CN214465148U

CN214465148U - FFU system gas tightness mounting structure

Info

Publication number: CN214465148U
Application number: CN202120175302.8U
Authority: CN
Inventors: 方超; 邓信甫; 刘大威; 陈丁堃
Original assignee: Zhiwei Semiconductor Shanghai Co Ltd; PNC Process Systems Co Ltd
Current assignee: Zhiwei Semiconductor Shanghai Co Ltd; PNC Process Systems Co Ltd
Priority date: 2021-01-21
Filing date: 2021-01-21
Publication date: 2021-10-22
Anticipated expiration: 2031-01-21

Abstract

The utility model discloses a FFU system installation structure providing good air tightness, which adopts the technical proposal that the FFU system installation structure comprises a shell, a separating part and a flow guide part are arranged in the shell, the separating part comprises a separating plate, the separating plate separates an air flow space into a first space and a second space, the flow guide part comprises a first flow guide plate and a second flow guide plate, one end of the first flow guide plate and one end of the second flow guide plate are fixedly connected with the top wall of the shell, the first flow guide plate and the second flow guide plate are obliquely arranged, a positioning component is arranged on the shell, an FFU shell is kept stable above the shell through the positioning component, the air flow of the FFU system is prevented from directly flowing to the outside of the shell through a gap between the FFU system and the top surface of the shell, the air tightness of the device is ensured, the air flow space is separated into the first space and the second space through the separating part, the air flow velocity is accelerated through the flow guide part, a concealing component is arranged on the shell, the embedded part is arranged between the FFU shell and the wiring shell so that the FFU shell and the wiring shell are communicated with each other.

Description

FFU system gas tightness mounting structure

Technical Field

The utility model relates to a FFU system mount technical field, more specifically the utility model relates to a FFU system gas tightness mounting structure that says so.

Background

Semiconductor equipment includes the shell, including the air space in the shell, the robotic arm is regional, the technology cell body is regional and the region of bleeding, the technology cell body is regional to be located between the robotic arm region and the region of bleeding, the regional outside of bleeding is provided with air exhaust equipment, the air space is located the regional top of robotic arm and technology cell body, be provided with the FFU system on the shell top surface, the FFU system includes the FFU casing, can carry out chemical reaction in the technology cell body region, chemical reaction can produce sour gas, use air exhaust equipment to take sour gas out to the equipment outside from the technology cell body region, simultaneously through the inside fresh air current of pouring into of FFU system to the shell.

The FFU shell is usually directly placed above the shell, when the FFU system injects air flow into the shell, the FFU shell can shake above the shell, and the shaking can cause the air flow of the FFU system to directly flow to the outside of the shell through a gap between the FFU system and the top surface of the shell, so that the air tightness of the device is poor.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art exists, the utility model aims to provide an FFU system gas tightness mounting structure for make the FFU casing remain stable above the shell.

In order to achieve the above purpose, the utility model provides a following technical scheme: an air-tight mounting structure of an FFU (fan filter unit) system comprises a shell, wherein a partition part and a flow guide part are arranged in the shell, the partition part comprises a partition plate, an airflow space is divided into a first space and a second space by the partition plate, the flow guide part comprises a first flow guide plate and a second flow guide plate, one ends of the first flow guide plate and the second flow guide plate are fixedly connected with the top wall of the shell, the first flow guide plate and the second flow guide plate are obliquely arranged, and the distance between the ends, close to the top surface of the shell, of the first flow guide plate and the second flow guide plate is larger than the distance between the ends, far away from the top surface of the shell, of the first flow guide plate and the second flow guide plate;

the top surface of the shell is provided with a concealing assembly, the concealing assembly comprises a wiring shell, a wiring groove is formed in the wiring shell and used for accommodating electric wires of the FFU shell, a first through hole is formed in the side surface of the wiring shell, and the first through hole is communicated with the wiring groove;

an embedded component is arranged between the FFU shell and the wiring shell, the embedded component comprises a connecting piece, an embedded part is arranged between the connecting piece and the wiring shell, the embedded part comprises a spring pressing key, the spring pressing key is matched with the first through hole, so that one part of the spring pressing key is positioned in the wiring groove, and an electric wire passes through the connecting piece and the spring pressing key and enters the wiring groove;

the positioning assembly is arranged on the shell and comprises two positioning portions, an accommodating space is formed between the two positioning portions and matched with the FFU shell, each positioning portion comprises a first positioning plate and two second positioning plates, the two second positioning plates are integrally formed through the first positioning plate, one of the first positioning plates is located between the FFU shell and the wiring shell, and a communication hole is formed in the first positioning plate.

As a further improvement of the present invention, the first guide plate and the second guide plate have thicknesses larger than the thickness of the partition plate.

As a further improvement of the present invention, the partition plate is close to one side of the first space is provided with a first guide portion, the partition plate is close to one side of the second space is provided with a second guide portion, the first guide portion and the second guide portion are all used for guiding the air flow to keep away from the partition plate.

As a further improvement of the present invention, the first guide portion includes a plurality of first guide plates, the second guide portion includes a plurality of second guide plates, the first guide plate and the second guide plate are all inclined.

As a further improvement, the utility model provides an atmosphere portion is provided with on the shell, and atmosphere portion includes first atmosphere water conservancy diversion hole and second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with the shell top surface is all seted up in second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with first space link up each other, second atmosphere water conservancy diversion hole with the second space link up each other, first atmosphere water conservancy diversion hole with be formed with the linkage segment between the second atmosphere water conservancy diversion hole, the division board with linkage segment fixed connection, the FFU system passes through first atmosphere water conservancy diversion hole with second atmosphere water conservancy diversion hole to the inside air current that injects into of shell for the air current can get into first space and second space.

As a further improvement of the utility model, two first fixed orificess have been seted up on the shell top surface, be provided with the fixed plate on the shell, two second fixed orificess have been seted up on the fixed plate, the second fixed orifices with first fixed orifices one-to-one, just the second fixed orifices is located first fixed orifices top, walk the both ends of line casing and all be formed with the hem, the third fixed orifices has been seted up on the hem, the third fixed orifices with second fixed orifices one-to-one, just the third fixed orifices is located second fixed orifices top, through first fixed orifices the second fixed orifices with the third fixed orifices will the fixed plate walk the line casing with shell reciprocal anchorage.

As a further improvement of the utility model, first locating plate with the second locating plate all with shell top surface fixed connection, two in the same group location portion the second locating plate is parallel to each other, just first locating plate and two the equal mutually perpendicular of second locating plate, first locating plate with the second locating plate all is used for fixing a position the FFU casing, prevents the shake of FFU casing.

As a further improvement of the utility model, the suppress key includes first bullet briquetting and second bullet briquetting, first bullet briquetting with second bullet briquetting an organic whole is formed, first bullet briquetting is located the second bullet briquetting with between the connecting piece, the shape of cross section of first bullet briquetting is the rectangle, the shape of cross section of second bullet briquetting is trapezoidal, just the second bullet briquetting is along keeping away from first bullet briquetting to being close to the cross-sectional area gradual increase of first bullet briquetting, the suppress key be used for with the mutual block of first through-hole.

As a further improvement, the first through-hole with first bullet briquetting looks adaptation works as first through-hole with when first bullet briquetting pastes each other, the second bullet briquetting with the mutual block of trough inner wall.

As a further improvement, the second through-hole has been seted up in the suppressing key, the third through-hole has been seted up in the connecting piece, first through-hole with the third through-hole passes through the second through-hole link up each other, be provided with the connecting plate in the third through-hole, the connecting plate side with third through-hole inner wall fixed connection, a plurality of connecting holes have been seted up on the connecting plate, the connecting hole is used for passing through the electric wire.

The utility model has the advantages that: the utility model discloses a set up locating component on the shell, make the FFU casing remain stable in the shell top through locating component, prevent that the air current of FFU system from directly passing through the clearance between FFU system and the shell top surface and circulate to the shell outside, guarantee the gas tightness of device, separate into first space and second space with the air current space through the partition, accelerate the gas flow rate through water conservancy diversion portion, through setting up hidden subassembly on the shell, with the electric wire of accomodating the FFU casing, through FFU casing and walk to set up gomphosis portion between the line casing, make the FFU casing with walk to walk the line casing and link up each other.

Drawings

FIG. 1 is a schematic sectional view of the front view of the present invention;

FIG. 2 is an enlarged schematic view of the present invention at A in FIG. 1;

fig. 3 is a schematic top view of the present invention.

Reference numerals: 1. a partition portion; 11. a partition plate; 2. a flow guide part; 21. a first baffle; 22. a second baffle; 3. a concealment assembly; 31. a wiring shell; 4. a fitting assembly; 41. a connecting member; 42. a fitting portion; 421. a spring-pressing key; 5. a positioning assembly; 51. a positioning part; 52. a first positioning plate; 53. a second positioning plate; 6. an atmosphere section; 61. a connecting section; 7. and (7) fixing the plate.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. In which like parts are designated by like reference numerals. It should be noted that the terms "front," "back," "left," "right," "upper" and "lower" used in the following description refer to directions in the drawings, and the terms "bottom" and "top," "inner" and "outer" refer to directions toward and away from, respectively, the geometric center of a particular component.

Referring to fig. 1 to 3, the FFU system airtight mounting structure of the present embodiment includes a housing, a partition portion 1 and a flow guide portion 2 are disposed in the housing, the partition portion 1 includes a partition plate 11, the partition plate 11 partitions an air flow space into a first space and a second space, the air flow space is located above a robot arm area and a process tank area, the first space is located above the robot arm area, the second space is located above the process tank area, a chemical reaction is performed in the process tank area, the chemical reaction generates an acid gas, the acid gas generally volatilizes upward, an air exhaust area is disposed on one side of the process tank, a part of the acid gas can be exhausted to the outside of the housing for exhaust treatment, but a part of the acid gas continuously volatilizes upward and enters the second space, the part of the upward volatilized acid gas is difficult to return to the process tank area for exhausting, and the part of the acid gas returns to the process tank area through the partition portion 1 and the flow guide portion 2, then, the air is exhausted through air exhaust equipment, an atmosphere part 6 is arranged on the shell, an FFU system is arranged on the top surface of the shell and comprises an FFU shell, the FFU system injects fresh air flow into the shell through a first atmosphere guide hole and a second atmosphere guide hole, acid gas is brought back to the area of the process tank body under the flowing action of the fresh air and is exhausted through the air exhaust equipment, the atmosphere part 6 comprises a first atmosphere guide hole and a second atmosphere guide hole, the first atmosphere guide hole and the second atmosphere guide hole are both arranged on the top surface of the shell, the first atmosphere guide hole is communicated with the first space, the second atmosphere guide hole is communicated with the second space, the FFU system is positioned above the shell and is communicated with the inside of the shell through the first atmosphere guide hole and the second atmosphere guide hole, the FFU system ventilates the first space through the first atmosphere guide hole and ventilates the second space through the second atmosphere guide hole, so that the acid gas can not stay in the first space and the second space, and the instrument is protected from being damaged, a connecting section 61 is formed between the first atmosphere diversion hole and the second atmosphere diversion hole, and the partition plate 11 is fixedly connected with the connecting section 61. By arranging the partition plate 11, the gases in the first space and the second space are difficult to circulate mutually, the acid gas is prevented from entering the first space through the second space, the corrosion of the acid gas to the instruments in the robot arm area is prevented, one side of the partition plate 11 close to the first space is provided with a first guide part, one side of the partition plate 11 close to the second space is provided with a second guide part, the first guide part and the second guide part are both used for guiding the gas flow to be far away from the partition plate 11, one side of the partition plate 11 close to the first space and one side of the partition plate 11 close to the second space are extruded by the gas flow for a long time, may receive wearing and tearing, through setting up the first deflector and the second deflector of slope to reduce division board 11's atress, slow down division board 11's damage degree, first guide part includes a plurality of first deflectors, and second guide part includes a plurality of second deflectors, and first deflector and second deflector all incline the setting. The flow guiding part 2 comprises a first flow guiding plate 21 and a second flow guiding plate 22, the flow velocity of air flow injected into the first space and the second space by the FFU system can be accelerated by arranging the flow guiding part 2, so that acid gas in the second space flows back to the upper part of the process tank body area under the action of gas with higher flow velocity, and then is pumped out through the air pumping area, one ends of the first flow guiding plate 21 and the second flow guiding plate 22 are fixedly connected with the top wall of the shell, the first flow guiding plate 21 and the second flow guiding plate 22 are obliquely arranged, the distance between the ends, close to the top surface of the shell, of the first flow guiding plate 21 and the second flow guiding plate 22 is larger than the distance between the ends, far away from the top surface of the shell, of the first flow guiding plate 21 and the second flow guiding plate 22, the first flow guiding plate 21 is positioned in the first space, the first flow guiding plate 21 is obliquely arranged, and the distance between the first flow guiding plate 21 and the separating plate 11 is smaller and smaller from the top part of the shell to the bottom part of the shell, when the gas of the FFU system passes through the first guide plate 21 from top to bottom, the flowing space of the gas flow is smaller and smaller, so the flow rate of the gas flow is faster, the gas flow rate at the first space is fast, and the flow rate of the acid gas at the gap between the first space and the second space is slow, so the acid gas can not enter the first space through the gap between the first space and the second space, and can not corrode the apparatus in the robot arm area, the second guide plate 22 is positioned in the second space, because the second guide plate 22 is obliquely arranged, the distance between the second guide plate 22 and the partition plate 11 is smaller and smaller from the top of the shell to the bottom of the shell, when the gas of the FFU system passes through the second guide plate 22 from top to bottom, the flowing space of the gas flow is smaller and smaller, so the flowing rate of the gas flow is faster and faster, the gas flow rate at the second space is faster, and the flowing rate of the acid gas in the second space is slower, therefore, the acid gas in the second space can be kept away from the second space together under the flowing of the gas in the second space and is pumped out, the thicknesses of the first guide plate 21 and the second guide plate 22 are both larger than that of the partition plate 11, and the first guide plate 21, the second guide plate 22 and the partition plate 11 have certain thicknesses so as to resist the extrusion of flowing gas flow and prevent damage.

The top surface of the shell is provided with a concealing component 3, the concealing component 3 comprises a wiring shell 31, an FFU system needs wiring, wires are exposed in the air for a long time to cause a large amount of dust to be accumulated on the wires, so that the aging speed of the wires is accelerated, and the potential safety hazard is increased, the wires of the FFU system can be accommodated in the wiring slots by arranging the wiring shell 31 to prevent the aging of the wires, the wiring shell 31 is provided with wiring slots for accommodating the wires of the FFU shell to prevent the wires from being stained with dust, the side surface of the wiring shell 31 is provided with a first through hole which is communicated with the wiring slots, the first through hole is used for connecting a spring pressing key 421, the spring pressing key 421 is clamped with the first through hole, so that the wires entering the first through hole through the spring pressing key 421 cannot be damaged due to the mutual separation of the spring pressing key 421 and the first through hole, the top surface of the shell is provided with two first fixing holes, the fixing plate 7 is positioned above the shell, the routing shell 31 is positioned above the shell, the fixing plate 7 and the routing shell 31 are mutually fixed through a first fixing hole, a second fixing hole and a third fixing hole, the electric wire is prevented from being damaged by the movement of the routing shell 31, the fixing plate 7 is arranged on the shell, two second fixing holes are arranged on the fixing plate 7, the second fixing holes correspond to the first fixing holes one by one, the second fixing holes are positioned above the first fixing holes, folded edges are formed at two ends of the routing shell 31, third fixing holes are arranged on the folded edges, the third fixing holes correspond to the second fixing holes one by one, the third fixing holes are positioned above the second fixing holes, when the shell, the fixing plate 7 and the routing shell 31 are required to be mutually fixed, an operator sequentially penetrates through the corresponding first fixing holes, the second fixing holes and the third fixing holes by using bolts, so that the shell, the routing 7 and the shell 31 are mutually fixed, the movement of the wire housing 31 is prevented from damaging the electric wires.

The embedded component 4 is arranged between the FFU shell and the routing shell 31, the wires between the FFU shell and the routing shell 31 can be communicated with each other by arranging the embedded component 4, so that the wires can be stored, the embedded component 4 comprises a connecting piece 41, an embedded part 42 is arranged between the connecting piece 41 and the routing shell 31, the embedded part 42 enables the connecting piece 41 and the routing shell 31 to be connected with each other and not separated, the wires entering the routing shell 31 through the connecting piece 41 are prevented from being damaged due to the fact that the connecting piece 41 and the routing shell 31 are separated from each other, the embedded part 42 comprises a spring pressing key 421, the spring pressing key 421 is matched with the first through hole, so that one part of the spring pressing key 421 is positioned in the routing groove, the wires pass through the connecting piece 41 and the spring pressing key 421 to enter the routing groove, the spring pressing key 421 comprises a first spring pressing block and a second spring pressing block, and the first spring pressing block and the second spring pressing block are integrally formed, the first elastic pressing block is located between the second elastic pressing block and the connecting piece 41, the cross section of the first elastic pressing block is rectangular, the cross section of the second elastic pressing block is trapezoidal, and the cross section area of the second elastic pressing block is gradually increased from the first elastic pressing block to the position close to the cross section area of the first elastic pressing block. When needs are connected suppress key 421 and first through-hole, operating personnel will suppress key 421 and fill in the first through-hole, the second plays the briquetting and be the elastic component, when the second plays the briquetting and get into first through-hole, the second plays the briquetting receives the extrusion and deforms, continue to pack in suppressing key 421 toward first through-hole, until the second plays briquetting breaks away from each other with first through-hole, the second plays the briquetting resumes deformation, first play briquetting and first through-hole are laminated each other this moment, second plays briquetting and the mutual block of trough inner wall, make and play the briquetting 421 can't break away from first through-hole, prevent to cause the electric wire to damage because it breaks away from each other to play the briquetting 421 with first through-hole, first through-hole and first play briquetting looks adaptation, when first through-hole and first play briquetting are laminated each other, second play briquetting and the mutual block of trough inner wall. The elastic pressing key 421 has a second through hole, the connecting element 41 has a third through hole, the first through hole and the third through hole are communicated with each other through the second through hole, the connecting element 41 and the routing housing 31 are connected with each other through the elastic pressing key 421, so that the wires of the FFU system can sequentially enter the third through hole in the connecting piece 41, the second through hole on the spring key 421 and the first through hole on the routing shell 31 and finally enter the routing groove to prevent the wires from being stained with dust, a connecting plate is arranged in the third through hole, the side surface of the connecting plate is fixedly connected with the inner wall of the third through hole, a plurality of connecting holes are arranged on the connecting plate, the connecting holes are used for allowing the wires to pass through, the wires can not be smoothly plugged in when the wires need to be plugged in later due to the fact that the wires are directly plugged in the third through hole, and the wires are orderly plugged in the third through hole through the communicating holes, the electric wire in the third through hole is tidier, and can still be plugged smoothly when the electric wire needs to be plugged next time.

The casing is provided with a positioning component 5, the positioning component 5 comprises two positioning parts 51, the FFU casing can be effectively installed by arranging two groups of positioning parts 51, so that the FFU casing is kept stable above the casing, the air flow of the FFU system is prevented from directly flowing to the outside of the casing through a gap between the FFU system and the top surface of the casing, the air tightness of the device is ensured, a containing space is formed between the two positioning parts 51, the containing space is matched with the FFU casing and is used for placing the FFU casing, the positioning parts 51 comprise a first positioning plate 52 and two second positioning plates 53, the two second positioning plates 53 are integrally formed through the first positioning plate 52, one first positioning plate 52 is positioned between the FFU casing and the wiring casing 31 and is provided with a communication hole, the communication hole is used for penetrating through the connecting piece 41, so that one end of the connecting piece 41 can be connected with the FFU casing, and the electric wire of the FFU system can enter the wiring casing 31 through the connecting piece 41 for being stored, the first positioning plate 52 and the second positioning plate 53 are fixedly connected with the top surface of the housing, the two second positioning plates 53 are integrally formed through the first positioning plate 52, the two second positioning plates 53 in the same group of positioning parts 51 are parallel to each other, the first positioning plate 52 and the two second positioning plates 53 are perpendicular to each other, two groups of first positioning parts 51 enclose a rectangle to place an FFU shell, the FFU shell is placed in a containing space, when the FFU system works, the first positioning plate 52 and the second positioning plate 53 of the positioning parts 51 limit the position of the FFU shell, therefore, the shaking of the FFU shell can be reduced, the air flow of the FFU system cannot directly flow to the outside of the housing through the gap between the FFU system and the top surface of the housing, and the air tightness of the device is ensured.

The working principle is as follows: the FFU shell is placed in the accommodating space, when the FFU system works, the first positioning plate 52 and the second positioning plate 53 of the positioning part 51 limit the position of the FFU shell, so that the shaking of the FFU shell can be reduced, the air flow of the FFU system cannot directly flow to the outside of the shell through a gap between the FFU system and the top surface of the shell, and the air tightness of the device is ensured.

The FFU system is used for ventilating the first space through the first atmosphere guide hole and ventilating the second space through the second atmosphere guide hole, the airflow in the first space flows to the robot arm area after passing through the first space, the airflow in the second space flows to the process tank body area after passing through the second space, after chemical reaction is carried out in the process tank body area, the acid gas is upwards volatilized to the second space, the acid gas is difficult to enter the first space through the partition plate 11, so that instruments in the robot arm area are not corroded, the first guide plate 21 is obliquely arranged, after the airflow flows through the first guide plate 21 from top to bottom, the speed of the airflow is increased, the acid gas in the second space is prevented from entering the first space, the instruments in the robot arm area are corroded, the second guide plate 22 is obliquely arranged, after the airflow flows through the second guide plate 22 from top to bottom, the speed of the airflow is increased, and the flow rate of the gas in the second space is increased, the flow rate of the acid gas in the second space is relatively slow, so that the acid gas in the second space can be driven by the gas in the second space to be away from the second space together and be pumped out.

The electric wire of FFU system can be accomodate in the wiring inslot through setting up line casing 31 to prevent that the electric wire from ageing, when needs are fixed shell, fixed plate 7 and line casing 31 each other, operating personnel uses the bolt to pass corresponding first fixed orifices, second fixed orifices and third fixed orifices in proper order, makes shell, fixed plate 7 and line casing 31 reciprocal anchorage, prevents to walk that line casing 31 removes the damage electric wire.

When needs are connected FFU casing with walk line casing 31, operating personnel will play in pressing key 421 plugs in first through-hole, the second plays the briquetting and is the elastic component, when the second played the briquetting and gets into first through-hole, the second played the briquetting receives the extrusion and deformation, continue to plug in going to first through-hole with playing pressing key 421, play briquetting and first through-hole break away from each other until the second, the second plays the briquetting and resumes deformation, first play briquetting laminates with first through-hole each other this moment, second plays briquetting and the mutual block of trough inner wall, make and play pressing key 421 can't break away from first through-hole, prevent to cause the electric wire to damage because playing pressing key 421 and first through-hole break away from each other.

Above only the utility model discloses an it is preferred embodiment, the utility model discloses a scope of protection not only limits in above-mentioned embodiment, and the all belongs to the utility model discloses a technical scheme under the thinking all belongs to the utility model discloses a scope of protection. It should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.

Claims

1. An FFU system gas tightness mounting structure, includes the shell, its characterized in that: the shell is internally provided with a separating part (1) and a flow guide part (2), the separating part (1) comprises a separating plate (11), the separating plate (11) separates an airflow space into a first space and a second space, the flow guide part (2) comprises a first flow guide plate (21) and a second flow guide plate (22), one ends of the first flow guide plate (21) and the second flow guide plate (22) are fixedly connected with the top wall of the shell, the first flow guide plate (21) and the second flow guide plate (22) are obliquely arranged, and the distance between the ends, close to the top surface of the shell, of the first flow guide plate (21) and the second flow guide plate (22) is greater than the distance between the ends, far away from the top surface of the shell, of the first flow guide plate (21) and the second flow guide plate (22);

the top surface of the shell is provided with a concealing component (3), the concealing component (3) comprises a wiring shell (31), a wiring groove is formed in the wiring shell (31) and used for accommodating electric wires of an FFU shell, a first through hole is formed in the side surface of the wiring shell (31), and the first through hole is communicated with the wiring groove;

an embedded component (4) is arranged between the FFU shell and the wiring shell (31), the embedded component (4) comprises a connecting piece (41), an embedded part (42) is arranged between the connecting piece (41) and the wiring shell (31), the embedded part (42) comprises a spring pressing key (421), the spring pressing key (421) is matched with the first through hole, so that one part of the spring pressing key (421) is positioned in the wiring groove, and an electric wire passes through the connecting piece (41) and the spring pressing key (421) and enters the wiring groove;

the FFU shell is characterized in that a positioning assembly (5) is arranged on the shell, the positioning assembly (5) comprises two positioning portions (51), an accommodating space is formed between the two positioning portions (51), the accommodating space is matched with the FFU shell, the positioning portions (51) comprise first positioning plates (52) and two second positioning plates (53), the two second positioning plates (53) are integrally formed through the first positioning plates (52), one of the first positioning plates (52) is located between the FFU shell and the wiring shell (31), and communication holes are formed in the first positioning plate (52).

2. An FFU system airtight mounting structure in accordance with claim 1, wherein: the thicknesses of the first guide plate (21) and the second guide plate (22) are both larger than the thickness of the partition plate (11).

3. An FFU system airtight mounting structure in accordance with claim 1, wherein: one side that division board (11) are close to first space is provided with first guide part, one side that division board (11) are close to the second space is provided with the second guide part, first guide part with the second guide part all is used for guiding the air current and keeps away from division board (11).

4. An FFU system airtight mounting structure in accordance with claim 3, wherein: the first guide part comprises a plurality of first guide plates, the second guide part comprises a plurality of second guide plates, and the first guide plates and the second guide plates are all obliquely arranged.

5. An FFU system airtight mounting structure in accordance with claim 1, wherein: be provided with atmosphere portion (6) on the shell, atmosphere portion (6) include first atmosphere water conservancy diversion hole and second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with the shell top surface is all seted up in second atmosphere water conservancy diversion hole, first atmosphere water conservancy diversion hole with first space link up each other, second atmosphere water conservancy diversion hole with the second space link up each other, first atmosphere water conservancy diversion hole with be formed with linkage segment (61) between the second atmosphere water conservancy diversion hole, division board (11) with linkage segment (61) fixed connection.

6. An FFU system airtight mounting structure in accordance with claim 1, wherein: the improved cable routing device is characterized in that two first fixing holes are formed in the top surface of the shell, a fixing plate (7) is arranged on the shell, two second fixing holes are formed in the fixing plate (7), the second fixing holes correspond to the first fixing holes one to one, the second fixing holes are located above the first fixing holes, folded edges are formed at two ends of the cable routing shell (31), third fixing holes are formed in the folded edges, the third fixing holes correspond to the second fixing holes one to one, and the third fixing holes are located above the second fixing holes.

7. An FFU system airtight mounting structure in accordance with claim 1, wherein: the first positioning plate (52) and the second positioning plate (53) are fixedly connected with the top surface of the shell, the two second positioning plates (53) in the same group of positioning parts (51) are parallel to each other, and the first positioning plate (52) and the two second positioning plates (53) are perpendicular to each other.

8. An FFU system airtight mounting structure in accordance with claim 1, wherein: the elastic pressing key (421) comprises a first elastic pressing block and a second elastic pressing block, the first elastic pressing block and the second elastic pressing block are integrally formed, the first elastic pressing block is located between the second elastic pressing block and the connecting piece (41), the cross section of the first elastic pressing block is rectangular, the cross section of the second elastic pressing block is trapezoidal, and the cross section of the second elastic pressing block is gradually increased from the position far away from the first elastic pressing block to the position close to the cross section of the first elastic pressing block.

9. An FFU system airtight mounting structure according to claim 8, wherein: the first through hole is matched with the first elastic pressing block, and when the first through hole is attached to the first elastic pressing block, the second elastic pressing block is clamped with the inner wall of the wiring groove.

10. An FFU system airtight mounting structure according to claim 9, wherein: a second through hole is formed in the elastic pressing key (421), a third through hole is formed in the connecting piece (41), the first through hole and the third through hole are communicated with each other through the second through hole, a connecting plate is arranged in the third through hole, the side face of the connecting plate is fixedly connected with the inner wall of the third through hole, a plurality of connecting holes are formed in the connecting plate, and the connecting holes are used for passing through electric wires.