A kind of mask printing plate cleaning apparatus
Technical field
The utility model belongs to liquid crystal display panel technical field, and in particular to a kind of mask printing plate cleaning apparatus.
Technical background
Many structures in display base plate, integrated circuit etc. are prepared by photoetching process, and it is photoetching work to expose
The important step of skill is mainly carried out by mask plate.When the organic or metal material layer that the surface of mask plate is deposited reaches
Certain thickness, it is necessary to clean, no side material layer or come off or material blocks mask plate gap to mask plate, influence to make
Journey.
The cleaning machine of mask plate is cleaned using automation at present, and automation mask board cleaning machine loads several pieces with cassette
Cassette is placed pan feeding port by large scale mask plate using mobile plummer, and the mechanical mechanism inside cleaning machine is taken away one by one to be covered
Mask plate is loaded into mask plate fixed jig by diaphragm plate automatically.Large scale mask plate immerses after being fixed with cleaning machine gauge
It impregnates, is cleaned in dipper.Cleaning finishes, and mask plate fixed jig and mask plate are automatically separated, and mask plate is returned to
In the CST of blanking port.Ordinary circumstance, cleaning machine only corresponds to a kind of mask plate of size frame, but needs to transport when in factory
Different OLED vapor deposition lines of two substrate sizes of battalion, each producing line are required to cleaning metal mask plate, and so there are two types of different sizes
Mask plate it is to be cleaned, and the mask plate fixed jig of cleaning machine only has a kind of size, it is clear that is unable to meet demand.
Utility model content
The mesh of the utility model is to provide a kind of small size mask printing plate cleaning apparatus.
The utility model provides a kind of mask printing plate cleaning apparatus, including:For storing the rinse bath of cleaning solution, carrying cleaning
The mobile plummer of slot, for fixing the mask clamp of mask plate and drive link;Wherein, the plummer both ends are equipped with
Stent, the both ends of the mask clamp are connected by drive link with the stent;The drive link can turn around itself axis
It moves and mask clamp is driven to rotate.
Further, the both ends of the fixture of the mask plate are equipped with connector, described drive link one end and the company
Fitting connects, and the other end of drive link is connected with the stent;
Further, it is additionally provided with pivots rocker in the stent and intermeshing first meshing gear and second is nibbled
Gear is closed, pivots rocker is connected with the second meshing gear, and the first meshing gear is connected with the drive link, and pivots rocker shakes
When, by the first meshing gear and the engagement rotation of the second meshing gear, drive drive rod rotation;
Further, the stent is liftable air cylinder support;
Further, the sump pit below rinse bath is further included;
Further, the corner of the mask clamp is additionally provided with the briquetting of fixed mask plate.
The mask printing plate cleaning apparatus of the utility model, by passing through drive link and plummer two at the both ends of mask clamp
Stent connection is held, drive link can rotate around itself axis and mask clamp is driven to rotate, and mask plate front and back be carried out clear
It washes;The effective mask plate fixed jig for solving cleaning machine only has a kind of size, it is impossible to the problem of meet demand.
Description of the drawings
Fig. 1 is the schematic diagram of the mask printing plate cleaning apparatus of the utility model;
Fig. 2 is the front view of the mask printing plate cleaning apparatus of the utility model.
Specific embodiment
Below in conjunction with the accompanying drawings to a kind of specific embodiment of small size mask plate cleaning device provided by the utility model
It elaborates.
As depicted in figs. 1 and 2, the utility model provides a kind of mask printing plate cleaning apparatus 100, including:It is cleaned for storing
The rinse bath 102 of liquid;The mobile plummer 101 of rinse bath 102 is carried, stent 11, the stent 11 are equipped at the plummer both ends
For liftable air cylinder support;For fixing the mask clamp 103 of mask plate 105, the corner of the fixture 103 is additionally provided with briquetting
32, mask plate is further fixed;The both ends of mask clamp 103 have connector 31;And drive link 70, the drive link energy
It is rotated around itself axis;The both ends of mask clamp 103 are mounted in by drive link 70 on the stent 11 at mobile plummer both ends.Its
In, with the connector 31 of mask clamp 103 using pin connection, the other end and the movement of drive link 70 are held for one end of drive link 70
The stent 11 of microscope carrier 101 is connected using bearing, is additionally provided with pivots rocker 13 in the stent of mobile plummer 101 and is mutually nibbled
The first meshing gear 121 and the second meshing gear 122 closed, pivots rocker 13 are connected with 122 bolt of the second meshing gear, and first
Meshing gear 121, using key connection, when pivots rocker 13 shakes, is nibbled with drive link 70 by the first meshing gear 121 and second
The engagement rotation of gear 122 is closed, drive rod rotation is driven, so as to which mask clamp 103 be driven to rotate.Cleaning solution in rinse bath
It is discharged by the sump pit 104 below rinse bath.
When being cleaned to mask plate, mask plate is manually placed on fixture first, is fixed by briquetting;Using clear
Washing lotion is rinsed mask plate, overturns mask clamp by pivots rocker 13, mask plate front and back is cleaned;
When running into the spot of difficult cleaning, by the overturning mask clamp of pivots rocker 13 to level, i.e., mask plate is rotated to level,
The height of stent 11 is adjusted, mask plate is made to be immersed in rinse bath;After immersion, then the height of stent 11 is adjusted, make to cover
Film version departs from cleaning solution, it is cleaned, again manually removes mask plate 105 from mask clamp 103 after finally drying
;After cleaning, the cleaning solution in rinse bath is discharged by the sump pit 104 below rinse bath.
The preferred embodiment of the utility model described in detail above, but the utility model is not limited to above-mentioned implementation
Detail in mode in the range of the technology design of the utility model, can carry out the technical solution of the utility model
A variety of equivalents, these equivalents belong to the scope of protection of the utility model.