CN213316427U

CN213316427U - External hanging type cavity for cleaning arm stained with organic solution

Info

Publication number: CN213316427U
Application number: CN202021709831.3U
Authority: CN
Inventors: 张泽东; 周健; 申强; 苏杭; 吴文涛
Original assignee: CETC 55 Research Institute
Current assignee: CETC 55 Research Institute
Priority date: 2020-08-17
Filing date: 2020-08-17
Publication date: 2021-06-01
Anticipated expiration: 2030-08-17

Abstract

The utility model discloses an outer hanging cavity of clean arm that is stained with organic solution. The external hanging type cavity comprises a pipeline for spraying isopropanol on the front side, a pipeline for spraying deionized water on the front side, a pipeline for spraying isopropanol on the back side, a pipeline for spraying deionized water on the back side, a hot nitrogen drying pipeline, a cavity door and a control module; the valve control ends of the pipelines are electrically connected with the control module, the control end of the arm to be cleaned is electrically connected with the control module, and the control module drives the arm to be cleaned to extend into the cavity. The utility model discloses realize the clean dry of arm, solved the inherent defect of organic wet process semiconductor automation equipment.

Description

External hanging type cavity for cleaning arm stained with organic solution

Technical Field

The utility model belongs to semiconductor automation equipment, in particular to utilize organic wet process semiconductor automation equipment of recess arm transmission.

Background

The organic wet method semiconductor device is mainly used for soaking the wafer with the glue. Some wafers with through holes cannot use a vacuum arm, but only a physical groove arm. As shown in fig. 1, in practical use, the arm of the organic wet semiconductor automation device using groove arm transmission is prone to stain sticky organic liquid, which leads to unstable device transmission and wastes the effective operation time of the device.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem mentioned in the background art, the utility model provides a clean outer hanging cavity who is stained with the arm of organic solution.

In order to realize the technical purpose, the utility model discloses a technical scheme does:

an externally-hung cavity for cleaning an arm stained with an organic solution comprises a pipeline for spraying isopropanol on the front side, a pipeline for spraying deionized water on the front side, a pipeline for spraying isopropanol on the back side, a pipeline for spraying deionized water on the back side, a hot nitrogen drying pipeline, a cavity door and a control module; the valve control ends of the pipelines are electrically connected with the control module, the control end of the arm to be cleaned is electrically connected with the control module, and the control module drives the arm to be cleaned to extend into the cavity.

Further, still including setting up the organic exhaust pipe of chamber door upside and setting up the organic drainage pipe of chamber door downside, the valve that has organic exhaust pipe and organic drainage pipe is normally open state.

Furthermore, the cavity door comprises an upper part and a lower part, the upper part and the lower part of the cavity door move simultaneously under the pushing of the cavity door motor, when the upper part and the lower part of the cavity door move to a set position and the root of the arm is stabilized, the upper part and the lower part stop moving, and the control end of the cavity door motor is electrically connected with the control module.

Further, the cavity door is provided with a sealing ring.

Further, the sealing washer is for preventing the rubber circle of organic material.

Furthermore, a first valve is arranged on the pipeline for spraying the isopropanol on the front side, a second valve is arranged on the pipeline for spraying the deionized water on the front side, and one ends of the two pipelines are communicated and then connected with a spray head through a third valve; a fourth valve is arranged on the pipeline for spraying the isopropanol on the front surface, a fifth valve is arranged on the pipeline for spraying the deionized water on the front surface, and one ends of the two pipelines are communicated and then connected with the other spray head through a sixth valve; and the control ends of the first valve, the second valve, the third valve and the fourth valve are respectively and electrically connected with the control module.

Furthermore, a plurality of small spray holes are uniformly distributed on the spray head, so that a plurality of spray water columns are formed.

Furthermore, the spray head is driven by the spray head motor to perform reciprocating rotation motion, and the control end of the spray head motor is electrically connected with the control module.

Furthermore, a heating wire and a seventh valve are arranged on the hot nitrogen drying pipeline, and control ends of the heating wire and the seventh valve are respectively and electrically connected with the control module.

Adopt the beneficial effect that above-mentioned technical scheme brought:

(1) through the externally-hung cavity cleaning and drying arm designed by the utility model, the error reporting of the equipment can be reduced, the effective operation time of the equipment can be increased, and the problems of unstable piece transfer of the equipment and the like can be solved;

(2) the utility model does not need to detach the arm from the equipment, thereby avoiding unnecessary parameter adjustment and equipment loss when the arm is reassembled at the later stage;

(3) the utility model designs a front cleaning, back cleaning, hot nitrogen drying, organic exhaust and organic liquid discharge functions which can ensure that the arm which is stained with a small amount of organic solution is dirty to enter and dry to go out;

(4) the whole process of the utility model is closed, which avoids the contact of the personnel with the chemical reagent, is safe and reliable, reduces the manpower and improves the automation degree of the equipment;

(5) the utility model uses the cavity door and the sealing ring in a matching way, which not only can play a role of flexible contact, protect the arm to bear steady force in the spraying and washing process, but also can be properly sealed, and prevent organic solution from splashing out of the cavity to cause pollution; the sealing ring is made of organic material-proof rubber ring, so that the sealing ring can be used for a long time, and has very high service life and reliability;

(6) the utility model discloses well positive two way pipeline sharing shower nozzle, two way pipeline sharing shower nozzles of back both can guarantee to spray pipeline compact structure, practice thrift the space, the cost is also reduced simultaneously.

Drawings

FIG. 1 is a schematic view of a groove arm stained with an organic solution;

FIG. 2 is a schematic structural view of the present invention;

FIG. 3 is a schematic view of the unclosed state of the chamber door of the present invention;

FIG. 4 is a schematic view of the closed state of the chamber door of the present invention;

FIG. 5 is a schematic view of the rotary spraying nozzle of the present invention;

fig. 6 is a cleaning flow chart of the present invention.

Description of reference numerals: 1. a valve; 2. a valve; 3. a valve; 4. the root of the arm; 5. a front face sprayer; 6. an arm; 7. an organic exhaust valve; 8. a negative pressure gauge; 9. a hot nitrogen valve; 10. heating wires; 11. a control module; 12. a valve; 13. a valve; 14. a valve; 15. a cavity door; 16. a back side nozzle; 17. an organic drain valve; 18. high purity hot nitrogen; 19. a seal ring; 20. an organic solution.

Detailed Description

The technical solution of the present invention will be described in detail below with reference to the accompanying drawings.

The utility model discloses a clean outer hanging cavity that is stained with arm of organic solution, as shown in fig. 2, including the pipeline that openly sprays isopropyl alcohol all the way, openly spray the pipeline of deionized water all the way, the back spray the pipeline of isopropyl alcohol all the way, the back sprays the pipeline of deionized water all the way, hot nitrogen gas stoving pipeline, chamber door and control module all the way. The front side of the pipeline for spraying the isopropanol and the front side of the pipeline for spraying the deionized water are respectively used for spraying the isopropanol and the deionized water to the front side of the arm to be cleaned, the back side of the pipeline for spraying the isopropanol and the back side of the pipeline for spraying the deionized water are respectively used for spraying the isopropanol and the deionized water to the back side of the arm to be cleaned, and the hot nitrogen drying pipeline is used for spraying hot nitrogen to the arm to be cleaned for drying. The control module drives the arm to be cleaned to extend into the cavity, and the control module respectively controls the opening and closing of the valves of the pipelines.

In this embodiment, it is preferable that an organic exhaust duct is disposed on the upper side of the chamber door, an organic liquid discharge duct is disposed on the lower side of the chamber door, and both the valve 7 of the organic exhaust duct and the valve 17 of the organic liquid discharge duct are in a normally open state.

In this embodiment, preferably, the cavity door includes an upper portion and a lower portion, as shown in fig. 3, when the cavity door is not closed, the upper portion and the lower portion of the cavity door move simultaneously under the pushing of the cavity door motor, and when the cavity door moves to the set position and the arm base is stabilized, the motion stops, as shown in fig. 4, and the cavity door is closed. The chamber door sets up the sealing washer, and the sealing washer can adopt the rubber circle of preventing organic material, and the sealing washer contacts with the flexible seal of arm root, both can play the effect of firm arm, and the protection arm is spraying and is washed the in-process atress steady, can seal properly again, prevents that organic solution spill cavity from causing the pollution.

In this embodiment, preferably, the pipeline for spraying the isopropyl alcohol on the front side and the pipeline for spraying the deionized water on the front side share one front side nozzle, and the double-solution input single-pipeline spraying is realized through the control module and the valves 1(DI water), 2(IPA) and 3 (shared). In a similar way, a pipeline for spraying isopropanol on the back and the front sides and a pipeline for spraying deionized water on the back side share one back side spray head, and double-solution input single-pipeline spraying is realized through a control module, a valve 12(DI water), a valve 13(IPA) and a valve 14 (shared).

In this embodiment, preferably, a plurality of small spray holes are uniformly distributed on the spray head, so as to form a plurality of spray water columns, effectively increase the spray area and reduce the spray pressure. As shown in fig. 5, the nozzle performs reciprocating rotational motion by being driven by the nozzle motor.

In the present embodiment, preferably, hot nitrogenThe gas drying pipeline is provided with a heating wire and a valve, and high-Purity Nitrogen (PN) is heated by the heating wire₂) The arm was heated and dried with hot nitrogen.

As shown in fig. 6, the cleaning process of the present invention is as follows:

(1) the control module drives the arm to extend into the cavity;

(2) closing the chamber door;

(3) spraying isopropanol to the front side of the arm through a pipeline for spraying isopropanol to the front side;

(4) after the front side is sprayed with the isopropanol, hot nitrogen is sprayed to the arm through a hot nitrogen drying pipeline to be dried;

(5) spraying deionized water to the front side of the arm through a pipeline for spraying deionized water to the front side;

(6) after the front side is sprayed with the deionized water, hot nitrogen is sprayed to the arms through a hot nitrogen drying pipeline for drying treatment;

(7) spraying isopropanol to the back of the arm through a pipeline for spraying isopropanol to the back;

(8) after the back side is sprayed with the isopropanol, hot nitrogen is sprayed to the arm through a hot nitrogen drying pipeline to be dried;

(9) spraying deionized water to the back of the arm through a pipeline for spraying deionized water to the back;

(10) after the spraying of deionized water on the back is finished, hot nitrogen is sprayed to the arm through a hot nitrogen drying pipeline for drying treatment;

(11) repeating the steps (3) - (10) three times;

(12) spraying isopropanol to the front side of the arm through a pipeline for spraying isopropanol to the front side, so as to prevent the contamination of the back side from being washed to the front side of the arm and ensure the front side of the arm to be clean (the front side of the arm is contacted with a wafer);

(13) after the front side is sprayed with the isopropanol, hot nitrogen is sprayed to the arm through a hot nitrogen drying pipeline to be dried;

(14) opening the cavity door;

(15) the control module drives the arm to exit the cavity door.

The embodiment is only for explaining the technical thought of the utility model, can not limit with this the utility model discloses a protection scope, all according to the utility model provides a technical thought, any change of doing on technical scheme basis all falls into the utility model discloses within the protection scope.

Claims

1. The utility model provides a clean outer hanging cavity that is stained with arm of organic solution which characterized in that: the system comprises a pipeline for spraying isopropanol on the front side, a pipeline for spraying deionized water on the front side, a pipeline for spraying isopropanol on the back side, a pipeline for spraying deionized water on the back side, a hot nitrogen drying pipeline, a cavity door and a control module; the valve control ends of the pipelines are electrically connected with the control module, the control end of the arm to be cleaned is electrically connected with the control module, and the control module drives the arm to be cleaned to extend into the cavity.

2. The cleaning system of claim 1, wherein the cleaning system comprises: still including setting up the organic exhaust pipe of chamber door upside and setting up the organic flowing back pipeline in chamber door downside, the valve that has organic exhaust pipe and organic flowing back pipeline is normally open state.

3. The cleaning system of claim 1, wherein the cleaning system comprises: the cavity door comprises an upper part and a lower part, the upper part and the lower part of the cavity door move simultaneously under the pushing of the cavity door motor, when the upper part and the lower part move to a set position and the root of the arm is stabilized, the upper part and the lower part stop moving, and the control end of the cavity door motor is electrically connected with the control module.

4. The cleaning system of claim 1, wherein the cleaning system comprises: the cavity door is provided with a sealing ring.

5. The cleaning system of claim 4, wherein the cleaning system comprises: the sealing ring is a rubber ring made of organic materials.

6. The cleaning system of claim 1, wherein the cleaning system comprises: a first valve is arranged on the pipeline for spraying the isopropanol on the front side, a second valve is arranged on the pipeline for spraying the deionized water on the front side, and one ends of the two pipelines are communicated and then connected with a spray head through a third valve; a fourth valve is arranged on the pipeline for spraying the isopropanol on the front surface, a fifth valve is arranged on the pipeline for spraying the deionized water on the front surface, and one ends of the two pipelines are communicated and then connected with the other spray head through a sixth valve; and the control ends of the first valve, the second valve, the third valve and the fourth valve are respectively and electrically connected with the control module.

7. The cleaning system of claim 6, wherein the cleaning system comprises: a plurality of small spray holes are uniformly distributed on the spray head, so that a plurality of spray water columns are formed.

8. The cleaning system of claim 6, wherein the cleaning system comprises: the sprayer is driven by a sprayer motor to perform reciprocating movement and rotary motion in the horizontal direction, and the control end of the sprayer motor is electrically connected with the control module.

9. The cleaning system of claim 1, wherein the cleaning system comprises: and the hot nitrogen drying pipeline is provided with a heating wire and a seventh valve, and the control ends of the heating wire and the seventh valve are respectively and electrically connected with the control module.