CN112764310B - Cleaning process of flexible AMOLED mask - Google Patents
Cleaning process of flexible AMOLED mask Download PDFInfo
- Publication number
- CN112764310B CN112764310B CN202011638583.2A CN202011638583A CN112764310B CN 112764310 B CN112764310 B CN 112764310B CN 202011638583 A CN202011638583 A CN 202011638583A CN 112764310 B CN112764310 B CN 112764310B
- Authority
- CN
- China
- Prior art keywords
- wall
- mask
- cleaning
- plate
- mask plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 54
- 229920001621 AMOLED Polymers 0.000 title claims abstract description 18
- 238000000034 method Methods 0.000 title claims description 9
- 239000003814 drug Substances 0.000 claims abstract description 28
- 239000007788 liquid Substances 0.000 claims abstract description 23
- 238000002791 soaking Methods 0.000 claims abstract description 7
- 238000001035 drying Methods 0.000 claims description 36
- 230000006835 compression Effects 0.000 claims description 21
- 238000007906 compression Methods 0.000 claims description 21
- 230000001105 regulatory effect Effects 0.000 claims description 17
- 238000005485 electric heating Methods 0.000 claims description 11
- 239000002699 waste material Substances 0.000 claims description 11
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 239000007921 spray Substances 0.000 claims description 2
- 238000009434 installation Methods 0.000 description 6
- 238000005406 washing Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 208000025174 PANDAS Diseases 0.000 description 1
- 208000021155 Paediatric autoimmune neuropsychiatric disorders associated with streptococcal infection Diseases 0.000 description 1
- 240000000220 Panda oleosa Species 0.000 description 1
- 235000016496 Panda oleosa Nutrition 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000004018 waxing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
- B08B3/123—Cleaning travelling work, e.g. webs, articles on a conveyor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
- F26B21/001—Drying-air generating units, e.g. movable, independent of drying enclosure
Abstract
The invention discloses a cleaning device for a flexible AMOLED mask plate, which comprises a machine shell, wherein a fixing device is fixedly arranged on the inner wall of the machine shell, a telescopic rod is arranged in the fixing device, one end of the telescopic rod, which is far away from the machine shell, is provided with a movable connecting plate, the inner wall of the movable connecting plate is movably connected with the outer wall of the telescopic rod, one end of the movable connecting plate, which is far away from the telescopic rod, is fixedly provided with a limiting block, the inner part of the limiting block is provided with a rotating shaft, the outer wall of the rotating shaft is movably connected with the inner wall of the limiting block, the outer wall of the rotating shaft is fixedly provided with a mounting concave table, the inner part of the mounting concave table is provided with a control shaft, two ends of the control shaft are movably connected with the inner wall of the mounting concave table, and the outer wall of the control shaft is fixedly provided with a fixing rod I. Can fix the mask through fixing device for not unidimensional mask, the rotation axis can drive fixing device and rotate, further drives the mask and rotates, shortens the liquid medicine soaking time, improves cleaning efficiency.
Description
Technical Field
The invention belongs to the technical field of AMOLED masks, and particularly relates to a cleaning process of a flexible AMOLED mask.
Background
The mask plate is also called a photomask, a photoetching mask plate, a mask plate and the like, is a high-precision tool for transferring a pattern negative film in the manufacturing process of downstream industrial products, and is a carrier for carrying intellectual property information such as pattern design, process technology and the like. The mask is used for mass production of downstream electronic components, is a key part for connecting downstream industrial production flows, and is one of determining factors of downstream product precision and quality. The product is mainly applied to industries such as flat panel display, semiconductor chips, touch control, circuit boards and the like, and is a key tool in the downstream industrial product manufacturing process. Customers in the Chinese market include Beijing east, tianma, waxing photoelectric, group creation photoelectric, hanyu color crystal, dragon photoelectric, xinli, zhongjun panda, venue and the like in the panel field; in the semiconductor chip field, publishers have developed central world, intel, ai Keer, bang technology, long electric technology, schland micro, etc.
Conventional cleaning device when using:
1. because the produced products are different, the used masks are different, so that the masks are inconvenient to install and fix and inconvenient to clean.
2. Because mask cleaning often needs to be soaked for a long time, organic matters on the mask can be thoroughly removed, and the mask cleaning efficiency is low.
Disclosure of Invention
Aiming at the defects of the prior art, the invention aims to provide a cleaning device for a flexible AMOLED mask, which has the advantages of being capable of being used for masks of different sizes and high in cleaning efficiency.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a belt cleaning device of flexible AMOLED mask, includes the casing, the inner wall fixed mounting of casing has fixing device, fixing device's inside includes the telescopic link, the one end that the casing was kept away from to the telescopic link is provided with the fly leaf, the inner wall of fly leaf and the outer wall swing joint of telescopic link, the one end fixed mounting that the telescopic link was kept away from to the fly leaf has the stopper, the inside of stopper is provided with the rotation axis, the outer wall of rotation axis and the inner wall swing joint of stopper, the outer wall fixed mounting of rotation axis has the installation concave station, the inside of installation concave station is provided with the control axle, the both ends of control axle and the inner wall swing joint of installation concave station, the outer wall fixed mounting of control axle has dead lever one, the outer wall fixed mounting of dead lever one has spacing sideboard one.
Preferably, the inner wall movable mounting of spacing sideboard one has the regulating spindle, the outer wall fixed mounting of regulating spindle has dead lever two, the outer wall fixedly connected with of dead lever two is spacing sideboard two, the bottom of dead lever two is provided with to one side cable-stay spring, the one end of drawing cable-stay spring and the outer wall fixed connection of dead lever two, the inside of spacing sideboard one is provided with compression screw, compression screw's outer wall and the inner wall threaded connection of spacing sideboard one, compression screw's bottom fixed mounting has the clamp foot.
Through adopting above-mentioned technical scheme, spacing sideboard one and spacing sideboard two are fixed to the upper and lower both ends of mask version, and adjusting compression screw makes the fixed mask version of clamp foot, is convenient for fix the mask version of different shapes.
Preferably, the bottom of casing is provided with the base, the top of base and the bottom fixed connection of casing, the bottom fixed mounting of base has anti-skidding stabilizer blade, the inner wall fixed mounting of base has ultrasonic wave generating device, the inside of base includes the electrical heating stick, the both ends of electrical heating stick and the inner wall fixed connection of base.
By adopting the technical scheme, the ultrasonic wave generating device sends out ultrasonic waves for cleaning, and the electric heating rod controls the temperature of the cleaning liquid medicine.
Preferably, a medicine feeding pipe is arranged at the bottom of the base, and the outer wall of the medicine feeding pipe is fixedly connected with the inner wall of the base.
By adopting the technical scheme, the medicine inlet pipe enters the cleaning medicine liquid.
Preferably, the overflow launder has been seted up to the outer wall of casing, the inner wall fixed mounting of casing has slide rail, slide rail's inner wall swing joint has conveyor, conveyor's inside includes the slider, the outer wall of slider is provided with the connecting block, the outer wall fixed connection of one end and slider of connecting block.
By adopting the technical scheme, the overflow groove enables redundant cleaning liquid to flow out, and the conveying device slides through the sliding guide rail to convey the mask.
Preferably, the other end of connecting block is provided with the swing post, the one end and the inner wall swing joint of connecting block of swing post, the outer wall fixed mounting of swing post has the regulating plate, the inner wall movable mounting of regulating plate has the regulating block, the one end fixed mounting that the regulating block kept away from the regulating plate has vacuum chuck.
Through adopting above-mentioned technical scheme, swing post drive regulating plate and regulating block rotate, and vacuum chuck adsorbs the mask version, and the slider drives the mask version and passes through the feeding and lead to the groove to slide in the drying cabinet.
Preferably, the top fixed mounting of casing has the drying cabinet, the one end of drying cabinet is provided with the feed gate, the one end and the bottom swing joint of drying cabinet of feed gate, the inner wall fixedly connected with observation window of feed gate, the top fixed mounting of feed gate has the handle.
Through adopting above-mentioned technical scheme, observe the cleaning condition through the observation window on the feed gate, can open the feed gate through the handle.
Preferably, the top movable mounting of drying cabinet has closely knit top cap, the feeding logical groove has been seted up to the outer wall of drying cabinet, the one end in feeding logical groove is provided with the waste tank, the top in the drying cabinet is seted up to the waste tank, the inner wall fixed mounting of waste tank has the supporting network.
By adopting the technical scheme, the waste tank stores leached liquid, and the supporting net supports the mask.
Preferably, the inner wall fixed mounting of drying cabinet has the fan, the inner wall fixedly connected with tripe fan of fan, the top of fan is provided with the conveying pipe, the both ends and the inner wall fixed connection of drying cabinet of conveying pipe, the bottom fixed mounting of conveying pipe has the shower nozzle.
By adopting the technical scheme, the conveying pipe conveys water or alcohol for further cleaning, and the fan dries the mask.
A cleaning process of a flexible AMOLED mask plate comprises the following steps:
s1, a feeding door is opened, a mask plate is placed on a fixing device, the length of a telescopic rod is adjusted, the size of the mask plate is adapted, a first fixing rod rotates through a control shaft, a second fixing rod rotates to fix the mask plate, a compression screw is adjusted to enable a compression foot to fix the mask plate, and the mask plates in different shapes are convenient to fix.
S2, after the mask is fixed, cleaning liquid is injected into the shell and the base through the medicine inlet pipe, the ultrasonic generating device sends out ultrasonic waves, the electric heating rod controls the temperature of the cleaning liquid medicine, the rotating shaft can drive the mask to rotate, the soaking time of the liquid medicine is shortened, and the cleaning efficiency is improved.
S3, observing the cleaning condition through an observation window on the feed gate, after cleaning, enabling the movable connecting plate to rotate the mask plate to one end close to the conveying device, enabling the rotary shaft to rotate to enable the mask plate to be vertical, enabling the swing column to drive the adjusting plate and the adjusting block to rotate, enabling the vacuum chuck to adsorb the mask plate, enabling the sliding block to drive the mask plate to slide into the drying box through the feed through groove, and enabling operators not to touch the mask plate.
S4, the swing column drives the mask plate to move, the mask plate is placed on the supporting net, draining is carried out, water or alcohol is conveyed through the conveying pipe for further cleaning, and the fan is used for drying the mask plate.
Compared with the prior art, the invention has the beneficial effects that:
1. can fix the mask through fixing device to can be used for not unidimensional mask, the practicality is strong, and fixed effectual, the mask is difficult to remove at clear in-process, through adjusting the length of telescopic link, adapts to the size of mask, and dead lever one is rotated through the control shaft, and dead lever two rotations are fixed the mask, and limit sideboard one is fixed with limit sideboard two upper and lower both ends to the mask, further makes the fixed mask of clamp pin through adjusting compression screw, is convenient for fix the mask of different shapes.
2. Can drive fixing device through the rotation axis and rotate, further drive the mask and rotate for the liquid medicine flows, and the liquid medicine on the mask of being convenient for flows and quickens the washing, shortens the liquid medicine soaking time, improves cleaning efficiency, through advancing the inside washing liquid that pours into of medicine pipe to casing and base into, ultrasonic wave generating device sends the ultrasonic wave for wash, the temperature of electric heating stick control washing liquid medicine, and the rotation axis can drive the mask and rotate, reduces the liquid medicine soaking time, improves cleaning efficiency.
3. Can carry the drying cabinet with the mask version through setting up conveyor, need not operating personnel and contact the mask version, prevent to pollute, observe the cleaning condition through the observation window on the feed gate, after wasing, the swing post drives regulating plate and regulating block rotation with the mask version and rotates to the one end that is close to conveyor, and vacuum chuck adsorbs the mask version, and the slider drives the mask version and slides in the drying cabinet through the feeding through groove.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view of the internal structure of the casing according to the present invention;
FIG. 3 is a schematic view of a fixing device according to the present invention;
FIG. 4 is a schematic view of a conveying apparatus according to the present invention;
FIG. 5 is a schematic view of the structure of the removed dense top cover portion of the present invention.
In the figure: 1. a housing; 2. a fixing device; 201. a telescopic rod; 202. a movable connecting plate; 203. a limiting block; 204. a rotation shaft; 205. installing a concave table; 206. a control shaft; 207. a first fixed rod; 208. a second fixing rod; 209. a cable-stayed spring; 210. a compression screw; 211. a pressing foot; 3. a base; 4. an ultrasonic wave generating device; 5. an electric heating rod; 6. a medicine inlet pipe; 7. an overflow trough; 8. a sliding guide rail; 9. a conveying device; 901. a slide block; 902. a connecting block; 903. a swing column; 904. an adjusting plate; 905. an adjusting block; 906. a vacuum chuck; 10. a drying box; 11. a feed gate; 12. compacting the top cover; 13. feeding through grooves; 14. a waste tank; 15. a support net; 16. a blower; 17. a louver fan; 18. a feed pipe; 19. a spray head.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Embodiment one:
referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a belt cleaning device of flexible AMOLED mask, including casing 1, the inner wall fixed mounting of casing 1 has fixing device 2, fixing device 2's inside includes telescopic link 201, telescopic link 201 keeps away from casing 1's one end and is provided with flexible link 202, flexible link 202's inner wall and telescopic link 201's outer wall swing joint, flexible link 202 keeps away from telescopic link 201's one end fixed mounting has stopper 203, stopper 203's inside is provided with rotation axis 204, rotation axis 204's outer wall and stopper 203's inner wall swing joint, rotation axis 204's outer wall fixed mounting has installation concave table 205, installation concave table 205's inside is provided with control shaft 206, control shaft 206's both ends and installation concave table 205's inner wall swing joint, control shaft 206's outer wall fixed mounting has dead lever one 207, dead lever one 207's outer wall fixed mounting has spacing sideboard one, spacing sideboard one's inner wall swing joint has the regulating spindle, dead lever two 208's outer wall fixed mounting, dead lever 208's outer wall fixedly connected with spacing sideboard two, dead lever two 208's bottom is provided with oblique-tension spring 209, spring 209's one end and dead lever 208's outer wall swing joint's outer wall and stopper screw rod 208's outer wall 210, the inside is provided with spacing screw rod 210 of limit screw rod 210, compression screw 210 is fixedly connected with the screw rod 210, compression leg of compression leg 210, the inside is provided with compression leg 210.
In this embodiment, place the mask on fixing device 2, adjust the length of telescopic link 201, adapt to the size of mask, dead lever one 207 can rotate through control shaft 206, dead lever two 208 rotate and fix the mask, draw tension spring 209 makes between dead lever one 207 and the dead lever two 208 taut fixed, improve fixing device 2 stability in use, limit sideboard one and limit sideboard two fix the upper and lower both ends of mask, through rotating compression screw 210, make the fixed mask of clamp leg 211, prevent that the mask pine from taking off when wasing slides, influence the cleaning performance, be convenient for fix the mask of different shapes, rotation axis 204 can drive fixing device 2 rotation, further drive the mask and rotate, accelerate the liquid medicine flow on the mask of being convenient for and accelerate the washing, shorten the liquid medicine soaking time, improve cleaning efficiency.
Embodiment two:
referring to fig. 1-5, on the basis of the first embodiment, the present invention provides a technical solution: the bottom of the machine shell 1 is provided with a base 3, the top of the base 3 is fixedly connected with the bottom of the machine shell 1, the bottom of the base 3 is fixedly provided with an anti-skid support leg, the inner wall of the base 3 is fixedly provided with an ultrasonic wave generating device 4, the inside of the base 3 comprises an electric heating rod 5, two ends of the electric heating rod 5 are fixedly connected with the inner wall of the base 3, the bottom of the base 3 is provided with a medicine feeding pipe 6, the outer wall of the medicine feeding pipe 6 is fixedly connected with the inner wall of the base 3, the outer wall of the machine shell 1 is provided with an overflow groove 7, the inner wall of the machine shell 1 is fixedly provided with a sliding guide rail 8, the inner wall of the sliding guide rail 8 is movably connected with a conveying device 9, the inside of the conveying device 9 comprises a sliding block 901, the outer wall of the sliding block 901 is provided with a connecting block 902, one end of the connecting block 902 is fixedly connected with the outer wall of the sliding block 901, the other end of the connecting block 902 is provided with a swinging column 903, one end of the swinging column 903 is movably connected with the inner wall of the connecting block 902, the outer wall of the swinging column 903 is fixedly provided with an adjusting plate 904, the inner wall of the adjusting plate 904 is movably provided with an adjusting block 905, one end of the adjusting block 905, which is far away from the adjusting plate 904, is fixedly provided with a vacuum chuck 906, the top of the machine shell 1 is fixedly provided with a drying oven 10, one end of the drying oven 10 is provided with a feeding door 11, one end of the feeding door 11 is movably connected with the bottom of the drying oven 10, the inner wall of the feeding door 11 is fixedly connected with an observation window, the top of the feeding door 11 is fixedly provided with a handle, the top of the drying oven 10 is movably provided with a compact top cover 12, the outer wall of the drying oven 10 is provided with a feeding through groove 13, one end of the feeding through groove 13 is provided with a waste groove 14, the waste groove 14 is provided at the top of the drying oven 10, the inner wall of the waste groove 14 is fixedly provided with a supporting net 15, the inner wall of the drying oven 10 is fixedly provided with a fan 16, the inner wall of the fan 16 is fixedly connected with a louver 17, the top of fan 16 is provided with conveying pipe 18, and conveying pipe 18's both ends and the inner wall fixed connection of drying cabinet 10, and the bottom fixed mounting of conveying pipe 18 has shower nozzle 19.
In this embodiment, after the mask is fixed, the cleaning solution is injected into the casing 1 and the base 3 through the medicine feeding pipe 6, the ultrasonic wave generating device 4 sends out ultrasonic waves, the electric heating rod 5 controls the temperature of the cleaning solution so as to clean, the observation window is made of transparent materials, the cleaning condition is observed through the observation window on the feeding door 11, the liquid medicine is clarified, after the cleaning is completed, the movable connecting plate 202 rotates the mask to one end close to the conveying device 9, the rotating shaft 204 rotates to enable the mask to be vertical, the swinging column 903 drives the adjusting plate 904 and the adjusting block 905 to rotate, the vacuum chuck 906 adsorbs the mask, the sliding block 901 drives the mask to slide into the drying box 10 through the feeding through groove 13, an operator is not required to contact the mask, pollution is prevented, the swinging column drives the mask to move, the mask is placed on the supporting net 15, draining is performed, the mask is further cleaned through conveying water or alcohol through the conveying pipe 18, and the fan 16 can blow gas, and the mask is dried.
A cleaning process of a flexible AMOLED mask plate comprises the following steps:
s1, opening a feed door 11, placing a mask on a fixing device 2, adjusting the length of a telescopic rod 201, adapting to the size of the mask, rotating a first fixing rod 207 through a control shaft 206, rotating a second fixing rod 208 to fix the mask, and adjusting a compression screw 210 to enable a compression pin 211 to fix the mask, so that masks in different shapes are convenient to fix.
S2, after the mask is fixed, cleaning liquid is injected into the machine shell 1 and the base 3 through the medicine inlet pipe 6, the ultrasonic wave generating device 4 sends out ultrasonic waves, the electric heating rod 5 controls the temperature of the cleaning liquid medicine, the rotating shaft 204 can drive the mask to rotate, the soaking time of the liquid medicine is shortened, and the cleaning efficiency is improved.
S3, observing the cleaning condition through an observation window on the feed gate 11, after the cleaning is completed, the movable connecting plate 202 rotates the mask plate to one end close to the conveying device 9, the rotating shaft 204 rotates to enable the mask plate to be vertical, the swinging column 903 drives the adjusting plate 904 and the adjusting block 905 to rotate, the vacuum chuck 906 adsorbs the mask plate, and the sliding block 901 drives the mask plate to slide into the drying box 10 through the feed through groove 13 without the need of an operator to contact the mask plate.
S4, the swing column 903 drives the mask plate to move, the mask plate is placed on the supporting net 15 to be drained, water or alcohol is conveyed through the conveying pipe 18 to be further cleaned, and the fan 16 is used for drying the mask plate.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a belt cleaning device of flexible AMOLED mask, includes casing (1), its characterized in that: the inner wall of the machine shell (1) is fixedly provided with a fixing device (2), the inside of the fixing device (2) comprises a telescopic rod (201), one end of the telescopic rod (201) away from the machine shell (1) is provided with a movable connecting plate (202), the inner wall of the movable connecting plate (202) is movably connected with the outer wall of the telescopic rod (201), one end of the movable connecting plate (202) away from the telescopic rod (201) is fixedly provided with a limiting block (203), the inside of the limiting block (203) is provided with a rotating shaft (204), the outer wall of the rotating shaft (204) is movably connected with the inner wall of the limiting block (203), the outer wall of the rotating shaft (204) is fixedly provided with a mounting concave table (205), the inside of the mounting concave table (205) is provided with a control shaft (206), two ends of the control shaft (206) are movably connected with the inner wall of the mounting concave table (205), the outer wall of the control shaft (206) is fixedly provided with a fixing rod I (207), and the outer wall of the fixing rod I (207) is fixedly provided with a limiting side plate I.
The inner wall movable mounting of the first limit sideboard is provided with an adjusting shaft, the outer wall of the adjusting shaft is fixedly provided with a second fixing rod (208), the outer wall of the second fixing rod (208) is fixedly connected with a second limit sideboard, the bottom of the second fixing rod (208) is provided with a diagonal tension spring (209), one end of the diagonal tension spring (209) is fixedly connected with the outer wall of the second fixing rod (208), the inner part of the first limit sideboard is provided with a compression screw (210), the outer wall of the compression screw (210) is in threaded connection with the inner wall of the first limit sideboard, and the bottom of the compression screw (210) is fixedly provided with a compression foot (211);
the bottom of the shell (1) is provided with a base (3), the top of the base (3) is fixedly connected with the bottom of the shell (1), and an ultrasonic generating device (4) is fixedly arranged on the inner wall of the base (3);
the inner wall of the shell (1) is fixedly provided with a sliding guide rail (8), the inner wall of the sliding guide rail (8) is movably connected with a conveying device (9), the conveying device (9) comprises a sliding block (901), the outer wall of the sliding block (901) is provided with a connecting block (902), and one end of the connecting block (902) is fixedly connected with the outer wall of the sliding block (901);
the other end of connecting block (902) is provided with swing post (903), the one end and the inner wall swing joint of connecting block (902) of swing post (903), the outer wall fixed mounting of swing post (903) has regulating plate (904), the inner wall movable mounting of regulating plate (904) has regulating block (905), one end fixed mounting has vacuum chuck (906) that regulating block (905) kept away from regulating plate (904).
2. The cleaning device for a flexible AMOLED reticle of claim 1, wherein: the anti-slip support leg is fixedly arranged at the bottom of the base (3), the electric heating rod (5) is arranged in the base (3), and two ends of the electric heating rod (5) are fixedly connected with the inner wall of the base (3).
3. The cleaning device for a flexible AMOLED reticle of claim 2, wherein: the bottom of base (3) is provided with into medicine pipe (6), the outer wall of medicine pipe (6) and the inner wall fixed connection of base (3).
4. The cleaning device for a flexible AMOLED reticle of claim 1, wherein: an overflow groove (7) is formed in the outer wall of the shell (1).
5. The cleaning device for a flexible AMOLED reticle of claim 1, wherein: the drying cabinet is characterized in that a drying cabinet (10) is fixedly arranged at the top of the machine shell (1), a feeding door (11) is arranged at one end of the drying cabinet (10), one end of the feeding door (11) is movably connected with the bottom of the drying cabinet (10), an observation window is fixedly connected with the inner wall of the feeding door (11), and a handle is fixedly arranged at the top of the feeding door (11).
6. The cleaning apparatus for a flexible AMOLED reticle of claim 5, wherein: the top movable mounting of drying cabinet (10) has closely knit top cap (12), feeding logical groove (13) have been seted up to the outer wall of drying cabinet (10), the one end of feeding logical groove (13) is provided with waste material groove (14), waste material groove (14) are seted up in the top of drying cabinet (10), the inner wall fixed mounting of waste material groove (14) has supporting network (15).
7. The cleaning apparatus for a flexible AMOLED reticle of claim 5, wherein: the drying oven is characterized in that a fan (16) is fixedly arranged on the inner wall of the drying oven (10), a louver fan (17) is fixedly connected to the inner wall of the fan (16), a feeding pipe (18) is arranged at the top of the fan (16), two ends of the feeding pipe (18) are fixedly connected with the inner wall of the drying oven (10), and a spray head (19) is fixedly arranged at the bottom of the feeding pipe (18).
8. The cleaning process of the flexible AMOLED reticle cleaning device according to any one of claims 1 to 7, wherein: the method comprises the following steps:
s1, opening a feed door (11), placing a mask plate on a fixing device (2), adjusting the length of a telescopic rod (201) to adapt to the size of the mask plate, rotating a first fixing rod (207) through a control shaft (206), rotating a second fixing rod (208) to fix the mask plate, and adjusting a compression screw (210) to enable a compression pin (211) to fix the mask plate so as to be convenient for fixing the mask plates with different shapes;
s2, after the mask is fixed, cleaning liquid is injected into the shell (1) and the base (3) through the medicine feeding pipe (6), the ultrasonic generating device (4) emits ultrasonic waves, the electric heating rod (5) controls the temperature of the cleaning liquid, the rotating shaft (204) can drive the mask to rotate, the soaking time of the liquid is shortened, and the cleaning efficiency is improved;
s3, observing the cleaning condition through an observation window on a feed door (11), after the cleaning is finished, rotating the mask plate to one end close to a conveying device (9) by a movable connecting plate (202), enabling the mask plate to be vertical by rotating a rotating shaft (204), enabling a swinging column (903) to drive an adjusting plate (904) and an adjusting block (905) to rotate, enabling a vacuum chuck (906) to adsorb the mask plate, enabling a sliding block (901) to drive the mask plate to slide into a drying box (10) through a feed through groove (13), and enabling an operator not to contact the mask plate;
s4, the swing column (903) drives the mask plate to move, the mask plate is placed on the supporting net (15) to be drained, water or alcohol is conveyed to be further cleaned through the conveying pipe (18), and the fan (16) dries the mask plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011638583.2A CN112764310B (en) | 2020-12-31 | 2020-12-31 | Cleaning process of flexible AMOLED mask |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011638583.2A CN112764310B (en) | 2020-12-31 | 2020-12-31 | Cleaning process of flexible AMOLED mask |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112764310A CN112764310A (en) | 2021-05-07 |
| CN112764310B true CN112764310B (en) | 2024-03-26 |
Family
ID=75698284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011638583.2A Active CN112764310B (en) | 2020-12-31 | 2020-12-31 | Cleaning process of flexible AMOLED mask |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112764310B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114457343A (en) * | 2022-01-25 | 2022-05-10 | 全洋(黄石)材料科技有限公司 | Automatic intelligent cleaning process for continuous AMOLED metal mask plate |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201178092Y (en) * | 2008-04-08 | 2009-01-07 | 徐竹林 | Single chip washer |
| KR20090059014A (en) * | 2007-12-05 | 2009-06-10 | 주식회사 동부하이텍 | Apparatus for removing particles from a reticle |
| CN203133472U (en) * | 2013-03-01 | 2013-08-14 | 中芯国际集成电路制造(北京)有限公司 | Double-rotary mask plate washing device |
| CN206064912U (en) * | 2016-08-31 | 2017-04-05 | 苏州京浜光电科技股份有限公司 | A kind of glass substrate washing device |
| JP2017170313A (en) * | 2016-03-23 | 2017-09-28 | 株式会社ジャパンディスプレイ | Mask cleaning method and mask cleaning device |
| CN107526247A (en) * | 2017-08-31 | 2017-12-29 | 京东方科技集团股份有限公司 | A kind of fixture of mask plate, mask plate purging system and the method for cleaning mask plate |
| CN207424526U (en) * | 2017-08-14 | 2018-05-29 | 南京中电熊猫平板显示科技有限公司 | A kind of mask printing plate cleaning apparatus |
| CN109482557A (en) * | 2018-12-25 | 2019-03-19 | 上海彩丞新材料科技有限公司 | A kind of mask printing plate cleaning apparatus and its cleaning method |
| KR20190046122A (en) * | 2017-10-25 | 2019-05-07 | 세메스 주식회사 | Reticle cleaning apparatus and reticle cleaning method using the same |
-
2020
- 2020-12-31 CN CN202011638583.2A patent/CN112764310B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20090059014A (en) * | 2007-12-05 | 2009-06-10 | 주식회사 동부하이텍 | Apparatus for removing particles from a reticle |
| CN201178092Y (en) * | 2008-04-08 | 2009-01-07 | 徐竹林 | Single chip washer |
| CN203133472U (en) * | 2013-03-01 | 2013-08-14 | 中芯国际集成电路制造(北京)有限公司 | Double-rotary mask plate washing device |
| JP2017170313A (en) * | 2016-03-23 | 2017-09-28 | 株式会社ジャパンディスプレイ | Mask cleaning method and mask cleaning device |
| CN206064912U (en) * | 2016-08-31 | 2017-04-05 | 苏州京浜光电科技股份有限公司 | A kind of glass substrate washing device |
| CN207424526U (en) * | 2017-08-14 | 2018-05-29 | 南京中电熊猫平板显示科技有限公司 | A kind of mask printing plate cleaning apparatus |
| CN107526247A (en) * | 2017-08-31 | 2017-12-29 | 京东方科技集团股份有限公司 | A kind of fixture of mask plate, mask plate purging system and the method for cleaning mask plate |
| KR20190046122A (en) * | 2017-10-25 | 2019-05-07 | 세메스 주식회사 | Reticle cleaning apparatus and reticle cleaning method using the same |
| CN109482557A (en) * | 2018-12-25 | 2019-03-19 | 上海彩丞新材料科技有限公司 | A kind of mask printing plate cleaning apparatus and its cleaning method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112764310A (en) | 2021-05-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112764310B (en) | Cleaning process of flexible AMOLED mask | |
| CN206854007U (en) | A kind of electronic component dispensing workbench Frictioning device | |
| CN207138387U (en) | One kind is used for PCB high-efficiency washing device | |
| CN209680450U (en) | A kind of racing car accessory surface hole sealing device | |
| CN207475988U (en) | A kind of pcb board moves back film device | |
| CN105044944B (en) | A kind of equipment for disassembling cleaning display panel | |
| CN108831848A (en) | A kind of semiconductor crystal wafer cleaning and drying device | |
| CN113770986A (en) | Maintenance platform with clamping structure and ash removal device for computer maintenance | |
| CN210965586U (en) | Novel multi-functional adjustable spraying equipment | |
| CN108634580A (en) | A kind of indoor design workbench | |
| CN210668323U (en) | Packaging equipment for fingerprint identification chip | |
| CN209613743U (en) | A kind of glass cleaning machine after the edging for straight line | |
| CN217411651U (en) | MEMS wafer spraying device | |
| CN108246754B (en) | Centrifugal rotary cleaning device for liquid crystal display panel photomask | |
| CN219725829U (en) | Sand blasting device for heat exchanger frame plate | |
| CN207357639U (en) | A kind of SMT patches cleaning machine | |
| CN219253480U (en) | Complete set of processing apparatus for medicinal material processing | |
| CN112452874A (en) | Continuous type machine part ultrasonic cleaning device with drying function | |
| CN219683408U (en) | Chip substrate belt cleaning device | |
| CN206716666U (en) | A kind of chemical industry preparation vessels cleaning equipment | |
| CN110370801A (en) | A kind of automatic cleaning, drying equipment of rubber roller | |
| CN215523987U (en) | Transfer pipette drying device | |
| CN212736565U (en) | Quartz rod cutting device convenient to adjust | |
| CN220298135U (en) | Digital printing machine workstation convenient to height-adjusting | |
| CN220970139U (en) | Metal surface cleaning device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |