CN101220836A - Accurate mechanical bearing and aerostatic bearing associated shafting - Google Patents
Accurate mechanical bearing and aerostatic bearing associated shafting Download PDFInfo
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- CN101220836A CN101220836A CNA2007102033866A CN200710203386A CN101220836A CN 101220836 A CN101220836 A CN 101220836A CN A2007102033866 A CNA2007102033866 A CN A2007102033866A CN 200710203386 A CN200710203386 A CN 200710203386A CN 101220836 A CN101220836 A CN 101220836A
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Abstract
The invention provides a combined bearing system of a precise mechanical bearing and an air hydrostatic bearing. A mainshaft is a step shaft shape, which is sheathed by a transmission disc, a connecting sleeve and an adjusting lock sleeve sequentially from bottom to top; the transmission disc is connected with the connecting sleeve by a pin; the connecting sleeve is fixed with the surface of a workbench by a pin; the adjusting lock sleeve is a T-shaped ring; the upper section of the adjusting lock sleeve is connected with the mainshaft and the lower section thereof is provided with a spring; an upper bearing, a spacer bush, a lower bearing, a pressing cover and a lower nut are sheathed sequentially from the middle flange of the mainshaft to the lower end; a shaft sleeve is sheathed outside the two bearings; the flange of the mainshaft is sheathed by a sliding sleeve which is fixedly connected with the shaft sleeve; the shaft sleeve is a T-shaped sleeve; the outer convex ring of the shaft sleeve is connected with a cylinder seat; the cylinder wall of the cylinder seat is provided with an axial airway; the air outlet of the airway is distributed on the top surface of the cylinder seat; the lower part of the cylinder seat is fixed with the outer convex ring of the T-shaped shaft sleeve; a sealing ring is embedded on the bottom surface of the cylinder seat; the sealing ring is fixedly connected with the bottom surface of the cylinder seat. The invention is characterized by high precision, high rigidity, low friction, stable operation and being suitable for purification chambers.
Description
(1) technical field
The present invention relates to a kind of coupling shaft system, particularly a kind of axle system that is applied on the semiconductor manufacturing equipment intermittent-rotation worktable.
(2) background technique
The main effect of traditional semiconductor manufacturing equipment intermittent-rotation workbench precision axle system is accurate transmission wafer station, and adding provides necessary rigidity for worktable man-hour.Therefore, the structural type of workbench precision axle system has and significant effects wafer process quality, work efficiency.The general in the past precision optical machinery axle system that adopts of intermittent-rotation workbench precision axle system, its shortcoming is low, the poor rigidity of precision, can only be used for the not high occasion of requirement on machining accuracy; It is to adopt the hydrostatic pressure main shaft that a kind of traditional mode is also arranged, and this mode has overcome the low shortcoming of precision optical machinery shafting precision, but needs a cover hydraulic system, uses because of fluid leakage pollution environment, pollution chip are not suitable for Clean room.For this reason, some equipment adopts aerostatic bearing, and its running accuracy is than hydrostatic pressure main shaft height, and environmentally safe is fit to Clean room and uses; But because of the compressibility of air, the main shaft rigidity is lower, and using on the heavy load worktable influences machining accuracy; And have because of aerostatic bearing aspects such as material and heat treatment, machining accuracy are required very harsh, unfavorable factors such as manufacture cost height.
(3) summary of the invention
The purpose of this invention is to provide a kind of precision optical machinery bearing and aerostatic bearing associated shafting, the technical problem that to solve the axle that tradition is used for semiconductor manufacturing equipment intermittent-rotation worktable be function singleness, be difficult to be implemented in the processing of Clean room ultraprecise.
For achieving the above object, the present invention adopts following technological scheme:
A kind of precision optical machinery bearing and aerostatic bearing associated shafting, comprise the upper bearing (metal) and the lower bearing that are connected on the main shaft, it is characterized in that: main shaft 4 is the multidiameter shaft shape, there is a circle flange 4.1 at its middle part, flange by the main shaft middle part has three grades of gradually little steps of diameter to the main shaft upper end, order is with drive plate 9 from bottom to up, connecting sleeve 2 and adjustment lock tube 3, drive plate 9 vertically is being connected by pin 8 with connecting sleeve 2, connecting sleeve 2 passes worktable 1, fix by pin 15 and table surface, adjusting lock tube 3 is that a T shape that is connected between main shaft 4 and the connecting sleeve 2 is enclosed, the inner ring of its epimere is fixedlyed connected with main shaft 4 by upper cap nut 5, its hypomere has spring 6, the bottom withstands on the ladder of main shaft 4, flange by the main shaft middle part has the gradually little one-level step of diameter to the main shaft lower end, order is with upper bearing (metal) on this section main shaft, spacer 12, lower bearing, gland 14 and lower nut 22, be equipped with spacer 12 between the two bearings, be with axle sleeve 11 outside the two bearings, on the flange 4.1 of main shaft, be with sliding sleeve 10, this sliding sleeve 10 is fixedlyed connected with the upper end of axle sleeve 11 by pin, gland 14 below the lower bearing 17 is fixedlyed connected with the lower end of axle sleeve 11 by pin, axle sleeve 11 is T shape cover, its evagination circle connects an inverted T-shaped cylinder base 7, this cylinder base 7 places between worktable 1 and the frame 18, axial air flue 19 is arranged in the barrel of cylinder base 7, the inlet hole 20 of this air flue is positioned at the side of cylinder base 7 by the bottom, the outlet side 21 of this air flue is distributed in the end face of cylinder base 7, the bottom of cylinder base 7 is to the outstanding circle platform of inner tube wall, the evagination circle of this platform and T oblique crank Z cover 11 by dowel fixes together, there is a scrobicular ring bottom surface of cylinder base 7, scrobicular ring is embedded with seal ring 13, and sealing ring 13 is fixedlyed connected with the bottom surface of cylinder base 7 by pin.
Upper bearing (metal) 16 and lower bearing 17 are precise roller bearing or needle bearing.
Associated shafting of the present invention is transmitting the station process, air is by the inlet hole air inlet of cylinder base 7 bottoms, discharge by 24 throttle orifices at its top again, enter the junction plane between worktable 1 and the cylinder base 7, under the air pressure effect, make worktable 1 and pressure ring 2 micro-liftings, between cylinder base 7 and worktable 1, form the very thin air film of one deck like this; Pin 8 has guiding simultaneously and drives worktable 1 rotation two big functions.Between connecting sleeve 2 and the adjustment lock tube 3 spring 6 is housed, worktable 1 guarantees that by the spring balancing gas film pressure lifting process steadily reaches control lifting gap.After air shaft was floated, main shaft 4 began rotation under the drive of motor, thereby realized transmitting the purpose of station.Float on cylinder base 7 because of worktable 1 in this process, the advantage of utilize the friction factor of this layer air film little, low speed not having creeping phenomenon, realization improves the purpose of running accuracy, Location accuracy.
Described associated shafting is laid down air pressure after transmitting the station process and finishing, descend and get back to the home position at acting in conjunction lower tables such as gravity, spring force 1.Operating load is directly delivered on the cylinder base 7 by worktable 1 like this, is delivered on the frame, thereby has improved coupling stiffness greatly, makes work more steady, has significantly improved machining accuracy.
Compared with prior art the present invention also has following characteristics and beneficial effect: the present invention has the advantage of aerostatic bearing and precision optical machinery axle system concurrently for semiconductor manufacturing equipment intermittent-rotation worktable provides a kind of precision height, the high and low friction of rigidity, operates steadily, has been fit to precision optical machinery bearing and aerostatic bearing associated shafting that Clean room uses.
The present invention has the advantage of pneumatic bearing when the transmission wafer station, as operate steadily, frictional force is little etc., in the rotary work station process, worktable is floated on cylinder base by one deck air film, the radial force that is delivered to this system from motor is mainly born by precision optical machinery axle system, and be delivered on the frame by cylinder base 7, described intermittent-rotation worktable associated shafting is rotated flexibly, realize improving the purpose of running accuracy, Location accuracy; The rotary work station process is laid down air pressure after finishing, and under actings in conjunction such as spring, gravity, worktable directly is pressed on the cylinder base, makes the worktable load be delivered to frame by cylinder base, thereby has improved the coupling stiffness of worktable effectively.Thereby realized that semiconductor manufacturing equipment intermittent-rotation worktable correctly transmits station and adds man-hour the main effect of necessary rigidity is provided for worktable.
After the present invention adopts above-mentioned precision optical machinery axle system and aerostatic bearing associated shafting, Location accuracy, machining accuracy have been significantly improved, the wafer that the equipment for grinding that uses described axle to be is processed, the surface roughness Ra value is reduced to 0.012 μ m by 0.2 common μ m, has realized the purpose of superfine grinding.
The present invention can be fixed on the equipment by the screw via hole on the outer lug boss of cylinder base bottom; Static pressure air shaft rotor can directly be connected use as the intermittent-rotation worktable or with the intermittent-rotation stationary table.
Upper half part of the present invention adopts aerostatic bearing, adopts the gap to float with central main shaft and is connected, and the fitting surface between worktable and the cylinder base is the air film space; Worktable can slide on central main shaft when floating or descend.Lower half portion adopts precision optical machinery axle system, and central main shaft adopts interference fit to be connected with bearing inner race, and bearing foreign country then adopts interference fit to be connected with cylinder base.
The present invention can be regulated the size in aerostatic bearing gap by the nut on central main shaft top; Also can regulate and enter the compressed air pressure that described axle is according to the load size.To satisfy different applications.
Precision optical machinery bearing and aerostatic bearing associated shafting are adjusted air film supported ability and rigidity by regulating the pressure of inlet hole pressurized gas; Guarantee the worktable running steadily.Adjust the positioning control air-film thickness of lock tube 3 on main shaft 4.Connecting sleeve 2 can slide on drive plate 9, changes to adapt to the air shaft gap length.Between connecting sleeve 2 and the adjustment lock tube 3 spring 6 is housed, worktable 1 guarantees that by the spring balancing gas film pressure lifting process is steady.The pressurized air that axle system uses enters cylinder base 7 after super-dry, filtration, discharging back environmentally safe, so this axle system is fit to the Clean room use.
(4) description of drawings
The present invention will be further described in detail below in conjunction with accompanying drawing.
Fig. 1 is a structural representation of the present invention.
Reference character: 1-worktable, 2-connecting sleeve, 3-adjust lock tube, 4-main shaft, 4.1-flange, 5-upper cap nut, 6-spring, 7-cylinder base, 8-pin, 9-drive plate, 10-sliding sleeve, 11-axle sleeve, 12-spacer, 13-seal ring, 14-gland, 15-pin, 16-upper bearing (metal), 17-lower bearing, 18-frame, 19-air flue, 20-inlet hole, 21-outlet side, 22-lower nut.
(5) embodiment
Embodiment is referring to shown in Figure 1, and this precision optical machinery bearing and aerostatic bearing associated shafting comprise the upper bearing (metal) 16 and the lower bearing 17 that are connected on the main shaft, and upper bearing (metal) 16 and lower bearing 17 can be the precise roller bearings, also can be accurate needle bearings.Its main shaft 4 is the multidiameter shaft shape, there is a circle flange 4.1 at its middle part, flange by the main shaft middle part has three grades of gradually little steps of diameter to the main shaft upper end, order is with drive plate 9 from bottom to up, connecting sleeve 2 and adjustment lock tube 3, drive plate 9 is vertically being fixedlyed connected by pin 8 with connecting sleeve 2, connecting sleeve 2 passes worktable 1, fix by pin 15 and table surface, adjusting lock tube 3 is that a T shape that is connected between main shaft 4 and the connecting sleeve 2 is enclosed, the inner ring of its epimere is fixedlyed connected with main shaft 4 by upper cap nut 5, its hypomere is with spring 6 or hoop is equipped with several little springs at interval, the bottom withstands on the ladder of main shaft 4, flange by the main shaft middle part has the gradually little one-level step of diameter to the main shaft lower end, order is with upper bearing (metal) on this section main shaft, spacer 12, lower bearing, gland 14 and lower nut 22, be equipped with spacer 12 between the two bearings, be with axle sleeve 11 outside the two bearings, on the flange 4.1 of main shaft, be with sliding sleeve 10, this sliding sleeve 10 is fixedlyed connected with the upper end of axle sleeve 11 by pin, gland 14 below the lower bearing 17 is fixedlyed connected with the lower end of axle sleeve 11 by pin, axle sleeve 11 is T shape cover, its evagination circle connects an inverted T-shaped cylinder base 7, this cylinder base 7 places between worktable 1 and the frame 18, axial air flue 19 is arranged in the barrel of cylinder base 7, the inlet hole 20 of this air flue is positioned at the side of cylinder base 7 by the bottom, the outlet side 21 of this air flue is distributed in the end face of cylinder base 7, the bottom of cylinder base 7 is to the outstanding circle platform of inner tube wall, the evagination circle of this platform and T oblique crank Z cover 11 by dowel fixes together, there is a scrobicular ring bottom surface of cylinder base 7, scrobicular ring is embedded with seal ring 13, and sealing ring 13 is fixedlyed connected with the bottom surface of cylinder base 7 by pin.
Axle of the present invention is to be made up of pneumatic bearing and precision optical machinery axle system.Associated shafting can be fixed on the equipment by the screw via hole on the cylinder base 7 bottom outer lug boss and use.The pneumatic bearing that described axle is mainly is made up of cylinder base 7, worktable 1, connecting sleeve 2, spring 6 adjustment lock tubes 3 and seal ring and air feeder etc.Wherein form the air shaft gap by cylinder base 7 and worktable 1 junction plane.Reconcile gap length by nut 3.The compressed air pressure that enters cylinder base 7 can be reconciled according to the load size.Connecting sleeve 2 can slide on drive plate 9, to adapt to the air shaft gap length.The worktable transmission of power is connected with main shaft 4 by connecting sleeve 2, pin 8, drive plate 9 and flat key.Precision optical machinery axle owner will be made up of axle sleeve, spacer, main shaft and bearing etc.Precision optical machinery axle system by screw on cylinder base 7 bottom inner platforms.Precision optical machinery axle system is made up of axle sleeve 11, spacer 12, main shaft 4 and gland, nut, a cover precise roller bearing etc.
Claims (2)
1. precision optical machinery bearing and aerostatic bearing associated shafting, comprise the upper bearing (metal) and the lower bearing that are connected on the main shaft, it is characterized in that: main shaft (4) is the multidiameter shaft shape, there is a circle flange (4.1) at its middle part, flange by the main shaft middle part has three grades of gradually little steps of diameter to the main shaft upper end, order is with drive plate (9) from bottom to up, connecting sleeve (2) and adjustment lock tube (3), drive plate (9) vertically is being connected by pin (8) with connecting sleeve (2), connecting sleeve (2) passes worktable (1), fix by pin (15) and table surface, adjusting lock tube (3) is that a T shape that is connected between main shaft (4) and the connecting sleeve (2) is enclosed, the inner ring of its epimere is fixedlyed connected with main shaft (4) by upper cap nut (5), its hypomere has spring (6), the bottom withstands on the ladder of main shaft (4), flange by the main shaft middle part has the gradually little one-level step of diameter to the main shaft lower end, order is with upper bearing (metal) (16) on this section main shaft, spacer (12), lower bearing (17), gland (14) and lower nut (22), be equipped with spacer (12) between the two bearings, be with axle sleeve (11) outside the two bearings, on the flange (4.1) of main shaft, be with sliding sleeve (10), this sliding sleeve (10) is fixedlyed connected with the upper end of axle sleeve (11) by pin, gland (14) below the lower bearing (17) is fixedlyed connected with the lower end of axle sleeve (11) by pin, axle sleeve (11) is T shape cover, its evagination circle connects an inverted T-shaped cylinder base (7), this cylinder base (7) places between worktable (1) and the frame (18), axial air flue (19) is arranged in the barrel of cylinder base (7), the inlet hole of this air flue (20) is positioned at the side of cylinder base (7) by the bottom, the outlet side of this air flue (21) is distributed in the end face of cylinder base (7), the bottom of cylinder base (7) is to the outstanding circle platform of inner tube wall, the evagination circle of this platform and T oblique crank Z cover (11) by dowel fixes together, there is a scrobicular ring bottom surface of cylinder base (7), scrobicular ring is embedded with seal ring (13), and sealing ring (13) is fixedlyed connected with the bottom surface of cylinder base (7) by pin.
2. precision optical machinery bearing according to claim 1 and aerostatic bearing associated shafting is characterized in that: upper bearing (metal) (16) and lower bearing (17) are precise roller bearing or needle bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007102033866A CN100547758C (en) | 2007-12-25 | 2007-12-25 | Precision optical machinery bearing and aerostatic bearing associated shafting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007102033866A CN100547758C (en) | 2007-12-25 | 2007-12-25 | Precision optical machinery bearing and aerostatic bearing associated shafting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101220836A true CN101220836A (en) | 2008-07-16 |
| CN100547758C CN100547758C (en) | 2009-10-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007102033866A Expired - Fee Related CN100547758C (en) | 2007-12-25 | 2007-12-25 | Precision optical machinery bearing and aerostatic bearing associated shafting |
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| CN (1) | CN100547758C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101882592A (en) * | 2010-06-12 | 2010-11-10 | 中国电子科技集团公司第四十五研究所 | Elastic adjusting mechanism for special semiconductor device |
| CN101894784A (en) * | 2010-06-10 | 2010-11-24 | 中国电子科技集团公司第四十五研究所 | Wafer rotating plate device for special equipment of semiconductor |
| CN102312926A (en) * | 2011-03-11 | 2012-01-11 | 许晓华 | Straight-axis bearing positioning structure |
| CN105458910A (en) * | 2015-12-23 | 2016-04-06 | 北京中电科电子装备有限公司 | Wafer supporting table system |
| CN108638359A (en) * | 2018-05-09 | 2018-10-12 | 中国工程物理研究院激光聚变研究中心 | The process that cutting-in is fed in fly cutting |
| CN113983141A (en) * | 2021-11-22 | 2022-01-28 | 无锡巨蟹智能驱动科技有限公司 | Carry on compact steering wheel of harmonic speed reducer ware |
-
2007
- 2007-12-25 CN CNB2007102033866A patent/CN100547758C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101894784A (en) * | 2010-06-10 | 2010-11-24 | 中国电子科技集团公司第四十五研究所 | Wafer rotating plate device for special equipment of semiconductor |
| CN101894784B (en) * | 2010-06-10 | 2012-07-11 | 北京中电科电子装备有限公司 | Wafer rotating plate device for special equipment of semiconductor |
| CN101882592A (en) * | 2010-06-12 | 2010-11-10 | 中国电子科技集团公司第四十五研究所 | Elastic adjusting mechanism for special semiconductor device |
| CN102312926A (en) * | 2011-03-11 | 2012-01-11 | 许晓华 | Straight-axis bearing positioning structure |
| CN105458910A (en) * | 2015-12-23 | 2016-04-06 | 北京中电科电子装备有限公司 | Wafer supporting table system |
| CN105458910B (en) * | 2015-12-23 | 2018-01-09 | 北京中电科电子装备有限公司 | A kind of wafer-supporting platform system |
| CN108638359A (en) * | 2018-05-09 | 2018-10-12 | 中国工程物理研究院激光聚变研究中心 | The process that cutting-in is fed in fly cutting |
| CN113983141A (en) * | 2021-11-22 | 2022-01-28 | 无锡巨蟹智能驱动科技有限公司 | Carry on compact steering wheel of harmonic speed reducer ware |
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| Publication number | Publication date |
|---|---|
| CN100547758C (en) | 2009-10-07 |
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Granted publication date: 20091007 Termination date: 20131225 |