CN201178092Y - Single chip washer - Google Patents
Single chip washer Download PDFInfo
- Publication number
- CN201178092Y CN201178092Y CNU2008201072469U CN200820107246U CN201178092Y CN 201178092 Y CN201178092 Y CN 201178092Y CN U2008201072469 U CNU2008201072469 U CN U2008201072469U CN 200820107246 U CN200820107246 U CN 200820107246U CN 201178092 Y CN201178092 Y CN 201178092Y
- Authority
- CN
- China
- Prior art keywords
- socket
- support body
- transmission shaft
- spray pipe
- jet pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 claims abstract description 34
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims description 16
- 239000004575 stone Substances 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 abstract description 3
- 239000007921 spray Substances 0.000 abstract 8
- 238000011086 high cleaning Methods 0.000 abstract 1
- 238000000638 solvent extraction Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 210000003027 ear inner Anatomy 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The utility model relates to a single-wafer cleaning machine, which comprises a frame, a spray pipe, a rotary vacuum sealer, a sucking disk, a sealed housing, and a motor. The sealed housing is covered on a partitioning plate positioned at the top of the frame, the inverted L-shaped spray pipe is connected with the right part of the bottom plate of a cleaning tank on the upper part of the frame via a socket, the bottom of the spray pipe is connected with the top end of a pendulous device via a socket, a spray pipe opening is horizontally arranged on the lower part of the spray pipe, and one end of a horizontal structure on the upper part of the spray pipe is connected with a spray nozzle via a socket; a shaft sleeve upper fixed seat is fixed in the middle of the bottom plate of the cleaning tank, the bottom of the shaft sleeve upper fixed seat is connected with the top end of the shaft sleeve via a socket, the bottom end of the shaft sleeve is fixed in the middle of a portioning plate positioned on the middle part of the frame, a transmission shaft is fixed inside the shaft sleeve, the top end of the transmission shaft is connected with the sucking disk via a socket, the upper part of the spray pipe is opposite to the upper side of the sucking disk, the bottom end of the transmission shaft is connected with the vacuum sealer via a shaft, and a belt pulley on the lower part of the transmission shaft is connected with the belt pulley on an output shaft of the motor. The single-wafer cleaning machine provided in the utility model has the advantages of simple structure, simple and flexible operation, high cleaning efficiency, good cleanliness, and fulfillment of technical requirements in one time.
Description
Technical field
The utility model relates to a kind of semiconductor cleaning apparatus, especially a kind of monolithic cleaning machine.
Background technology
Semiconductor element cleaning device in the market adopts wet-cleaned mostly, and commonly with nozzle ejection cleaning fluid, cleaning fluid constantly is sprayed on the semiconductor element, thereby finishes the cleaning to it for it.And improving constantly along with integrated circuit fabrication process, it is more and more littler that the volume of semiconductor element also becomes, and this has also caused the molecule etc. of semiconductor component surfaces to be difficult to clean, and causes the cleaning device cleaning efficiency low, it is not high to clean cleanliness factor, is difficult to reach problems such as specification requirement.And other cleaning methods such as employing ultrasonic wave clean, and it is complex operation not only, and the volume heaviness has also greatly improved the cleaning cost, is difficult to adapt to the production demand.
The utility model content
The purpose of this utility model provides a kind of monolithic cleaning machine, and to overcome existing cleaning machine complex operation, volume heaviness, cleaning efficiency is low, the deficiency of weak effect.
The purpose of this utility model is to be achieved through the following technical solutions:
A kind of monolithic cleaning machine, comprise support body, jet pipe, rotation vacuum seal device, sucker, seal closure and motor, described support body left side is provided with header board, the support body right side is provided with the back plate, header board and plate top, back accompany dividing plate, the dividing plate top cover labyrinth has seal closure, the dividing plate downside is provided with the rinse bath base plate that is fixed on the support body, described rinse bath base plate right part falls L shaped jet pipe by the sealing clamp socket, the jet pipe bottom is socketed in the pendulous device top by connector, pendulous device is fixed on the dividing plate right side at support body middle part, and the jet pipe lower horizontal is provided with nozzle hole, the horizontal structure one end socket shower nozzle on jet pipe top; Rinse bath base plate middle part is by screw axle sleeve upper fixed seat, axle sleeve upper fixed seat bottom socket axle sleeve top, the axle sleeve bottom is fixed on the dividing plate middle part at support body middle part, axle sleeve is inner by the bearing fixing power transmission shaft, the sucker of power transmission shaft top socket rinse bath base plate upside, the sucker top is relative with the shower nozzle on jet pipe top, the power transmission shaft bottom is coupling and rotates the vacuum seal device, the synchronously fixing belt pulley in power transmission shaft bottom is connected by belt pulley fixing on angle band and the motor output shaft, and described motor is fixed on the left of the dividing plate in the middle part of the support body by screw.
Described rotation vacuum seal device is by axle core, jump ring, bearing, pad, O type circle, external seal frame, stone sealing ring, rubber seal, sealed support, spring and spring support, the axle core bottom at rotation vacuum seal device middle part is with spring, the spring top is enclosed within the sealed support bottom, be with rubber seal in the described sealed support, the rubber seal upside is provided with the stone sealing ring, rubber seal and stone sealing ring all are enclosed within on the core, and stone sealing ring upside is provided with the external seal frame; Described external seal frame is enclosed within a core cylindrical middle part, the nested O type circle in external seal frame cylindrical middle part, external seal frame top is provided with pad, described pad upside is provided with two bearings, bearing holder (housing, cover) is on axle core cylindrical top, be provided with pad between two bearings, be provided with jump ring between the bearing of upside and the rotation vacuum seal device inside top.
The beneficial effect of monolithic cleaning machine described in the utility model is: simple in structure, and convenient and flexible operation, the cleaning efficiency height, it is good to clean cleanliness factor, can disposablely reach specification requirement.
Description of drawings
With embodiment the utility model is described in further detail with reference to the accompanying drawings below.
Fig. 1 is the structural representation of monolithic cleaning machine described in the utility model;
Fig. 2 is the structural representation of the rotation vacuum seal device of monolithic cleaning machine described in the utility model.
Among the figure:
1, support body; 2, dividing plate; 3, rinse bath base plate; 4, jet pipe; 5, shower nozzle; 6, rotation vacuum seal device; 601, axle core; 602, jump ring; 603, bearing; 604, pad; 605, O type circle; 606, external seal frame; 607, stone sealing ring; 608, rubber seal; 609, sealed support; 610, spring; 611, spring support; 7, nozzle hole; 8, sucker; 9, power transmission shaft; 10, back plate; 11, connector; 12, sealing clamp; 13, axle sleeve upper fixed seat; 14, axle sleeve; 15, belt pulley; 16, seal closure; 17, motor; 18, header board; 19, bearing; 20, pendulous device.
Embodiment
As shown in Figure 1, monolithic cleaning machine described in the utility model, comprise support body 1, jet pipe 4, rotation vacuum seal device 6, sucker 8, seal closure 16 and motor 17, described support body 1 left side is provided with header board 18, support body 1 right side is provided with back plate 10, header board 18 and plate 10 tops, back accompany dividing plate 2, dividing plate 2 top cover labyrinths have seal closure 16, dividing plate 2 downsides are provided with the rinse bath base plate 3 that is fixed on the support body 1, described rinse bath base plate 3 right parts fall L shaped jet pipe 4 by sealing clamp 12 sockets, jet pipe 4 bottoms are socketed in pendulous device 20 tops by connector 11, pendulous device 20 is fixed on dividing plate 2 right sides at support body 1 middle part, jet pipe 4 lower horizontal are provided with nozzle hole 7, the horizontal structure one end socket shower nozzle 5 on jet pipe 4 tops; Rinse bath base plate 3 middle parts are by screw axle sleeve upper fixed seat 13, axle sleeve upper fixed seat 13 bottom socket axle sleeves 14 tops, axle sleeve 14 bottoms are fixed on dividing plate 2 middle parts at support body 1 middle part, axle sleeve 14 is inner by bearing 19 fixed conveyor axles 9, the sucker 8 of power transmission shaft 9 top socket rinse bath base plates 3 upsides, sucker 8 tops are relative with the shower nozzle 5 on jet pipe 4 tops, power transmission shaft 9 bottoms are coupling and rotate vacuum seal device 6, rotation vacuum seal device 6 can make that the product on the sucker 8 is constantly attached thereto closely, the synchronously fixing belt pulley 15 in power transmission shaft 9 bottoms is connected by the belt pulley of fixing on angle band and motor 17 output shafts 15, and described motor 17 is fixed on dividing plate 2 left sides at support body 1 middle part by screw.
As shown in Figure 2, monolithic cleaning machine described in the utility model, described rotation vacuum seal device 6 is by axle core 601, jump ring 602, bearing 603, pad 604, O type circle 605, external seal frame 606, stone sealing ring 607, rubber seal 608, sealed support 609, spring 610 and spring support 611, axle core 601 bottoms at rotation vacuum seal device 6 middle parts are with spring 610, spring 610 tops are enclosed within sealed support 609 bottoms, be with rubber seal 608 in the described sealed support 609, rubber seal 608 upsides are provided with stone sealing ring 607, rubber seal 608 all is enclosed within on the core 601 with stone sealing ring 607, and stone sealing ring 607 upsides are provided with external seal frame 606; Described external seal frame 606 is enclosed within a core 601 cylindricals middle part, the nested O type circle 605 in external seal frame 606 cylindricals middle part, external seal frame 606 tops are provided with pad 604, described pad 604 upsides are provided with two bearings 603, bearing 603 is enclosed within a core 601 cylindrical tops, be provided with pad 604 between two bearings 603, be provided with jump ring 602 between the bearing 603 of upside and rotation vacuum seal device 6 inside top.
Described monolithic cleaning machine is to drive power transmission shaft 9 high speed rotating by motor 17, and the sucker 8 that power transmission shaft 9 drives its top rotates; Simultaneously, pendulous device 20 drives jet pipe 4 by connector 11 and rotates, the shower nozzle 5 that makes jet pipe 4 tops connect begins swing, nozzle hole 7 injection cleaning fluids (deionized water) to jet pipe 4 bottoms carry out high pressure swing hydro-peening to silicon chip, after cleaning end, stop to inject cleaning fluid (deionized water), open the nitrogen input channel, nitrogen heats the back by built-in heater and is entered in the seal closure 16 by jet pipe 4, and silicon chip is dried.
Monolithic cleaning machine described in the utility model, the spin rinse that can adapt to (comprising square and other special shapes) material dries.The high-cleanness, high flushing that can be used for similar associated materials such as semiconductor silicon disk, GaAs material, mask, solar cell substrates, sapphire, lithium niobate, optical mirror slip, disk, CD, medical glass substrate dries.
Monolithic cleaning machine described in the utility model is under high speed rotating, by each functional module of water, gas and electricity, functional unit orderly coordinative role and finish cleaning, drying mutually.It has strict requirement to reliability, fail safe and the operator's of equipment protection, thereby has well ensured its cleaning efficiency and detergent degree.
Claims (1)
1, a kind of monolithic cleaning machine, comprise support body (1), jet pipe (4), rotation vacuum seal device (6), sucker (8), seal closure (16) and motor (17), described support body (1) left side is provided with header board 18, support body (1) right side is provided with back plate (10), header board (18) and plate (10) top, back accompany dividing plate (2), dividing plate (2) top cover labyrinth has seal closure (16), dividing plate (2) downside is provided with the rinse bath base plate (3) that is fixed on the support body (1), it is characterized in that: rinse bath base plate (3) right part falls L shaped jet pipe (4) by sealing clamp (12) socket, jet pipe (4) bottom is socketed in pendulous device (20) top by connector (11), described pendulous device (20) is fixed on dividing plate (2) right side at support body (1) middle part, jet pipe (4) lower horizontal is provided with nozzle hole (7), the horizontal structure one end socket shower nozzle (5) on jet pipe (4) top; Described rinse bath base plate (3) middle part is by screw axle sleeve upper fixed seat (13), axle sleeve upper fixed seat 13 bottom socket axle sleeve (14) tops, axle sleeve (14) bottom is fixed on dividing plate (2) middle part at support body (1) middle part, axle sleeve (14) is inner by bearing (19) fixed conveyor axle (9), the sucker (8) of power transmission shaft (9) top socket rinse bath base plate (3) upside, power transmission shaft (9) bottom is coupling and rotates vacuum seal device (6), axle core (601) bottom at described rotation vacuum seal device (6) middle part is with spring (610), spring (610) top is enclosed within sealed support (609) bottom, be with rubber seal (608) in the described sealed support (609), rubber seal (608) upside is provided with stone sealing ring (607), rubber seal (608) all is enclosed within on the core (601) with stone sealing ring (607), and stone sealing ring (607) upside is provided with external seal frame (606); Described external seal frame (606) is enclosed within a core (601) cylindrical middle part, external seal frame (606) cylindrical middle part nested O type circle (605), external seal frame (606) top is provided with pad (604), described pad (604) upside is provided with two bearings (603), bearing (603) is enclosed within a core (601) cylindrical top, be provided with pad (604) between two bearings (603), be provided with jump ring (602) between bearing of upside (603) and rotation vacuum seal device (6) inside top; The synchronously fixing belt pulley (15) in described power transmission shaft (9) bottom is connected by belt pulley (15) fixing on angle band and motor (17) output shaft, and described motor (17) is fixed on the left of the dividing plate (2) in the middle part of the support body (1) by screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201072469U CN201178092Y (en) | 2008-04-08 | 2008-04-08 | Single chip washer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201072469U CN201178092Y (en) | 2008-04-08 | 2008-04-08 | Single chip washer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201178092Y true CN201178092Y (en) | 2009-01-07 |
Family
ID=40218117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201072469U Expired - Fee Related CN201178092Y (en) | 2008-04-08 | 2008-04-08 | Single chip washer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201178092Y (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101894784A (en) * | 2010-06-10 | 2010-11-24 | 中国电子科技集团公司第四十五研究所 | Wafer rotating plate device for special equipment of semiconductor |
| CN102139271A (en) * | 2011-03-02 | 2011-08-03 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
| CN103962331A (en) * | 2013-01-29 | 2014-08-06 | 昆山尚达智机械有限公司 | Manual rotating cleaner for parts |
| CN106269607A (en) * | 2016-08-16 | 2017-01-04 | 姚东鑫 | A kind of fine care device of mosaic tiles |
| CN106345739A (en) * | 2016-11-29 | 2017-01-25 | 晶科能源有限公司 | Method and device for cleaning silicon materials |
| CN106623187A (en) * | 2016-12-13 | 2017-05-10 | 无锡南方声学工程有限公司 | Fast cleaning device for discs |
| CN106711279A (en) * | 2016-11-29 | 2017-05-24 | 梁结平 | Solar cell panel electrode removing device and method |
| CN106733832A (en) * | 2016-12-13 | 2017-05-31 | 无锡南方声学工程有限公司 | A kind of two-sided cleaning device of disk |
| CN107051940A (en) * | 2016-12-13 | 2017-08-18 | 无锡南方声学工程有限公司 | A kind of disk cleaning device |
| CN107377508A (en) * | 2017-08-12 | 2017-11-24 | 宁波鄞州竹创信息科技有限公司 | A kind of cleaning device of mould processing |
| CN108176644A (en) * | 2017-12-26 | 2018-06-19 | 重庆程顺汽车配件制造有限公司 | A kind of auto parts and components cleaning device and its manufacturing method |
| CN108480267A (en) * | 2018-04-16 | 2018-09-04 | 安徽吉乃尔电器科技有限公司 | A kind of microelectronic product automated cleaning equipment and its application method |
| CN108580385A (en) * | 2018-04-20 | 2018-09-28 | 安徽忠盛新型装饰材料有限公司 | A kind of sheet metal uniform cleaning device |
| CN112764310A (en) * | 2020-12-31 | 2021-05-07 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
-
2008
- 2008-04-08 CN CNU2008201072469U patent/CN201178092Y/en not_active Expired - Fee Related
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101894784A (en) * | 2010-06-10 | 2010-11-24 | 中国电子科技集团公司第四十五研究所 | Wafer rotating plate device for special equipment of semiconductor |
| CN101894784B (en) * | 2010-06-10 | 2012-07-11 | 北京中电科电子装备有限公司 | Wafer rotating plate device for special equipment of semiconductor |
| CN102139271A (en) * | 2011-03-02 | 2011-08-03 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
| CN102139271B (en) * | 2011-03-02 | 2012-07-04 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
| CN103962331A (en) * | 2013-01-29 | 2014-08-06 | 昆山尚达智机械有限公司 | Manual rotating cleaner for parts |
| CN106269607A (en) * | 2016-08-16 | 2017-01-04 | 姚东鑫 | A kind of fine care device of mosaic tiles |
| CN106269607B (en) * | 2016-08-16 | 2018-09-28 | 泰州市美斯顿机械制造有限公司 | A kind of fine care device of mosaic tiles |
| CN106711279A (en) * | 2016-11-29 | 2017-05-24 | 梁结平 | Solar cell panel electrode removing device and method |
| CN106345739A (en) * | 2016-11-29 | 2017-01-25 | 晶科能源有限公司 | Method and device for cleaning silicon materials |
| CN106623187A (en) * | 2016-12-13 | 2017-05-10 | 无锡南方声学工程有限公司 | Fast cleaning device for discs |
| CN106733832A (en) * | 2016-12-13 | 2017-05-31 | 无锡南方声学工程有限公司 | A kind of two-sided cleaning device of disk |
| CN107051940A (en) * | 2016-12-13 | 2017-08-18 | 无锡南方声学工程有限公司 | A kind of disk cleaning device |
| CN107377508A (en) * | 2017-08-12 | 2017-11-24 | 宁波鄞州竹创信息科技有限公司 | A kind of cleaning device of mould processing |
| CN108176644A (en) * | 2017-12-26 | 2018-06-19 | 重庆程顺汽车配件制造有限公司 | A kind of auto parts and components cleaning device and its manufacturing method |
| CN108176644B (en) * | 2017-12-26 | 2021-04-23 | 重庆程顺汽车配件制造有限公司 | Automobile part cleaning device and manufacturing method thereof |
| CN108480267A (en) * | 2018-04-16 | 2018-09-04 | 安徽吉乃尔电器科技有限公司 | A kind of microelectronic product automated cleaning equipment and its application method |
| CN108580385A (en) * | 2018-04-20 | 2018-09-28 | 安徽忠盛新型装饰材料有限公司 | A kind of sheet metal uniform cleaning device |
| CN112764310A (en) * | 2020-12-31 | 2021-05-07 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
| CN112764310B (en) * | 2020-12-31 | 2024-03-26 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Assignor: Xu Zhulin Contract fulfillment period: 2009.5.10 to 2014.5.9 Contract record no.: 2009320000945 Denomination of utility model: Single chip washer Granted publication date: 20090107 License type: Exclusive license Record date: 20090515 |
|
| LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.5.10 TO 2014.5.9; CHANGE OF CONTRACT Name of requester: UZHOU CSE SEMICONDUCTOR EQUIPMENT TECHNOLOGYCO.,LT Effective date: 20090515 |
|
| EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Assignor: Xu Zhulin Contract record no.: 2009320000945 Date of cancellation: 20100721 |
|
| ASS | Succession or assignment of patent right |
Owner name: SUZHOU CSE SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO., Free format text: FORMER OWNER: XU ZHULIN Effective date: 20100914 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 101118 NO.9, CHUKUYING, XUANWU DISTRICT, BEIJING TO: 215000 NO.398, RUOSHUIROAD, GAOJIAO DISTRICT, DUSHUHU, INDUSTRIAL PARK, SUZHOU CITY, JIANGSU PROVINCE |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20100914 Address after: 215000 Jiangsu city of Suzhou province Dushu Lake Industrial Park No. 398 waterway if higher education Patentee after: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Address before: 101118, Beijing Xuanwu District reservoir Camp No. 9 Patentee before: Xu Zhulin |
|
| DD01 | Delivery of document by public notice |
Addressee: Xu Zhulin Document name: Notification of Passing Examination on Formalities |
|
| DD01 | Delivery of document by public notice |
Addressee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Document name: Notification to Pay the Fees |
|
| DD01 | Delivery of document by public notice |
Addressee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Document name: Notification of Termination of Patent Right |
|
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090107 Termination date: 20140408 |
|
| EXPY | Termination of patent right or utility model |