CN215087008U - Flow guide structure of wet method equipment - Google Patents

Flow guide structure of wet method equipment Download PDF

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Publication number
CN215087008U
CN215087008U CN202120175231.1U CN202120175231U CN215087008U CN 215087008 U CN215087008 U CN 215087008U CN 202120175231 U CN202120175231 U CN 202120175231U CN 215087008 U CN215087008 U CN 215087008U
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China
Prior art keywords
baffle
connecting plate
water conservancy
conservancy diversion
wet process
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CN202120175231.1U
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Chinese (zh)
Inventor
张九勤
李志锋
徐铭
陈佳炜
邓信甫
刘大威
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhiwei Semiconductor Shanghai Co Ltd
PNC Process Systems Co Ltd
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Zhiwei Semiconductor Shanghai Co Ltd
PNC Process Systems Co Ltd
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Priority to CN202120175231.1U priority Critical patent/CN215087008U/en
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Abstract

The utility model discloses a water conservancy diversion structure of wet process equipment, its technical scheme main points are including first connecting plate, and first connecting plate is located technology cell area, and first connecting plate and shell roof fixed connection are provided with water conservancy diversion mechanism on the first connecting plate, and water conservancy diversion mechanism is used for preventing that the condensate liquid from getting into the mechanism of ventilating, and water conservancy diversion mechanism includes the baffle, and the baffle can be dismantled with first connecting plate and be connected, offers flutedly on the baffle bottom surface, recess and fixed plate looks adaptation. Through set up water conservancy diversion mechanism on first connecting plate, water conservancy diversion mechanism includes the baffle, and water conservancy diversion mechanism is used for preventing the condensate from getting into venting mechanism, prevents that venting mechanism department from attaching to the circulation speed that the condensate leads to sour gas and slowing down.

Description

Flow guide structure of wet method equipment
Technical Field
The utility model relates to a wet process equipment technical field, more specifically the water conservancy diversion structure that relates to a wet process equipment that says so.
Background
The wet process equipment comprises a shell, a process tank body area and an exhaust area are included in the shell, wet process chemical reaction can be carried out in the process tank body area, acid gas can be generated through chemical reaction, the acid gas can diffuse the space in the whole wet process equipment, the machine is corroded, the service life of the machine is influenced, and therefore the acid gas needs to be treated. And a ventilation mechanism is arranged between the process tank body area and the exhaust area, and the ventilation mechanism enables the process tank body area and the exhaust area to be communicated with each other. The outside of wet process equipment is provided with air extraction equipment, uses air extraction equipment to take out the sour gas to the exhaust region from the process tank body region, and finally discharges to the wet process equipment outside, is provided with the fixed plate in the shell, and the fixed plate divides into two spaces with the process tank body region.
When the air extraction equipment works, the pressure and the temperature in the process tank area can be changed, so that liquid generated in the wet chemical reaction process forms condensate, the condensate flows to the ventilation mechanism along with the acid gas under the driving of the air extraction equipment, and part of the condensate can be attached to the ventilation mechanism, so that the circulation speed of the acid gas is reduced.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art exists, the utility model aims to provide a water conservancy diversion structure of wet process equipment for block the condensate liquid and get into the ventilation mechanism.
In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a water conservancy diversion structure of wet process equipment, includes first connecting plate, first connecting plate is located technology cell region, just first connecting plate and shell roof fixed connection, be provided with water conservancy diversion mechanism on the first connecting plate, water conservancy diversion mechanism is used for preventing the condensate liquid from getting into the mechanism of ventilating, water conservancy diversion mechanism includes the baffle, the baffle with the connection can be dismantled to first connecting plate, set up flutedly on the baffle bottom surface, recess and fixed plate looks adaptation. The baffle is fixed through the groove and the first connecting plate.
As a further improvement of the present invention, a fixing mechanism is provided on the first connecting plate, the fixing mechanism is used for fixing the first connecting plate and the baffle to each other.
As a further improvement of the utility model, the fixing mechanism includes a plurality of first fixed orificess, be formed with the convex part on the first connecting plate bottom surface, first fixed orifices all seted up in on the convex part, a plurality of second fixed orificess have been seted up on the baffle, first fixed orifices with the second fixed orifices one-to-one uses the bolt to pass correspondingly first fixed orifices with the second fixed orifices will baffle fixed connection be in on the first connecting plate.
As a further improvement of the present invention, the width of the baffle is greater than one fifth of the length of the baffle, and less than one fourth of the length of the baffle, and the baffle covers the aeration mechanism so that the condensate cannot enter the aeration mechanism.
As a further improvement of the present invention, the length of the groove is greater than seventy-tenth of the length of the baffle, and is less than fifty-tenth of the length of the baffle, the width of the groove is greater than one hundred twenty-tenth of the width of the baffle, and is less than one hundred of the width of the baffle, the height of the groove is the same as the thickness of the baffle, through the groove will the baffle block is on the fixing plate.
As the utility model discloses a further improvement is provided with the second connecting plate between the technology cell body is regional and the exhaust region, and venting mechanism is located the second connecting plate is close to the regional one side of technology cell body, the second connecting plate is kept away from the regional one side of technology cell body and is provided with and holds the box, hold and set up the holding tank in the box, when the air exhaust equipment during operation, sour gas loops through venting mechanism and holding tank.
As a further improvement of the present invention, the distance between the baffle and the second connecting plate is greater than the width of the baffle.
As a further improvement, the one side that holds the box and keep away from the technology cell body region has seted up the exhaust hole, the exhaust hole with the holding tank link up each other, is provided with the blast pipe in the exhaust region, the one end and the exhaust hole fixed connection of blast pipe, the other end and the air exhaust equipment intercommunication of blast pipe, sour gas passes through the blast pipe is to the outside discharge of shell.
The utility model has the advantages that: the utility model discloses a set up water conservancy diversion mechanism on first connecting plate, water conservancy diversion mechanism includes the baffle, and water conservancy diversion mechanism is used for preventing that the condensate liquid from getting into the ventilation mechanism, prevents that ventilation mechanism department from adhering to the circulation speed that the condensate liquid leads to sour gas and slowing down, through setting up ventilation mechanism, holds box and blast pipe for air exhaust equipment during operation, sour gas loops through ventilation mechanism, holds box and blast pipe, finally to the outside discharge of shell.
Drawings
Fig. 1 is a schematic perspective sectional view of the present invention;
fig. 2 is an enlarged schematic view of a portion a in fig. 1 according to the present invention.
Reference numerals: 1. a first connecting plate; 2. a flow guide mechanism; 3. a baffle plate; 31. a groove; 4. a second connecting plate; 5. accommodating the box; 51. accommodating grooves; 6. an exhaust hole; 7. and (4) exhausting the gas.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.
Referring to fig. 1 and fig. 2, the water conservancy diversion structure of wet process equipment of this embodiment, including first connecting plate 1, first connecting plate 1 bottom is used for fixed stop 3, in order to stop the condensate liquid to get into the ventilation mechanism, first connecting plate 1 is located technology cell area territory, and first connecting plate 1 and shell roof fixed connection, be provided with water conservancy diversion mechanism 2 on the first connecting plate 1, wet process equipment includes the shell, including technology cell area territory and exhaust area in the shell, can carry out wet process chemical reaction in the technology cell area territory, chemical reaction can produce sour gas, sour gas can fill the space in the whole wet process equipment, cause the corruption to the machine, influence the life of machine, consequently, need handle sour gas. The outside of the wet process equipment is provided with air extraction equipment, acid gas is extracted from a process tank body area to an exhaust area by the air extraction equipment and finally discharged to the outside of the wet process equipment, when the air extraction equipment works, the pressure and the temperature in the process tank body area can change, so that liquid generated in the wet process chemical reaction process forms condensate, the condensate flows to the ventilation mechanism along with the acid gas under the driving of the air extraction equipment, part of the condensate can be attached to the ventilation mechanism, the circulation speed of the acid gas is reduced, therefore, a flow guide mechanism 2 is required to be arranged for preventing the condensate from entering the ventilation mechanism, the flow guide mechanism 2 comprises a baffle plate 3, when the air extraction equipment works, the condensate flows to the ventilation mechanism under the driving of the air extraction equipment, before reaching the position of the ventilation mechanism, the condensate reaches the baffle plate 3 and is attached to the baffle plate 3, and the condensate is prevented from reaching the position of the ventilation mechanism and being attached to the ventilation mechanism, the normal circulation of the acid gas is not affected. Baffle 3 can be dismantled with first connecting plate 1 and be connected, and baffle 3 is used for blockking the condensate liquid, when adhering to too much condensate liquid on baffle 3, needs to change baffle 3 for baffle 3 has the better effect of blockking the condensate liquid, can dismantle to connect baffle 3 of being convenient for to change, and the width of baffle 3 is greater than the fifth of baffle 3 length, and is less than the fourth of baffle 3 length. The length of the ventilation mechanism is long, so the length of the baffle 3 needs to be long, so that the condensed liquid cannot pass through the baffle 3 and cannot be attached to the ventilation mechanism, and the first connecting plate 1 is provided with a fixing mechanism which is used for fixing the first connecting plate 1 and the baffle 3 to each other. The fixing mechanism comprises a plurality of first fixing holes, convex parts are formed on the bottom surface of the first connecting plate 1, the first fixing holes are all formed on the convex parts, a plurality of second fixing holes are formed on the baffle plate 3, the first fixing holes correspond to the second fixing holes one by one, when the baffle plate 3 and the first connecting plate 1 need to be fixed mutually, an operator sequentially penetrates through the corresponding first fixing holes and the second fixing holes by using bolts to enable the baffle plate 3 and the first connecting plate 1 to be fixed mutually, a groove 31 is formed on the bottom surface of the baffle plate 3, the groove 31 is matched with the fixing plate, a fixing plate is arranged in the shell, the fixing plate divides the process tank body area into two spaces, a bulge is formed on the fixing plate, the bulge is matched with the groove 31, when the fixing plate and the baffle plate 3 need to be fixed mutually, the bulge is clamped with the groove 31 to enable the bulge and the groove 31 to be fixed mutually, and the baffle plate 3 is prevented from shaking caused when condensate is attached to the baffle plate 3, make baffle 3 can more effectively block condensate liquid and get into ventilation mechanism, the length of recess 31 is greater than seventy-tenth of baffle 3 length, and is less than fifty-one of baffle 3 length, and the width of recess 31 is greater than one hundred twenties of baffle 3 width, and is less than one hundred of baffle 3 width, and the height of recess 31 is the same with the thickness of baffle 3, and the size of recess 31 need not be too big, only need can with the protruding mutual block of fixed plate can.
The second connecting plate 4 is arranged between the process tank body area and the exhaust area, the ventilation mechanism is located on one side, close to the process tank body area, of the second connecting plate 4, the process tank body area and the exhaust area are communicated with each other through the ventilation mechanism, when the air exhaust equipment works, acid gas can enter the exhaust area through the process tank body area, the acid gas can be exhausted, the accommodating box 5 is arranged on one side, far away from the process tank body area, of the second connecting plate 4, the accommodating box 51 is arranged in the accommodating box 5, the accommodating box 5 is used for accommodating the acid gas, and when the air exhaust equipment works, the acid gas sequentially passes through the ventilation mechanism and the accommodating box 51. The distance between baffle 3 and the second connecting plate 4 is greater than the width of baffle 3, still have certain space between baffle 3 and the second connecting plate 4, make sour gas can not blockked by baffle 3, can get into holding tank 51 through the air mechanism, hold box 5 and keep away from the regional one side of technology cell body and seted up exhaust hole 6, exhaust hole 6 and holding tank 51 link up each other, be provided with blast pipe 7 in the exhaust region, blast pipe 7 is used for circulating sour gas, when air exhaust equipment during operation, sour gas gets into holding tank 51 through the air mechanism from the regional process cell body, get into blast pipe 7 through holding tank 51, finally discharge to the shell outside, the one end and the exhaust hole 6 fixed connection of blast pipe 7, the other end and the air exhaust equipment intercommunication of blast pipe 7.
The working principle is as follows: when the air extraction equipment works, acid gas enters the holding tank 51 from the process tank body area through the ventilation mechanism, enters the exhaust pipe 7 through the holding tank 51 and is finally discharged to the outside of the shell, when the air extraction equipment works, the pressure and the temperature in the process tank body area can change, so that liquid generated in the wet chemical reaction process forms condensate liquid, the baffle plate 3 is arranged in the process tank body area, when the baffle plate 3 and the first connecting plate 1 need to be fixed mutually, an operator sequentially penetrates through the corresponding first fixing hole and the second fixing hole by using bolts, so that the baffle plate 3 and the first connecting plate 1 are fixed mutually, when the fixing plate and the baffle plate 3 need to be fixed mutually, the bulge and the groove 31 are clamped mutually, so that the baffle plate and the groove are fixed mutually, when the air extraction equipment works, the condensate liquid flows to the ventilation mechanism under the driving of the air extraction equipment, and before reaching the position of the ventilation mechanism, the acid gas reaches the baffle 3 firstly, so the acid gas can be attached to the baffle 3, and the condition that the condensed liquid reaches the position of the ventilation mechanism and is attached to the ventilation mechanism and the normal circulation of the acid gas is not influenced is avoided.
Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (8)

1. The utility model provides a wet process equipment's water conservancy diversion structure, includes first connecting plate (1), first connecting plate (1) is located technology cell area territory, just first connecting plate (1) and shell roof fixed connection, its characterized in that: be provided with water conservancy diversion mechanism (2) on first connecting plate (1), water conservancy diversion mechanism (2) are used for preventing the condensate liquid from getting into the mechanism of ventilating, water conservancy diversion mechanism (2) are including baffle (3), baffle (3) with first connecting plate (1) can be dismantled and be connected, seted up on baffle (3) bottom surface recess (31), recess (31) and fixed plate looks adaptation.
2. The flow guide structure of a wet process apparatus according to claim 1, wherein: the first connecting plate is provided with a fixing mechanism, and the fixing mechanism is used for fixing the first connecting plate and the baffle plate to each other.
3. The flow guide structure of a wet process apparatus according to claim 2, wherein: the fixing mechanism comprises a plurality of first fixing holes, a convex part is formed on the bottom surface of the first connecting plate, the first fixing holes are formed in the convex part, a plurality of second fixing holes are formed in the baffle, and the first fixing holes correspond to the second fixing holes one to one.
4. The flow guide structure of a wet process apparatus according to claim 1, wherein: the width of the baffle (3) is greater than one fifth of the length of the baffle (3) and less than one fourth of the length of the baffle (3).
5. The flow guide structure of a wet process apparatus according to claim 4, wherein: the length of the groove (31) is greater than seventy-tenth of the length of the baffle (3) and less than fifty-one of the length of the baffle (3), the width of the groove (31) is greater than one hundred twenty-one of the width of the baffle (3) and less than one hundred of the width of the baffle (3), and the height of the groove (31) is the same as the thickness of the baffle (3).
6. The flow guide structure of a wet process apparatus according to claim 1, wherein: a second connecting plate (4) is arranged between the process tank body area and the exhaust area, the ventilating mechanism is located on one side, close to the process tank body area, of the second connecting plate (4), an accommodating box (5) is arranged on one side, far away from the process tank body area, of the second connecting plate (4), an accommodating groove (51) is formed in the accommodating box (5), and when the air extracting equipment works, the sour gas sequentially passes through the ventilating mechanism and the accommodating groove (51).
7. The flow guide structure of a wet process apparatus according to claim 6, wherein: the distance between the baffle (3) and the second connecting plate (4) is larger than the width of the baffle (3).
8. The flow guide structure of a wet process apparatus according to claim 7, wherein: hold box (5) and keep away from the regional one side of technology cell body and seted up exhaust hole (6), exhaust hole (6) with holding tank (51) link up each other, are provided with blast pipe (7) in the exhaust region, the one end and the exhaust hole (6) fixed connection of blast pipe (7), the other end and the air exhaust equipment intercommunication of blast pipe (7).
CN202120175231.1U 2021-01-21 2021-01-21 Flow guide structure of wet method equipment Active CN215087008U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202120175231.1U CN215087008U (en) 2021-01-21 2021-01-21 Flow guide structure of wet method equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202120175231.1U CN215087008U (en) 2021-01-21 2021-01-21 Flow guide structure of wet method equipment

Publications (1)

Publication Number Publication Date
CN215087008U true CN215087008U (en) 2021-12-10

Family

ID=79325039

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202120175231.1U Active CN215087008U (en) 2021-01-21 2021-01-21 Flow guide structure of wet method equipment

Country Status (1)

Country Link
CN (1) CN215087008U (en)

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