is prevented from entering the second space 12 through the first space 11, the flow rate of the airflow injected into the first space 11 and the second space 12 by the FFU system can be realized through the diversion part 3, so that the acid gas in the first space 11 and the second space 12 is under the action of the gas with the higher flow rate, the acid gas flows back to the upper part of the process tank body area and is further extracted through the air extraction area to prevent the pollution of instruments, the partition part 2 comprises a partition plate 21, the partition plate 21 divides the gas flow space 1 into a first space 11 and a second space 12, the robot arm area is positioned below the first space 11, the process tank body area is positioned below the second space 12, the gas flow in the first space 11 flows to the robot arm area through the first space 11, the gas flow in the second space 12 flows to the process tank body area through the second space 12, after the chemical reaction is carried out in the process tank body area, the acid gas is volatilized upwards to the second space 12, the acid gas is difficult to enter the first space 11 through the partition plate 21, so that the instruments in the robot arm area are not corroded, the flow guide part 3 comprises a first flow guide plate 31 and a second flow guide plate 32, the first flow guide plate 31 is positioned in the first space 11, and the first flow guide plate 31 is obliquely arranged, the distance between the first guide plate 31 and the second connecting plate 52 is smaller and smaller from the top of the housing to the bottom of the housing, when the air of the FFU system passes through the first guide plate 31 from top to bottom, the space through which the air flows is smaller and smaller, so the flow rate of the air flow is faster, the flow rate of the air at the position of the gap between the first space 11 and the second space 12, which is close to the first space 11, is faster, the flow rate of the acid gas at the position of the gap between the first space 11 and the second space 12 is slower, so the acid gas cannot enter the first space 11 through the gap between the first space 11 and the second space 12, and cannot corrode instruments in the robot arm area, the second guide plate 32 is located in the second space 12, because the second guide plate 32 is obliquely arranged, the distance between the second guide plate 32 and the second connecting plate 52 is smaller and smaller from the top of the housing to the bottom of the housing, when the air of the FFU system passes through the second guide plate 32 from top to bottom, the space that the air current circulates is littleer and smaller, therefore the velocity of flow of air current can become fast, the velocity of flow of sour gas in the second space 12 is comparatively slow, thereby take away the sour gas in the second space 12 from second space 12 together, and take out, make sour gas unable with the apparatus contact in the robotic arm region, first guide plate 31 and second guide plate 32 all incline the setting, the one end of first guide plate 31 and second guide plate 32 all with shell roof fixed connection, the distance between the one end that first guide plate 31 and second guide plate 32 are close to the shell top surface is greater than the distance between the one end that first guide plate 31 and second guide plate 32 keep away from the shell top surface. The included angles between the first guide plate 31 and the second guide plate 32 and the top surface of the housing are both 45 degrees, and the included angles are set to 45 degrees, so that the airflow can obtain a large flow velocity, and the acid gas can be brought back to the upper part of the process tank body area for air extraction treatment, a connecting part 5 is formed between the first atmosphere guide hole 41 and the second atmosphere guide hole 42, the connecting part 5 comprises a first connecting plate 51 and a second connecting plate 52, the first connecting plate 51 is used for fixing the second connecting plate 52, the second connecting plate 52 is used for fixing the partition plate 21, the first connecting plate 51 is integrally formed with the second connecting plate 52, the first connecting plate 51 is parallel to the top surface of the housing, the first connecting plate 51 is perpendicular to the second connecting plate 52, the partition plate 21 and the first connecting plate 51 are both positioned on the same side surface of the second connecting plate 52, and the partition plate 21 is positioned below the first connecting plate 51, so that the partition plate 21 can extend downwards, the airflow space 1 is divided into a first space 11 and a second space 12, so that airflow is divided to treat acid gas, the included angle between the partition plate 21 and the first connecting plate 51 is 87 degrees, the distance between the first connecting plate 51 and the inner wall of the shell close to the first space 11 is reduced from the top to the bottom of the shell, when the airflow in the first space 11 passes through the partition plate 21 from top to bottom, the flow rate of the airflow is further accelerated, the flow rate of the acid gas in the gap between the first space 11 and the second space 12 is slow, so that the acid gas cannot enter the first space 11 through the gap between the first space 11 and the second space 12, instruments in the robot arm area cannot be corroded, the top of the partition plate 21 is provided with a plurality of first fixing holes, the bottom of the second connecting plate 52 is provided with a plurality of second fixing holes, the first fixing holes correspond to the second fixing holes one by one, when the partition plate 21 needs to be fixed on the second connecting plate 52, an operator uses bolts to sequentially pass through the corresponding first fixing holes and second fixing holes, so that the partition plate 21 is fixedly connected with the second connecting plate 52.
The working principle is as follows: the air flow space 1 is positioned above a mechanical arm area and a process tank area, chemical reaction can be carried out in the process tank area, acid gas can be generated by the chemical reaction and can corrode equipment, therefore, air flow needs to be injected into a shell through an FFU system to remove the acid gas, the acid gas generally volatilizes upwards, an air exhaust area is arranged on one side of the process tank body, part of the acid gas can be exhausted to the outside of the shell to be exhausted, but a small part of the acid gas continuously volatilizes upwards to enter a second space 12 and enter a first space 11 through the second space 12 to enter the mechanical arm area to corrode instruments in the mechanical arm area, the FFU system is positioned above the shell, the FFU system is communicated with the inside of the shell through a first atmosphere diversion hole 41 and a second atmosphere diversion hole 42, the FFU system ventilates the first space 11 through the first atmosphere diversion hole 41 and ventilates the second space 12 through the second atmosphere diversion hole 42, the air flow in the first space 11 is communicated to the robot arm area through the first space 11, the air flow in the second space 12 is communicated to the process tank body area through the second space 12, after chemical reaction is carried out in the process tank body area, the acid gas is volatilized upwards to the second space 12, the acid gas is difficult to enter the first space 11 through the partition board 21, so that instruments in the robot arm area are not corroded, the first guide plate 31 is obliquely arranged, after the air flow flows through the first guide plate 31 from top to bottom, the speed of the air flow is increased, thereby preventing the acid gas in the second space 12 from entering the first space 11 and corroding the instruments in the robot arm area, the second guide plate 32 is obliquely arranged, the speed of the air flow is increased after the air flow flows through the second guide plate 32 from top to bottom, thereby bringing the sour gas within the second space 12 along away from the second space 12 so that the sour gas cannot come into contact with instruments in the robot arm area.
Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (5)
1. An FFU system mounting structure with good water conservancy diversion function, includes air current space (1), air current space (1) is located the shell top, its characterized in that: the air flow space (1) is internally provided with a partition part (2) and a flow guide part (3), the partition part (2) comprises a partition plate (21), the partition plate (21) divides the air flow space (1) into a first space (11) and a second space (12), a robot arm area is positioned below the first space (11), a process groove area is positioned below the second space (12), the flow guide part (3) comprises a first flow guide plate (31) and a second flow guide plate (32), the first flow guide plate (31) is positioned in the first space (11), the second flow guide plate (32) is positioned in the second space (12), the first flow guide plate (31) and the second flow guide plate (32) are obliquely arranged, one end of the first flow guide plate (31) and one end of the second flow guide plate (32) are fixedly connected with the top wall of the shell, the distance between the ends of the first and second baffles (31, 32) near the top surface of the enclosure is greater than the distance between the ends of the first and second baffles (31, 32) away from the top surface of the enclosure.
2. An FFU system mounting structure with good air guide function according to claim 1, wherein: be provided with atmosphere portion (4) on the shell, atmosphere portion (4) include first atmosphere water conservancy diversion hole (41) and second atmosphere water conservancy diversion hole (42), first atmosphere water conservancy diversion hole (41) with shell top surface is all seted up in second atmosphere water conservancy diversion hole (42), first atmosphere water conservancy diversion hole (41) with first space (11) link up each other, second atmosphere water conservancy diversion hole (42) with second space (12) link up each other.
3. An FFU system mounting structure with good air guiding function as claimed in claim 2, wherein: first atmosphere water conservancy diversion hole (41) with be formed with connecting portion (5) between second atmosphere water conservancy diversion hole (42), connecting portion (5) include first connecting plate (51) and second connecting plate (52), first connecting plate (51) with second connecting plate (52) an organic whole forms, first connecting plate (51) with the shell top surface is parallel, first connecting plate (51) with second connecting plate (52) mutually perpendicular, division board (21) with first connecting plate (51) all are located same side of second connecting plate (52), just division board (21) are located first connecting plate (51) below, division board (21) with the contained angle of first connecting plate (51) is 87 degrees.
4. An FFU system mounting structure with good air guide function according to claim 3, wherein: the top of the partition plate (21) is provided with a plurality of first fixing holes, the bottom of the second connecting plate (52) is provided with a plurality of second fixing holes, and the first fixing holes correspond to the second fixing holes in a one-to-one mode.
5. An FFU system mounting structure with good air guide function according to claim 1, wherein: the included angle between the first guide plate (31) and the second guide plate (32) and the top surface of the shell is 45 degrees.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120176836.2U CN213936137U (en) | 2021-01-21 | 2021-01-21 | FFU system installation structure with good flow guide function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120176836.2U CN213936137U (en) | 2021-01-21 | 2021-01-21 | FFU system installation structure with good flow guide function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213936137U true CN213936137U (en) | 2021-08-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120176836.2U Active CN213936137U (en) | 2021-01-21 | 2021-01-21 | FFU system installation structure with good flow guide function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN213936137U (en) |
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2021
- 2021-01-21 CN CN202120176836.2U patent/CN213936137U/en active Active
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