CN214438916U

CN214438916U - Exhaust structure of wet process equipment

Info

Publication number: CN214438916U
Application number: CN202120175234.5U
Authority: CN
Inventors: 邓信甫; 徐铭; 陈佳炜; 李志锋; 刘大威
Original assignee: Zhiwei Semiconductor Shanghai Co Ltd; PNC Process Systems Co Ltd
Current assignee: Zhiwei Semiconductor Shanghai Co Ltd; PNC Process Systems Co Ltd
Priority date: 2021-01-21
Filing date: 2021-01-21
Publication date: 2021-10-22
Anticipated expiration: 2031-01-21

Abstract

The utility model discloses an exhaust structure of wet process equipment, which has the technical proposal that the exhaust structure comprises a clapboard, the clapboard is positioned between a process tank body area and an exhaust area, the clapboard is provided with two intercommunicating pores, and an aeration mechanism corresponding to the intercommunicating pores is arranged on the clapboard, the aeration mechanism comprises a connecting plate, an aeration part is arranged on the connecting plate, the aeration part comprises a plurality of strip-shaped air vents which are arranged side by side, the cross-sectional area of the air vent is smaller, the space of the process tank body area is larger, when the air exhaust equipment works, acid gas flows to the air vent from the process tank body area, so that the flow velocity of the acid gas close to the air vent is larger than that of the acid gas far away from the air vent, the acid gas flow velocity is accelerated, the efficiency of the acid gas exhaust is improved, the machine is prevented from being corroded by the acid gas, through arranging a containing mechanism on the clapboard, the containing mechanism comprises a containing box, a containing groove is arranged in the containing box, when the air extraction equipment works, the sour gas passes through the ventilating part and the accommodating groove in sequence.

Description

Exhaust structure of wet process equipment

Technical Field

The utility model relates to a wet process equipment technical field, more specifically the exhaust structure that relates to a wet process equipment that says so.

Background

The wet method equipment comprises a shell, wherein the shell comprises a process tank body area and an exhaust area, wet chemical reaction can be carried out in the process tank body area, acid gas can be generated by the chemical reaction, the acid gas can diffuse the space in the whole wet method equipment and corrode the machine, so that the service life of the machine is influenced, the acid gas needs to be treated, usually, air extraction equipment is arranged outside the wet method equipment, and the acid gas is extracted from the process tank body area to the exhaust area by the air extraction equipment and finally discharged to the outside of the wet method equipment;

among the prior art, be provided with the baffle that is used for keeping apart two regions between technology cell body region and exhaust region usually, set up an opening on a great range on the baffle, air exhaust equipment directly extracts the sour gas through the opening, and the efficiency that the sour gas was taken out is not high, leads to the internal partial sour gas that can be detained of technology cell, and the sour gas that detains still can cause the corruption to the machine, influences the life of machine.

SUMMERY OF THE UTILITY MODEL

To the not enough of prior art existence, the utility model aims to provide an exhaust structure of wet process equipment for improve the efficiency that sour gas was taken out.

In order to achieve the above purpose, the utility model provides a following technical scheme: an exhaust structure of wet process equipment comprises a partition plate, wherein the partition plate is positioned between a process tank body area and an exhaust area, two communicating holes are formed in the partition plate, two ventilating mechanisms are arranged on one side, close to the process tank body area, of the partition plate, the ventilating mechanisms are in one-to-one correspondence with the communicating holes, each ventilating mechanism comprises a connecting plate, the connecting plates are matched with the communicating holes, a plurality of groups of ventilating parts are arranged on the connecting plates, and the acid gas extraction efficiency is improved through the ventilating parts;

one side that the technology cell body region was kept away from to the baffle is provided with and holds the mechanism, hold the mechanism including holding the box, hold and seted up the holding tank in the box, two the intercommunicating pore all with the holding tank link up each other, when air extraction equipment during operation, sour gas loops through the portion of ventilating with the holding tank.

As a further improvement of the present invention, two the connecting plates are all detachably connected to the partition plate, so that the connecting plates can be replaced when damaged.

As a further improvement of the utility model, each group the ventilation part comprises a plurality of air vents arranged side by side, the air vents are in a strip shape, and the acid airflow speed is accelerated by the air vents.

As a further improvement, the one side that holds the box and keep away from the technology cell body region has seted up the exhaust hole, is provided with the blast pipe in the exhaust region, the one end and the exhaust hole fixed connection of blast pipe, the other end and the air exhaust equipment intercommunication of blast pipe, when air exhaust equipment during operation, sour gas passes through the blast pipe and discharges.

As a further improvement of the present invention, the length and the width of the connecting plate are the same, the length of the vent hole is greater than ten times the width of the vent hole, and the distance between adjacent two vent holes in the vent part is smaller than the width of the vent hole, so that the acid gas can be effectively discharged.

As a further improvement, the width of holding tank is greater than twenty times of connecting plate thickness, the aperture in exhaust hole is less than the length of connecting plate, the width that holds the box is greater than one fifth of blast pipe length, and is less than the quarter of blast pipe length for sour gas can effectively discharge.

The utility model has the advantages that: the utility model is provided with two intercommunicating pores on the clapboard, and the clapboard is provided with the ventilation mechanism corresponding to the intercommunicating pores, the ventilation mechanism comprises a connecting plate, the connecting plate is provided with a ventilation part which comprises a plurality of strip-shaped ventilation holes arranged in parallel, the cross section area of the ventilation holes is smaller, the space of the process groove body area is larger, when the air extraction equipment works, the acid gas flows to the vent holes from the area of the process tank body, so that the flow velocity of the acid gas close to the vent holes is larger than that of the acid gas far away from the vent holes, the acid gas flow velocity is accelerated, the extraction efficiency of the acid gas is improved, the acid gas is prevented from corroding machines, by arranging the accommodating mechanism on the partition board, the accommodating mechanism comprises an accommodating box, an accommodating groove is arranged in the accommodating box, when the air extraction equipment during operation, sour gas loops through portion of ventilating and holding tank for through setting up the blast pipe in the exhaust area for sour gas can be discharged through the blast pipe.

Drawings

FIG. 1 is a schematic sectional view of the present invention;

fig. 2 is an enlarged schematic view of a portion a in fig. 1 according to the present invention.

Reference numerals: 1. a partition plate; 2. a communicating hole; 3. a venting mechanism; 31. a connecting plate; 32. a ventilation section; 321. a vent hole; 4. an accommodating mechanism; 41. accommodating the box; 42. accommodating grooves; 5. an exhaust hole; 6. and (4) exhausting the gas.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

Referring to fig. 1 and 2, an exhaust structure of a wet process device in this embodiment includes a partition board 1, the partition board 1 is located between a process tank area and an exhaust area, the wet process device includes a housing, the housing includes the process tank area and the exhaust area, a wet process chemical reaction is performed in the process tank area, the chemical reaction generates an acid gas, the acid gas can diffuse into a space in the whole wet process device, and corrode a machine, so that the service life of the machine is affected, therefore, the acid gas needs to be pumped out by an air pumping device outside the wet process device, the partition board 1 is used for isolating the process tank area and the exhaust area from each other, a ventilation mechanism 3 is arranged on the partition board 1, so that the acid gas in the process tank area can enter the exhaust area through the ventilation mechanism 3, then the acid gas in the exhaust area is pumped out of the housing by the exhaust device, the partition board 1 is provided with two communication holes 2, usually, an opening with a larger range is directly formed in the partition board 1, the acid gas is directly extracted by an air extraction device through the opening, the efficiency of extracting the acid gas is low, two communicating holes 2 are arranged, so that the efficiency of extracting the acid gas is higher than that of forming one opening, the communicating holes 2 are provided with the ventilating mechanisms 3, so that the efficiency of extracting the acid gas is further improved, one side of the partition board 1, which is close to a process tank body area, is provided with two ventilating mechanisms 3, the ventilating mechanisms 3 are in one-to-one correspondence with the communicating holes 2, each ventilating mechanism 3 comprises a connecting board 31, the two connecting boards 31 are detachably connected with the partition board 1, the connecting board 31 and the partition board 1 are respectively provided with a plurality of positioning holes, bolts penetrate through the corresponding positioning holes to mutually fix the connecting board 31 and the partition board 1, when the connecting board 31 is corroded by the acid gas due to long-time circulation of the acid gas, the bolts between the connecting board 31 and the partition board 1 can be dismounted, the connecting plate 31 is replaced conveniently, the connecting plate 31 is matched with the communication holes 2, the connecting plate 31 can cover the communication holes 2, so that acid gas can flow to an exhaust area through the vent holes 321, a plurality of groups of vent parts 32 are arranged on the connecting plate 31, each group of vent parts 32 comprises a plurality of vent holes 321 which are arranged in parallel, the cross sectional areas of the vent holes 321 are smaller, the space of a process tank body area is larger, when an air extractor works, the acid gas flows to the vent holes 321 from the process tank body area, the flow rate of the acid gas close to the vent holes 321 is larger than that of the acid gas far away from the vent holes 321, the acid gas flow speed is accelerated, the acid gas extraction efficiency is improved, the acid gas is prevented from corroding machines, the vent holes 321 are in a long strip shape, the vent holes 321 are arranged in a long strip shape, more acid gas can conveniently pass through, the length and the width of the connecting plate 31 are the same, and the length of the vent holes 321 is more than ten times the width of the vent holes 321, the distance between two adjacent air vents 321 in the same group of air vents 32 is less than the width of the air vents 321, two groups of air vents 32 are arranged on the connecting plate 31, the two groups of air vents 32 are distributed up and down, and each group of air vents 32 comprises thirteen air vents 321, so that the acid gas which can pass through simultaneously is more, the circulation of the acid gas is accelerated, and the machine is prevented from being corroded by the acid gas.

The side of the partition board 1 far away from the process tank body area is provided with an accommodating mechanism 4, the accommodating mechanism 4 comprises an accommodating box 41, an accommodating groove 42 is formed in the accommodating box 41, the two communicating holes 2 are communicated with the accommodating groove 42, the width of the accommodating groove 42 is more than twenty times of the thickness of the connecting board 31, when the air extraction equipment works, acid gas passes through the ventilation part 32 from the process tank body area and then enters the accommodating groove 42, the space in the accommodating box 41 is large, when the acid gas flow is prevented from being too fast, the accommodating box 41 is filled with the acid gas, the acid gas flows back to the process tank body area to corrode a machine, one side of the accommodating box 41 far away from the process tank body area is provided with an exhaust pipe 5, one end of the exhaust pipe 6 is fixedly connected with the exhaust hole 5, the other end of the exhaust pipe 6 is communicated with the air extraction equipment, when the air extraction equipment works, the acid gas passes through the ventilation part 32 from the process tank body area, get into holding tank 42 in, then being discharged to the shell outside through blast pipe 6, effectual exhaust sour gas for sour gas can't cause the corruption to the machine, and the aperture of exhaust hole 5 is less than the length of connecting plate 31, and the width that holds box 41 is greater than one fifth of blast pipe 6 length, and is less than one fourth of blast pipe 6 length.

The working principle is as follows: when the sour gas needs to be discharged, the external air extraction equipment of the shell is started, so that the sour gas in the process tank body area flows to the vent hole 321, the cross sectional area of the vent hole 321 is small, the space in the process tank body area is large, the flow rate of the sour gas close to the vent hole 321 is larger than that of the sour gas far away from the vent hole 321, the flow rate of the sour gas is accelerated, the efficiency of the sour gas extraction is improved, the sour gas at the vent hole 321 flows into the accommodating groove 42, the space in the accommodating box 41 is large, the accommodating box 41 is filled with the sour gas when the flow rate of the sour gas is too high, the sour gas flows back to the process tank body area, the sour gas in the accommodating groove 42 flows to the exhaust pipe 6, finally the sour gas is discharged to the outside of the shell through the exhaust pipe 6, the sour gas is effectively discharged, and the sour gas cannot corrode a machine.

Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims

1. The utility model provides a wet process equipment's exhaust structure, includes baffle (1), baffle (1) are located between technology cell body region and the exhaust region, its characterized in that: the partition plate (1) is provided with two communicating holes (2), one side of the partition plate (1) close to a process tank body area is provided with two ventilation mechanisms (3), the ventilation mechanisms (3) correspond to the communicating holes (2) one by one, each ventilation mechanism (3) comprises a connecting plate (31), the connecting plate (31) is matched with the communicating holes (2), and the connecting plate (31) is provided with a plurality of groups of ventilation parts (32);

one side that technology cell body region was kept away from in baffle (1) is provided with accommodation mechanism (4), accommodation mechanism (4) are including holding box (41), holding tank (42) have been seted up in holding box (41), two intercommunicating pore (2) all with holding tank (42) link up each other, and when air exhaust equipment during operation, sour gas loops through portion of ventilating (32) with holding tank (42).

2. The exhaust structure of a wet process apparatus according to claim 1, wherein: the two connecting plates (31) are detachably connected with the partition plate (1).

3. The exhaust structure of a wet process apparatus according to claim 1, wherein: each group of the ventilation parts (32) comprises a plurality of ventilation holes (321) which are arranged in parallel, and the ventilation holes (321) are in a long strip shape.

4. The exhaust structure of a wet process apparatus according to claim 1, wherein: the exhaust hole (5) is formed in one side, away from the process groove body area, of the accommodating box (41), the exhaust pipe (6) is arranged in the exhaust area, one end of the exhaust pipe (6) is fixedly connected with the exhaust hole (5), and the other end of the exhaust pipe (6) is communicated with the air exhaust equipment.

5. The exhaust structure of a wet equipment according to claim 3, wherein: the length and the width of the connecting plate (31) are the same, the length of the vent hole (321) is more than ten times of the width of the vent hole (321), and the distance between two adjacent vent holes (321) in the same set of vent parts (32) is less than the width of the vent hole (321).

6. The exhaust structure of a wet equipment according to claim 4, wherein: the width of holding tank (42) is greater than twenty times of connecting plate (31) thickness, the aperture of exhaust hole (5) is less than the length of connecting plate (31), the width that holds box (41) is greater than one fifth of blast pipe (6) length, and is less than one quarter of blast pipe (6) length.