CN108638359A - The process that cutting-in is fed in fly cutting - Google Patents
The process that cutting-in is fed in fly cutting Download PDFInfo
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- CN108638359A CN108638359A CN201810436046.6A CN201810436046A CN108638359A CN 108638359 A CN108638359 A CN 108638359A CN 201810436046 A CN201810436046 A CN 201810436046A CN 108638359 A CN108638359 A CN 108638359A
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- cutting
- fly
- air pressure
- kickboard
- feeding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The present invention provides the process that cutting-in is fed in a kind of fly cutting of the achievable submicron order amount of feeding.The process that cutting-in is fed in fly cutting changes the operating air pressure of fly-cutting lathe, and upper kickboard, lower kickboard are under the influence of air pressure, elastic deformation amount increases, it is expanded respectively to upper and lower both sides, to make the cutter being fixed in lower kickboard also offset downward, that is, realizes a certain amount of feeding.The present invention is not necessarily to additional regulating mechanism, using lower kickboard under pressure stress deformation the characteristics of, propose the adjusting method that the cutting-in amount of feeding is realized using the stress deformation, the adjusting of submicron order cutting-in feeding is realized by control pressure, it can be used for the cutting-in feeding of ultraprecise fly-cutting lathe, other field is can also be used for, it is easy to operate, it is easy to accomplish.
Description
Technical field
The present invention relates to ultra-precise fly incision technology field, more particularly to it is a kind of by control pressure realize in fly cutting into
The process given.
Background technology
Ultra precision cutting technology is answered extensively at present because of the high and reproducible feature of its high precision machining, production efficiency
For high-tech areas such as aerospace, precision instrument, war industrys.In the high-energy solid laser of inertial confinement laser fusion
In device, KDP crystal is the material irreplaceable as frequency multiplication element and optoelectronic switch.KDP crystal is due to soft crisp, the easy deliquescence of its matter
Etc. physical characteristics, it is difficult to processed, thus developed suitable for the super of KDP crystal pro cessings with modes such as traditional milling, polishings
Precision diamond fly-cutting technology.
Ultraprecise diamond fly-cutting technology can be directly used in the finishing of KDP crystal, and finished surface precision is high, disclosure satisfy that
Optical element requirement.Meanwhile fly cutting technical controlling is simple, and it is high in machining efficiency, it is to add for KDP crystal is most effective
Work means.Fly cutting is different from turnery processing, in fly cutting cutter with semi shield oil cylinder revolution at a high speed, be processed element slowly into
Realization machining, this feature of fly cutting to be very suitable for processing plane component.
In ultraprecise diamond fly cutting, need the cutting-in amount of feeding as small as possible improve processing stability and
Reliability is processed element surface quality to improve.However manual cutting-in feeding adjusting mechanism of the conventional mounting on cutter
It is only capable of realizing that the amount of feeding of micron level is adjusted, it is difficult to which the cutting-in feeding for breaking through submicron order cannot further improve element table
Face quality realizes that cutting-in feeds the other breakthrough of submicron order.
Invention content
Technical problem to be solved by the invention is to provide cut in a kind of fly cutting of the achievable submicron order amount of feeding
The process fed deeply.
The technical proposal for solving the technical problem of the invention is：The process that cutting-in is fed in fly cutting, changes
Become the operating air pressure of fly-cutting lathe, under the influence of air pressure, elastic deformation amount increases, respectively to upper and lower two for upper kickboard, lower kickboard
Side is expanded, and to make the cutter being fixed in lower kickboard also offset downward, that is, realizes a certain amount of feeding.
Further, the operating air pressure changes within the scope of 0.46-0.56MPa.
Further, the operating air pressure is 0.5MPa.
Further, the operating air pressure refers to the admission pressure between upper kickboard, lower kickboard and bearing holder (housing, cover).
Further, this approach includes the following steps：1) the Aerostatic Spindle work of fly-cutting lathe before processing, is adjusted
It is A1 to make air pressure, and time processing is carried out to element；2) after completing processing, hydraulic pressure guide rail is resetted, does not adjust cutting-in feeding, then
The operating air pressure of the Aerostatic Spindle is further added by 0.01-0.10MPa on the basis of A1, then carries out cutting at one time processing, it is empty
Gas hydrostatic spindle generates flexible deformation under atmospheric pressure variation so that the deformation of lower kickboard, while cutter is to workpiece variation, i.e., in fact
The other cutting-in feeding of submicron order is showed.
The beneficial effects of the invention are as follows：The present invention be not necessarily to additional regulating mechanism, using lower kickboard under pressure by
The characteristics of power deforms, it is proposed that the adjusting method that the cutting-in amount of feeding is realized using the stress deformation is realized by control pressure
The adjusting of submicron order cutting-in feeding can be used for the cutting-in feeding of ultraprecise fly-cutting lathe, it can also be used to other field, operation letter
It is single, it is easy to accomplish.
Description of the drawings
Fig. 1 is the structural schematic diagram of fly-cutting lathe.
Fig. 2 is the sectional view of the Aerostatic Spindle of Fig. 1.
Fig. 3 is the schematic diagram that the displacement static measurement of the Aerostatic Spindle is measured with dynamic.
Specific implementation mode
As shown in Figs. 1-2, ultraprecise diamond fly-cutting lathe is mainly by lathe bed 1, column 2, crossbeam 3, the Aerostatic Spindle
4, hydraulic pressure guide rail 5, vacuum cup 6 and cutter 7 form.The Aerostatic Spindle 4 acts mainly as the effect of bearing, motor shaft 9
With upper kickboard 10, upper kickboard 10 and be all made of bolt between axle sleeve 11, axle sleeve 11 and lower kickboard 8 and be fixedly connected, constitute rotating part
Part, and rotary motion is done by motor driving together, cutter 7 is fixed in lower kickboard 8.The processing method of fly-cutting lathe is：Crystal
Element is adsorbed on vacuum cup 6, and slowly downward kickboard 8 moves by the drive of hydraulic pressure guide rail 5, and cutting-in feed mechanism is mounted on
On cutter 7, the adjusting of cutting-in is realized by adjusting cutter 7.Motor shaft 9 drives lower kickboard 8 and cutter 7 to make rotary motion realization
Machining.It is filled with pressure-air between upper kickboard 10, lower kickboard 8, axle sleeve 11 and bearing holder (housing, cover) 12 and forms air film 13, it is whole to make
A rotary part suspends, and the frictional force between upper kickboard 10, lower kickboard 8 and bearing holder (housing, cover) 12 becomes minimum, operates steadily.Air
Hydrostatic spindle 4 is capable of providing high radial and axial running accuracy, due to not having Mechanical Contact, the degree of wear to fall below most
It is low, so that it is guaranteed that precision remains stable.
The method of the present invention is work in-process, the admission pressure in increase between kickboard 10, lower kickboard 8 and bearing holder (housing, cover) 12, then
Under the influence of air pressure, elastic deformation amount increases for upper kickboard 10, lower kickboard 8, is expanded respectively to upper and lower both sides, to make to be fixed on
Cutter 7 in lower kickboard 8 is also offset downward, that is, realizes a certain amount of feeding.
When the material of main part of the Aerostatic Spindle 4 is 38CrMoAl, elasticity modulus 206GPa, Poisson's ratio 0.3, density
For 7850kg/m3, motor shaft 9, upper kickboard 10, axle sleeve 11 and the rotary part gross mass that lower kickboard 8 is constituted are 310Kg, first
When lathe is not run, by changing upper admission pressure between kickboard 10, lower kickboard 8 and bearing holder (housing, cover) 12, cutter 7 is measured
Displacement at position of tool tip obtains static measurement data shown in Fig. 3；Then start machine component, be 0.47MPa with air pressure
When on the basis of, at this time deflection (displacement at the position of tool tip of cutter 7) be 0；When air pressure increases to 0.48MPa, deformation
Amount is 0.05 micron；When air pressure is 0.49MPa, deflection is 0.1 micron；When air pressure is 0.50MPa, deflection 0.14
Micron；When air pressure is 0.51MPa, deflection is 0.18 micron；When air pressure is 0.52MPa, deflection is 0.21 micron；When
When air pressure is 0.53MPa, deflection is 0.24 micron；When air pressure is 0.54MPa, deflection is 0.27 micron；When air pressure is
When 0.55MPa, deflection is 0.30 micron；When air pressure is 0.56MPa, deflection is 0.32 micron, to obtain shown in Fig. 3
Dynamic measuring data, above-mentioned all deformation datas are that the number extracted afterwards is detected to element surface using interferometer
According to.Element has reaction force to cutter 7 when due to processing, thus static measurement data are bigger than dynamic measuring data, static measurement
Data only compare use, and dynamic measuring data reflection is only the practical amount of feeding.
For inventor the study found that when air pressure increases to 0.49MPa from 0.47MPa, deflection increases by 0.10 micron；Air pressure from
When 0.49MPa increases to 0.52MPa, deflection increases by 0.11 micron；When air pressure increases to 0.55MPa from 0.52MPa, deflection
Increase by 0.09 micron.Air pressure range when the fly-cutting lathe normal work of the present invention may be provided at 0.46-0.56MPa ranges
Interior, optimum working pressure value is 0.5MPa or so, and at this moment the Aerostatic Spindle operating is more steady, and machining accuracy is higher.This hair
Air pressure adjustment range in bright method is adjusted near this optimum working pressure value to be advisable.
Embodiment：
Before being processed, it sets the supply gas pressure of lathe to 0.49MPa, according to conventional machining parameter setting main shaft
Rotating speed 400rpm, 60 μm/s of feed speed, 3 μm of cutting-in carry out a conventional machining；After completing time processing, by supply gas pressure
Increase to 0.52MPa, at this time since upper kickboard 10, lower kickboard 8 distinguish up and down both sides expansion, cutter 7 is micro- to bottom offset 0.11
Rice, then carries out time processing again, that is, realizes 0.11 micron of cutting-in feeding, and second processing relative to realizing for the first time
The other cutting-in feeding of submicron order.
The present invention can arbitrarily change the air pressure processed twice, pressure variety and displacement within the scope of 0.46-0.56MPa
Variable quantity correspondence as shown in Fig. 3 dynamic measurement results, adjusted with reaching the corresponding amount of feeding.
Claims (6)
1. the process that cutting-in is fed in fly cutting, it is characterised in that：Change the operating air pressure of fly-cutting lathe, upper kickboard
(10), under the influence of air pressure, elastic deformation amount increases lower kickboard (8), is expanded respectively to upper and lower both sides, to make to be fixed on down
Cutter (7) in kickboard (8) is also offset downward, that is, realizes a certain amount of feeding.
2. the process that cutting-in is fed in fly cutting as described in claim 1, it is characterised in that：The operating air pressure exists
Change within the scope of 0.46-0.56MPa.
3. the process that cutting-in is fed in fly cutting as described in claim 1, it is characterised in that：The operating air pressure is
0.5MPa。
4. the process that cutting-in is fed in fly cutting as described in claim 1, it is characterised in that：The operating air pressure refers to
Admission pressure between upper kickboard (10), lower kickboard (8) and bearing holder (housing, cover) (12).
5. the process that cutting-in is fed in fly cutting as described in claim 1, it is characterised in that：This method includes as follows
Step：1) the Aerostatic Spindle (4) operating air pressure for before processing, adjusting fly-cutting lathe is A1, to element once add
Work；2) after completing processing, hydraulic pressure guide rail (5) are resetted, do not adjust cutting-in feeding, then by the work of the Aerostatic Spindle (4)
Air pressure is further added by 0.01-0.10MPa on the basis of A1, then carries out cutting at one time processing, and the Aerostatic Spindle (4) is in air pressure pressure
Power variation is lower to generate flexible deformation so that lower kickboard (8) deformation, while cutter (7) realizes submicron order to workpiece variation
Other cutting-in feeding.
6. the process that cutting-in is fed in fly cutting as claimed in claim 5, it is characterised in that：The operating air pressure exists
Change within the scope of 0.46-0.56MPa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810436046.6A CN108638359A (en) | 2018-05-09 | 2018-05-09 | The process that cutting-in is fed in fly cutting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810436046.6A CN108638359A (en) | 2018-05-09 | 2018-05-09 | The process that cutting-in is fed in fly cutting |
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| Publication Number | Publication Date |
|---|---|
| CN108638359A true CN108638359A (en) | 2018-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810436046.6A Pending CN108638359A (en) | 2018-05-09 | 2018-05-09 | The process that cutting-in is fed in fly cutting |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101220836A (en) * | 2007-12-25 | 2008-07-16 | 中国电子科技集团公司第四十五研究所 | Accurate mechanical bearing and aerostatic bearing associated shafting |
| CN101693365A (en) * | 2009-10-22 | 2010-04-14 | 中国计量科学研究院 | Air bearing structure and method for achieving air film thickness compensation |
| CN103056397A (en) * | 2012-12-31 | 2013-04-24 | 哈尔滨工业大学 | Large-diameter ultra-precise air static pressure rotating shafting |
| CN103639887A (en) * | 2013-10-28 | 2014-03-19 | 中国计量学院 | Flexible pneumatic polishing disk for crystal substrate surface machining |
| CN103648714A (en) * | 2011-07-15 | 2014-03-19 | 株式会社安川电机 | Stage device and stage control system |
| CN104440474A (en) * | 2014-11-28 | 2015-03-25 | 西安交通大学 | Self-adaption profile modification blade abrasive belt polishing machine tool |
-
2018
- 2018-05-09 CN CN201810436046.6A patent/CN108638359A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101220836A (en) * | 2007-12-25 | 2008-07-16 | 中国电子科技集团公司第四十五研究所 | Accurate mechanical bearing and aerostatic bearing associated shafting |
| CN101693365A (en) * | 2009-10-22 | 2010-04-14 | 中国计量科学研究院 | Air bearing structure and method for achieving air film thickness compensation |
| CN103648714A (en) * | 2011-07-15 | 2014-03-19 | 株式会社安川电机 | Stage device and stage control system |
| CN103056397A (en) * | 2012-12-31 | 2013-04-24 | 哈尔滨工业大学 | Large-diameter ultra-precise air static pressure rotating shafting |
| CN103639887A (en) * | 2013-10-28 | 2014-03-19 | 中国计量学院 | Flexible pneumatic polishing disk for crystal substrate surface machining |
| CN104440474A (en) * | 2014-11-28 | 2015-03-25 | 西安交通大学 | Self-adaption profile modification blade abrasive belt polishing machine tool |
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Application publication date: 20181012 |