Wafer rotating plate device for special equipment of semiconductor
Technical field
The present invention relates to semiconductor manufacturing equipment wafer whirligig technical field.
Background technology
Semiconductor manufacturing equipment need be fixing to process with wafer vacuum absorption in the process of carrying out wafer process.There are some problems in common whirligig, and is low etc. as galloping, poor sealing, rigidity.
Summary of the invention
The purpose of invention provides a kind of wafer rotating plate device for special equipment of semiconductor, compared with prior art, has compact conformation, running steadily, high, the good airproof performance of crudy, easy to use, advantage such as the life-span is long.
The present invention is achieved in that a kind of wafer rotating plate device for special equipment of semiconductor, comprise vacuum cup, rotating shaft, motor and mechanical driving device, it is characterized in that vacuum cup is fixed on the rotating shaft upper surface, rotating shaft adopts an end to fix the end support of moving about, be installed in bearing holder (housing, cover) by two angular contact ball bearings and a deep groove ball bearing, the rotating shaft below is connected with motor and mechanical driving device, and bearing holder (housing, cover) and pedestal fix.
Described rotating shaft is a multidiameter, two angular contact ball bearing two ends Internal and external cycles are all fixing, the upper end inner ring is stuck on the shaft shoulder of rotating shaft, the outer ring, upper end is pressed on the lower surface of bearing cap, the lower end inner ring contacts with the spacer upper surface, the outer ring, lower end is pressed on the interior hole end surface of bearing holder (housing, cover), bearing cap by screw on the upper surface of bearing holder (housing, cover); A deep groove ball bearing two ends inner ring is fixed, and the upper end inner ring contacts with the spacer lower surface, and the lower end inner ring is by last locknut and the screw thread double locking of following locknut by the rotating shaft lower end, and end cap is fixed on the bearing holder (housing, cover) lower surface; The vacuum locknut is pressed in the groove of vacuum cup, connects with vacuum tube in the rotating shaft by screw thread, and the below of vacuum tube is connected to the swivel joint that links to each other with vacuum plant.
Between described two angular contact ball bearings internal space ring and external space ring is installed, the inner ring spacer ring is installed between deep groove ball bearing and the locknut.
Described upper sealing ring is fixed on the lower surface of vacuum cup, intersects mutually with lower sealing ring.
Between described above-mentioned vacuum cup and the bearing cap, be equipped with the radial labyrinth sealing between end cap and the last locknut.
Good effect of the present invention is: can effectively solve problems of the prior art, compared with prior art, have compact conformation, running steadily, high, the good airproof performance of crudy, easy to use, advantage such as the life-span is long.
Description of drawings
Fig. 1 is the structural representation of a preferred embodiment of the present invention.
Among the figure: locknut under 1-vacuum cup, 2-vacuum locknut, 3-bearing cap, 4-upper sealing ring, 5-lower sealing ring, 6-rotating shaft, 7-angular contact ball bearing, 8-vacuum tube, 9-spacer, 10-bearing holder (housing, cover), 11-deep groove ball bearing, 12-end cap, the last locknut of 13-, the 14-.
Embodiment
Below in conjunction with preferred embodiment and accompanying drawing thereof with the present invention is further described, but not as a limitation of the invention.
See Fig. 1, this wafer rotating plate device for special equipment of semiconductor, comprise vacuum cup 1, rotating shaft 6, motor and mechanical driving device, vacuum cup 1 is fixed on rotating shaft 6 upper surfaces, rotating shaft 6 adopts an end to fix the end support of moving about, be installed in bearing holder (housing, cover) 10 by two angular contact ball bearings 7 and a deep groove ball bearing 11, rotating shaft 6 belows are connected with motor and mechanical driving device, and bearing holder (housing, cover) 10 and pedestal fix; Vacuum locknut 2 is pressed in the groove of vacuum cup 1, connects with vacuum tube 8 in the rotating shaft 6 by screw thread, and the below of vacuum tube 8 is connected to the swivel joint that links to each other with vacuum plant.Rotating shaft 6 is a multidiameter, two angular contact ball bearing 7 two ends Internal and external cycles are all fixing, the upper end inner ring is stuck on the shaft shoulder of rotating shaft 6, the outer ring, upper end is pressed on the lower surface of bearing cap 3, the lower end inner ring contacts with spacer 9 upper surfaces, the outer ring, lower end is pressed on the interior hole end surface of bearing holder (housing, cover) 10, bearing cap 3 by screw on the upper surface of bearing holder (housing, cover) 10; Deep groove ball bearing 11 a two ends inner ring is fixed, and the upper end inner ring contacts with spacer 9 lower surfaces, and the lower end inner ring is by last locknut 13 and the screw thread double locking of following locknut 14 by the rotating shaft lower end, and end cap 12 is fixed on bearing holder (housing, cover) 10 lower surfaces.Between two angular contact ball bearings 7 internal space ring and external space ring is installed, between deep groove ball bearing 11 and the locknut 13 the inner ring spacer ring is installed.Upper sealing ring 4 is fixed on the lower surface of vacuum cup 1, intersects mutually with lower sealing ring 5.Between above-mentioned vacuum cup 1 and the bearing cap 3, be equipped with the radial labyrinth sealing between end cap 12 and the last locknut 13.
Patent of the present invention is that a kind of stable action, wafer easy to use adsorb whirligig.Axle is that bearing adopts an end to fix an end supports of moving about, the increase stability of rotation.Rotation axis is supported by a pair of angular contact bearing and a deep groove ball bearing, wherein, the angular contact bearing Internal and external cycle both sides of upper end are all fixing, thereby having limited the two-way of axle moves, and a deep groove ball bearing inner ring is fixed, when the shaft extension Shi Kezuo that contracts moves axially, good operating stability can adapt to the variations in temperature that high speed rotating brings.Labyrinth seal has all been designed in the above and below of bearing, can prevent that dust, moisture and other impurity from entering bearing, improves the life-span of bearing.Upper sealing ring intersects mutually with lower sealing ring, can prevent cooling fluid access to plant inside.Add labyrinth seal in many places, prevent that dust from entering.Device is hollow devices, and the centre is equipped with vacuum tube, and following termination swivel joint is convenient to vacuum suction.