CN212834141U - 碳化硅晶体的生长装置 - Google Patents
碳化硅晶体的生长装置 Download PDFInfo
- Publication number
- CN212834141U CN212834141U CN202020619456.7U CN202020619456U CN212834141U CN 212834141 U CN212834141 U CN 212834141U CN 202020619456 U CN202020619456 U CN 202020619456U CN 212834141 U CN212834141 U CN 212834141U
- Authority
- CN
- China
- Prior art keywords
- heater
- crucible
- silicon carbide
- exhaust
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202020619456.7U CN212834141U (zh) | 2020-04-22 | 2020-04-22 | 碳化硅晶体的生长装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202020619456.7U CN212834141U (zh) | 2020-04-22 | 2020-04-22 | 碳化硅晶体的生长装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN212834141U true CN212834141U (zh) | 2021-03-30 |
Family
ID=75152202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202020619456.7U Active CN212834141U (zh) | 2020-04-22 | 2020-04-22 | 碳化硅晶体的生长装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN212834141U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113502541A (zh) * | 2021-06-21 | 2021-10-15 | 苏州优晶光电科技有限公司 | 一种补充气态碳源和硅源的碳化硅晶体生长方法及设备 |
CN115125613A (zh) * | 2022-06-17 | 2022-09-30 | 江苏集芯半导体硅材料研究院有限公司 | 一种制备单晶碳化硅的生长装置 |
-
2020
- 2020-04-22 CN CN202020619456.7U patent/CN212834141U/zh active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113502541A (zh) * | 2021-06-21 | 2021-10-15 | 苏州优晶光电科技有限公司 | 一种补充气态碳源和硅源的碳化硅晶体生长方法及设备 |
CN115125613A (zh) * | 2022-06-17 | 2022-09-30 | 江苏集芯半导体硅材料研究院有限公司 | 一种制备单晶碳化硅的生长装置 |
CN115125613B (zh) * | 2022-06-17 | 2024-05-10 | 江苏集芯先进材料有限公司 | 一种制备单晶碳化硅的生长装置 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN111621851B (zh) | 碳化硅晶体的生长装置及生长方法 | |
TWI555888B (zh) | 流化床反應器和用於製備粒狀多晶矽的方法 | |
CN212834141U (zh) | 碳化硅晶体的生长装置 | |
JP2941426B2 (ja) | SiC単結晶を製造する装置及び方法 | |
EP0554047A1 (en) | SiC single crystal growth | |
KR20120082873A (ko) | SiC 단결정의 승화 성장 | |
JP4199921B2 (ja) | 炭化珪素単結晶を製造する方法および装置 | |
US5075055A (en) | Process for producing a boron nitride crucible | |
CN112144110B (zh) | Pvt法生长碳化硅晶体的生长方法 | |
CN112962083A (zh) | 一种用于碳化硅单晶生长的籽晶背部镀膜的装置与方法 | |
US7727483B2 (en) | Reactor for chlorosilane compound | |
CN209854283U (zh) | 碳化硅晶体制备装置 | |
CN111945219B (zh) | 一种碳化硅晶体生长方法及装置 | |
CN110512281B (zh) | 快速制备碳化硅的方法 | |
CN116716655A (zh) | 生长高质量碳化硅晶体的装置、方法及碳化硅晶体 | |
CN113249784B (zh) | 一种可平衡生长体系气氛的碳化硅单晶生长装置 | |
CN115613137A (zh) | 一种过滤层的制备方法及晶体生长装置 | |
CN108046267B (zh) | 一种合成高纯SiC粉料的系统及方法 | |
JP3922074B2 (ja) | 炭化珪素単結晶の製造方法および製造装置 | |
CN213172679U (zh) | Pvt法生长碳化硅晶体的坩埚 | |
JP2004311649A (ja) | 炭化珪素単結晶の製造方法および製造装置 | |
JP5226496B2 (ja) | シリコン単結晶引上装置 | |
TW202227684A (zh) | 用於晶體生產的改良式爐設備 | |
CN113388884A (zh) | 一种双坩埚蒸发源 | |
CN107815664A (zh) | 化学气相沉积设备、方法及用途 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220419 Address after: 321000 plant 3, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province (self declaration) Patentee after: Zhejiang Fuxin Microelectronics Technology Co.,Ltd. Address before: 321000 South Second Ring West Road, Jinhua, Zhejiang Province, No. 2688 Patentee before: ZHEJIANG BOLANTE SEMICONDUCTOR TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230605 Address after: 321000 south side of Building 1, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province Patentee after: Jinhua Bolante New Material Co.,Ltd. Address before: 321000 plant 3, No. 2688, south 2nd Ring West Road, qiubin street, Wucheng District, Jinhua City, Zhejiang Province (self declaration) Patentee before: Zhejiang Fuxin Microelectronics Technology Co.,Ltd. |