CN206961798U - Substrate board treatment and spray head cleaning device - Google Patents
Substrate board treatment and spray head cleaning device Download PDFInfo
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- CN206961798U CN206961798U CN201720599967.5U CN201720599967U CN206961798U CN 206961798 U CN206961798 U CN 206961798U CN 201720599967 U CN201720599967 U CN 201720599967U CN 206961798 U CN206961798 U CN 206961798U
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- shower nozzle
- spray head
- cleaning device
- accommodation space
- liquid
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Abstract
This announcement provides a kind of substrate board treatment and spray head cleaning device.Substrate board treatment includes：One board holder, for keeping a substrate；An at least process liquid spray unit, comprising a shower nozzle, spray a process liquid along a path for side on the substrate；And a spray head cleaning device, the outer circumference of the board holder is arranged on, for spraying a cleaning liquid to the shower nozzle of an at least process liquid spray unit described in being placed on the spray head cleaning device.
Description
Technical field
This announcement is related to a kind of substrate board treatment and spray head cleaning device, more particularly to a kind of for Wet-type etching
Substrate board treatment, it has the spray head cleaning device available for cleaning sprayer.
Background technology
Now, single-wafer rotary machine (single wafer spin processor) can be passed through in semiconductor processing
Wet-type etching or cleaning are carried out to wafer.The program of multiple tracks etch cleaning, example can be passed through during Wet-type etching or cleaning
Such as, first time etching is first carried out to wafer with the first chemical liquid, second then is carried out to wafer with second of chemical liquid
Secondary etching, finally the chemical liquid remained above wafer is rinsed with cleaning fluid again and cleaned.In general, in order that board is overall
The pipeline for providing chemical liquid, gas or cleaning fluid more succinctly with miniaturization, can be incorporated into same process liquid by configuration
In spray unit so that the shower nozzle of the process liquid spray unit can spray suitable liquid according to current program.
However, after chemical liquid has been sprayed by process liquid spray unit, it is residual that the chemical liquid easily occurs
The problem of staying in the shower nozzle so that when process liquid spray unit continues sprinkling cleaning fluid, the chemical liquid of residual
Current cleaning fluid can be polluted, and then influences the quality of product.
In view of this, it is necessary to a kind of substrate board treatment and spray head cleaning device are proposed, to solve in the prior art
The problem of existing.
Utility model content
To solve above-mentioned problem of the prior art, the purpose of this announcement is to provide a kind of substrate board treatment and shower nozzle clear
Cleaning device, and then avoid in the prior art when chemical liquid, which remains in shower nozzle, causes to spray cleaning fluid, the chemical liquids of residual
The current cleaning fluid of body pollution, and then influence the quality of product.
To reach above-mentioned purpose, this announcement provides a kind of substrate board treatment, including：One board holder, for keeping
One substrate；An at least process liquid spray unit, comprising a shower nozzle, spray a technique along a path for side on the substrate
Liquid；And a spray head cleaning device, the outer circumference of the board holder is arranged on, for clear to being placed on the shower nozzle
The shower nozzle of an at least process liquid spray unit on cleaning device sprays a cleaning liquid.
Among one of this announcement preferred embodiment, the spray head cleaning device includes：One hollow pedestal, comprising
One annular wall and the line segments being connected with one end of the annular wall, wherein the annular wall has been internally formed an accommodating sky
Between, for the shower nozzle to be housed in the inner；One cleaning liquid sprays pipeline, extends to inside the line segments, wherein described
The ejiction opening that cleaning liquid sprays pipeline is directed at the accommodation space, to be sprayed to the shower nozzle being housed in the accommodation space
Spill the cleaning liquid；And a discharging tube, it is connected with the line segments, for discharging the cleaning after cleaning the shower nozzle
Liquid.
Among one of this announcement preferred embodiment, the discharging tube is also used to control the row comprising a switch valve
The break-make of liquid pipe.
Among one of this announcement preferred embodiment, an at least process liquid spray unit also includes：One moves
Motivation structure, it is connected with the shower nozzle, for controlling the shower nozzle to be moved to the board holder from a position of readiness, with institute
State surface and spray the process liquid along the path.
Among one of this announcement preferred embodiment, the travel mechanism includes：One rotary driving part, for controlling
An at least process liquid spray unit rotates around a rotating shaft in a plane；And one lifting drive division, for controlling
An at least process liquid spray unit is vertically moved up or down along perpendicular to the direction of the plane.
Among one of this announcement preferred embodiment, the spray head cleaning device is arranged on the position of readiness.
Among one of this announcement preferred embodiment, the shower nozzle bag of an at least process liquid spray unit
Contain：An at least nozzle, for spraying the process liquid；And a mask, it is provided around in an at least nozzle
Around.
Among one of this announcement preferred embodiment, the spray head cleaning device includes an annular wall, the annular
Pars intramuralis is formed with an accommodation space, for the shower nozzle to be housed in the inner, and the configuration of wherein described accommodation space with
The configuration of the mask of the shower nozzle is corresponding and coordinates.
Among one of this announcement preferred embodiment, the spray head cleaning device also includes a supply air line, described
The gas outlet of supply air line is directed at the accommodation space, to provide a gas to the shower nozzle being housed in the accommodation space
Body, the cleaning liquid for remaining in the shower nozzle is dried up.
This announcement also provides a kind of spray head cleaning device, and for cleaning the shower nozzle of a substrate board treatment, the shower nozzle is used
In spraying a process liquid on a substrate, the spray head cleaning device includes：One hollow pedestal, comprising an accommodation space,
For housing the shower nozzle in the inner；One cleaning liquid sprays pipeline, the accommodation space is directed at comprising an ejiction opening, with to receiving
Hold the sprinkling cleaning liquid of the shower nozzle in the accommodation space to clean the nozzle；And a discharging tube, for discharging
The cleaning liquid cleaned after the shower nozzle.
Compared to prior art, this announcement in substrate board treatment by setting with the shower nozzle available for cleaning sprayer
Cleaning device so that process liquid spray unit can pass through the shower nozzle when having sprayed process liquid and having returned to position of readiness
The process liquid on shower nozzle that cleaning device will remain in process liquid spray unit cleans up, and then avoids that different works occur
Between skill liquid the problem of pollution intersected with each other.
Brief description of the drawings
Fig. 1 shows a kind of schematic diagram of the substrate board treatment of the preferred embodiment according to this announcement；
Fig. 2 shows the partial schematic diagram of Fig. 1 process liquid spray unit；
Fig. 3 shows corresponding schematic diagram of Fig. 1 process liquid spray unit with spray head cleaning device when separating；
Fig. 4 shows corresponding schematic diagram of Fig. 3 process liquid spray unit with spray head cleaning device when combining；
Fig. 5 shows Fig. 4 profile along transversal A-A；And
Fig. 6 shows a kind of flow chart of the cleaning method of the shower nozzle of the preferred embodiment according to this announcement.
Embodiment
, hereafter will be excellent especially exemplified by this announcement in order to which above-mentioned and other purpose, feature, the advantage of this announcement can be become apparent
Embodiment is selected, and coordinates accompanying drawing, is described in detail below.
Fig. 1 is refer to, it shows a kind of schematic diagram of the substrate board treatment 1 of preferred embodiment according to this announcement.Base
Plate processing unit 1 includes board holder 10, process liquid spray unit 20 and spray head cleaning device 30, wherein in this implementation
The quantity of process liquid spray unit 20 is two in example, and one is set either however, can use in other embodiments
The design of more than two process liquid spray units 20, is only not limited to this.Substrate board treatment 1 is to be used to carry out substrate
Various processing, such as carry out Wet-type etching and either remove particle of substrate surface etc..
As shown in figure 1, board holder 10 includes rotating disk 11 and the recovery ring 12 being looped around around rotating disk 11.Rotation
Disk 11 is kept thereon with by substrate.For example, can by way of vacuum suction by substrate adsorption in rotating disk 11, or
Person is that substrate clamping is fixed in rotating disk 11 by clamping device, is not limited to this.Handled when by substrate board treatment 1
During substrate, substrate is maintained in rotating disk 11 first, then by process liquid spray unit 20 in surface along all the way
Footpath spray processing liquid, afterwards again by reclaim ring 12 reclaim corresponding to process liquid and process liquid spray unit 20 moved
Move to position of readiness, to pass through the nozzle of the cleaning liquid spray unit 20 of spray head cleaning device 30 (specific steps and each
The concrete structure of part will be described hereafter).
Referring to Fig.1 and 2, Fig. 2 shows the partial schematic diagram of Fig. 1 process liquid spray unit 20.Process liquid sprays
Spill unit 20 and include shower nozzle 21, rotation and lifting seat 22 and long-armed 23, wherein shower nozzle 21 and rotation and lifting seat 22 is connected to length
The relative both ends of arm 23.Rotation and lifting seat 22 and long-armed 23 is travel mechanism as process liquid spray unit 20, is used for
Control shower nozzle 21 is moved to board holder 10 from position of readiness, with process liquor corresponding to surface along path sprinkling
Body.Rotation and lifting seat 22 is arranged on the platform of identical one with board holder 10, and rotation and lifting seat 22 is arranged on substrate
The outer circumference of the recovery ring 12 of maintaining part 10, with board holder 10 at a distance of a distance.Rotation and lifting seat 22 revolves with one respectively
Turn drive division (not shown in the figures) and a lifting drive division connection (not shown in the figures), wherein rotary driving part and lifting
Drive division can be using by rotation and lifting seat 22, the drive device (such as motor) different from two connects to implement, either respectively
By rotary driving part and lifting drive division be incorporated into same drive device (such as motor), and further with rotation and lifting seat 22
Connect to implement.Rotation and lifting seat 22 can be driven around an axis of rotation by the driving of rotary driving part, and then driven long-armed
23 drive shower nozzles 21 move on X/Y plane along a path.And the driving by lifting drive division can drive rotation and lifting seat
22 do vertical displacement movement along perpendicular to the direction of X/Y plane (i.e. Z-direction).
As shown in Fig. 2 process liquid spray unit 20, which is one kind, will provide a variety of different process liquid (such as chemical drugs
Liquid, gas or cleaning fluid) the design that combines of pipeline.For example, in the present embodiment, process liquid is sprayed single
The shower nozzle 21 of member 20 is designed as comprising first jet 211, the nozzle 213 of second nozzle 212 and the 3rd.Preferably, first jet
211st, the nozzle 213 of second nozzle 212 and the 3rd can be respectively designed to be used to provide deionized water, provide water jets under high pressure or carry
For the nozzle of chemical liquid, wherein single fluid nozzle either second fluid nozzle can be used for providing the nozzle of chemical liquid
Design.In addition, it is surrounded with a mask 210 in the outside of the nozzle 213 of second nozzle 212 and the 3rd.Pass through mask 210
Masking so that the nozzle 213 of second nozzle 212 and the 3rd can avoid process liquid from splashing in spray processing liquid.That is,
When shower nozzle 21 has sprayed process liquid, process liquid can be remained on mask 210.Therefore, in this announcement when passing through technique
After liquid spray unit 20 is handled substrate, then the shower nozzle 21 of process liquid spray unit 20 can be moved to placement
On spray head cleaning device 30, the multiple nozzle and mask 210 of shower nozzle 21 are cleaned up.
It refer to Fig. 1 and Fig. 3, Fig. 3 shows Fig. 1 process liquid spray unit 20 with spray head cleaning device 30 when separating
Corresponding schematic diagram.Spray head cleaning device 30 is to be arranged on the platform of identical one with rotation and lifting seat 22 and board holder 10
On, and the outer circumference of the recovery ring 12 of board holder 10 is arranged on, for being placed on spray head cleaning device 30
The shower nozzle spray of process liquid spray unit 20 21 spill a cleaning liquid 34.Preferably, spray head cleaning device 30 is provided in work
The position of readiness of skill liquid spray unit 20.
It refer to Fig. 3 to Fig. 5, Fig. 4 shows Fig. 3 process liquid spray unit 20 with spray head cleaning device 30 when combining
Corresponding schematic diagram, and Fig. 5 shows Fig. 4 profile along transversal A-A.Spray head cleaning device 30 includes hollow pedestal
31st, cleaning liquid sprays pipeline 32 and discharging tube 33.Pedestal 31 includes annular wall 310 and line segments 311, wherein line segments 311
It is connected with one end of annular wall 310 so that annular wall 310 and line segments 311 communicate with each other.Annular wall 310 has been internally formed
One accommodation space 312, for shower nozzle 21 to be housed in the inner.Line segments 311 and the other end that annular wall 310 is connected formed with
Two perforates, cleaning liquid spray pipeline 32 and extended to by a wherein perforate for line segments 311 inside line segments 311.Discharge opeing
Pipe 33 is connected with line segments 311, and corresponding with another perforate (i.e. outage 313) of line segments 311.Cleaning liquid bleed pipe
The ejiction opening 320 on road 32 is directed at the accommodation space 312 of pedestal 31, to be sprayed clearly to the shower nozzle 21 being housed in accommodation space 312
Wash liq 34.Preferably, cleaning liquid 34 is sprayed in the form of water smoke.It is understood that it can pass through in this announcement
The angle of ejiction opening 320 is adjusted to adjust the spraying range of cleaning liquid 34, and then lifts cleaning speed.Furthermore pass through discharge opeing
Pipe 33 can discharge the cleaning liquid 34 after cleaning sprayer 21.
As shown in Figure 4 and Figure 5, the configuration of the accommodation space 312 of pedestal 31 is relative with the configuration of the mask 210 of shower nozzle 21
Should and it coordinate, thereby, it can be ensured that cleaning liquid sprays the cleaning liquid 34 that pipeline 32 sprays and is all maintained at the interior of mask 210
Portion, to avoid cleaning liquid 34 or be mixed with the mixed liquor of process liquid to be splashed to outside, and then processing substrate is caused to fill
Put the damage of 1 other components.It is understood that because cleaning liquid sprays 33 liang of pipeline 32 and discharging tube in this announcement
Person is using indivedual independently circuit designs so that cleaning liquid 34 can be passed in and out by different pipelines, clear rapidly to supply
Wash liq 34 or discharge cleaning liquid 34, and then lift the speed of cleaning.
In this announcement, spray head cleaning device 30 can also include a supply air line.In the present embodiment, supply air line be with
Cleaning liquid sprays pipeline 32 and combined.That is, the gas outlet of supply air line is equally in alignment with the accommodating of pedestal 31
Space 312, and then a gas can be provided to the shower nozzle 21 being housed in accommodation space 312, the cleaning of shower nozzle 21 will be remained in
Liquid 34 dries up.
In this announcement, discharging tube 33 is also (not shown in the figures) for controlling the logical of discharging tube 33 comprising a switch valve
It is disconnected.By the design of switch valve, when the switch valve of discharging tube 33 is closed, it may be such that cleaning liquid 34 is interior full of pedestal 31
Portion, and then shower nozzle 21 is immersed in cleaning liquid 34, it thereby can ensure that the every nook and cranny of shower nozzle 21 can all be cleaned, the opposing party
Face also may be such that the nozzle for being used to spray chemical liquid on shower nozzle 21 keeps moistening, so avoid because chemical liquid is dry and incite somebody to action
Shower nozzle blocks.
Fig. 6 is refer to, it shows a kind of flow chart of the cleaning method of the shower nozzle of preferred embodiment according to this announcement, its
Described in cleaning method be applied to this announcement substrate board treatment.The cleaning method includes following step.First, walked
Rapid S11, there is provided substrate board treatment 1 as shown in Figure 1.Substrate board treatment 1 includes board holder 10, process liquid sprays
Unit 20 and spray head cleaning device 30, wherein process liquid spray unit 20 include shower nozzle 21 and mobile device (by rotation and lifting
Seat 22 and long-armed 23 composition).It should be appreciated that the concrete structure of each part of substrate board treatment 1 is as described above, herein not
It is repeated here.Then, step S12 is carried out, a substrate is placed on board holder 10, wherein board holder 10 can be by true
Suction it is attached or clamping etc. mode substrate is maintained on board holder 10.
After substrate is maintained at into board holder 10, then, step S13 is carried out, technique is controlled by mobile device
The shower nozzle 21 of liquid spray unit 20 sprays a process liquid in surface along a path, to carry out various processing to substrate,
Such as carry out Wet-type etching and either remove particle of substrate surface etc..When complete to processing substrate after, in order to avoid process liquor
Body is remained on shower nozzle 21, can then carry out step S14, and the shower nozzle 21 of process liquid spray unit 20 is controlled by mobile device
It is moved to and is placed on spray head cleaning device 30, finally carry out step S15 again, control spray head cleaning device 30 sprays towards shower nozzle 21
Cleaning liquid 34 is spilt, and then removes the process liquid remained on shower nozzle 21.
Preferably, in order to ensure spray head cleaning device 30 shower nozzle 21 can be cleaned it is more complete, when carry out step S15
When, by mobile device the shower nozzle 21 of process liquid spray unit 20 and spray head cleaning device 30 can be controlled to make Relative vertical in the lump
Elevating movement, and then lift cleaning efficiency and increase the spraying range of cleaning liquid 34.Specifically, as shown in figure 1, can lead to
The lifting drive division for crossing control process liquid spray unit 20 is transported with driving rotation and lifting seat 22 to do lifting to and fro along the Z direction
It is dynamic, and then cause shower nozzle 21 to make Relative vertical and to and fro elevating movement with spray head cleaning device 30.
In this announcement, discharging tube 33 also includes the switch valve of a break-make that can be used for control discharging tube 33.Walked
, can be by by the switch valve of discharging tube after 34 a period of time of cleaning liquid is sprayed by spray head cleaning device 30 during rapid S15
Close, to cause the inside of pedestal 31 of the cleaning liquid 34 full of spray head cleaning device 30, and then shower nozzle 21 is immersed in cleaning
It in liquid 34, thereby can ensure that the every nook and cranny of shower nozzle 21 can all be cleaned, on the other hand also may be such that and be used on shower nozzle 21
The nozzle for spraying chemical liquid keeps moistening, and then avoids blocking shower nozzle because chemical liquid is dry.Finally, when by shower nozzle 21
After soaking a period of time, then the switch valve of discharging tube is opened again, the cleaning liquid 34 after cleaning sprayer 21 is passed through into row
Liquid pipe 33 is discharged.
In this announcement, spray head cleaning device 30 can also include a supply air line.In the present embodiment, supply air line be with
Cleaning liquid sprays pipeline 32 and combined.That is, the gas outlet of supply air line is equally in alignment with the accommodating of pedestal 31
Space 312.When spray head cleaning device 30 stops sprinkling cleaning liquid 34 and shower nozzle 21 is not immersed in cleaning liquid 34, connect
And also can control the supply air line to provide a gas to the shower nozzle 21 being housed in accommodation space 312, shower nozzle will be remained in
21 cleaning liquid 34 dries up.
In summary, this announcement cleans dress by being set in substrate board treatment with the shower nozzle available for cleaning sprayer
Put so that process liquid spray unit can be cleaned by the shower nozzle and filled when having sprayed process liquid and having returned to position of readiness
Put and clean up the process liquid on the shower nozzle for remaining in process liquid spray unit, and then avoid that different process liquid occurs
Between pollution intersected with each other the problem of.
Although this announcement is disclosed above with preferred embodiment, so it is not limited to this announcement, skill belonging to this announcement
Art has usually intellectual in field, in the spirit and scope for not departing from this announcement, when can be used for a variety of modifications and variations, because
The protection domain of this this announcement is worked as to be defined depending on appended claims institute defender.
Claims (12)
- A kind of 1. substrate board treatment, it is characterised in that including：One board holder, for keeping a substrate；An at least process liquid spray unit, comprising a shower nozzle, spray a process liquor along a path for side on the substrate Body；AndOne spray head cleaning device, the outer circumference of the board holder is arranged on, for being placed on the shower nozzle cleaning dress The shower nozzle of an at least process liquid spray unit on putting sprays a cleaning liquid, wherein shower nozzle cleaning dress Put and include：One hollow pedestal, comprising an annular wall and the line segments being connected with one end of the annular wall, wherein the annular Wall has been internally formed an accommodation space, for the shower nozzle to be housed in the inner；One cleaning liquid sprays pipeline, extends to inside the line segments, wherein the cleaning liquid sprays the ejiction opening of pipeline The accommodation space is directed at, to spray the cleaning liquid to the shower nozzle being housed in the accommodation space；AndOne discharging tube, it is connected with the line segments, for discharging the cleaning liquid after cleaning the shower nozzle.
- 2. substrate board treatment as claimed in claim 1, it is characterised in that the discharging tube also is used to control comprising a switch valve Make the break-make of the discharging tube.
- 3. substrate board treatment as claimed in claim 1, it is characterised in that an at least process liquid spray unit is also wrapped Contain：One travel mechanism, it is connected with the shower nozzle, is kept for controlling the shower nozzle to be moved to the substrate from a position of readiness Portion, the process liquid is sprayed along the path with side on the substrate.
- 4. substrate board treatment as claimed in claim 3, it is characterised in that the travel mechanism includes：One rotary driving part, for controlling an at least process liquid spray unit to be rotated around a rotating shaft in a plane； AndOne lifting drive division, for controlling an at least process liquid spray unit to be hung down along perpendicular to the direction of the plane Go straight up to drop.
- 5. substrate board treatment as claimed in claim 3, it is characterised in that the spray head cleaning device is arranged on described standby Position.
- 6. substrate board treatment as claimed in claim 1, it is characterised in that the institute of an at least process liquid spray unit Shower nozzle is stated to include：An at least nozzle, for spraying the process liquid；AndOne mask, it is provided around described at least around a nozzle.
- 7. substrate board treatment as claimed in claim 6, it is characterised in that the spray head cleaning device includes an annular wall, The annular wall has been internally formed an accommodation space, for the shower nozzle to be housed in the inner, and wherein described accommodation space Configuration it is corresponding with the configuration of the mask of the shower nozzle and coordinate.
- 8. substrate board treatment as claimed in claim 7, it is characterised in that the spray head cleaning device also includes an air supply pipe Road, the gas outlet of the supply air line is directed at the accommodation space, to be carried to the shower nozzle being housed in the accommodation space For a gas, the cleaning liquid for remaining in the shower nozzle is dried up.
- 9. a kind of spray head cleaning device, for cleaning the shower nozzle of a substrate board treatment, the shower nozzle is used to spray a process liquor Body is on a substrate, it is characterised in that the spray head cleaning device includes：One hollow pedestal, comprising an accommodation space, for housing the shower nozzle in the inner；One cleaning liquid sprays pipeline, the accommodation space is directed at comprising an ejiction opening, with to being housed in the accommodation space Shower nozzle sprinkling cleaning liquid to clean the shower nozzle；AndOne discharging tube, for discharging the cleaning liquid after cleaning the shower nozzle.
- 10. spray head cleaning device as claimed in claim 9, it is characterised in that the discharging tube is also used for comprising a switch valve Control the break-make of the discharging tube.
- 11. spray head cleaning device as claimed in claim 9, it is characterised in that the spray head cleaning device further includes one Supply air line, the gas outlet of the supply air line are directed at the accommodation space, with to described in being housed in the accommodation space Shower nozzle provides a gas, and the cleaning liquid for remaining in the shower nozzle is dried up.
- 12. spray head cleaning device as claimed in claim 9, it is characterised in that the pedestal also comprising an annular wall and one with The line segments of one end connection of the annular wall, wherein the accommodation space is defined by the annular wall；Wherein described cleaning Liquid sprays pipeline and extended to inside the line segments；And wherein described discharging tube is connected with the line segments.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720599967.5U CN206961798U (en) | 2017-05-26 | 2017-05-26 | Substrate board treatment and spray head cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720599967.5U CN206961798U (en) | 2017-05-26 | 2017-05-26 | Substrate board treatment and spray head cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206961798U true CN206961798U (en) | 2018-02-02 |
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ID=61375512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720599967.5U Active CN206961798U (en) | 2017-05-26 | 2017-05-26 | Substrate board treatment and spray head cleaning device |
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| CN (1) | CN206961798U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108933092A (en) * | 2017-05-26 | 2018-12-04 | 弘塑科技股份有限公司 | Substrate board treatment, spray head cleaning device and spray head cleaning method |
| CN110722797A (en) * | 2019-11-29 | 2020-01-24 | 肇庆学院 | Full-automatic cleaning device and method for 3D additive manufacturing post-process |
-
2017
- 2017-05-26 CN CN201720599967.5U patent/CN206961798U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108933092A (en) * | 2017-05-26 | 2018-12-04 | 弘塑科技股份有限公司 | Substrate board treatment, spray head cleaning device and spray head cleaning method |
| CN110722797A (en) * | 2019-11-29 | 2020-01-24 | 肇庆学院 | Full-automatic cleaning device and method for 3D additive manufacturing post-process |
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