CN215087009U - Exhaust device of wet process equipment - Google Patents

Abstract

The utility model discloses an exhaust device of wet process equipment, which adopts the technical proposal that the exhaust device comprises a first clapboard, a second clapboard and a third clapboard, wherein the first clapboard is positioned between a machine arm area and a process tank area, the second clapboard is positioned in the process tank area, the third clapboard is positioned between the process tank area and an exhaust area, the machine arm area and the process tank area are mutually separated by arranging a separating mechanism on the first clapboard, the process tank area is mutually communicated with the exhaust area by arranging two ventilating mechanisms on the third clapboard, a containing mechanism is arranged on the third clapboard, a flow guide mechanism is arranged on the second clapboard to prevent condensed liquid from entering the ventilating mechanisms, an exhaust pipe is arranged in the exhaust area, an adjusting mechanism is arranged in the exhaust pipe, the opening size of the exhaust pipe can be adjusted, when an air exhaust device works, sour gas passes through the ventilation mechanism, the containing mechanism and the exhaust pipe in sequence.

Description

Exhaust device of wet process equipment

Technical Field

The utility model relates to a wet process equipment technical field, more specifically the saying so relates to a wet process equipment exhaust apparatus.

Background

The wet process equipment comprises a shell, wherein the shell comprises a robot arm area, a process tank area and an exhaust area, the process tank area is located between the robot arm area and the exhaust area, wet process chemical reaction can be carried out in the process tank area, acid gas can be generated by the chemical reaction, the acid gas can diffuse the space in the whole wet process equipment, the machine is corroded, the service life of the machine is influenced, and therefore the acid gas needs to be treated. Usually, an air extraction device is arranged outside the wet method device, acid gas is extracted from an arm area and a process tank body area to an exhaust area by using the air extraction device and finally discharged to the outside of the wet method device, when the air extraction device works, the pressure and the temperature in the process tank body area can change, so that liquid generated in the wet method chemical reaction process forms condensation liquid, fresh air flow needs to be injected into the shell after the acid gas is extracted, an FFU system is arranged on the shell, air flow is provided for the interior of the shell through the FFU system,

when the pumping speed of the pumping equipment and the air supply speed of the FFU system are not matched, the gas environment inside the shell is unstable.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a be not enough to prior art exists, the utility model aims to provide a wet process equipment exhaust apparatus for adjust the inside gaseous environment of shell, make it keep relatively stable.

In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a wet process equipment exhaust apparatus, includes first baffle, second baffle and third baffle, first baffle is located between robot arm region and the technology cell body region, and the second baffle is located technology cell body region, and the third baffle is located between technology cell body region and the exhaust region, be provided with partition mechanism on the first baffle, partition mechanism is used for separating robot arm region and technology cell body region each other, be provided with two ventilation mechanism on the third baffle, ventilation mechanism is used for communicating technology cell body region and exhaust region each other, one side that technology cell body region was kept away from to the third baffle is provided with holds the mechanism, be provided with water conservancy diversion mechanism on the second baffle, water conservancy diversion mechanism is used for preventing the condensate liquid from advancing ventilation mechanism is provided with the blast pipe in the exhaust region, and when air exhaust equipment during operation, sour gas loops through ventilation mechanism, The exhaust pipe is provided with an exhaust pipe opening, the exhaust pipe opening is provided with an accommodating mechanism, the accommodating mechanism is used for adjusting the size of the exhaust pipe opening, the adjusting mechanism comprises an adjusting plate, and the outer diameter of the adjusting plate is matched with the inner diameter of the exhaust pipe.

As a further improvement, the adjusting mechanism includes an adjusting rod, the adjusting rod with the blast pipe inner wall rotates to be connected, the adjusting rod with the connection can be dismantled to the regulating plate.

As a further improvement, the adjusting plate is provided with an air pressure sensor.

As a further improvement of the present invention, the partition mechanism includes a first connecting plate, a second connecting plate, a third connecting plate and two fourth connecting plates which are fixedly connected, the first connecting plate and the first partition plate can be detached from each other for connection.

As a further improvement of the utility model, two intercommunicating pores have been seted up on the second baffle, ventilation mechanism includes the connecting plate, the connecting plate with intercommunicating pore looks adaptation and one-to-one, be provided with a plurality of group's portion of ventilating on the connecting plate, the portion of ventilating includes the air vent that a plurality of set up side by side.

As a further improvement, the holding mechanism comprises a holding box, the holding tank is arranged in the holding box, and the communicating hole is communicated with the holding tank.

As a further improvement of the utility model, the diversion mechanism includes a baffle, the baffle with the connection can be dismantled to the second baffle.

As a further improvement of the present invention, the distance between the first partition plate and the second partition plate is greater than the distance between the second partition plate and the third partition plate.

The utility model has the advantages that: the utility model discloses a set up the partition mechanism on first baffle, make the regional mutual separation of robot arm and technology cell body, through set up two air vent mechanisms on the third baffle, make the regional mutual intercommunication with the exhaust region of technology cell body, through set up holding mechanism on the third baffle, through set up water conservancy diversion mechanism on the second baffle, in order to prevent that the condensate liquid from getting into air vent mechanism, be provided with the blast pipe in the exhaust region, be provided with adjustment mechanism in the blast pipe, make the opening size of blast pipe can be adjusted, when air exhaust equipment during operation, sour gas loops through air vent mechanism, holding mechanism and blast pipe.

Drawings

Fig. 1 is a schematic perspective view of the present invention.

Reference numerals: 1. a first separator; 2. a second separator; 3. a third partition plate; 4. a separation mechanism; 5. a venting mechanism; 51. a connecting plate; 6. an accommodating mechanism; 61. accommodating the box; 7. a flow guide mechanism; 71. a baffle plate; 8. An exhaust pipe; 9. an adjustment mechanism; 91. an adjusting plate; 92. and adjusting the rod.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

Referring to fig. 1, the exhaust device for wet process equipment of the embodiment includes a first partition plate 1, a second partition plate 2 and a third partition plate 3, where the first partition plate 1 is located between a robot arm area and a process tank area, the second partition plate 2 is located in the process tank area, the third partition plate 3 is located between the process tank area and an exhaust area, a chemical reaction may occur in the process tank area, the chemical reaction may generate acid gas, the acid gas may corrode a machine, and therefore the acid gas needs to be exhausted, an FFU system is provided on a housing, an air flow is provided to the inside of the housing through the FFU system, when an air exhaust speed of an air exhaust device is not matched with an air supply speed of the FFU system, an unstable gas environment inside the housing may be caused, and an amount of the gas exhausted through an adjusting mechanism 9 is adjusted, so that the gas environment is kept relatively stable. The distance between the first separator 1 and the second separator 2 is greater than the distance between the second separator 2 and the third separator 3. Be provided with partition mechanism 4 on first baffle 1, partition mechanism 4 is used for separating the regional each other of robotic arm and technology cell body, prevents that sour gas in the technology cell body region from getting into the robotic arm region, causes the pollution to the machine in the robotic arm region, partition mechanism 4 includes fixed connection's first connecting plate, second connecting plate, third connecting plate and two fourth connecting plates, first connecting plate can be dismantled with first baffle 1 and be connected for conveniently being replaced when first connecting plate damages.

The third partition plate 3 is provided with two ventilation mechanisms 5, the ventilation mechanisms 5 are used for communicating the process tank body area with the exhaust area, so that acid gas can flow from the process tank body area to the exhaust area, the acid gas is exhausted, the exhaust amount of the acid gas is controlled through the adjusting mechanism 9, the stability of the gas environment is maintained, the second partition plate 2 is provided with two communication holes, usually, an opening with a larger range is directly formed on the third partition plate 3, the acid gas is directly extracted through the opening by an air extraction device, the extraction efficiency of the acid gas is not high, the two communication holes are arranged, so that the extraction efficiency of the acid gas is higher than that of the opening, the ventilation mechanisms 5 are arranged on the communication holes, so that the extraction efficiency of the acid gas is further improved, each ventilation mechanism 5 comprises a connecting plate 51, the connecting plates 51 are matched with the communication holes and correspond to one another, and the connecting plates 51 can cover the communication holes, make sour gas pass through the vent hole and circulate to the exhaust area, thereby discharge sour gas, and control sour gas exhaust volume through adjustment mechanism 9, with the stability of maintaining gaseous environment, be provided with the portion of ventilating of a plurality of group on the connecting plate 51, the portion of ventilating includes the vent hole that a plurality of set up side by side, the cross-sectional area of vent hole is less, the regional space of technology cell body is great, when air extraction equipment during operation, sour gas is from the regional flow direction vent hole of technology cell body, make the velocity of flow of sour gas that is close to the vent hole be greater than the velocity of flow of sour gas of keeping away from the vent hole, sour gas flow speed accelerates, make the efficiency that sour gas was taken out improve, the sour gas corrosion machine has been prevented.

The third partition plate 3 is provided with a containing mechanism 6 at one side far away from the process tank body area, the containing mechanism 6 comprises a containing box 61, when the air extracting device works, acid gas passes through the ventilating mechanism 5 from the process tank body area and then enters the containing tank, the space in the containing box 61 is large, when the acid gas flow is prevented from being too fast, the containing box 61 is full of the acid gas, the acid gas flows back to the process tank body area and corrodes the machine, the containing tank is arranged in the containing box 61, the two communicating holes are communicated with the containing tank, the exhaust pipe 8 is arranged in the exhaust area, one end of the exhaust pipe 8 is fixedly connected with the exhaust hole, the other end of the exhaust pipe 8 is communicated with the air extracting device, when the air extracting device works, the acid gas passes through the ventilating part from the process tank body area and enters the containing tank and then is exhausted to the outside of the shell through the exhaust pipe 8, the acid gas is effectively exhausted, so that the acid gas cannot corrode the machine, when the air extracting equipment works, the acid gas sequentially passes through the ventilating mechanism 5, the containing mechanism 6 and the exhaust pipe 8, the adjusting mechanism 9 is arranged in the exhaust pipe 8, the adjusting mechanism 9 is used for adjusting the size of the opening of the exhaust pipe 8, when the air extracting speed of the air extracting equipment is not matched with the air supply speed of the FFU system, the gas environment in the shell is unstable, too much or too little gas in the shell is caused, the gas environment in the shell is adjusted through the adjusting mechanism 9 to keep relatively stable, when too much gas in the shell is caused, the opening of the exhaust pipe 8 is increased through the adjusting mechanism 9, the gas extracted from the air extracting equipment to the outside of the shell is increased, when too much gas in the shell is caused, the opening of the exhaust pipe 8 is reduced through the adjusting mechanism 9, the gas extracted from the air extracting equipment to the outside of the shell is reduced, and the relative stability of the gas environment in the shell is maintained, adjustment mechanism 9 includes regulating plate 91, when the gas in the shell is too much, rotate in blast pipe 8 inside through adjusting pole 92, drive regulating plate 91 and rotate in blast pipe 8 inside, make the top and the bottom of regulating plate 91 and the interval grow of blast pipe 8 inner wall, make the opening of blast pipe 8 increase, the gas that air extracting equipment took out to the shell outside increases, when the gas in the shell is too little, rotate in blast pipe 8 inside through adjusting pole 92, it rotates to drive regulating plate 91 in blast pipe 8 inside, make the top and the bottom of regulating plate 91 and the interval of diminishing of blast pipe 8 inner wall, make the opening of blast pipe 8 reduce, the gas that air extracting equipment took out to the shell outside reduces, thereby maintain the relative stability of the inside gas environment of shell, the external diameter of regulating plate 91 and the internal diameter looks adaptation of blast pipe 8. The adjusting mechanism 9 comprises an adjusting rod 92, the adjusting rod 92 is rotatably connected with the inner wall of the exhaust pipe 8, and the adjusting rod 92 is detachably connected with the adjusting plate 91. The adjusting plate 91 is provided with a pressure sensor, the pressure sensor is used for detecting the amount of gas in the shell, when the pressure sensor detects that the pressure of the gas in the shell is too high, the gas in the shell is too much, the adjusting plate 92 is rotated in the exhaust pipe 8 to drive the adjusting plate 91 to rotate in the exhaust pipe 8, the distance between the top and the bottom of the adjusting plate 91 and the inner wall of the exhaust pipe 8 is increased, the opening of the exhaust pipe 8 is increased, the gas pumped out of the shell by the air pumping equipment is increased, when the pressure sensor detects that the pressure of the gas in the shell is too low, the gas in the shell is too little, the adjusting plate 91 is driven to rotate in the exhaust pipe 8 by the rotation of the adjusting plate 92, the distance between the top and the bottom of the adjusting plate 91 and the inner wall of the exhaust pipe 8 is decreased, and the gas pumped out of the shell by the air pumping equipment is reduced, so that the gas environment remains relatively stable.

The second partition plate 2 is provided with the flow guide mechanism 7, when the air extraction device works, the pressure and the temperature in the process tank area can be changed, so that liquid generated in the wet chemical reaction process forms condensate, the flow guide mechanism 7 is used for preventing the condensate from entering the ventilation mechanism 5, the flow guide mechanism 7 comprises a baffle plate 71, when the air extraction device works, the condensate flows to the ventilation mechanism 5 under the driving of the air extraction device, before the condensate reaches the position of the ventilation mechanism 5, the condensate reaches the position of the baffle plate 71 first, and therefore the condensate can be attached to the baffle plate 71, the condensate is prevented from reaching the position of the ventilation mechanism 5 and being attached to the ventilation mechanism 5, and the normal circulation of acid gas is not influenced. Baffle 71 can be dismantled with second baffle 2 and be connected, and baffle 71 is used for blockking the condensate liquid, when adhering to too much condensate liquid on baffle 71, needs to change baffle 71 for baffle 71 has the better effect of blockking the condensate liquid, can dismantle the connection baffle 71 of being convenient for and change.

The working principle is as follows: can produce chemical reaction in the technology cell body region, chemical reaction can produce sour gas, sour gas can corrode the machine, consequently, need take out sour gas through air exhaust equipment, be provided with the FFU system on the shell, provide the air current to the shell inside through the FFU system, when air exhaust equipment's bleed speed and FFU system's air feed speed mismatch, can lead to the inside gaseous environment of shell unstable, adjust through adjustment mechanism 9, make gaseous environment keep relatively stable, when air exhaust equipment during operation, gas passes through the air vent of ventilation mechanism 5 in proper order, hold holding tank and blast pipe 8 of holding mechanism 6, finally discharge to the equipment outside.

When the air extraction equipment works, the pressure and the temperature in the process tank area can be changed, so that liquid generated in the wet chemical reaction process forms condensation liquid, the condensation liquid flows to the ventilation mechanism 5 under the driving of the air extraction equipment, and the condensation liquid firstly reaches the baffle 71 before reaching the position of the ventilation mechanism 5, so that the condensation liquid can be attached to the baffle 71, the condensation liquid is prevented from reaching the position of the ventilation mechanism 5 and being attached to the ventilation mechanism 5, and the normal circulation of acid gas is not influenced.

When gas passes through the vent hole of the venting mechanism 5, the cross sectional area of the vent hole is small, the space of the process tank body area is large, and acid gas flows to the vent hole from the process tank body area, so that the flow rate of the acid gas close to the vent hole is larger than that of the acid gas far away from the vent hole, the acid gas flow speed is accelerated, the extraction efficiency of the acid gas is improved, and the acid gas is prevented from corroding machines.

When the gas passes through the accommodating groove of the accommodating mechanism 6, the accommodating box 61 is filled with the acid gas because the space in the accommodating box 61 is large, so that the acid gas is prevented from flowing back to the area of the process groove body to corrode a machine when the acid gas flows too fast, the gas amount in the shell is detected by the gas pressure sensor,

when gas flows through the exhaust pipe 8, the gas outflow is adjusted by the adjusting mechanism 9 in the exhaust pipe 8, when the pressure sensor detects that the pressure of the gas in the housing is too high, the gas in the housing is too much, the adjusting rod 92 rotates in the exhaust pipe 8 to drive the adjusting plate 91 to rotate in the exhaust pipe 8, so that the distance between the top and the bottom of the adjusting plate 91 and the inner wall of the exhaust pipe 8 is increased, the gas pumped out of the housing by the pumping equipment is increased, when the pressure sensor detects that the pressure of the gas in the housing is too low, the gas in the housing is too little, the adjusting rod 92 rotates in the exhaust pipe 8 to drive the adjusting plate 91 to rotate in the exhaust pipe 8, the distance between the top and the bottom of the adjusting plate 91 and the inner wall of the exhaust pipe 8 is decreased, and the gas pumped out of the housing by the pumping equipment is decreased, so that the gas environment remains relatively stable.

Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims (8)

1. The utility model provides a wet process equipment exhaust apparatus, includes first baffle (1), second baffle (2) and third baffle (3), first baffle (1) is located between the robot arm region and the technology cell body region, and second baffle (2) are located the technology cell body region, and third baffle (3) are located between the technology cell body region and the exhaust region, its characterized in that: the device is characterized in that a separation mechanism (4) is arranged on the first partition plate (1), the separation mechanism (4) is used for separating a robot arm region and a process tank body region from each other, two ventilation mechanisms (5) are arranged on the third partition plate (3), the ventilation mechanisms (5) are used for communicating the process tank body region with an exhaust region, a containing mechanism (6) is arranged on one side, away from the process tank body region, of the third partition plate (3), a flow guide mechanism (7) is arranged on the second partition plate (2), the flow guide mechanism (7) is used for preventing condensation liquid from entering the ventilation mechanisms (5), an exhaust pipe (8) is arranged in the exhaust region, when an air extraction device works, acid gas sequentially passes through the ventilation mechanisms (5), the containing mechanism (6) and the exhaust pipe (8), and an adjusting mechanism (9) is arranged in the exhaust pipe (8), adjustment mechanism (9) are used for adjusting blast pipe (8) open-ended size, adjustment mechanism (9) include regulating plate (91), the external diameter of regulating plate (91) with the internal diameter looks adaptation of blast pipe (8).

2. The wet plant exhaust of claim 1, wherein: the adjusting mechanism (9) comprises an adjusting rod (92), the adjusting rod (92) is rotatably connected with the inner wall of the exhaust pipe (8), and the adjusting rod (92) is detachably connected with the adjusting plate (91).

3. A wet plant exhaust as claimed in claim 2, wherein: an air pressure sensor is arranged on the adjusting plate (91).

4. The wet plant exhaust of claim 1, wherein: the partition mechanism (4) comprises a first connecting plate, a second connecting plate, a third connecting plate and two fourth connecting plates which are fixedly connected, and the first connecting plate is detachably connected with the first partition plate (1).

5. The wet plant exhaust of claim 1, wherein: the second partition plate (2) is provided with two communicating holes, the ventilation mechanism (5) comprises a connecting plate (51), the connecting plate (51) is matched with the communicating holes and corresponds to the communicating holes one by one, the connecting plate (51) is provided with a plurality of groups of ventilation parts, and the ventilation parts comprise a plurality of ventilation holes which are arranged in parallel.

6. The wet plant exhaust of claim 5, wherein: hold mechanism (6) including holding box (61), hold and to have seted up the holding tank in box (61), two the intercommunicating pore all with the holding tank link up each other.

7. The wet plant exhaust of claim 1, wherein: the flow guide mechanism (7) comprises a baffle (71), and the baffle (71) is detachably connected with the second partition plate (2).

8. The wet plant exhaust of claim 1, wherein: the distance between the first partition board (1) and the second partition board (2) is larger than the distance between the second partition board (2) and the third partition board (3).

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