CN107526247A - A kind of fixture of mask plate, mask plate purging system and the method for cleaning mask plate - Google Patents
A kind of fixture of mask plate, mask plate purging system and the method for cleaning mask plate Download PDFInfo
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- CN107526247A CN107526247A CN201710776234.9A CN201710776234A CN107526247A CN 107526247 A CN107526247 A CN 107526247A CN 201710776234 A CN201710776234 A CN 201710776234A CN 107526247 A CN107526247 A CN 107526247A
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- mask plate
- fixture
- cleaning
- ultrasonic oscillator
- fixed mount
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- 238000004140 cleaning Methods 0.000 title claims abstract description 152
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000010926 purge Methods 0.000 title claims abstract description 19
- 239000000725 suspension Substances 0.000 claims abstract description 58
- 230000005540 biological transmission Effects 0.000 claims description 29
- 239000012530 fluid Substances 0.000 claims description 29
- 238000005406 washing Methods 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 16
- 230000033001 locomotion Effects 0.000 description 14
- 239000011368 organic material Substances 0.000 description 14
- 238000013019 agitation Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 230000002349 favourable effect Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 235000013399 edible fruits Nutrition 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 210000004209 hair Anatomy 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000008450 motivation Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/02—Devices for holding articles during cleaning
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electroluminescent Light Sources (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of fixture of mask plate, mask plate purging system and clean mask plate method, be related to mask plate cleaning equipment technical field, for solve the problems, such as existing mask plate purging system to the bad invention of mask plate cleaning performance.The fixture of the mask plate, including：Suspension bracket；Fixed mount, the fixed mount are used to fix mask plate, and the fixed mount is rotatablely connected with the suspension bracket, and central axis the extending laterally along the fixed mount rotated；First driving means, the first driving means are fixed on the suspension bracket, and are connected with the fixed mount, and the first driving means are used to drive rotation of the fixed mount between the suspension bracket.The present invention can be used for the cleaning of mask plate.
Description
Technical field
The present invention relates to mask plate cleaning equipment technical field, more particularly to a kind of fixture of mask plate, mask plate to clean
System and the method for cleaning mask plate.
Background technology
In the manufacturing process of display device, mask plate (Mask) is often used, can by the effect of blocking of mask plate
To form required figure, such as mask plate on substrate in OLED (the organic hairs of Organic Light-Emitting Diode
Optical diode) display device making in just play an important role, the organic luminous layer (EL layers) of OLED at present
The major way of preparation is evaporation, because mask plate is mainly to be carried out to that need not cover the part of luminous organic material on substrate
Block, then, during evaporation, upper luminous organic material is just inevitably deposited on mask plate, therefore, mask plate exists
Using just needing to clean it after a period of time, with remove on mask plate luminous organic material on evaporation, otherwise have
Machine luminescent material is more long-pending thicker on mask plate, easily falls on substrate, and the display so to OLED display device produces bad
Influence.As can be seen here, whether the cleaning of mask plate totally directly affects the display quality of OLED display device, mask plate it is clear
Wash and mainly completed by mask plate cleaning equipment, and the fixture of mask plate is the important component in mask plate cleaning equipment,
Mainly mask plate is fixed, the fixture of mask plate is the carrier of mask plate in cleaning process, and its structure design must be
It is no reasonable, it is directly related to the cleaning performance of mask plate.
A kind of fixture of existing mask plate, as shown in figure 1, including：Fixed mount 01, fixed mount 01 are provided with the first clamping jaw
02 and second clamping jaw 03, the first clamping jaw 02 and the second clamping jaw 03 be used to clamp mask plate 0200.Fixed mount 01 is used for and transfer arm
0300 is fixedly connected, and transfer arm 0300 can drive fixed mount 01 (Y-direction in figure) and vertical direction (in figure in the horizontal direction
Z-direction) it is mobile.When being cleaned to mask plate 0200, the first clamping jaw 02 and the second clamping jaw 03 on fixed mount 01, which clamp, to be treated
The mask plate 0200 of cleaning, then transfer arm 0300 is extend into the fixture 0100 and mask plate 0200 of mask plate fills clearly
In the cleaning tub 0400 of washing lotion (such as hydrocarbon decoction), mask plate 0200 is immersed in cleaning fluid, cleans the bucket bottom of tub 0400
On be additionally provided with row's ultrasonic oscillator 0410 (as shown in Figure 2), ultrasonic oscillator 0410 can send ultrasonic activation cleaning fluid, with
Mask plate 0200 is cleaned.
However, in the fixture of existing this mask plate, fixed mount 01 is to be fixedly connected with transfer arm 0300, as shown in Fig. 2
After the fixture 0100 of mask plate is extend into cleaning tub 0400, the lower end of mask plate 0200 is easy to ultrasonic oscillator
0410 ultrasonic wave launched is stopped that it is difficult the top for being irradiated to mask plate 0200 to cause ultrasonic wave, so causes mask
The top of plate 0200 not by ultrasonic irradiation to dead angle be difficult to be cleaned, and the luminous organic material on mask plate 0200 is clear
Do not wash clean, then easily fall in evaporation on substrate, so as to cause bad influence to the display quality of display device.
The content of the invention
Embodiments of the invention provide a kind of fixture of mask plate, mask plate purging system and the method for cleaning mask plate,
To solve the problems, such as that existing purging system is bad to mask plate cleaning performance.
To reach above-mentioned purpose, on the one hand, the embodiments of the invention provide a kind of fixture of mask plate, including：Suspension bracket；Gu
Determine frame, the fixed mount is used to fix mask plate, and the fixed mount is rotatablely connected with the suspension bracket, and the central axis edge rotated
The fixed mount extends laterally；First driving means, the first driving means are fixed on the suspension bracket, and with it is described solid
Determine frame to be connected, the first driving means are used to drive rotation of the fixed mount between the suspension bracket.
Further, the first driving means include the first motor and transmission mechanism, and first motor is fixed on institute
State the top of suspension bracket, the first end of the transmission mechanism is connected with first motor, the second end of the transmission mechanism with
The top of the fixed mount is hinged, and be hinged centerline axis parallel is in the central axis of the rotation, the center of the rotation
There is the distance for being used for adjusting the relative suspension bracket rotational angle of the fixed mount, institute between axis and the top of the fixed mount
Stating the first motor can drive the fixed mount to be rotated relative to the suspension bracket by the transmission mechanism.
Further, the transmission mechanism includes the first leading screw, the first nut and driving member, first leading screw and institute
State the output axis connection of the first motor, and Longitudinal extending of first leading screw along the suspension bracket, first nut and institute
The first leading screw is stated to be engaged, the first end of the driving member is connected with first nut rotation, and the driving member with it is described
Pivot center between first nut is parallel to the central axis of the rotation, the second end and the fixed mount of the driving member
Top be hinged, the first end of the transmission mechanism is the connection end of first leading screw and first motor, the transmission
Second end of mechanism is the second end of the driving member.
Further, the fixed mount includes body and the first clamping element and the second clamping element, first clamping element
It is fixedly connected with the body, second clamping element is flexibly connected with the body, and second clamping element is connected with driving
Part, the actuator are fixed on the body, and second clamping element can be driven to be clamped to away from or close to described first
The direction movement of part.
Further, first clamping element, the second clamping element being longitudinally arranged along the body, and it is described
Second clamping element is located at the top of first clamping element.
Further, the actuator includes the second motor, and second motor is fixed on the body, and described
The output shaft of two motors is connected with the second leading screw, and the second nut, second clamping element and institute are combined with second leading screw
The second nut is stated to be fixedly connected, second motor can be driven by second leading screw second clamping element can to remote or
Moved close to the direction of first clamping element.
The fixture of mask plate provided in an embodiment of the present invention, because fixed mount and suspension bracket are rotatablely connected, and the center rotated
Axis is extended laterally along fixed mount, and first driving means are fixed on suspension bracket, and is connected with fixed mount, and can be driven solid
Rotation of the frame between suspension bracket is determined, so when transfer arm is extend into clearly with suspension bracket, fixed mount and mask plate to be cleaned
After cask washing groove, first driving means can is by driving rotation of the fixed mount between suspension bracket, so that mask plate is close
The transmission path of ultrasonic wave is avoided in one end of ultrasonic oscillator, to avoid the ultrasonic wave that ultrasonic oscillator is launched by mask plate institute
Stop, the ultrasonic wave can that ultrasonic oscillator is launched is irradiated to the other position of mask plate, do not surpassed on such mask plate
The dead angle position can that sound wave is irradiated greatly reduces, and reduces residual of the luminous organic material on mask plate, so as to
To greatly improve the cleaning performance of mask plate；Meanwhile fixed mount can also be to the cleaning fluid in cleaning groove relative to suspension bracket rotation
Play a part of agitation, be advantageous to the flowing of cleaning fluid, so as to be rinsed to mask plate surface, can also equally improve mask
The cleaning performance of plate.And the raising of the cleaning performance of mask plate, in mask plate in use, organic luminous layer such as is deposited in substrate
When, it is possible to reduce the luminous organic material remained on mask plate and drop the probability on substrate, so as to improving display device
Display quality it is favourable.
On the other hand, the embodiment of the present invention additionally provides a kind of mask plate purging system, including：It is transfer arm, any of the above-described
The fixture and cleaning tub of mask plate described in embodiment, the transfer arm can move along horizontally and vertically direction, described to hang
Frame is fixedly connected with the transfer arm, and the transfer arm can drive the fixture of the mask plate to extend into the cleaning tub,
The bucket bottom of the cleaning tub is provided with the first ultrasonic oscillator, and first ultrasonic oscillator can launch ultrasonic wave upward.
Further, mask plate purging system provided in an embodiment of the present invention also includes：Ultrasonic oscillator bearing part, it is described
Ultrasonic oscillator bearing part is provided with the second ultrasonic oscillator, and second ultrasonic oscillator can launch ultrasonic wave, institute downwards
State ultrasonic oscillator bearing part and be connected with the second drive device, second drive device is arranged on outside the cleaning tub, institute
Stating the second drive device can drive the ultrasonic oscillator bearing part to move, and second ultrasonic oscillator is moved to described
Clean in tub.
Further, to extending laterally formed with flange at the bung of the cleaning groove, second drive device
It is arranged on the flange, second drive device includes horizontal drive apparatus and vertical drive device, the horizontal drive
Device can drive the ultrasonic oscillator bearing part to move in the horizontal direction, and the vertical drive device can drive the ultrasonic wave
Oscillator bearing part vertically moves.
Further, the horizontal drive apparatus includes horizontal motor, and the horizontal motor is fixed on the flange,
The 3rd leading screw is connected with the output shaft of the horizontal motor, the 3rd leading screw is horizontally extending, the 3rd leading screw
On be combined with the 3rd nut, be connected with fixture on the 3rd nut；The vertical drive device includes vertical motor, described
Vertical motor is fixed on the fixture, and the 4th leading screw, the 4th leading screw are connected with the output shaft of the vertical motor
Vertically extend, the 4th nut is combined with the 4th leading screw, is held on the 4th nut with the ultrasonic oscillator
Holder is fixedly connected.
Mask plate purging system provided in an embodiment of the present invention, due to including the mask plate described in any of the above-described embodiment
Fixture, transfer arm can be moved along horizontally and vertically direction, and suspension bracket is fixedly connected with transfer arm, such transfer arm can
It is moved in the horizontal direction above the bung of cleaning tub with the fixture of mask plate and mask plate to be cleaned, then again along perpendicular
The fixture of mask plate and mask plate to be cleaned are extend into cleaning tub by Nogata to mobile, at this moment in the fixture of mask plate
First driving means can is by driving rotation of the fixed mount between suspension bracket, so that the lower end of mask plate is avoided the first surpassing
The transmission path for the ultrasonic wave that acoustic wave transducer is sent, avoid ultrasonic wave and stopped by the lower end of mask plate, the first ultrasonic wave
The ultrasonic wave can that oscillator is launched is irradiated to the other position of mask plate, is not irradiated on such mask plate by ultrasonic wave
Dead angle position can greatly reduces, and reduces residual of the luminous organic material on mask plate, is covered so as to greatly improve
The cleaning performance of diaphragm plate；Meanwhile fixed mount rotates the work that agitation can also be played to the cleaning fluid in cleaning groove relative to suspension bracket
With being advantageous to the flowing of cleaning fluid, so as to being rinsed to mask plate surface, can also equally improve the cleaning effect of mask plate
Fruit.And the raising of the cleaning performance of mask plate, in mask plate in use, such as when organic luminous layer is deposited in substrate, it is possible to
Reduce the luminous organic material that remains on mask plate to drop the probability on substrate, so as to the display quality to improving display device
Favorably.
The third aspect, the embodiment of the present invention additionally provide a kind of method for cleaning mask plate, comprised the following steps：
The fixture for being fixed with mask plate is inserted in the cleaning tub for filling cleaning fluid；
The first ultrasonic oscillator positioned at the washing bucket trench bottom is opened, and drives the fixture to drive the mask plate
Deflected around a central axis, the central axis extends laterally along the fixture, so that the mask plate avoids described first
The ultrasonic wave that ultrasonic oscillator is launched；
After the completion of cleaning, the fixture for being fixed with mask plate is removed into the cleaning tub.
Further, the method for the cleaning mask plate that the embodiment of the present invention also provides is further comprising the steps of：
After the fixture for being fixed with mask plate is inserted in the cleaning tub for fill cleaning fluid, by the second ultrasonic oscillator
It is moved in the cleaning tub, and opens second ultrasonic oscillator；
After the completion of cleaning, before the fixture for being fixed with mask plate by described removes the cleaning tub, by described the
Two ultrasonic oscillators remove the cleaning tub.
The method of cleaning mask plate provided in an embodiment of the present invention, after opening the first ultrasonic oscillator, can drive
Fixture drives mask plate deflect around a central axis, so that the lower end of mask plate surpassing of avoiding that the first ultrasonic oscillator launched
Sound wave, the ultrasonic wave can that such first ultrasonic oscillator is launched avoid being stopped by mask plate, and the first ultrasonic wave shakes
The ultrasonic wave can that son is launched is irradiated to the other position of mask plate, is not irradiated on such mask plate by ultrasonic wave dead
Angular position can greatly reduces, and so as to greatly improve the cleaning performance of mask plate, reduces luminous organic material and is covering
Residual on diaphragm plate；Meanwhile the fixture of mask plate drives mask plate can also be in cleaning groove around central axis deflection
Cleaning fluid plays a part of agitation, is advantageous to the flowing of cleaning fluid, so as to be rinsed to mask plate surface, can also equally carry
The cleaning performance of high mask plate.And the raising of the cleaning performance of mask plate, in mask plate in use, being such as deposited in substrate organic
During luminescent layer, it is possible to reduce the luminous organic material remained on mask plate and fall the probability on substrate, so as to be shown to improving
The display quality of device is favourable.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is a kind of existing structural representation of mask plate purging system；
Fig. 2 is the cross section view of existing this mask plate purging system；
Fig. 3 is the structural representation of the mask plate purging system in the embodiment of the present invention；
Fig. 4 is the structural representation of the fixture of the mask plate in the embodiment of the present invention；
Fig. 5 is that the fixed mount in the fixture of the mask plate in the embodiment of the present invention drives the schematic diagram that mask plate rotates；
Fig. 6 is the structural representation of the second drive device of the mask plate purging system in the embodiment of the present invention；
Fig. 7 is the flow chart of the method for cleaning mask plate provided in an embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
In the description of the invention, it is to be understood that term " " center ", " on ", " under ", "front", "rear", " left side ",
The orientation or position relationship of the instruction such as " right side ", " vertical ", " level ", " top ", " bottom ", " interior ", " outer " are to be installed based on embodiment
Orientation or position relationship shown in position, it is for only for ease of description description of the invention and simplified, rather than instruction or hint institute
The device or component of finger must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to this hair
Bright limitation.
Term " first ", " second " be only used for describe purpose, and it is not intended that instruction or imply relative importance or
The implicit quantity for indicating indicated technical characteristic.Thus, " first " is defined, the feature of " second " can be expressed or imply
Ground includes one or more this feature.In the description of the invention, unless otherwise indicated, " multiple " be meant that two or
Two or more.
Referring to Fig. 4, the embodiments of the invention provide a kind of fixture of mask plate, including：Suspension bracket 1；Fixed mount 2, fixed mount 2
For fixing mask plate (in figure shown in label M), fixed mount 2 is rotatablely connected with suspension bracket 1, and the central axis 3 rotated is along fixation
Transverse direction (X-direction shown in the figure) extension of frame 2；First driving means 4, first driving means 4 are fixed on suspension bracket 1, and with
Fixed mount 2 is connected, and first driving means 4 are used to drive rotation of the fixed mount 2 between suspension bracket 1.
The fixture of mask plate provided in an embodiment of the present invention, as shown in figure 4, because fixed mount 2 and suspension bracket 1 are rotatablely connected,
And the extending laterally along fixed mount 2 of central axis 3 rotated, first driving means 4 are fixed on suspension bracket 1, and with the phase of fixed mount 2
Connection, and can drive rotation of the fixed mount 2 between suspension bracket 1, so when transfer arm 200 with suspension bracket 1, fixed mount 2 with
And mask plate is extend into after cleaning tub 300 (as shown in Figure 3), the can of first driving means 4 is by driving the phase of fixed mount 2
To the rotation between suspension bracket 1, so that mask plate avoids the transmission path of ultrasonic wave close to one end of ultrasonic oscillator (such as Fig. 5 institutes
Show), the ultrasonic wave to avoid ultrasonic oscillator from being launched is stopped by mask plate, and the ultrasonic wave that ultrasonic oscillator is launched can
To be irradiated to the other position of mask plate, the dead angle position can not irradiated on such mask plate by ultrasonic wave subtracts significantly
It is few, reduce residual of the luminous organic material on mask plate, so as to greatly improve the cleaning performance of mask plate；Meanwhile
Fixed mount 2 rotates relative to suspension bracket 1 to play a part of agitation to the cleaning fluid in cleaning groove, be advantageous to the stream of cleaning fluid
It is dynamic, so as to be rinsed to mask plate surface, it can also equally improve the cleaning performance of mask plate.And the cleaning performance of mask plate
Raising, in mask plate in use, such as substrate be deposited organic luminous layer when, it is possible to reduce remained on mask plate it is organic
Luminescent material drops the probability on substrate, so as to favourable to the display quality for improving display device.
Wherein, the structure of first driving means 4 is not unique, for example first driving means 4 can be following structure：Such as figure
Shown in 4, first driving means 4 include the first motor 41 and transmission mechanism 42, and the first motor 41 is fixed on the top of suspension bracket 1, pass
The first end of motivation structure 42 is connected with the first motor 41, and the second end and the top of fixed mount 2 of transmission mechanism 42 are hinged, and cuts with scissors
The central axis (in figure shown in label m) connect is parallel to the central axis 3 of rotation, the central axis 3 of rotation and the top of fixed mount 2
Have between portion and be used to adjust distance of the fixed mount 2 with respect to the rotational angle of suspension bracket 1, the first motor 41 can be driven by transmission mechanism 42
Dynamic fixed mount 2 rotates relative to suspension bracket 1.
In addition, first driving means 4 can also be following structure：First driving means 4 include the first motor 41, the first electricity
Machine 41 is arranged on the position being rotatablely connected on fixed mount 2 with suspension bracket 1, and the output shaft of the first motor 41 is connected with fixed mount 2, the
One motor 41 direct drive fixed mount 2 rotates relative to suspension bracket 1.Compared to the first motor 41 direct drive fixed mount 2 with respect to 1 turn of suspension bracket
Dynamic embodiment, first driving means 4 are included in the embodiment of the first motor 41 and transmission mechanism 42, and the first motor 41 is to set
At the top of suspension bracket 1, so when being cleaned to mask plate, the first motor 41 does not just have to be immersed in corrosive cleaning fluid
Among, it can be ensured that the normal work of the first motor 41, and the first motor 41 is rotten without the anti-cleaning fluid set costly
The protector of erosion, so as to advantageously reduce cost.
In the embodiment that first driving means 4 include the first motor 41 and transmission mechanism 42, the structure of transmission mechanism 42
Also not uniquely, for example transmission mechanism 42 can use following structure：As shown in figure 4, transmission mechanism 42 include the first leading screw 421,
The output axis connection of first nut 422 and driving member 423, the first leading screw 421 and the first motor 41, and the edge of the first leading screw 421
The Longitudinal extending (Y-direction shown in figure) of suspension bracket 1, the first nut 422 are engaged with the first leading screw 421, and the of driving member 423
One end is rotatablely connected with the first nut 422, and pivot center (the label n institutes in figure between the nut 422 of driving member 423 and first
Show) parallel to the central axis 3 of rotation, the second end and the top of fixed mount 2 of driving member 423 are hinged, and hinge axes m is put down
Row is in the central axis 3 of rotation.When first motor 41 works, the first leading screw 421 is driven to rotate, so that the first nut 422 can
Move back and forth on the first leading screw 421 along the longitudinal direction of suspension bracket 1, such can of first nut 422 is driven solid by driving member 423
The central axis 3 for determining frame 2 around rotation is swung, so that avoiding the transmitting of ultrasonic wave on mask plate close to the position of ultrasonic oscillator
Path, be advantageous to improve the cleaning performance of mask plate.
In addition, transmission mechanism 42 can also use following structure：Transmission mechanism 42 includes rotating disk and connecting rod, rotating disk and first
The output shaft of motor 41 is connected, and the central axis of rotating disk is identical with the bearing of trend of the output shaft of the first motor 41, and the
Parallel to the central axis 3 of rotation, first end and the rotating disk of connecting rod are rotatablely connected the output shaft of one motor 41, and are rotatablely connected
Point is located at close to the edge of rotating disk, and is rotatablely connected the centerline axis parallel of axle and rotating disk, the second end and the fixed mount 2 of connecting rod
Top be hinged, and hinge axes are parallel to the central axis 3 of rotation.When first motor 41 works, turntable rotation is driven, so
Rotating disk drives fixed mount 2 to be swung (equivalent to crank and rocker mechanism) around the central axis 3 of rotation by connecting rod afterwards.Compared to driver
Structure 42 includes the embodiment of rotating disk and connecting rod, and transmission mechanism 42 includes the first leading screw 421, the first nut 422 and driving member 423
It is that the swing angle of fixed mount 2, the first electricity are controlled by position of first nut 422 on the first leading screw 421 in embodiment
Machine 41 circles the distance of 422, the first nut, one screw thread of advance, can so be accurately controlled the first nut 422 first
Position on leading screw 421, so as to accurately control the swing angle of fixed mount 2, and then mask plate can be made preferably to keep away
The generation path of ultrasonic wave is opened, it is stronger to the cleaning performance of raising mask plate.
In order that fixed mount 2 is more steady around the swing of the central axis 3 of rotation, as shown in figure 4, the number of driving member 423
Mesh is two, and two driving members 423 are symmetrically distributed in the both sides in the transverse center face (face in figure shown in label A) of fixed mount 2,
One end of two driving members 423 is rotatablely connected with the first nut 422, and top of the other end with fixed mount 2 is hinged.Wherein,
Connecting shaft (in figure shown in label t) can be fixed with first nut 422, two driving members 423 connect by being rotated with connecting shaft
Connect, to realize the rotation connection with the first nut 422.By setting two driving members 423, and it is symmetrically distributed in fixed mount 2
Transverse center face A both sides, can so ensure fixed mount 2 in the swing process of the central axis 3 of rotation in the horizontal
Stress balance so that fixed mount 2 is more steady around the swing of the central axis 3 of rotation.
In the fixture of mask plate provided in an embodiment of the present invention, mask plate is fixed for the ease of fixed mount 2, such as
Shown in Fig. 4, fixed mount 2 includes the clamping element 22 of body 21 and first and the second clamping element 23, the first clamping element 22 and body 21
It is fixedly connected, the second clamping element 23 is flexibly connected with body 21, and the second clamping element 23 is connected with actuator 24, and actuator 24 is fixed
In on body 21, and the second clamping element 23 can be driven to be moved to the direction away from or close to the first clamping element 22.In fixed mask
During plate, first mask plate can be placed between the first clamping element 22 and the second clamping element 23, then the driving of actuator 24 second
Clamping element 23 moves to close to the direction of the first clamping element 22, to clamp mask plate；After cleaning finishes, the driving of actuator 24 the
Two clamping elements 23 move to the direction away from the first clamping element 22, to unclamp the mask plate after cleaning.Pass through the first clamping element 22
It is fixedly connected with body 21, this setup that the second clamping element 23 is flexibly connected with body 21, actuator 24 can drive
Second clamping element 23 moves, flexibly to control the distance between the first clamping element 22, second clamping element 23 to adapt to different size
Mask plate, while the first clamping element 22, the second clamping element 23 can also be controlled to the clamping force of mask plate, so that mask plate enters
Row is preferably fixed on fixed mount 2.
Wherein, the arrangement of the first clamping element 22, the second clamping element 23 on body 21 is not unique, such as such as Fig. 4
Shown, the first clamping element 22, the second clamping element 23 can be arranged along the longitudinal direction (the y directions shown in figure) of body 21, and the
Two clamping elements 23 are located at the top of the first clamping element 22.In addition, the first clamping element 22, the second clamping element 23 can also be along bodies 21
Transverse direction (the x directions shown in figure) arrangement.Compared to the lateral arrangement along body 21, the first clamping element 22, the second clamping element 23
Along body 21 when being longitudinally arranged, the weight of mask plate is supported by the first clamping element 22, rather than by the first clamping element
22nd, come what is offset, this setup can be covered the frictional force between the second clamping element 23 and mask plate so that fixed weight is larger
Diaphragm plate.
The structure of actuator 24 is not also unique, for example actuator 24 can be following structure：As shown in figure 4, actuator 24
Including the second motor 241, the second motor 241 is fixed on body 21, and the output shaft of the second motor 241 is connected with the second leading screw
242, the second nut 243 is combined with the second leading screw 242, and the second clamping element 23 is fixedly connected with the second nut 243, the second motor
241 can drive the second clamping element 23 to be moved to the direction away from or close to the first clamping element 22 by the second leading screw 242.Second
Motor 241 drives the second leading screw 242 to rotate when working, and the can of the second nut 243 moves back and forth along the second leading screw 242, with band
Dynamic second clamping element 23 moves to the direction away from or close to the first clamping element 22, can thus realize the clamping to mask plate
With release.Wherein, the second nut 243 can be integrally formed (as shown in Figure 4) with the second clamping element 23, can also be clamped with second
The split production of part 23, then the second clamping element 23 be arranged on the second nut 243 on, be not specifically limited herein.
In addition, actuator 24 can also be following structure：Actuator 24 includes cylinder, and cylinder is fixed on body 21, gas
The piston rod of cylinder is fixedly connected with the second clamping element 23, and cylinder can drive the second clamping element 23 to be clamped to away from or close to first
The direction movement of part 22.Compared to cylinder, the second clamping element 23 is driven to be clamped to first by the second motor 241, the second leading screw 242
The mode that part 22 moves, it is relatively simple for structure, without setting the parts such as air pump, pipeline, control air valve, advantageously reduce part
Number, so as to improve the first clamping element 22, the second clamping element 23 work when reliability.
In order to ensure the mask plate stress balance in its transverse direction when clamping, as shown in figure 4, the first clamping element 22, second
The number of clamping element 23 is two, and two the first clamping elements 22 are symmetricly set on the transverse center face A of fixed mount 2 both sides,
Two the second clamping elements 23 are symmetricly set on the both sides in the transverse center face of fixed mount 2.By setting two the first clamping elements 22
With two the second clamping elements 23, so when two the first clamping elements 22 and two the second clamping elements 23 clamp mask plate, so that it may
To ensure mask plate stress balance in its transverse direction, so that the fixed effect of mask plate is more preferable.
In the fixture of mask plate provided in an embodiment of the present invention, the shape of suspension bracket 1 has a lot, for the ease of the phase of fixed mount 2
Suspension bracket 1 is smoothly rotated, as shown in figure 4, suspension bracket 1 is gantry type hanger frame, fixed mount 2 rotates with the horizontal both sides of suspension bracket 1 to be connected
Connect, so advantageously ensure that fixed mount 2 keeps balance in its transverse direction, so as to so that fixed mount 2 is rotated and must compared relative to suspension bracket 1
It is more steady.
On the other hand, as shown in figure 3, the embodiment of the present invention additionally provides a kind of mask plate purging system, including：Transfer arm
200th, the fixture 100 of the mask plate in any of the above-described embodiment and cleaning tub 300, transfer arm 200 can be along horizontally and vertically sides
To movement, suspension bracket 1 is fixedly connected with transfer arm 200, and transfer arm 200 can drive the fixture 100 of mask plate to extend into cleaning tub
In 300, the bucket bottom of cleaning tub 300 is provided with the first ultrasonic oscillator 310 (as shown in Figure 5), and the first ultrasonic oscillator 310 can
Launch ultrasonic wave upward.
Wherein, " top " in " the first ultrasonic oscillator 310 can launch ultrasonic wave upward " can be not only surface,
It can also be oblique upper.
Referring to Fig. 3, because mask plate purging system provided in an embodiment of the present invention is included described in any of the above-described embodiment
Mask plate fixture 100, transfer arm 200 can be moved along horizontally and vertically direction, and suspension bracket 1 is fixed with transfer arm 200 and connected
Connect, such can of transfer arm 200 is moved to cleaning in the horizontal direction with the fixture 100 and mask plate to be cleaned of mask plate
Above the bung of tub 300, then vertically move again and extend into the fixture 100 of mask plate and mask plate to be cleaned
Clean in tub 300, at this moment the can of first driving means 4 in the fixture 100 of mask plate is by driving fixed mount 2 is relative to hang
Rotation between frame 1, so that the transmission path for the ultrasonic wave that the first ultrasonic oscillator 310 is sent is avoided in the lower end of mask plate
(as shown in Figure 5), avoid ultrasonic wave and stopped by the lower end of mask plate, the ultrasonic wave that the first ultrasonic oscillator 310 is launched
Can is irradiated to the other position of mask plate, and the dead angle position can not irradiated on such mask plate by ultrasonic wave is significantly
Reduce, reduce residual of the luminous organic material on mask plate, so as to greatly improve the cleaning performance of mask plate；Together
When, fixed mount 2 rotates relative to suspension bracket 1 to play a part of agitation to the cleaning fluid in cleaning groove, be advantageous to cleaning fluid
Flowing, so as to being rinsed to mask plate surface, can also equally improve the cleaning performance of mask plate.And the cleaning of mask plate
The raising of effect, in mask plate in use, such as when organic luminous layer is deposited in substrate, it is possible to reduce what is remained on mask plate
Luminous organic material drops the probability on substrate, so as to favourable to the display quality for improving display device.
In order to further improve the cleaning performance of mask plate, as shown in fig. 6, mask plate provided in an embodiment of the present invention cleans
System also includes：Ultrasonic oscillator bearing part 400, ultrasonic oscillator bearing part 400 are provided with the second ultrasonic oscillator 410, the
Two ultrasonic oscillators 410 (not still underface or obliquely downward) transmitting ultrasonic wave, ultrasonic oscillator can carry downwards
Part 400 is connected with the second drive device 500, and the second drive device 500 is arranged on outside cleaning tub 300, the second drive device 500
Ultrasonic oscillator bearing part 400 can be driven to move, the second ultrasonic oscillator 410 is moved in cleaning tub 300.Work as mask
After the fixture 100 and mask plate of plate are extend into cleaning tub 300, the second drive device 500 driving ultrasonic oscillator bearing part
400 movements, the second ultrasonic oscillator 410 is moved in cleaning tub 300, so, as shown in figure 5, the first ultrasonic wave shakes
The 310, second ultrasonic oscillator of son 410 launches ultrasonic wave simultaneously, is cleaned with the surface to mask plate.Due to the first ultrasound
Ripple oscillator 310, the second ultrasonic oscillator 410 respectively be located at mask plate upper and lower part, such first ultrasonic oscillator 310,
The ultrasonic wave that second ultrasonic oscillator 410 is launched can comprehensively be covered to the surface of mask plate, so as to enter
One step improves the cleaning performance of mask plate；In addition, ultrasonic oscillator bearing part 400 is designed to movable type, such ultrasonic wave shakes
The sub- can of bearing part 400 is moved to cleaning after the fixture 100 of mask plate is inserted in the cleaning tub 300 for fill cleaning fluid
In tub 300, and cleaning tub 300 is removed before the fixture 100 of mask plate removes cleaning tub 300, so as to keep away
Movement interference occurs for the fixture 100 for exempting from ultrasonic oscillator bearing part 400 and mask plate, it is ensured that the fixture 100 of mask plate is smoothly stretched
Enter or remove cleaning tub 300.
Wherein, the structure composition of drive device is not unique, for example drive device can be following structure：As shown in fig. 6,
Clean at the bung of tub 300 and set over flange 320 formed with flange 320, the second drive device 500 to extending laterally, the
Two drive devices 500 include horizontal drive apparatus 510 and vertical drive device 520, and horizontal drive apparatus 510 can drive ultrasonic wave
Oscillator bearing part 400 moves in the horizontal direction, and vertical drive device 520 can drive ultrasonic oscillator bearing part 400 along vertical side
To movement.After the fixture 100 and mask plate of mask plate are extend into cleaning tub 300, horizontal drive apparatus 510 drives ultrasound
Ripple oscillator bearing part 400 is moved to the position relative with the bung for cleaning tub 300 in the horizontal direction, then, vertical driving dress
Put 520 driving ultrasonic oscillator bearing parts 400 to move vertically downwards, so that the second ultrasonic oscillator 410 is immersed in cleaning
Among liquid.
In addition, drive device can also be following structure：The side wall of groove is cleaned to extending laterally formed with installing plate, the
Two drive devices 500 are set on a mounting board, opened up in the side wall that is connected with installing plate of cleaning tub 300 it is jagged, second
Drive device 500 includes horizontal drive apparatus 510, and horizontal drive apparatus 510 can drive ultrasonic oscillator bearing part 400 along level
Direction is moved, and ultrasonic oscillator bearing part 400 is moved in cleaning tub 300 by breach.Compared to the second drive device
500 only include the embodiment of horizontal drive apparatus 510, and the second drive device 500 includes horizontal drive apparatus 510 and vertical driving
The embodiment of device 520, among second ultrasonic oscillator 410 being immersed in into cleaning fluid due to vertical drive device 520, such
The ultrasonic wave can that two ultrasonic oscillators 410 are sent is propagated to be cleaned to mask plate in cleaning fluid, avoids
Two ultrasonic oscillators 410 are not immersed in ultrasonic wave when in cleaning fluid and propagate caused decay in atmosphere, thus can improve the
Two ultrasonic oscillators 410 send cleaning performance of the ultrasonic wave to mask plate, and then can integrally improve the cleaning effect of mask plate
Fruit.
It is horizontal in the embodiment that the second drive device 500 includes horizontal drive apparatus 510 and vertical drive device 520
Drive device 510, vertical drive device 520 can be realized especially by following structure：As shown in fig. 6, horizontal drive apparatus 510
Including horizontal motor 511, horizontal motor 511 is fixed over flange 320, and the 3rd is connected with the output shaft of horizontal motor 511
Thick stick 512, the 3rd leading screw 512 is horizontally extending, is combined with the 3rd nut 513 on the 3rd leading screw 512, on the 3rd nut 513
It is connected with fixture 514；Vertical drive device 520 includes vertical motor 521, and vertical motor 521 is fixed on fixture 514,
The 4th leading screw 522 is connected with the output shaft of vertical motor 521, the 4th leading screw 522 vertically extends, the 4th leading screw 522
On be combined with the 4th nut 523, be fixedly connected on the 4th nut 523 with ultrasonic oscillator bearing part 400.Horizontal drive apparatus
510 and vertical drive device 520 specific work process it is as follows：Horizontal motor 511 is started working, and the 3rd leading screw 512 of driving revolves
Turn, to drive the 3rd nut 513 to be moved on the 3rd leading screw 512, and then vertical motor the 521, the 4th is driven by fixture 514
Leading screw 522, the 4th nut 523 and ultrasonic oscillator bearing part 400 move in the horizontal direction；Vertical motor 521 is started working,
Drive the 4th leading screw 522 to rotate, to drive the 4th nut 523 to be moved on the 4th leading screw 522, and then pass through the 4th nut 523
Drive the in the vertical direction motion of ultrasonic oscillator bearing part 400.
Wherein, the 3rd nut 513 can be integrally formed (as shown in Figure 6) with fixture 514, can also divide with fixed mount 2
System is made, and then fixture 514 is arranged on the 3rd nut 513, is not specifically limited herein；4th nut 523 can be with surpassing
Acoustic wave transducer bearing part 400 is integrally formed (as shown in Figure 6), can also with the split production of ultrasonic oscillator bearing part 400, then
Ultrasonic oscillator bearing part 400 is arranged on the 4th nut 523, is also not specifically limited herein.
In order that the 3rd nut 513, the 4th nut 523 are more steady in motion process, as shown in fig. 6, horizontal drive
Device 510 also includes horizontal guide rail 515, and horizontal guide rail 515 is arranged on flange 320, and the bearing of trend of horizontal guide rail 515
Identical with the bearing of trend of the 3rd leading screw 512, the 3rd nut 513 can slide along horizontal guide rail 515；Vertical drive device 520 is also
Including upright guide rail 524, upright guide rail 524 is arranged on fixture 514, and the bearing of trend of upright guide rail 524 and the 4th
The bearing of trend of leading screw 522 is identical, and the 4th nut 523 can slide along upright guide rail 524.By setting horizontal guide rail 515, so
Horizontal guide rail 515 can be carried out spacing to it during the 3rd nut 513 moves in the horizontal direction, avoid it from being moved through
Shaken in journey, make the 3rd nut 513 more steady in motion process；By setting upright guide rail 524, so the 4th
Upright guide rail 524 can be carried out spacing to it during nut 523 is vertically moving, avoid it from being sent out in motion process
Life is rocked, and makes the 4th nut 523 more steady in motion process.And the 3rd nut 513, the stable movement of the 4th nut 523 are entered
And ensure that the horizontal movement of ultrasonic oscillator bearing part 400 and it is vertically movable when stationarity.
The third aspect, as shown in fig. 7, the embodiment of the present invention additionally provides a kind of method for cleaning mask plate, including it is following
Step：
S1：The fixture 100 for being fixed with mask plate is inserted in the cleaning tub 300 for filling cleaning fluid；
S2：Open positioned at the bottom of washing bucket groove 300 the first ultrasonic oscillator 310, and drive fixture to drive mask plate around
One central axis deflects, and central axis extends laterally along fixture 100, so that the first ultrasonic oscillator is avoided in the lower end of mask plate
310 ultrasonic waves launched；
Wherein, as shown in figure 3, central axis can be the central axis 3 of the rotation between fixed mount 2 and suspension bracket 1.
S3：After the completion of cleaning, the fixture 100 for being fixed with mask plate is removed into cleaning tub 300.
Wherein, S is performed1、S3The main body of step can be transfer arm 200, and transfer arm 200 drives fixture 100 to move, will
It is inserted or removed in the cleaning tub 300 for filling cleaning fluid；It can also be other mobile device, not do specific limit herein
It is fixed.
The method of cleaning mask plate provided in an embodiment of the present invention, after opening the first ultrasonic oscillator 310, can drive
Dynamic fixture 100 drives mask plate to be deflected around a central axis, so that the lower end of mask plate is avoided the first ultrasonic oscillator 310 and sent out
The ultrasonic wave of injection, the ultrasonic wave can that such first ultrasonic oscillator 310 is launched avoid being stopped by mask plate,
The ultrasonic wave can that one ultrasonic oscillator 310 is launched is irradiated to the other position of mask plate, is not surpassed on such mask plate
The dead angle position can that sound wave is irradiated greatly reduces, and so as to greatly improve the cleaning performance of mask plate, reducing has
Residual of the machine luminescent material on mask plate；Meanwhile fixture 100 drives mask plate can also be to cleaning around central axis deflection
Cleaning fluid in groove plays a part of agitation, is advantageous to the flowing of cleaning fluid, so as to be rinsed to mask plate surface, equally
The cleaning performance of mask plate can also be improved.And the raising of the cleaning performance of mask plate, in mask plate in use, such as in substrate
When organic luminous layer is deposited, it is possible to reduce the luminous organic material remained on mask plate and fall the probability on substrate, so as to right
The display quality for improving display device is favourable.
In order to further improve the cleaning performance of mask plate, as shown in fig. 7, cleaning mask plate provided in an embodiment of the present invention
Method it is further comprising the steps of：
N1：After the fixture 100 for being fixed with mask plate is inserted in the cleaning tub 300 for fill cleaning fluid, by second
Ultrasonic oscillator 410 is moved in cleaning tub 300, and opens the second ultrasonic oscillator 410；
Wherein, after the fixture 100 of mask plate is inserted in the cleaning tub 300 for fill cleaning fluid, driving can be passed through
Device drives the second ultrasonic oscillator 410 to move, and the second ultrasonic oscillator 410 is moved in cleaning tub 300.
N2：After the completion of cleaning, before the fixture 100 for being fixed with mask plate to be removed to cleaning tub 300, will the second it surpass
Acoustic wave transducer 410 removes cleaning tub 300.
Pass through step N1、N2, so in the cleaning process of mask plate, the first ultrasonic oscillator 310, the second ultrasonic wave shake
Sub 410 cans launch ultrasonic wave simultaneously, are cleaned with the surface to mask plate.Due to the first ultrasonic oscillator 310,
Two ultrasonic oscillators 410 are located at the upper and lower part of mask plate respectively, and such first ultrasonic oscillator 310, the second ultrasonic wave shake
The ultrasonic wave that son 410 is launched can comprehensively be covered to the surface of mask plate, so as to further improve mask
The cleaning performance of plate.In addition, the second ultrasonic oscillator 410 is to insert in the fixture 100 of mask plate and fill the washing bucket of cleaning fluid
Just it is moved to after in groove 300 in cleaning tub 300, and before the fixture 100 of mask plate removes cleaning tub 300 just
Tub 300 is cleaned through removing, can so avoid the fixture 100 of the second ultrasonic oscillator 410 and mask plate that movement interference occurs,
Ensure that the fixture 100 of mask plate smoothly stretches into or removed cleaning tub 300.
More than, it is only embodiment of the invention, but protection scope of the present invention is not limited thereto, and it is any to be familiar with
Those skilled in the art the invention discloses technical scope in, change or replacement can be readily occurred in, should all be covered
Within protection scope of the present invention.Therefore, protection scope of the present invention should be defined by scope of the claims.
Claims (12)
- A kind of 1. fixture of mask plate, it is characterised in that including：Suspension bracket；Fixed mount, the fixed mount are used to fix mask plate, and the fixed mount is rotatablely connected with the suspension bracket, and the center rotated Axis extends laterally along the fixed mount；First driving means, the first driving means are fixed on the suspension bracket, and are connected with the fixed mount, and described One drive device is used to drive rotation of the fixed mount between the suspension bracket.
- 2. the fixture of mask plate according to claim 1, it is characterised in that the first driving means include the first motor And transmission mechanism, first motor are fixed on the top of the suspension bracket, the first end of the transmission mechanism and the described first electricity Machine is connected, and the second end and the top of the fixed mount of the transmission mechanism are hinged, and be hinged centerline axis parallel is in institute The central axis of rotation is stated, has between the central axis of the rotation and the top of the fixed mount and is used to adjust the fixation The distance of the relatively described suspension bracket rotational angle of frame, first motor can drive the fixed mount relative by the transmission mechanism The suspension bracket rotates.
- 3. the fixture of mask plate according to claim 2, it is characterised in that the transmission mechanism includes the first leading screw, the One nut and driving member, the output axis connection of first leading screw and first motor, and first leading screw are described in The Longitudinal extending of suspension bracket, first nut are engaged with first leading screw, the first end of the driving member and described first Nut rotation connects, and the pivot center between the driving member and first nut is parallel to the central shaft of the rotation Line, the second end and the top of the fixed mount of the driving member are hinged,The first end of the transmission mechanism is the connection end of first leading screw and first motor, the of the transmission mechanism Two ends are the second end of the driving member.
- 4. the fixture of the mask plate according to any one of claims 1 to 3, it is characterised in that the fixed mount includes body And first clamping element and the second clamping element, first clamping element be fixedly connected with the body, second clamping element with The body is flexibly connected, and second clamping element is connected with actuator, and the actuator is fixed on the body, and can be driven Second clamping element is moved to move to the direction away from or close to first clamping element.
- 5. the fixture of mask plate according to claim 4, it is characterised in that first clamping element, described second clamp Part is longitudinally arranged along the body, and second clamping element is located at the top of first clamping element.
- 6. the fixture of mask plate according to claim 4, it is characterised in that the actuator includes the second motor, described Second motor is fixed on the body, and the output shaft of second motor is connected with the second leading screw, matches somebody with somebody on second leading screw Conjunction has the second nut, and second clamping element is fixedly connected with second nut, and second motor can pass through described second Leading screw drives second clamping element to be moved to the direction away from or close to first clamping element.
- A kind of 7. mask plate purging system, it is characterised in that including：Mask described in transfer arm, any one of claim 1~6 The fixture and cleaning tub, the transfer arm of plate can be moved along horizontally and vertically direction, and the suspension bracket is fixed with the transfer arm Connection, the transfer arm can drive the fixture of the mask plate to extend into the inside for cleaning tub, the cleaning tub Bucket bottom is provided with the first ultrasonic oscillator, and first ultrasonic oscillator can launch ultrasonic wave upward.
- 8. mask plate purging system according to claim 7, it is characterised in that also include：Ultrasonic oscillator bearing part, institute To state ultrasonic oscillator bearing part and be provided with the second ultrasonic oscillator, second ultrasonic oscillator can launch ultrasonic wave downwards, The ultrasonic oscillator bearing part is connected with the second drive device, and second drive device is arranged on outside the cleaning tub, Second drive device can drive the ultrasonic oscillator bearing part to move, and second ultrasonic oscillator is moved into institute State in cleaning tub.
- 9. mask plate purging system according to claim 8, it is characterised in that to lateral at the bung of the cleaning groove Extension is arranged on the flange formed with flange, second drive device, and second drive device includes horizontal drive Device and vertical drive device, the horizontal drive apparatus can drive the ultrasonic oscillator bearing part to move in the horizontal direction, The vertical drive device can drive the ultrasonic oscillator bearing part vertically to move.
- 10. mask plate purging system according to claim 9, it is characterised in that the horizontal drive apparatus includes level Motor, the horizontal motor are fixed on the flange, are connected with the 3rd leading screw on the output shaft of the horizontal motor, and described Three leading screws are horizontally extending, and the 3rd nut is combined with the 3rd leading screw, fixture is connected with the 3rd nut； The vertical drive device includes vertical motor, and the vertical motor is fixed on the fixture, the motor vertically it is defeated The 4th leading screw is connected with shaft, the 4th leading screw vertically extends, and the 4th nut is combined with the 4th leading screw, It is fixedly connected on 4th nut with the ultrasonic oscillator bearing part.
- A kind of 11. method for cleaning mask plate, it is characterised in that comprise the following steps：The fixture for being fixed with mask plate is inserted in the cleaning tub for filling cleaning fluid；The first ultrasonic oscillator positioned at the washing bucket trench bottom is opened, and drives the fixture to drive the mask plate around one Central axis deflects, and the central axis extends laterally along the fixture, so that the lower end of the mask plate avoids described the The ultrasonic wave that one ultrasonic oscillator is launched；After the completion of cleaning, the fixture for being fixed with mask plate is removed into the cleaning tub.
- 12. the method for cleaning mask plate according to claim 11, it is characterised in that further comprising the steps of：After the fixture for being fixed with mask plate is inserted in the cleaning tub for fill cleaning fluid, the second ultrasonic oscillator is moved To the cleaning tub, and open second ultrasonic oscillator；After the completion of cleaning, before the fixture for being fixed with mask plate is removed into the cleaning tub, the second surpass described Acoustic wave transducer removes the cleaning tub.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710776234.9A CN107526247B (en) | 2017-08-31 | 2017-08-31 | Mask plate clamp, mask plate cleaning system and mask plate cleaning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710776234.9A CN107526247B (en) | 2017-08-31 | 2017-08-31 | Mask plate clamp, mask plate cleaning system and mask plate cleaning method |
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| Publication Number | Publication Date |
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| CN107526247A true CN107526247A (en) | 2017-12-29 |
| CN107526247B CN107526247B (en) | 2020-12-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710776234.9A Expired - Fee Related CN107526247B (en) | 2017-08-31 | 2017-08-31 | Mask plate clamp, mask plate cleaning system and mask plate cleaning method |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109604251A (en) * | 2018-12-29 | 2019-04-12 | 西安奕斯伟硅片技术有限公司 | A kind of cleaning device and cleaning method |
| CN110000711A (en) * | 2019-03-21 | 2019-07-12 | 北京工商大学 | A kind of system and method preparing super hydrophobic surface for abrasive air jet stream |
| CN111085494A (en) * | 2019-12-19 | 2020-05-01 | 天津智安微电子技术有限公司 | Mask plate cleaning device |
| CN111359971A (en) * | 2020-03-16 | 2020-07-03 | 昆山国显光电有限公司 | Cleaning device |
| CN112387693A (en) * | 2019-08-19 | 2021-02-23 | 深圳市海博源光电科技有限公司 | Mask plate cleaning method and device |
| CN112764310A (en) * | 2020-12-31 | 2021-05-07 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
| CN114721231A (en) * | 2022-04-17 | 2022-07-08 | 江苏晟驰微电子有限公司 | Tool clamp for cleaning photoetching plate |
| CN116347784A (en) * | 2023-04-03 | 2023-06-27 | 上海铭控传感技术有限公司 | Electronic circuit board cleaning system and method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1707746A (en) * | 2004-06-10 | 2005-12-14 | 中芯国际集成电路制造(上海)有限公司 | Method for processing optical mask of semiconductor device |
| US20100307358A1 (en) * | 2009-06-03 | 2010-12-09 | Panasonic Corporation | Cleaning device for screen printing mask and screen printing machine |
| CN203420006U (en) * | 2013-08-11 | 2014-02-05 | 唐军 | Mask plate washing device |
| CN105607414A (en) * | 2016-03-28 | 2016-05-25 | 武汉华星光电技术有限公司 | Mask plate washing device and method |
| CN105652588A (en) * | 2016-03-21 | 2016-06-08 | 京东方科技集团股份有限公司 | Mask plate cleaning system |
-
2017
- 2017-08-31 CN CN201710776234.9A patent/CN107526247B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1707746A (en) * | 2004-06-10 | 2005-12-14 | 中芯国际集成电路制造(上海)有限公司 | Method for processing optical mask of semiconductor device |
| US20100307358A1 (en) * | 2009-06-03 | 2010-12-09 | Panasonic Corporation | Cleaning device for screen printing mask and screen printing machine |
| CN203420006U (en) * | 2013-08-11 | 2014-02-05 | 唐军 | Mask plate washing device |
| CN105652588A (en) * | 2016-03-21 | 2016-06-08 | 京东方科技集团股份有限公司 | Mask plate cleaning system |
| CN105607414A (en) * | 2016-03-28 | 2016-05-25 | 武汉华星光电技术有限公司 | Mask plate washing device and method |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109604251A (en) * | 2018-12-29 | 2019-04-12 | 西安奕斯伟硅片技术有限公司 | A kind of cleaning device and cleaning method |
| CN109604251B (en) * | 2018-12-29 | 2022-04-05 | 西安奕斯伟材料科技有限公司 | Cleaning device and cleaning method |
| CN110000711A (en) * | 2019-03-21 | 2019-07-12 | 北京工商大学 | A kind of system and method preparing super hydrophobic surface for abrasive air jet stream |
| CN110000711B (en) * | 2019-03-21 | 2020-07-28 | 北京工商大学 | System and method for preparing super-hydrophobic surface through abrasive gas jet |
| CN112387693A (en) * | 2019-08-19 | 2021-02-23 | 深圳市海博源光电科技有限公司 | Mask plate cleaning method and device |
| CN111085494B (en) * | 2019-12-19 | 2022-01-04 | 天津智安微电子技术有限公司 | Mask plate cleaning device |
| CN111085494A (en) * | 2019-12-19 | 2020-05-01 | 天津智安微电子技术有限公司 | Mask plate cleaning device |
| CN111359971A (en) * | 2020-03-16 | 2020-07-03 | 昆山国显光电有限公司 | Cleaning device |
| CN111359971B (en) * | 2020-03-16 | 2021-10-08 | 昆山国显光电有限公司 | Cleaning device |
| CN112764310A (en) * | 2020-12-31 | 2021-05-07 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
| CN112764310B (en) * | 2020-12-31 | 2024-03-26 | 南京深光科技有限公司 | Cleaning process of flexible AMOLED mask |
| CN114721231A (en) * | 2022-04-17 | 2022-07-08 | 江苏晟驰微电子有限公司 | Tool clamp for cleaning photoetching plate |
| CN116347784A (en) * | 2023-04-03 | 2023-06-27 | 上海铭控传感技术有限公司 | Electronic circuit board cleaning system and method |
| CN116347784B (en) * | 2023-04-03 | 2024-05-31 | 上海铭控传感技术有限公司 | Electronic circuit board cleaning system and method |
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