CN213401140U

CN213401140U - Fixing device of special equipment of wafer production and processing

Info

Publication number: CN213401140U
Application number: CN202022636262.0U
Authority: CN
Inventors: 李传银
Original assignee: Suzhou Yongchenxin Microelectronics Co ltd
Current assignee: Suzhou Yongchenxin Microelectronics Co ltd
Priority date: 2020-11-16
Filing date: 2020-11-16
Publication date: 2021-06-08
Anticipated expiration: 2030-11-16

Abstract

The utility model discloses a special equipment fixing device for wafer production and processing, which comprises a base, the surface of base is equipped with first screw rod, fixed plate, the fixed plate is close to the intermediate position of base surface, the outside cover of first screw rod is equipped with the slider, be equipped with the swing arm on the fixed plate, the outside of swing arm is equipped with the rotating ring, the top of swing arm is equipped with the fixed block, the top surface of fixed block is equipped with the drum, the inside of drum is equipped with the piston, the top of drum is equipped with the carriage release lever, the top side of carriage release lever is equipped with the second screw rod, the side of fixed block is equipped with electric telescopic handle, the other end of electric telescopic handle is equipped with the disc, the top surface of disc is equipped with the cylinder post; the first screw rotates by a proper angle, the slider drives the movable rod to vertically move, the movable rod drives the piston to move and the cylinder to suck air, and the wafer is stably adsorbed and attached to the surface of the sucker under the action of pressure so as to be convenient for fixing the wafer.

Description

Fixing device of special equipment of wafer production and processing

Technical Field

The utility model belongs to the technical field of wafer processing fixing device, concretely relates to fixing device of special equipment of wafer production and processing.

Background

The wafer is a relatively complex and precise device, in order to ensure quality and reliability and reduce research and development time and cost of device manufacturing process, a probe station is usually used for testing the wafer, and the process of placing the wafer on a workbench on the probe station is not simple and convenient enough;

the problem that the process that a wafer is placed on a workbench on a probe table is inconvenient when the wafer is tested by using the probe table at present is solved, and therefore a fixing device special for assembling wafer production and processing is provided.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a fixing device of special equipment of wafer production processing to use probe station test wafer that proposes in solving above-mentioned background art, the wafer is arranged in the not convenient enough problem of process of probe bench workstation.

In order to achieve the above object, the utility model provides a following technical scheme: a fixing device for special assembly of wafer production and processing comprises a base, wherein a first screw rod and a fixing plate are arranged on the surface of the base, the fixing plate is close to the middle position of the surface of the base, a slider is sleeved on the outer side of the first screw rod, a rotating rod is arranged on the fixing plate, a rotating ring is arranged on the outer side of the rotating rod, a fixing block is arranged at the top end of the rotating rod, a cylinder is arranged on the top surface of the fixing block, a piston is arranged inside the cylinder, a moving rod is arranged at the top of the cylinder, a second screw rod is arranged on the side face of the top of the moving rod, an electric telescopic rod is arranged on the side face of the fixing block, a disc is arranged at the other end of the electric telescopic rod, a cylinder column is arranged on the top surface of the disc, a sucking disc is arranged on the top surface of the cylinder column, a vent pipe is arranged between the first vent hole and the second vent hole, a sac cavity is arranged inside the cylinder, and an air hole is formed in the surface of the sucker.

Preferably, the bottom and the base of first screw rod rotate to be connected, the slider closes with first screw rod soon through the screw thread to be connected, the top of first screw rod is equipped with the hand wheel, first screw rod is close to the avris position of base.

Preferably, the fixed plate is provided with a frame groove and a rectangular groove, the rotating ring is positioned in the frame groove, the end part of the rotating rod is positioned in the rectangular groove, the rotating rod is connected with the fixed plate in a sliding manner, the outer surface of the bottom end of the rotating rod is provided with an external thread, and the rotating ring is connected with the rotating rod in a screwing manner through the thread.

Preferably, the fixed block and the rotating rod, the fixed block and the electric telescopic rod, and the electric telescopic rod and the disc are connected through screws in a rotating mode, the fixed block and the cylinder are connected through glue in a bonding mode, the side face of the sliding block is provided with a screw hole, and the second screw rod is matched with the screw hole.

Preferably, the inside of drum is equipped with movable chamber, the carriage release lever includes square end and column end, the tip that the column end is located the inside drum is "T" type structure, inside the tip embedding piston that the carriage release lever column end is located the drum, the laminating of piston surface and drum internal surface, the piston is made by the silicon rubber material, first blow vent and the inside intercommunication of drum.

Preferably, the bottom of the disc is provided with a sponge ring, the second vent is communicated with the sac cavity, and the air hole is communicated with the sac cavity.

Preferably, the sucking disc is made of a silicon rubber material, two ends of the vent pipe are respectively sleeved on the outer sides of the first vent hole and the second vent hole, and the vent pipe is made of a PVC material.

Compared with the prior art, the beneficial effects of the utility model are that:

1. through the first screw rod, slider, drum, carriage release lever, second screw rod, breather pipe, section of thick bamboo post, the sucking disc that set up, the rotatory suitable angle of first screw rod and the vertical removal of slider drive carriage release lever, and the carriage release lever drives the piston and removes and the drum is inside inhales, and under the pressure effect, the stable absorption laminating of wafer is on the sucking disc surface, is convenient for fixed wafer.

2. Through electric telescopic handle, the disc that sets up, electric telescopic handle operation, electric telescopic handle horizontal extension or shorten, the position of the disc of being convenient for adjust does benefit to and places, withdraws the wafer on the sucking disc.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic cross-sectional view of the cylinder of the present invention;

FIG. 3 is a schematic cross-sectional view of the cylinder of the present invention;

fig. 4 is a schematic top view of the sucking disc of the present invention;

in the figure: 1. a base; 2. a first screw; 3. a slider; 4. a fixing plate; 5. rotating the rod; 6. a rotating ring; 7. a fixed block; 8. a cylinder; 9. a travel bar; 10. a second screw; 11. a first vent; 12. an electric telescopic rod; 13. a disc; 14. a cylinder; 15. a suction cup; 16. a second vent; 17. a breather pipe; 18. a piston; 19. a capsule cavity; 20. and (4) air holes.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1 to 4, the present invention provides a technical solution: a fixing device special for assembling wafer production and processing comprises a base 1, a first screw 2 and a fixing plate 4 are arranged on the surface of the base 1, the fixing plate 4 is close to the middle position of the surface of the base 1, a sliding block 3 is sleeved on the outer side of the first screw 2, a rotating rod 5 is arranged on the fixing plate 4, a rotating ring 6 is arranged on the outer side of the rotating rod 5, a fixing block 7 is arranged at the top end of the rotating rod 5, a cylinder 8 is arranged on the top surface of the fixing block 7, a piston 18 is arranged inside the cylinder 8, a moving rod 9 is arranged at the top of the cylinder 8, a second screw 10 is arranged on the side surface of the top of the moving rod 9, an electric telescopic rod 12 is arranged on the side surface of the fixing block 7, a disc 13 is arranged at the other end of the electric telescopic rod 12, a cylinder column 14 is arranged on the top surface of the disc 13, a sucking disc 15 is arranged on the top, a vent pipe 17 is arranged between the first vent hole 11 and the second vent hole 16, a bag cavity 19 is arranged inside the barrel column 14, an air hole 20 is formed in the surface of the sucker 15, a wafer is arranged on the sucker 15, the first screw rod 2 rotates by a proper angle, the sliding block 3 drives the moving rod 9 to vertically move, the moving rod 9 drives the piston 18 to move, the cylinder 8 sucks air, and the wafer is stably adsorbed and attached to the surface of the sucker 15 under the action of pressure, so that the wafer is convenient to fix.

In this embodiment, the bottom of first screw rod 2 rotates with base 1 to be connected, and slider 3 closes with first screw rod 2 soon through the screw thread to be connected, and the top of first screw rod 2 is equipped with the hand wheel, and first screw rod 2 is close to the avris position of base 1, is convenient for adjust the high position of slider 3.

In this embodiment, be equipped with frame groove and rectangular channel on the fixed plate 4, the tip that the swivel becket 6 is located frame inslot and swing arm 5 is located the rectangular channel, swing arm 5 and 4 sliding connection of fixed plate, the external screw thread has been seted up to the surface of swing arm 5 bottom, swivel becket 6 closes with swing arm 5 through the screw thread soon and is connected, fixed block 7 and swing arm 5, fixed block 7 and electric telescopic handle 12, electric telescopic handle 12 closes with disc 13 all through the screw soon and is connected, fixed block 7 passes through glue adhesive connection with drum 8, the screw has been seted up to the side of slider 3, second screw rod 10 and screw cooperation, be convenient for adjust the high position of fixed block 7.

In this embodiment, a movable cavity is disposed inside the cylinder 8, the moving rod 9 includes a square end and a column end, the end of the column end located inside the cylinder 8 is a "T" shaped structure, the end of the moving rod 9 located inside the cylinder 8 is embedded inside the piston 18, the outer surface of the piston 18 is attached to the inner surface of the cylinder 8, the piston 18 is made of silicon rubber material, the first vent 11 is communicated with the inside of the cylinder 8, the bottom of the disc 13 is provided with a sponge ring, the second vent 16 is communicated with the bag cavity 19, the air hole 20 is communicated with the bag cavity 19, the suction cup 15 is made of silicon rubber material, two ends of the vent 17 are respectively sleeved on the first vent 11, outside the second vent 16, the vent 17 is made by PVC material, places the wafer on the sucking disc 15, rotates the suitable angle of first screw rod 2, and slider 3 drives the vertical removal of carriage release lever 9, and the drum 8 is inside inhales, and under the pressure effect, the stable absorption of wafer is laminated on sucking disc 15 surface.

The utility model discloses a theory of operation and use flow:

when quality test is carried out on a produced and processed wafer, the first screw rod 2 is rotated to a proper angle, the sliding block 3 vertically moves, the rotating ring 6 is stirred and the rotating ring 6 rotates along the anticlockwise direction, the rotating rod 5 stops stirring the rotating ring 6 after vertically moving to a proper position, the bottom of the disc 13 and the surface of a workbench of a wafer test probe table are positioned on the same horizontal plane, the second screw rod 10 is rotated, and the second screw rod 10 is embedded into the sliding block 3;

the wafer is placed on a sucker 15, the first screw 2 is rotated by a proper angle, the slide block 3 drives the moving rod 9 to vertically move, the moving rod 9 drives the piston 18 to move, air is sucked in the cylinder 8, and the wafer is stably adsorbed and attached to the surface of the sucker 15 under the action of pressure, so that the wafer is fixed conveniently;

electric telescopic handle 12 operation, electric telescopic handle 12 horizontal extension or shorten, the position of the disc 13 of being convenient for adjust does benefit to and places, withdraws the wafer on the sucking disc 15, fixed block 7 and swing arm 5, electric telescopic handle 12 and disc 13, fixed plate 4 all closes with base 1 through the screw soon and is connected, second screw rod 10 closes with slider 3 through the screw soon and is connected, this fixing device connected mode is simple and convenient, convenient to detach, equipment, easy to use.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a fixing device of special equipment of wafer production and processing, includes base (1), its characterized in that: the surface of the base (1) is provided with a first screw rod (2) and a fixed plate (4), the fixed plate (4) is close to the middle position of the surface of the base (1), the outer side of the first screw rod (2) is sleeved with a sliding block (3), the fixed plate (4) is provided with a rotating rod (5), the outer side of the rotating rod (5) is provided with a rotating ring (6), the top end of the rotating rod (5) is provided with a fixed block (7), the top surface of the fixed block (7) is provided with a cylinder (8), the inside of the cylinder (8) is provided with a piston (18), the top of the cylinder (8) is provided with a moving rod (9), the top side of the moving rod (9) is provided with a second screw rod (10), the side of the fixed block (7) is provided with an electric telescopic rod (12), the other end of the electric telescopic rod (12) is provided with a disc (13), the top, the top surface of section of thick bamboo post (14) is equipped with sucking disc (15), the side of drum (8) is equipped with first air vent (11), section of thick bamboo post (14) are equipped with second air vent (16) towards the side of first air vent (11), be equipped with breather pipe (17) between first air vent (11) and second air vent (16), the inside of section of thick bamboo post (14) is equipped with bag chamber (19), gas pocket (20) are seted up on the surface of sucking disc (15).

2. The wafer production and processing dedicated assembly fixture as claimed in claim 1, wherein: the bottom of first screw rod (2) rotates with base (1) to be connected, slider (3) close soon with first screw rod (2) through the screw thread and are connected, the top of first screw rod (2) is equipped with the hand wheel, first screw rod (2) are close to the avris position of base (1).

3. The wafer production and processing dedicated assembly fixture as claimed in claim 1, wherein: be equipped with frame groove and rectangular channel on fixed plate (4), the tip that swivel becket (6) are located frame inslot and swing arm (5) is located the rectangular channel, swing arm (5) and fixed plate (4) sliding connection, the external screw thread has been seted up to the surface of swing arm (5) bottom, swivel becket (6) close with swing arm (5) through the screw thread soon and are connected.

4. The wafer production and processing dedicated assembly fixture as claimed in claim 1, wherein: fixed block (7) and swing arm (5), fixed block (7) and electric telescopic handle (12), electric telescopic handle (12) and disc (13) all close through the screw soon and are connected, fixed block (7) and drum (8) are through glue bonding connection, the screw has been seted up to the side of slider (3), second screw rod (10) and screw cooperation.

5. The wafer production and processing dedicated assembly fixture as claimed in claim 1, wherein: the inside of drum (8) is equipped with movable chamber, carriage release lever (9) are including square end and column end, the column end is located the inside tip of drum (8) and is "T" type structure, inside tip embedding piston (18) that carriage release lever (9) column end is located drum (8), piston (18) surface and drum (8) internal surface laminating, piston (18) are made by the silicon rubber material, first blow vent (11) and the inside intercommunication of drum (8).

6. The wafer production and processing dedicated assembly fixture as claimed in claim 1, wherein: the bottom of the disc (13) is provided with a sponge ring, the second vent (16) is communicated with the sac cavity (19), and the air hole (20) is communicated with the sac cavity (19).

7. The wafer production and processing dedicated assembly fixture as claimed in claim 1, wherein: the sucking disc (15) is made of silicon rubber materials, the two ends of the vent pipe (17) are respectively sleeved on the outer sides of the first vent hole (11) and the second vent hole (16), and the vent pipe (17) is made of PVC materials.