CN201178092Y - Single chip washer - Google Patents
Single chip washer Download PDFInfo
- Publication number
- CN201178092Y CN201178092Y CNU2008201072469U CN200820107246U CN201178092Y CN 201178092 Y CN201178092 Y CN 201178092Y CN U2008201072469 U CNU2008201072469 U CN U2008201072469U CN 200820107246 U CN200820107246 U CN 200820107246U CN 201178092 Y CN201178092 Y CN 201178092Y
- Authority
- CN
- China
- Prior art keywords
- socket
- support body
- transmission shaft
- spray pipe
- jet pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004140 cleaning Methods 0.000 claims abstract description 34
- 230000005540 biological transmission Effects 0.000 claims abstract description 17
- 238000007789 sealing Methods 0.000 claims description 16
- 239000004575 stone Substances 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 abstract description 3
- 239000007921 spray Substances 0.000 abstract 8
- 238000011086 high cleaning Methods 0.000 abstract 1
- 238000000638 solvent extraction Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 210000003027 ear inner Anatomy 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2008201072469U CN201178092Y (en) | 2008-04-08 | 2008-04-08 | Single chip washer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNU2008201072469U CN201178092Y (en) | 2008-04-08 | 2008-04-08 | Single chip washer |
Publications (1)
Publication Number | Publication Date |
---|---|
CN201178092Y true CN201178092Y (en) | 2009-01-07 |
Family
ID=40218117
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNU2008201072469U Expired - Fee Related CN201178092Y (en) | 2008-04-08 | 2008-04-08 | Single chip washer |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN201178092Y (en) |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101894784A (en) * | 2010-06-10 | 2010-11-24 | 中国电子科技集团公司第四十五研究所 | Wafer rotating plate device for special equipment of semiconductor |
CN102139271A (en) * | 2011-03-02 | 2011-08-03 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
CN103962331A (en) * | 2013-01-29 | 2014-08-06 | 昆山尚达智机械有限公司 | Manual rotating cleaner for parts |
CN106269607A (en) * | 2016-08-16 | 2017-01-04 | 姚东鑫 | A kind of fine care device of mosaic tiles |
CN106345739A (en) * | 2016-11-29 | 2017-01-25 | 晶科能源有限公司 | Method and device for cleaning silicon materials |
CN106623187A (en) * | 2016-12-13 | 2017-05-10 | 无锡南方声学工程有限公司 | Fast cleaning device for discs |
CN106711279A (en) * | 2016-11-29 | 2017-05-24 | 梁结平 | Solar cell panel electrode removing device and method |
CN106733832A (en) * | 2016-12-13 | 2017-05-31 | 无锡南方声学工程有限公司 | A kind of two-sided cleaning device of disk |
CN107051940A (en) * | 2016-12-13 | 2017-08-18 | 无锡南方声学工程有限公司 | A kind of disk cleaning device |
CN107377508A (en) * | 2017-08-12 | 2017-11-24 | 宁波鄞州竹创信息科技有限公司 | A kind of cleaning device of mould processing |
CN108176644A (en) * | 2017-12-26 | 2018-06-19 | 重庆程顺汽车配件制造有限公司 | A kind of auto parts and components cleaning device and its manufacturing method |
CN108480267A (en) * | 2018-04-16 | 2018-09-04 | 安徽吉乃尔电器科技有限公司 | A kind of microelectronic product automated cleaning equipment and its application method |
CN108580385A (en) * | 2018-04-20 | 2018-09-28 | 安徽忠盛新型装饰材料有限公司 | A kind of sheet metal uniform cleaning device |
CN112764310A (en) * | 2020-12-31 | 2021-05-07 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
-
2008
- 2008-04-08 CN CNU2008201072469U patent/CN201178092Y/en not_active Expired - Fee Related
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101894784A (en) * | 2010-06-10 | 2010-11-24 | 中国电子科技集团公司第四十五研究所 | Wafer rotating plate device for special equipment of semiconductor |
CN101894784B (en) * | 2010-06-10 | 2012-07-11 | 北京中电科电子装备有限公司 | Wafer rotating plate device for special equipment of semiconductor |
CN102139271A (en) * | 2011-03-02 | 2011-08-03 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
CN102139271B (en) * | 2011-03-02 | 2012-07-04 | 江苏港星方能超声洗净科技有限公司 | Cleaning device |
CN103962331A (en) * | 2013-01-29 | 2014-08-06 | 昆山尚达智机械有限公司 | Manual rotating cleaner for parts |
CN106269607A (en) * | 2016-08-16 | 2017-01-04 | 姚东鑫 | A kind of fine care device of mosaic tiles |
CN106269607B (en) * | 2016-08-16 | 2018-09-28 | 泰州市美斯顿机械制造有限公司 | A kind of fine care device of mosaic tiles |
CN106711279A (en) * | 2016-11-29 | 2017-05-24 | 梁结平 | Solar cell panel electrode removing device and method |
CN106345739A (en) * | 2016-11-29 | 2017-01-25 | 晶科能源有限公司 | Method and device for cleaning silicon materials |
CN106623187A (en) * | 2016-12-13 | 2017-05-10 | 无锡南方声学工程有限公司 | Fast cleaning device for discs |
CN106733832A (en) * | 2016-12-13 | 2017-05-31 | 无锡南方声学工程有限公司 | A kind of two-sided cleaning device of disk |
CN107051940A (en) * | 2016-12-13 | 2017-08-18 | 无锡南方声学工程有限公司 | A kind of disk cleaning device |
CN107377508A (en) * | 2017-08-12 | 2017-11-24 | 宁波鄞州竹创信息科技有限公司 | A kind of cleaning device of mould processing |
CN108176644A (en) * | 2017-12-26 | 2018-06-19 | 重庆程顺汽车配件制造有限公司 | A kind of auto parts and components cleaning device and its manufacturing method |
CN108176644B (en) * | 2017-12-26 | 2021-04-23 | 重庆程顺汽车配件制造有限公司 | Automobile part cleaning device and manufacturing method thereof |
CN108480267A (en) * | 2018-04-16 | 2018-09-04 | 安徽吉乃尔电器科技有限公司 | A kind of microelectronic product automated cleaning equipment and its application method |
CN108580385A (en) * | 2018-04-20 | 2018-09-28 | 安徽忠盛新型装饰材料有限公司 | A kind of sheet metal uniform cleaning device |
CN112764310A (en) * | 2020-12-31 | 2021-05-07 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
CN112764310B (en) * | 2020-12-31 | 2024-03-26 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Assignor: Xu Zhulin Contract fulfillment period: 2009.5.10 to 2014.5.9 Contract record no.: 2009320000945 Denomination of utility model: Single chip washer Granted publication date: 20090107 License type: Exclusive license Record date: 20090515 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2009.5.10 TO 2014.5.9; CHANGE OF CONTRACT Name of requester: UZHOU CSE SEMICONDUCTOR EQUIPMENT TECHNOLOGYCO.,LT Effective date: 20090515 |
|
EC01 | Cancellation of recordation of patent licensing contract |
Assignee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Assignor: Xu Zhulin Contract record no.: 2009320000945 Date of cancellation: 20100721 |
|
ASS | Succession or assignment of patent right |
Owner name: SUZHOU CSE SEMICONDUCTOR EQUIPMENT TECHNOLOGY CO., Free format text: FORMER OWNER: XU ZHULIN Effective date: 20100914 |
|
C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 101118 NO.9, CHUKUYING, XUANWU DISTRICT, BEIJING TO: 215000 NO.398, RUOSHUIROAD, GAOJIAO DISTRICT, DUSHUHU, INDUSTRIAL PARK, SUZHOU CITY, JIANGSU PROVINCE |
|
TR01 | Transfer of patent right |
Effective date of registration: 20100914 Address after: 215000 Jiangsu city of Suzhou province Dushu Lake Industrial Park No. 398 waterway if higher education Patentee after: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Address before: 101118, Beijing Xuanwu District reservoir Camp No. 9 Patentee before: Xu Zhulin |
|
DD01 | Delivery of document by public notice |
Addressee: Xu Zhulin Document name: Notification of Passing Examination on Formalities |
|
DD01 | Delivery of document by public notice |
Addressee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Document name: Notification to Pay the Fees |
|
DD01 | Delivery of document by public notice |
Addressee: Suzhou CSE Semiconductor Equipment Technology Co., Ltd. Document name: Notification of Termination of Patent Right |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090107 Termination date: 20140408 |
|
EXPY | Termination of patent right or utility model |