CN112764310A - Cleaning process of flexible AMOLED mask - Google Patents

Cleaning process of flexible AMOLED mask Download PDF

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Publication number
CN112764310A
CN112764310A CN202011638583.2A CN202011638583A CN112764310A CN 112764310 A CN112764310 A CN 112764310A CN 202011638583 A CN202011638583 A CN 202011638583A CN 112764310 A CN112764310 A CN 112764310A
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CN
China
Prior art keywords
wall
mask
fixed mounting
mask version
base
Prior art date
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Granted
Application number
CN202011638583.2A
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Chinese (zh)
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CN112764310B (en
Inventor
钱超
余洋
植启东
黄斌
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Nanjing Shenguang Technology Co ltd
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Nanjing Shenguang Technology Co ltd
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Priority to CN202011638583.2A priority Critical patent/CN112764310B/en
Publication of CN112764310A publication Critical patent/CN112764310A/en
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Publication of CN112764310B publication Critical patent/CN112764310B/en
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82Auxiliary processes, e.g. cleaning or inspecting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B08B3/123Cleaning travelling work, e.g. webs, articles on a conveyor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
    • F26B21/001Drying-air generating units, e.g. movable, independent of drying enclosure

Abstract

The invention discloses a cleaning device for a flexible AMOLED mask plate, which comprises a machine shell, wherein a fixing device is fixedly arranged on the inner wall of the machine shell, a telescopic rod is arranged in the fixing device, a movable connecting plate is arranged at one end, away from the machine shell, of the telescopic rod, the inner wall of the movable connecting plate is movably connected with the outer wall of the telescopic rod, a limiting block is fixedly arranged at one end, away from the telescopic rod, of the movable connecting plate, a rotating shaft is arranged in the limiting block, the outer wall of the rotating shaft is movably connected with the inner wall of the limiting block, an installation concave table is fixedly arranged on the outer wall of the rotating shaft, a control shaft is arranged in the installation concave table, two ends of the control shaft are movably connected with the inner wall of the installation concave table. Can fix the mask version through fixing device for not unidimensional mask version, the rotation axis can drive fixing device and rotate, further drives the mask version and rotates, shortens the liquid medicine soak time, improves cleaning efficiency.

Description

Cleaning process of flexible AMOLED mask
Technical Field
The invention belongs to the technical field of AMOLED (active matrix/organic light emitting diode) mask plates, and particularly relates to a cleaning process of a flexible AMOLED mask plate.
Background
The mask plate is also called as a photomask, a photoetching mask plate, a mask plate and the like, is a high-precision tool for transferring a pattern 'negative film' in the manufacturing process of products in the downstream industry, and is a carrier for bearing intellectual property information such as pattern design, process technology and the like. The mask is used for batch production in the downstream electronic component manufacturing industry, is a key part of the connection of production processes in the downstream industry, and is one of the determining factors of the accuracy and quality of downstream products. The product is mainly applied to industries such as flat panel display, semiconductor chips, touch control, circuit boards and the like, and is a key tool in product manufacturing procedures in downstream industries. Customers in the Chinese market comprise Jingdong, Tianma, Huaxing photoelectricity, group creative photoelectricity, Vast-Caucaila, Longteng photoelectricity, Xinli, middle-television panda, Wei Xinnuo and the like in the panel field; in the field of semiconductor chips, publishers have developed inter-die, intel, elkel, tall bang technologies, long electric technologies, strandlet, and the like.
When the traditional cleaning device is used:
1. because the produced products are different and the used masks are different, the masks are inconvenient to install and fix and inconvenient to clean.
2. The cleaning of the mask is usually carried out for a long time to thoroughly remove organic matters on the mask, so that the cleaning efficiency of the mask is low.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide the cleaning device for the flexible AMOLED mask, which has the advantages of being capable of being used for mask plates with different sizes and high in cleaning efficiency.
In order to achieve the purpose, the invention provides the following technical scheme: the utility model provides a belt cleaning device of flexible AMOLED mask version, includes the casing, the inner wall fixed mounting of casing has fixing device, fixing device's inside includes the telescopic link, the one end that the casing was kept away from to the telescopic link is provided with the activity and links the board, the activity links the inner wall of board and the outer wall swing joint of telescopic link, the activity links the one end fixed mounting that the telescopic link was kept away from to the board and has the stopper, the inside of stopper is provided with the rotation axis, the outer wall of rotation axis and the inner wall swing joint of stopper, the outer wall fixed mounting of rotation axis has the installation concave station, the inside of installation concave station is provided with the control shaft, the both ends of control shaft and the inner wall swing joint of installation concave station, the outer wall fixed mounting of control shaft has dead lever one, the outer.
Preferably, the inner wall movable mounting of spacing sideboard I has the regulating spindle, the outer wall fixed mounting of regulating spindle has dead lever two, the outer wall fixedly connected with spacing sideboard II of dead lever two, the bottom of dead lever two is provided with oblique pull spring, the one end of oblique pull spring and the outer wall fixed connection of dead lever two, the inside of spacing sideboard I is provided with compression screw, compression screw's outer wall and the inner wall threaded connection of spacing sideboard I, compression screw's bottom fixed mounting has the foot that compresses tightly.
Through adopting above-mentioned technical scheme, the upper and lower both ends of two pairs of mask versions of spacing sideboard one and spacing sideboard are fixed, adjust compression screw and make the fixed mask version of foot that compresses tightly, are convenient for fix the mask version of different shapes.
Preferably, the bottom of casing is provided with the base, the top of base and the bottom fixed connection of casing, the bottom fixed mounting of base has the antiskid stabilizer blade, the inner wall fixed mounting of base has ultrasonic wave generating device, the inside of base includes the electrical heating stick, the both ends of electrical heating stick and the inner wall fixed connection of base.
By adopting the technical scheme, the ultrasonic generating device sends ultrasonic waves to accelerate cleaning, and the electric heating rod controls the temperature of the cleaning liquid medicine.
Preferably, the bottom of base is provided with into pencil, the outer wall of entering pencil and the inner wall fixed connection of base.
By adopting the technical scheme, the medicine inlet pipe enters the cleaning liquid medicine.
Preferably, the outer wall of the casing is provided with an overflow groove, the inner wall of the casing is fixedly provided with a sliding guide rail, the inner wall of the sliding guide rail is movably connected with a conveying device, the conveying device comprises a sliding block inside, the outer wall of the sliding block is provided with a connecting block, and one end of the connecting block is fixedly connected with the outer wall of the sliding block.
By adopting the technical scheme, the overflow groove enables the redundant cleaning fluid to flow out, and the conveying device slides through the sliding guide rail to convey the mask plate.
Preferably, the other end of connecting block is provided with the swing post, the one end of swing post and the inner wall swing joint of connecting block, the outer wall fixed mounting of swing post has the regulating plate, the inner wall movable mounting of regulating plate has the regulating block, the one end fixed mounting that the regulating plate was kept away from to the regulating block has vacuum chuck.
Through adopting above-mentioned technical scheme, the swing post drives regulating plate and regulating block and rotates, and vacuum chuck adsorbs the mask version, and the slider drives the mask version and leads to the groove through the feeding and slides in the drying cabinet.
Preferably, the top fixed mounting of casing has the drying cabinet, the one end of drying cabinet is provided with the feeding gate, the one end of feeding gate and the bottom swing joint of drying cabinet, the inner wall fixedly connected with observation window of feeding gate, the top fixed mounting of feeding gate has the handle.
Through adopting above-mentioned technical scheme, observe the washing condition through the observation window on the feeding door, can open the feeding door through the handle.
Preferably, the top movable mounting of drying cabinet has closely knit top cap, the logical groove of feeding has been seted up to the outer wall of drying cabinet, the one end that the groove was led to in the feeding is provided with the waste material groove, the waste material groove is seted up at the top of drying cabinet, the inner wall fixed mounting of waste material groove has the supporting network.
By adopting the technical scheme, the liquid drained from the waste material tank is stored, and the mask is supported by the support net.
Preferably, a fan is fixedly mounted on the inner wall of the drying box, a louver fan is fixedly connected to the inner wall of the fan, a feeding pipe is arranged at the top of the fan, two ends of the feeding pipe are fixedly connected with the inner wall of the drying box, and a spray nozzle is fixedly mounted at the bottom of the feeding pipe.
Through adopting above-mentioned technical scheme, the conveying pipe carries water or alcohol further to wash, and the fan is dried to the mask.
A cleaning process of a flexible AMOLED mask comprises the following steps:
s1, opening the feeding door, placing the mask on the fixing device, adjusting the length of the telescopic rod to adapt to the size of the mask, rotating the first fixing rod through the control shaft, rotating the second fixing rod to fix the mask, adjusting the compression screw to fix the mask by the compression pins, and facilitating the fixation of the masks in different shapes.
S2, after the mask is fixed, cleaning liquid is injected into the shell and the base through the medicine inlet pipe, the ultrasonic generating device sends ultrasonic waves, the electric heating rod controls the temperature of the cleaning liquid medicine, the rotating shaft can drive the mask to rotate, the soaking time of the liquid medicine is shortened, and the cleaning efficiency is improved.
S3, observing the cleaning condition through an observation window on the feeding door, after cleaning, rotating the mask plate to one end close to the conveying device through a movable connecting plate, rotating the rotating shaft to enable the mask plate to be vertical, driving the adjusting plate and the adjusting block to rotate through the swinging column to enable the vacuum chuck to adsorb the mask plate, and driving the mask plate to slide into the drying box through the feeding through groove by the sliding block without contacting the mask plate by an operator.
S4, the swing column drives the mask to move, the mask is placed on the supporting net to be drained, water or alcohol is conveyed through the feeding pipe to be further cleaned, and the fan dries the mask.
Compared with the prior art, the invention has the beneficial effects that:
1. can fix the mask version through fixing device, and can be used for not unidimensional mask version, therefore, the clothes hanger is strong in practicability, and fixed effectual, the mask version is difficult to remove at clear in-process, through the length of adjusting the telescopic link, adapt to the size of mask version, dead lever one rotates through the control shaft, dead lever two rotates and fixes the mask version, spacing sideboard one and spacing sideboard two upper and lower both ends of two pairs of mask versions fix, further make the fixed mask version of foot that compresses tightly through adjusting compression screw, be convenient for fix the mask version of different shapes.
2. Can drive fixing device through the rotation axis and rotate, further drive the mask version and rotate, accelerate the liquid medicine flow, the liquid medicine flow on the mask version of being convenient for accelerates the washing, shorten liquid medicine soak time, improve cleaning efficiency, through advancing the pencil to casing and the inside injection washing liquid of base, ultrasonic wave generating device sends the ultrasonic wave, accelerate the washing, the temperature of liquid medicine is washd in the control of electrical heating rod, the rotation axis can drive the mask version and rotate, reduce liquid medicine soak time, improve cleaning efficiency.
3. In can carrying the drying cabinet with the mask version through setting up conveyor, need not operating personnel contact mask version, prevent pollution, observe the washing condition through the observation window on the feed door, wash and accomplish the back, the activity even board rotates the mask version to the one end that is close to conveyor, the swing post drives regulating plate and regulating block and rotates, vacuum chuck adsorbs the mask version, the slider drives the mask version and passes through the groove through the feeding and slide in the drying cabinet.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the internal structure of the housing of the present invention;
FIG. 3 is a schematic view of the fixing device of the present invention;
FIG. 4 is a schematic view of the structure of the conveying device of the present invention;
fig. 5 is a schematic structural view of the invention with the solid top cover removed.
In the figure: 1. a housing; 2. a fixing device; 201. a telescopic rod; 202. a movable connecting plate; 203. a limiting block; 204. a rotating shaft; 205. mounting a concave platform; 206. a control shaft; 207. fixing a rod I; 208. a second fixing rod; 209. a diagonal tension spring; 210. a compression screw; 211. a pressing foot; 3. a base; 4. an ultrasonic wave generating device; 5. an electrical heating rod; 6. a medicine inlet pipe; 7. an overflow trough; 8. a sliding guide rail; 9. a conveying device; 901. a slider; 902. connecting blocks; 903. a swing post; 904. an adjusting plate; 905. an adjusting block; 906. a vacuum chuck; 10. a drying oven; 11. a feed gate; 12. compacting the top cover; 13. a feeding through groove; 14. a waste chute; 15. a support net; 16. a fan; 17. a louver fan; 18. a feed pipe; 19. and (4) a spray head.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The first embodiment is as follows:
referring to fig. 1-3, the present invention provides a technical solution: a cleaning device for a flexible AMOLED mask comprises a machine shell 1, wherein a fixing device 2 is fixedly installed on the inner wall of the machine shell 1, a telescopic rod 201 is arranged inside the fixing device 2, a movable connecting plate 202 is arranged at one end, away from the machine shell 1, of the telescopic rod 201, the inner wall of the movable connecting plate 202 is movably connected with the outer wall of the telescopic rod 201, a limiting block 203 is fixedly installed at one end, away from the telescopic rod 201, of the movable connecting plate 202, a rotating shaft 204 is arranged inside the limiting block 203, the outer wall of the rotating shaft 204 is movably connected with the inner wall of the limiting block 203, an installation concave table 205 is fixedly installed on the outer wall of the rotating shaft 204, a control shaft 206 is arranged inside the installation concave table 205, two ends of the control shaft 206 are movably connected with the inner wall of the installation concave table 205, a first fixing rod 207 is fixedly installed on the outer wall of the control, the outer wall fixed mounting of regulating spindle has two 208 dead levers, the spacing sideboard two of outer wall fixedly connected with of two 208 dead levers, the bottom of two 208 dead levers is provided with oblique pull spring 209, the one end of oblique pull spring 209 and the outer wall fixed connection of two 208 dead levers, the inside of spacing sideboard one is provided with compression screw 210, compression screw 210's outer wall and the inner wall threaded connection of spacing sideboard one, compression screw 210's bottom fixed mounting compresses tightly foot 211.
In this embodiment, the mask is placed on the fixing device 2, the length of the telescopic rod 201 is adjusted to adapt to the size of the mask, the first fixing rod 207 can rotate through the control shaft 206, the second fixing rod 208 rotates to fix the mask, the first fixing rod 207 and the second fixing rod 208 are tensioned and fixed through the diagonal spring 209, the use stability of the fixing device 2 is improved, the upper end and the lower end of the two pairs of masks of the first limiting side plate and the second limiting side plate are fixed, through rotating compression screw 210, make and compress tightly the fixed mask version of foot 211, the mask version pine takes off the slip when preventing to wash, influences the cleaning performance, is convenient for fix the mask version of different shapes, and rotation axis 204 can drive fixing device 2 and rotate, further drives the mask version and rotates for the liquid medicine flows, and the liquid medicine flow on the mask version of being convenient for accelerates the washing, shortens the liquid medicine soak time, improves cleaning efficiency.
Example two:
referring to fig. 1-5, on the basis of the first embodiment, the present invention provides a technical solution: the bottom of the machine shell 1 is provided with a base 3, the top of the base 3 is fixedly connected with the bottom of the machine shell 1, the bottom of the base 3 is fixedly provided with anti-skid support legs, the inner wall of the base 3 is fixedly provided with an ultrasonic wave generating device 4, the interior of the base 3 comprises an electric heating rod 5, two ends of the electric heating rod 5 are fixedly connected with the inner wall of the base 3, the bottom of the base 3 is provided with a medicine inlet pipe 6, the outer wall of the medicine inlet pipe 6 is fixedly connected with the inner wall of the base 3, the outer wall of the machine shell 1 is provided with an overflow groove 7, the inner wall of the machine shell 1 is fixedly provided with a sliding guide rail 8, the inner wall of the sliding guide rail 8 is movably connected with a conveying device 9, the interior of the conveying device 9 comprises a sliding block 901, the outer wall of the sliding block 901 is provided with a connecting block 902, one end of, an adjusting plate 904 is fixedly installed on the outer wall of the swinging column 903, an adjusting block 905 is movably installed on the inner wall of the adjusting plate 904, a vacuum sucker 906 is fixedly installed at one end, away from the adjusting plate 904, of the adjusting block 905, a drying oven 10 is fixedly installed at the top of the machine shell 1, a feeding door 11 is arranged at one end of the drying oven 10, one end of the feeding door 11 is movably connected with the bottom of the drying oven 10, an observation window is fixedly connected with the inner wall of the feeding door 11, a handle is fixedly installed at the top of the feeding door 11, a compact top cover 12 is movably installed at the top of the drying oven 10, a feeding through groove 13 is formed in the outer wall of the drying oven 10, a waste material groove 14 is arranged at one end of the feeding through groove 13, the waste material groove 14 is formed in the top of the drying oven 10, a support net 15 is fixedly installed on the inner wall of the waste material groove, two ends of the feeding pipe 18 are fixedly connected with the inner wall of the drying box 10, and the bottom of the feeding pipe 18 is fixedly provided with a spray nozzle 19.
In the embodiment, after the mask is fixed, cleaning liquid is injected into the machine shell 1 and the base 3 through the medicine inlet pipe 6, the ultrasonic generating device 4 emits ultrasonic waves, the electric heating rod 5 controls the temperature of the cleaning liquid medicine so as to clean, the observation window is made of transparent material, the cleaning condition is observed through the observation window on the feeding door 11, the liquid medicine is observed to become clear, after the cleaning is completed, the movable connecting plate 202 rotates the mask to one end close to the conveying device 9, the rotating shaft 204 rotates to enable the mask to be vertical, the swing column 903 drives the adjusting plate 904 and the adjusting block 905 to rotate, the vacuum chuck 906 adsorbs the mask, the slider 901 drives the mask to slide into the drying box 10 through the feeding through groove 13, an operator does not need to contact the mask to prevent pollution, the swing column 903 drives the mask to move by driving the mask to be placed on the supporting net 15 for draining, the mask is further cleaned by conveying water or alcohol through the conveying pipe 18, the fan 16 can blow out air to dry the mask.
A cleaning process of a flexible AMOLED mask comprises the following steps:
s1, opening the feeding door 11, placing the mask on the fixing device 2, adjusting the length of the telescopic rod 201 to adapt to the size of the mask, rotating the first fixing rod 207 through the control shaft 206, rotating the second fixing rod 208 to fix the mask, and adjusting the compression screw 210 to enable the compression foot 211 to fix the mask, so that the mask in different shapes can be fixed conveniently.
S2, after the mask is fixed, cleaning liquid is injected into the shell 1 and the base 3 through the medicine inlet pipe 6, the ultrasonic generating device 4 emits ultrasonic waves, the electric heating rod 5 controls the temperature of the cleaning liquid medicine, the rotating shaft 204 can drive the mask to rotate, the soaking time of the liquid medicine is shortened, and the cleaning efficiency is improved.
S3, observe the cleaning condition through the observation window on the feeding door 11, after the cleaning is completed, the movable connecting plate 202 rotates the mask plate to one end close to the conveying device 9, the rotating shaft 204 rotates to enable the mask plate to be vertical, the swinging column 903 drives the adjusting plate 904 and the adjusting block 905 to rotate, the vacuum chuck 906 adsorbs the mask plate, the sliding block 901 drives the mask plate to slide to the drying box 10 through the feeding through groove 13, and an operator does not need to contact the mask plate.
S4, the swing column 903 is used for driving the mask to move, the mask is placed on the supporting net 15 and drained, water or alcohol is conveyed through the conveying pipe 18 for further cleaning, and the fan 16 is used for drying the mask.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. The utility model provides a belt cleaning device of flexible AMOLED mask version, includes casing (1), its characterized in that: the inner wall fixed mounting of casing (1) has fixing device (2), the inside of fixing device (2) includes telescopic link (201), the one end that casing (1) was kept away from to telescopic link (201) is provided with activity even board (202), the inner wall of activity even board (202) and the outer wall swing joint of telescopic link (201), the activity even board (202) one end fixed mounting that telescopic link (201) was kept away from has stopper (203), the inside of stopper (203) is provided with rotation axis (204), the outer wall of rotation axis (204) and the inner wall swing joint of stopper (203), the outer wall fixed mounting of rotation axis (204) has installation concave station (205), the inside of installation concave station (205) is provided with control shaft (206), the both ends of control shaft (206) and the inner wall swing joint of installation concave station (205), the outer wall fixed mounting of control shaft (206) has dead lever (207), and a first limiting side plate is fixedly arranged on the outer wall of the first fixing rod (207).
2. The cleaning device for the flexible AMOLED reticle defined in claim 1, wherein: the utility model discloses a spacing sideboard, including the fixed pole two (208), the fixed pole two (208) is connected with the fixed pole two, the inner wall movable mounting of spacing sideboard one has the regulating spindle, the outer wall fixed mounting of regulating spindle has dead lever two (208), the spacing sideboard two of outer wall fixedly connected with of dead lever two (208), the bottom of dead lever two (208) is provided with oblique pull spring (209), the one end of oblique pull spring (209) and the outer wall fixed connection of dead lever two (208), the inside of spacing sideboard one is provided with compression screw (210), the outer wall of compression screw (210) and the inner wall threaded connection of spacing sideboard one, the bottom fixed mounting of compression screw (210) has and compresses tightly foot (211).
3. The cleaning device for the flexible AMOLED reticle defined in claim 1, wherein: the bottom of casing (1) is provided with base (3), the top of base (3) and the bottom fixed connection of casing (1), the bottom fixed mounting of base (3) has anti-skidding stabilizer blade, the inner wall fixed mounting of base (3) has ultrasonic wave generating device (4), the inside of base (3) includes electrical heating rod (5), the both ends of electrical heating rod (5) and the inner wall fixed connection of base (3).
4. The cleaning device for the flexible AMOLED reticle defined in claim 3, wherein: the bottom of base (3) is provided with into pencil (6), the outer wall that advances pencil (6) and the inner wall fixed connection of base (3).
5. The cleaning device for the flexible AMOLED reticle defined in claim 1, wherein: the outer wall of the machine shell (1) is provided with an overflow groove (7), the inner wall of the machine shell (1) is fixedly provided with a sliding guide rail (8), the inner wall of the sliding guide rail (8) is movably connected with a conveying device (9), the conveying device (9) comprises a sliding block (901), the outer wall of the sliding block (901) is provided with a connecting block (902), and one end of the connecting block (902) is fixedly connected with the outer wall of the sliding block (901).
6. The cleaning device for the flexible AMOLED reticle defined in claim 5, wherein: the other end of connecting block (902) is provided with swing post (903), the one end of swing post (903) and the inner wall swing joint of connecting block (902), the outer wall fixed mounting of swing post (903) has regulating plate (904), the inner wall movable mounting of regulating plate (904) has regulating block (905), the one end fixed mounting that regulating plate (904) were kept away from in regulating block (905) has vacuum chuck (906).
7. The cleaning device for the flexible AMOLED reticle defined in claim 1, wherein: the top fixed mounting of casing (1) has drying cabinet (10), the one end of drying cabinet (10) is provided with feed gate (11), the one end of feed gate (11) and the bottom swing joint of drying cabinet (10), the inner wall fixedly connected with observation window of feed gate (11), the top fixed mounting of feed gate (11) has the handle.
8. The cleaning device for the flexible AMOLED reticle defined in claim 7, wherein: the top movable mounting of drying cabinet (10) has closely knit top cap (12), the outer wall of drying cabinet (10) has been seted up the feeding and has been led to groove (13), the one end that the feeding led to groove (13) is provided with waste material groove (14), waste material groove (14) are seted up in the top of drying cabinet (10), the inner wall fixed mounting of waste material groove (14) has supporting network (15).
9. The cleaning device for the flexible AMOLED reticle defined in claim 7, wherein: the inner wall of the drying box (10) is fixedly provided with a fan (16), the inner wall of the fan (16) is fixedly connected with a louver fan (17), the top of the fan (16) is provided with a feeding pipe (18), two ends of the feeding pipe (18) are fixedly connected with the inner wall of the drying box (10), and the bottom of the feeding pipe (18) is fixedly provided with a spray head (19).
10. The cleaning process for the flexible AMOLED mask as claimed in claims 1-9, wherein: the method comprises the following steps:
s1, open the feed gate (11), place the mask version on fixing device (2), adjust the length of telescopic link (201), adapt to the size of mask version, dead lever one (207) rotate through control shaft (206), dead lever two (208) rotate and fix the mask version, adjust compression screw (210) and make and compress tightly foot (211) fixed mask version, be convenient for fix the mask version of different shapes.
S2, after the mask is fixed, cleaning liquid is injected into the shell (1) and the base (3) through the medicine inlet pipe (6), the ultrasonic generating device (4) sends ultrasonic waves, the electric heating rod (5) controls the temperature of the cleaning liquid medicine, the rotating shaft (204) can drive the mask to rotate, the soaking time of the liquid medicine is shortened, and the cleaning efficiency is improved.
S3, observe the washing condition through the observation window on feed door (11), wash the completion back, activity even board (202) rotates the mask version to the one end that is close to conveyor (9), rotation axis (204) rotate and make the mask version vertical, swing post (903) drive regulating plate (904) and regulating block (905) rotate, make vacuum chuck (906) adsorb the mask version, slider (901) drive the mask version through feeding logical groove (13) slide to drying cabinet (10), do not need operating personnel contact mask version.
S4, the swing column (903) drives the mask to move, the mask is placed on the supporting net (15) and drained, water or alcohol is conveyed through the conveying pipe (18) to be further cleaned, and the fan (16) dries the mask.
CN202011638583.2A 2020-12-31 2020-12-31 Cleaning process of flexible AMOLED mask Active CN112764310B (en)

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CN112764310B CN112764310B (en) 2024-03-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114457343A (en) * 2022-01-25 2022-05-10 全洋(黄石)材料科技有限公司 Automatic intelligent cleaning process for continuous AMOLED metal mask plate

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